摘要:
In a D/A converter in a deflection system of an electron beam exposure device, the most significant bits (m bits) of input digital data consisting of n bits are input into a decoder circuit, and 2.sup.m D/A converters which correspond to the m bits are provided. The data consisting of the least significant bits (n-m bits) is input into the 2.sup.m D/A converters via 2.sup.m gates, respectively. The decoder circuit is constructed so as to control the 2.sup.m gates so that when the content of the data of the m bits is S, the first to S-th data of the 2.sup.m D/A converters is all rendered to be "1", the data of the (S+1)-th D/A converter remains the same as the data of the n-m bits, and the data of the (S+2)-th and subsequent D/A converters is all rendered to be "0", the sum of the outputs of the 2.sup.m D/A converters being applied to a coil which deflects the electron beam.
摘要翻译:在电子束曝光装置的偏转系统中的D / A转换器中,由n位组成的输入数字数据的最高有效位(m位)被输入到解码器电路中,对应于2m的D / A转换器 提供m位。 由最低有效位(n-m位)组成的数据分别通过2m个门输入到2m D / A转换器。 解码器电路被构造成控制2m个门,使得当m位的数据的内容为S时,2m D / A转换器的第一至第S数据全部变为“1” 第(S + 1)个D / A转换器的数据与nm位的数据保持相同,并且第(S + 2)和随后的D / A转换器的数据全部变为“ 0“,2m D / A转换器的输出之和被施加到偏转电子束的线圈上。
摘要:
An electron beam lithographic system which exposes a desired area of an electron beam resist so as to form a desired pattern to be used for manufacturing large scale integrated circuits. This electron beam lithographic system provides a first and a second slit plate, respectively providing a rectangular slit so as to form an electron beam having a rectangular cross section, and a deflection means which deflects the electron beam passing the first slit so as to vary the cross section of the electron beam which passes the second slit. Therefore, electron beams having various cross sections can be obtained, so that the electron beam resist is exposed by the beam having various cross sections and the desired pattern can be formed within a short time on a wafer.
摘要:
Stretching polyester tows at a speed greater than 150 m/min., wherein more than 85 mol percent of the recurring units are units of ethylene terephthalate, is carried out at a stretch ratio satisfying the formula-1.58log(.DELTA.n .times. 10.sup.3) + 4.18 .ltoreq. DR .ltoreq. -2.32log(.DELTA.n .times. 10.sup.3) + 5.93Wherein .DELTA. n represents the birefringence of the unstretched filaments and is a value of from 0.020 to 0.100, and DR is the stretch ratio in times.
摘要:
An anti-pilling polyester fiber having an intrinsic viscosity of 0.32 to 0.48 which has the following physical properties: tenacity, 3.5 to 5.0 g/d; knot tenacity, not more than 3.0 g/d; ratio of tenacity and knot tenacity, not less than 1.5.
摘要:
Pharmaceutical compositions containing 2-amino-6-benzyl-3-ethoxycarbonyl-4,5,6,7-tetrahydro-thieno[2,3-c]pyridine hydrochloride and a method of using such compositions in treatment of liver dysfunction in mammals are disclosed.
摘要:
A microphone assembly or apparatus comprises a perforated capsule having a microphone unit supported therein and a tubular projection communicating with the interior of the capsule. The projection is arranged to be inserted into the auditory canal of a human or dummy head. The microphone unit is located near the opening of the auditory canal.
摘要:
An electron gun cathode (104) is column shaped, and emits electrons by being heated. A holder (103), which covers the bottom and sides of the electron gun cathode, has electrical conductivity and holds the electron gun cathode, and is composed of a material that does not easily react with the electron gun cathode when in a heated state, is provided. The tip of the electron gun cathode (104) protrudes from the holder (103) so as to be exposed, and electrons are emitted from the tip toward the front by applying an electric field to the tip.
摘要:
A perceived relative distance (Ds) that shows a relative distance between a host vehicle and a perception object (TA) perceived by a driver of the host vehicle is calculated on the basis of an actual relative distance (Dr) therebetween. A perceived relative velocity (Vs) that shows a relative velocity between the host vehicle and the perception object (TA) perceived by the driver is calculated on the basis of an actual relative velocity (Vr) therebetween (step ST2). A perceived relative ratio (X) that is a ratio between the perceived relative distance (Ds) and the perceived relative velocity (Vs) is calculated (step ST3). If the perceived relative ratio (X) exceeds a threshold value (XO), a vehicle control is performed (steps ST4 and ST5).
摘要:
Provided is an aromatic polycarbonate resin composition including a combination composed of 98 to 1 mass % of an aromatic polycarbonate (A), 1 to 98 mass % of an aliphatic polyester (B), and 1 to 80 mass % of an organic filler derived from a natural product (C), the aromatic polycarbonate resin composition being obtained by suppressing increase in density of an aromatic polycarbonate resin composition containing an aliphatic polyester, while improving rigidity and fluidity thereof and ameliorating poor external appearance such as pearly luster.
摘要:
A machine tool has a pair of guide rails and a pair of upper and lower ball screws. No forces are transferred between a beam of a double column frame and a movable unit. The guide rails are spaced from each other and disposed on a bed, and the movable unit is horizontally movably supported on the guide rails. The upper and lower ball screws are mounted respectively on upper and lower portions of the double column frame for moving the movable unit horizontally. Even when the beam is deformed by flexing downwardly by gravity, the movable unit moves stably and smoothly at a high speed to machine a workpiece highly accurately without being adversely affected by the deformation of the beam.