Plasma reactor having a symmetric parallel conductor coil antenna
    105.
    发明授权
    Plasma reactor having a symmetric parallel conductor coil antenna 有权
    具有对称并联导体线圈天线的等离子体反应器

    公开(公告)号:US06893533B2

    公开(公告)日:2005-05-17

    申请号:US10697893

    申请日:2003-10-29

    CPC分类号: H01J37/321

    摘要: The invention in one embodiment is realized in a plasma reactor for processing a semiconductor workpiece. The reactor includes a vacuum chamber having a side wall and a ceiling, a workpiece support pedestal within the chamber and generally facing the ceiling, a gas inlet capable of supplying a process gas into the chamber and a solenoidal interleaved parallel conductor coil antenna overlying the ceiling and including a first plurality conductors wound about an axis of symmetry generally perpendicular to the ceiling in respective concentric helical solenoids of at least nearly uniform lateral displacements from the axis of symmetry, each helical solenoid being offset from the other helical solenoids in a direction parallel to the axis of symmetry. An RF plasma source power supply is connected across each of the plural conductors.

    摘要翻译: 在一个实施例中的本发明在用于处理半导体工件的等离子体反应器中实现。 反应器包括具有侧壁和天花板的真空室,腔室内的工件支撑基座,并且大致面对天花板,能够将工艺气体供应到室中的气体入口和覆盖在天花板上的螺线管交错的并行导体线圈天线 并且包括缠绕在大致垂直于天花板的相应同心螺旋螺线管中的对称轴线的第一多个导体,其具有来自对称轴线的至少几乎均匀的横向位移,每个螺旋螺线管在与另一个螺旋螺线管平行的方向上偏离 对称轴。 RF等离子体源电源连接在多个导体中的每一个上。

    Dechucking method and apparatus for workpieces in vacuum processors
    106.
    发明申请
    Dechucking method and apparatus for workpieces in vacuum processors 有权
    真空处理器中工件的脱色方法和装置

    公开(公告)号:US20050036268A1

    公开(公告)日:2005-02-17

    申请号:US10928152

    申请日:2004-08-30

    摘要: A glass workpiece being processed in a vacuum plasma processing chamber is dechucked from a monopolar electrostatic chuck by gradually reducing the chucking voltage during processing while maintaining the voltage high enough to clamp the workpiece. A reverse polarity voltage applied to the chuck at the end of processing assists in dechucking. The workpiece temperature is maintained at a high value at the end of processing to assisting in dechucking. Peak current flowing through the chuck during lifting of the workpiece from the chuck controls the amplitude and/or duration of the reverse polarity voltage during the next dechucking operation.

    摘要翻译: 在真空等离子体处理室中处理的玻璃工件通过在保持电压足够高以夹持工件的同时在加工期间逐渐降低夹紧电压从单极静电卡盘中被卡扣。 在加工结束时施加到卡盘的反极性电压有助于脱扣。 在加工结束时,工件温度保持在高值,以帮助脱帽。 在从卡盘提起工件期间流过卡盘的峰值电流在下一个脱扣操作期间控制反向极性电压的幅度和/或持续时间。

    Plasma method and apparatus for processing a substrate
    107.
    发明授权
    Plasma method and apparatus for processing a substrate 有权
    用于处理衬底的等离子体方法和设备

    公开(公告)号:US06831021B2

    公开(公告)日:2004-12-14

    申请号:US10461083

    申请日:2003-06-12

    IPC分类号: H01L21469

    摘要: Embodiments of the invention generally provide a method of forming a nitride gate dielectric layer. The method includes generating a nitrogen-containing plasma in a processing chamber via introduction of a nitrogen-containing processing gas into the processing chamber and the application of an ionizing energy to the processing gas, and pulsing the ionizing energy to maintain a mean temperature of electrons in the nitrogen-containing plasma of less than about 0.7 eV.

    摘要翻译: 本发明的实施例通常提供形成氮化物栅极电介质层的方法。 该方法包括通过在处理室中引入含氮处理气体和向处理气体中施加电离能,并且使电离能脉冲以维持电子的平均温度,从而在处理室中产生含氮等离子体 在含氮等离子体中小于约0.7eV。

    Gas purge protection of sensors and windows in a gas phase processing reactor
    109.
    发明授权
    Gas purge protection of sensors and windows in a gas phase processing reactor 有权
    气相处理反应器中传感器和窗户的气体吹扫保护

    公开(公告)号:US06344151B1

    公开(公告)日:2002-02-05

    申请号:US09559795

    申请日:2000-04-27

    IPC分类号: G01N2100

    摘要: A gas purged viewport for endpoint detection in a gas phase processing chamber is provided which prevents contamination of an optical monitoring window by use of a purge gas flow. The purge gas purges the viewport and prevents deposition of byproducts and contaminants on the window which will adversely effect endpoint detection. The gas purge viewport includes a prechamber between the optically transparent window and the process chamber. The purge gas is passed through the prechamber and into the processing chamber to purge the window. The gas purge system may also be used to purge other parts such as sensors.

    摘要翻译: 提供了一种用于在气相处理室中进行端点检测的气体净化视口,其防止通过使用吹扫气流而污染光学监测窗。 净化气体清洗视口并防止副反应物和污染物沉积在窗口上,这将不利地影响端点检测。 气体净化视口包括在光学透明窗口和处理室之间的预制室。 净化气体通过预燃室并进入处理室以净化窗口。 气体吹扫系统也可用于吹扫诸如传感器的其它部件。

    Hybrid sphygmomanometer
    110.
    发明授权
    Hybrid sphygmomanometer 失效
    混合血压计

    公开(公告)号:US06168567A

    公开(公告)日:2001-01-02

    申请号:US09275595

    申请日:1999-03-24

    IPC分类号: A61B500

    摘要: A hybrid sphygmomanometer comprises: (a) an arm cuff with an inflatable air bladder; (b) a pumping device for inflating the air bladder; (c) a manually controlled air outlet valve for deflating the air bladder; (d) an air pressure transducer operative to receive the pressure in the air bladder of the arm cuff and to produce an electrical signal representing this pressure; (e) a manually operated switch for generating systolic and diastolic interrupt signals; (f) a first electronic display for displaying the instantaneous pressure in the air bladder in the form of a bar graph; (g) a second electronic display for displaying systolic and diastolic pressures; and (h) an electrical circuit connected to the pressure transducer and to the button for controlling said first and second display. The first display, for displaying the instantaneous pressure in the air bladder, is a simulated mercury column. The electrical circuit provides an output of digital signals, representing the systolic and diastolic pressures, for use by a programmed digital computer for storage and processing. It also provides an output of manually or digitally entered patient identification data.

    摘要翻译: 混合血压计包括:(a)具有可充气气囊的臂箍;(b)用于使气囊膨胀的泵送装置;(c)用于使气囊膨胀的手动控制的空气出口阀;(d)空气压力 传感器,用于接收臂箍的气囊中的压力并产生表示该压力的电信号;(e)用于产生收缩和舒张中断信号的手动操作的开关;(f)第一电子显示器,用于显示瞬时 空气囊中的压力以条形图形式;(g)用于显示收缩压和舒张压的第二电子显示器; 和(h)连接到压力传感器和按钮的电路,用于控制所述第一和第二显示器。用于显示气囊中的瞬时压力的第一显示器是模拟的汞柱。 电路提供数字信号的输出,代表收缩压和舒张压,供编程数字计算机用于存储和处理。 它还提供手动或数字输入的患者识别数据的输出。