公开(公告)号：US6084337A

公开(公告)日：2000-07-04

申请号：US118906

申请日：1998-07-20

申请人： Geoffrey Beardmore

发明人： Geoffrey Beardmore

IPC分类号： H01J61/067 ,  H01J1/02 ,  H01J61/09 ,  H01K1/18

CPC分类号： H01J61/09 ,  H01J1/025

摘要： A gas discharge lamp has a tubular envelope containing tubular electrodes at opposite ends. An annular support member of a compressible ceramic fiber is supported in a groove around each electrode and is compressed against the inside surface of the envelope. Movement of the electrodes relative to the envelope is damped by the support member.

摘要翻译： 气体放电灯具有在相对端包含管状电极的管状外壳。 可压缩陶瓷纤维的环形支撑构件被支撑在每个电极周围的凹槽中并被压靠在外壳的内表面上。 电极相对于外壳的移动被支撑构件阻尼。

公开(公告)号：US6049086A

公开(公告)日：2000-04-11

申请号：US022507

申请日：1998-02-12

申请人： Giovanni Antonio Foggiato ,  Leonid V. Velikov ,  Ralph F. Manriquez ,  Ashraf R. Khan

发明人： Giovanni Antonio Foggiato ,  Leonid V. Velikov ,  Ralph F. Manriquez ,  Ashraf R. Khan

IPC分类号： H01J65/00 ,  G03F7/20 ,  H01J61/067 ,  H01J61/26 ,  H01J61/30 ,  H01J61/52 ,  H01J65/04 ,  H01J17/38

CPC分类号： H01J65/046 ,  G03F7/70016 ,  H01J61/0672 ,  H01J61/26 ,  H01J61/305 ,  H01J61/526 ,  H05H1/2406 ,  H05H2001/2418 ,  H05H2001/2437

摘要： Ultraviolet and vacuum ultraviolet radiators for use in the manufacture of semiconductors are provided which have improved lifetimes, improved distribution of radiation generation, improved distribution of emitted radiation, increased efficiency of radiation emission, and improved means for cooling. The radiators have novel electrodes, novel electrode configurations, novel means for distributing plasmas between electrodes, and have novel cooling means. These features enable the miniaturization of the radiators permitting high-intensity and uniform radiation exposure of planar surfaces. The radiators are used in the pre-treatment of semiconductor surfaces, the deposition of semiconductor thin films, and the post-deposition processing of semiconductor thin films.

摘要翻译： 提供用于制造半导体的紫外线和真空紫外线辐射器，其具有改善的寿命，改善辐射产生的分布，改善发射辐射的分布，提高辐射发射的效率和改进的冷却装置。 散热器具有新颖的电极，新颖的电极结构，用于在电极之间分配等离子体的新颖手段，并具有新的冷却装置。 这些特征使得散热器的小型化允许平面表面的高强度和均匀的辐射曝光。 散热器用于半导体表面的预处理，半导体薄膜的沉积以及半导体薄膜的后沉积处理。

公开(公告)号：US6037714A

公开(公告)日：2000-03-14

申请号：US581236

申请日：1995-12-29

申请人： Vivek Mehrotra ,  Thomas F. McGee ,  Susan McGee ,  Jeroen Langevoort ,  Edward Young

发明人： Vivek Mehrotra ,  Thomas F. McGee ,  Susan McGee ,  Jeroen Langevoort ,  Edward Young

IPC分类号： H01J61/06 ,  H01J61/067 ,  H01J61/09 ,  H01J61/36 ,  H01J61/78

CPC分类号： H01J61/0677 ,  H01J61/067 ,  H01J61/09 ,  H01J61/36

摘要： Novel emitter materials, electrode assemblies amd lamps comprising the same are provided in which, in accordance with the invention, novel electrodes are provided having a lamp electrode structure, preferably including a hollow ferrule for sealing in a lamp to permit evacuation; an emitter material of the invention on at least one surface thereof, preferably on a protrusion attached to the hollow ferrule; a thermal isolator, preferably in the form of a low thermal conductivity wire or an incised or cut-out portion of the hollow ferrule body, for thermally isolating the protrusion from the ferrule to maintain a sufficiently high temperature for thermionic emission, and further comprising an emitter material requiring no in-lamp processing. The emitter materials are a mixed oxide of Ba, Sr and mixtures thereof with one or more of the metals from the series comprising Ta, Ti, Zr, Sc, Y, and La, are preferably selected from the group consisting of Ba.sub.4 Ta.sub.2 O.sub.9, Ba.sub.5 Ta.sub.4 O.sub.15, BaY.sub.2 O.sub.4, BaCeO.sub.3, Ba.sub.x Sr.sub.1-x Y.sub.2 O.sub.4, Ba.sub.2 TiO.sub.4, BaZrO.sub.3, Ba.sub.x Sr.sub.1-x TiO.sub.3, and Ba.sub.x Sr.sub.1-x ZrO.sub.3, wherein x ranges from a value of 0 to 1, and are most preferably one or more mixed oxides selected from the group consisting of Ba.sub.4 Ta.sub.2 O.sub.9, BaY.sub.2 O.sub.4, BaCeO.sub.3, Ba.sub.0.5 Sr.sub.0.5 Y.sub.2 O.sub.4, Ba.sub.0.75 Sr.sub.0.25 Y.sub.2 O.sub.4, Ba.sub.2 TiO.sub.4, BaZrO.sub.3, Ba.sub.0.5 Sr.sub.0.5 TiO.sub.3, and Ba.sub.0.5 Sr.sub.0.5 ZrO.sub.3.

摘要翻译： 提供了新的发射体材料，包括它们的电极组件amd灯，其中根据本发明提供了具有灯电极结构的新型电极，优选地包括用于密封灯以便排空的中空套圈; 本发明的发射体材料在其至少一个表面上，优选地在连接到中空套圈的突起上; 优选为导热性较弱的导线或中空套管主体的切口或切口部分的热隔离器，用于将突起与套圈热隔离以保持足够高的热离子发射温度，并且还包括 发射体材料不需要灯管内加工。 发射极材料是Ba，Sr的混合氧化物及其与一种或多种来自包含Ta，Ti，Zr，Sc，Y和La的系列的金属的混合物，优选选自Ba4Ta2O9，Ba5Ta4O15， BaY2O4，BaCeO3，BaxSr1-xY2O4，Ba2TiO4，BaZrO3，BaxSr1-xTiO3和BaxSr1-xZrO3，其中x为0至1，最优选为选自Ba4Ta2O9，BaY2O4中的一种或多种混合氧化物 ，BaCeO3，Ba0.5Sr0.5Y2O4，Ba0.75Sr0.25Y2O4，Ba2TiO4，BaZrO3，Ba0.5Sr0.5TiO3，Ba0.5Sr0.5ZrO3。

公开(公告)号：US5990626A

公开(公告)日：1999-11-23

申请号：US23601

申请日：1998-02-13

申请人： Jean J. Heuvelmans ,  Abraham L. De Smit

发明人： Jean J. Heuvelmans ,  Abraham L. De Smit

IPC分类号： H01J61/067 ,  H01J61/54 ,  H05B41/00 ,  H05B41/298 ,  H05B37/00

CPC分类号： H05B41/2988

摘要： A lighting unit according to the invention comprises a supply unit (1) and a low-pressure mercury discharge lamp (2). The low-pressure mercury discharge lamp has a light-transmitting discharge vessel (3) which is provided with a luminescent layer (3) on an inner surface and which encloses in a gastight manner a discharge space (4) which is provided with a filling comprising mercury and one or several rare gases. A first (5a) and a second electrode (5b) are arranged in the discharge space, each comprising a coiling of a metal wire coated with one or several electron-emitting metal oxides. Each electrode is electrically connected to a respective current supply conductor (6a, 6b) which extends to outside the discharge vessel (3). The current supply conductors are electrically connected to the supply unit outside the discharge vessel, the unit ignites the low-pressure mercury discharge lamp in the state upon switching-on. During nominal operation, at least a portion (5a*) of each electrode (5a, 5b) passes an electrode current Iel having an effective value Iel which is at least 1.8 times the minimum electrode current Ip4 required for thermal emission. The lighting unit according to the invention has a long switching life.

摘要翻译： 根据本发明的照明单元包括供应单元（1）和低压汞放电灯（2）。 低压汞放电灯具有透光放电容器（3），其在内表面上设置有发光层（3），并以气密方式包围放电空间（4），放电空间（4）设置有填充物 包括汞和一种或几种稀有气体。 第一（5a）和第二电极（5b）布置在放电空间中，每个包括涂覆有一个或多个电子发射金属氧化物的金属线的卷绕。 每个电极电连接到延伸到放电容器（3）外部的相应供电导体（6a，6b）。 电流供应导体与放电容器外部的电源单元电连接，该单元在接通状态时点燃低压汞放电灯。 在标称操作期间，每个电极（5a，5b）的至少一部分（5a *）通过具有有效值+ E的电极电流IEL，ovs I + EE el是至少1.8倍所需的最小电极电流Ip4的1.8倍 热发射。 根据本发明的照明单元具有长的开关寿命。

公开(公告)号：US5977702A

公开(公告)日：1999-11-02

申请号：US929849

申请日：1997-09-15

申请人： Yoriyuki Nieda

发明人： Yoriyuki Nieda

IPC分类号： H01J61/067 ,  H01J61/24 ,  H01J61/26 ,  H01J17/04

CPC分类号： H01J61/0672

摘要： A tubular glow discharge electrode is formed therein with a slot in which front end parts of support leads are inserted. The slot has a widened center part which defines an opening. The tube-like glow discharge tube is welded at its one end part to one of the support lead so as to be electrical conductive to the same, and is caulked at it's the other end part to the other one of the support leads through the intermediary of an insulator. A filament electrode (ark discharge electrode) carrying an electron-emissive substance is supported to the free end parts of the support leads within the tube-like glow discharge electrode which therefore surrounds the arc discharge electrode with a small gap defined between the glow discharge electrode and the filament electrode. In this arrangement, particles of the electron-emissive substance evaporated and scattered from the filament electrode are soon trapped to the inner surface of the glow discharge electrode without being emitted from the glow discharge electrode, and can be reused as the electron-emissive substance, thereby it is possible to prolong the use life of the electron device.

摘要翻译： 在其中形成管状辉光放电电极，其中插入有支撑引线的前端部分的狭槽。 狭槽具有加宽的中心部分，其限定开口。 管状辉光放电管在其一端部被焊接到支撑引线之一，以便与其导电，并且通过中间体将另一端支撑引线的另一端铆接 的绝缘体。 携带有电子发射物质的丝状电极（排出电极）被支撑在管状辉光放电电极内的支撑引线的自由端部，因此围绕电弧放电电极，在辉光放电电极 和灯丝电极。 在这种布置中，从灯丝电极蒸发和散射的电子发射物质的颗粒很快被捕获到辉光放电电极的内表面，而不会从辉光放电电极发射，并且可以重新用作电子发射物质， 从而可以延长电子器件的使用寿命。

公开(公告)号：US5973449A

公开(公告)日：1999-10-26

申请号：US226880

申请日：1999-01-07

申请人： Osamu Nakamura ,  Shigemi Suzuki

发明人： Osamu Nakamura ,  Shigemi Suzuki

IPC分类号： H01J61/06 ,  G02F1/13357 ,  H01J1/30 ,  H01J1/304 ,  H01J9/02 ,  H01J17/06 ,  H01J31/12 ,  H01J61/067 ,  H01J1/62

CPC分类号： B82Y10/00 ,  H01J1/30 ,  H01J1/3042 ,  H01J61/0677 ,  H01J9/022 ,  H01J9/025 ,  G02F1/1336 ,  H01J2201/30446 ,  H01J2217/49271 ,  H01J2329/00 ,  H01J61/305 ,  H01J61/32 ,  H01J61/70 ,  H01J61/72

摘要： A cold-cathode discharge display device which includes a fluorescent tube and electrodes containing R.sub.2 O.sub.3-z, where R is an atom or an atom group of rare earth elements, O is oxygen, and z is 0.0 to 1.0, to perform field emission of electrons and emission of secondary electrons. The electrodes are generated with an electron emitting film containing rare earth elements.

摘要翻译： 一种冷阴极放电显示装置，包括荧光管和含有R 2 O 3 -z的电极，其中R是稀土元素的原子或原子团，O为氧，z为0.0至1.0，以进行电子的场发射 和二次电子的发射。 电极由含有稀土元素的电子发射膜产生。

公开(公告)号：US5905339A

公开(公告)日：1999-05-18

申请号：US764700

申请日：1996-12-04

申请人： Hui-Meng Chow ,  Jose Azevedo ,  Susan McGee

发明人： Hui-Meng Chow ,  Jose Azevedo ,  Susan McGee

IPC分类号： H01J61/06 ,  H01J61/067 ,  H01J61/09 ,  H01J61/36 ,  H01J61/78

CPC分类号： H01J61/0677 ,  H01J61/067 ,  H01J61/09 ,  H01J61/36

摘要： An electric gas discharge lamp includes an electrode having a tip portion comprised by a mesh body carrying an emitter material. The mesh body in a favorable embodiment is circular cylindrical and is attached via an electrically conductive thermal isolator to a conductive feed-through, such as a hollow ferrule, extending through a seal of the lamp vessel. As compared to a continuous walled tip portion of similar shape and material, the mesh body has a lower mass and heat capacity, and can therefore be operated at higher temperatures without increasing the temperature of the seal area. The higher operating temperature of the tip portion promotes greater electron emission from the emitter material, and therefore a lower cathode fall. A lower cathode fall enables the lamp to be operated at higher lamp currents for greater light output. The mesh body also has the capability to reduce sputtering from the electrode through improved adhesion of the emitter material to the tip portion and faster attainment of its nominal operating temperature as compared to a smooth continuous walled body. In a favorable embodiment, the lamp is a low pressure discharge lamp having an inside diameter of less than about 5 mm.

摘要翻译： 电气放电灯包括具有由承载发射体材料的网状体构成的尖端部分的电极。 在有利的实施例中的网状体是圆柱形的并且通过导电隔热器附接到延伸穿过灯泡的密封件的导电馈通，例如中空的套圈。 与具有类似形状和材料的连续的壁顶部相比，网状体具有较低的质量和热容量，因此可以在较高温度下操作而不增加密封区域的温度。 尖端部分的较高工作温度促进发射体材料的更大的电子发射，因此下部阴极下降。 较低的阴极下降使灯可以在更高的灯电流下工作，以获得更大的光输出。 与光滑的连续壁体相比，网状体还具有通过改善发射体材料对尖端部分的附着力和更快地达到其标称操作温度来减少从电极溅射的能力。 在有利的实施例中，灯是内径小于约5mm的低压放电灯。

公开(公告)号：US5864209A

公开(公告)日：1999-01-26

申请号：US739806

申请日：1996-10-30

申请人： David Lyle Clark

发明人： David Lyle Clark

IPC分类号： H01J61/067 ,  H01J61/12 ,  H01J17/04

CPC分类号： H01J61/12 ,  H01J61/067

摘要： A unique cathode (30) for an ultraviolet discharge lamp (10) is described. The cathode includes a triple-coil wire, i.e., the wire has a primary coil (43), a secondary coil (41) wound around the primary coil and a tertiary coil (36) wound around the secondary coil. The interstices of the primary coil and secondary coil, but not the tertiary coil, are occupied by a crystalline oxide emitter material. Filling the primary and secondary coils of the triple coil cathode provides a cathode having a greater amount of emitter material than prior art. In addition, as the outer layer of the emitter material sputters away from bombardment by positive ions, the remaining emitter material is protected by the now-exposed portion of the coil wire which protrudes beyond the remaining emitter material. Thus, incoming positive ions are apt to strike the exposed wire, and not the remaining emitter material.

摘要翻译： 描述了用于紫外线放电灯（10）的独特的阴极（30）。 阴极包括三线圈线，即线具有初级线圈（43），缠绕在初级线圈周围的次级线圈（41）和缠绕在次级线圈上的三级线圈（36）。 初级线圈和次级线圈的间隙而不是三次线圈被晶体氧化物发射体材料占据。 填充三线圈阴极的初级和次级线圈提供了一种具有比现有技术更大量的发射极材料的阴极。 此外，由于发射器材料的外层通过正离子溅射远离轰击，剩余的发射极材料被突出超过剩余发射极材料的线圈线的现在暴露的部分保护。 因此，进入的正离子易于撞击暴露的导线，而不是剩余的发射极材料。

公开(公告)号：US5744905A

公开(公告)日：1998-04-28

申请号：US916747

申请日：1997-08-19

申请人： Vivek Mehrotra ,  Hemant S. Betrabet ,  David Robert Woodward ,  Thomas O. Leyh ,  Susan McGee

发明人： Vivek Mehrotra ,  Hemant S. Betrabet ,  David Robert Woodward ,  Thomas O. Leyh ,  Susan McGee

IPC分类号： H01J1/142 ,  H01J61/067 ,  H01J1/62 ,  H01J17/20 ,  H01J61/12 ,  H01J63/04

CPC分类号： H01J61/0677 ,  H01J1/142

摘要： The present invention is directed to new electrode structures for use in fluorescent lamps in which a tungsten base structure is provided with electron emissive materials including one or more of barium titanate, barium zirconate, barium strontium zirconate, barium cerium oxide, barium tantalate, and barium strontium yittrium oxide. Amounts of MgO may be added to improve or change emitter properties. A composite electrode structure can be formed by way of coating a tungsten coil with a slurry of this material, or providing powdered mixtures of both the electron emissive material and tungsten material and sintering this powdered material into a high density composite electrode structure.

摘要翻译： 本发明涉及用于荧光灯的新的电极结构，其中钨基结构设置有电子发射材料，该电子发射材料包括钛酸钡，锆酸钡，锆酸锶钡，钡钡钡和钡钡中的一种或多种 氧化锶钇。 可以加入MgO的量以改善或改变发射体性质。 可以通过用该材料的浆料涂覆钨线圈或者提供电子发射材料和钨材料的粉末混合物并将该粉末材料烧结成高密度复合电极结构来形成复合电极结构。

公开(公告)号：US5686789A

公开(公告)日：1997-11-11

申请号：US403477

申请日：1995-03-14

申请人： Karl H. Schoenbach ,  Wojciech W. Byszewski ,  Frank E. Peterkin ,  Amin N. Dharamsi

发明人： Karl H. Schoenbach ,  Wojciech W. Byszewski ,  Frank E. Peterkin ,  Amin N. Dharamsi

IPC分类号： H01J1/02 ,  H01J1/62 ,  H01J27/26 ,  H01J61/06 ,  H01J61/067 ,  H01J61/09 ,  H01J61/12 ,  H01J61/20 ,  H01J61/66 ,  H01J61/72 ,  H01S3/038

CPC分类号： H01J3/025 ,  H01J1/025 ,  H01J17/04 ,  H01J17/06 ,  H01J27/08 ,  H01J3/04 ,  H01J61/067 ,  H01J61/09 ,  H01J61/12 ,  H01J61/305 ,  H01J61/66 ,  H01J61/72 ,  H01S3/0385 ,  H01J61/78 ,  H01S3/03 ,  H01S3/0382 ,  H01S3/2383

摘要： A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas. Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode. The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.

摘要翻译： 用于在规定压力下操作气体的放电装置包括其中具有多个微型空腔的​​阴极和与阴极间隔开的阳极。 每个微型空腔具有选定的尺寸以在规定的压力下产生微细的中空排出。 优选地，每个微型空腔的​​横截面尺寸都是气体中电子的平均自由程的数量级。 电能以负极和电流耦合到阴极和阳极，用于在阴极中的每个微型空腔中产生微空心放电。 排出装置可以包括用于维持规定压力的排出室。 当阴极和阳极之间的间隔大于气体中电子的平均自由程时，电介质层可以设置在阴极上。 放电装置的应用包括荧光灯，准分子灯，平面荧光光源，微型气体激光器，电子源和离子源。