Radiation sensitive material and method for forming pattern
    101.
    发明授权
    Radiation sensitive material and method for forming pattern 有权
    辐射敏感材料及其形成方法

    公开(公告)号:US07179580B2

    公开(公告)日:2007-02-20

    申请号:US10833114

    申请日:2004-04-28

    IPC分类号: G03F7/004 G03C1/492

    摘要: A copolymer expressed by the following structural formula was obtained by loading adamantyl methacrylate monomer and t-butyl acrylate monomer by 1:1, then conducting polymerization, adding AIBN as a polymerization initiator, and then conducting precipitation purification with methanol. Then to the copolymer, triphenylsulfonium hexafluoroantimonate was added to prepare a cyclohexanone solution. This solution was applied to a wafer, and exposed to a KrF excimer stepper and developed. The threshold energy Eth was 50 mJ/cm2. A 0.45 μm-wide L & S was formed at 130 mJ/cm2. The radiation sensitive material has good transparency and etching resistance, high sensitivity, and little peeling.

    摘要翻译: 通过将甲基丙烯酸金刚烷酯单体和丙烯酸叔丁酯单体以1:1的比例加载,然后进行聚合,加入AIBN作为聚合引发剂,然后用甲醇进行沉淀纯化,得到由以下结构式表示的共聚物。 然后向共聚物中加入三苯基锍六氟锑酸盐以制备环己酮溶液。 将该溶液施加到晶片上,暴露于KrF准分子步进机并显影。 阈值能量Eth为50mJ / cm 2。 在130mJ / cm 2下形成0.45μm的L&S。 辐射敏感材料具有良好的透明度和耐蚀刻性,灵敏度高,剥离少。

    Flexible disk drive
    103.
    发明授权
    Flexible disk drive 失效
    灵活的磁盘驱动器

    公开(公告)号:US07151646B2

    公开(公告)日:2006-12-19

    申请号:US10781834

    申请日:2004-02-20

    IPC分类号: G11B17/02

    CPC分类号: G11B17/043 G11B33/025

    摘要: A flexible disk drive includes a case and a disk holder provided in the case. A flexible disk is mounted on the disk holder. A part of the disk holder abuts against an inner face of the case. Preferably, the part of the disk holder is a tip end portion of the disk holder. The tip end portion of the disk holder is bent in a slanted direction so as to enlarge an inlet of the disk holder for the flexible disk to be inserted.

    摘要翻译: 软盘驱动器包括壳体和设置在壳体中的盘保持器。 软盘安装在磁盘支架上。 盘保持器的一部分抵靠壳体的内表面。 优选地,盘保持器的一部分是盘保持器的末端部分。 盘保持器的前端部沿倾斜方向弯曲,以便扩大用于待插入的软盘的盘保持器的入口。

    Waveform data analysis method and apparatus suitable for waveform expansion/compression control

    公开(公告)号:US07094965B2

    公开(公告)日:2006-08-22

    申请号:US10051973

    申请日:2002-01-16

    IPC分类号: G10H7/00

    摘要: Filtering is performed on original waveform to remove components of a predetermined frequency band from the waveform, and dividing positions of the original waveform data are determined on the basis of envelope levels of the filtered waveform. The dividing positions may be determined on the basis of differentiation of an envelope of the filtered waveform. Rise positions in the original waveform data are detected, and one rise position may be selected from among one or more rise positions detected within a predetermined range of the original waveform and extracted as a dividing position of the original waveform. Presumed beat positions in the original waveform may be detected, and rise positions of the original waveform may be detected within predetermined ranges corresponding to the presumed beat positions. In parallel with reproduction of automatic performance, waveform data are stored in memory along with synchronization control data indicative of relationship in processing timing between the automatic performance and the waveform data.

    Optical waveguide member and optical module
    105.
    发明授权
    Optical waveguide member and optical module 有权
    光波导元件和光模块

    公开(公告)号:US07054523B2

    公开(公告)日:2006-05-30

    申请号:US10250506

    申请日:2002-02-27

    IPC分类号: G02B6/26 G02B6/42

    摘要: The present invention has an object of enhancing the tolerance of setup positioning error of an optical multiplexer/demultiplexer which uses a multi-mode optical waveguide. For this sake, the invention is designed to couple the multi-mode optical waveguide with a single-mode optical waveguide directly. In another configuration of this invention, there is provided between both optical waveguides a single-mode optical waveguide having its length set to be approximately equal to zero, or equal or approximately equal to the period of interference between the 0th-order mode and a radiative higher-order mode of the single-mode optical waveguide.

    摘要翻译: 本发明的目的是提高使用多模光波导的光复用器/解复用器的设置定位误差的容限。 为此,本发明被设计成将多模光波导与单模光波导直接耦合。 在本发明的另一种结构中,在两个光波导之间设置一个单模光波导,其长度设置为近似等于零,或等于或大致等于0阶模与辐射之间的干扰周期 单模光波导的高阶模式。

    Main steam valve for a steam turbine
    107.
    发明申请
    Main steam valve for a steam turbine 有权
    蒸汽轮机主蒸汽阀

    公开(公告)号:US20060005889A1

    公开(公告)日:2006-01-12

    申请号:US11175284

    申请日:2005-07-07

    IPC分类号: F16K11/04

    摘要: A main steam valve with improved flow characteristic and enhanced reliability comprises a valve seat, a main valve body, and a bypass valve body. A side surface of the bypass valve body slidably fits into the inner surface of the main valve body and forms a steam inlet comprised of a plurality of rows of inlet openings arranged along the side surface. The openings are diametrically symmetrically arranged in the bypass valve, and the positions of the openings in each of the rows are shifted from the positions of openings in the next row.

    摘要翻译: 具有改善的流动特性和增强的可靠性的主蒸汽阀包括阀座,主阀体和旁通阀体。 旁通阀体的侧面可滑动地配合到主阀体的内表面,并形成一个蒸汽入口,它包括沿着侧面布置的多排入口。 开口在旁通阀中直径对称地布置,并且每行中的开口的位置从下一排中的开口的位置偏移。

    Burst transfer memory
    108.
    发明授权
    Burst transfer memory 失效
    突发传输记忆

    公开(公告)号:US06925543B2

    公开(公告)日:2005-08-02

    申请号:US10237028

    申请日:2002-09-09

    摘要: The present invention provides a burst transfer memory comprising a first memory having a cell array arranged in a matrix, a second memory which has a cell array arranged in a matrix and which performs a random access operation at a higher speed than the first memory, and an interface circuit which controls the first and second memories as one burst transfer memory, and wherein the interface circuit allocates addresses to the first and second memories as consecutive addresses, and the interface circuit substantially simultaneously starts the first random access to the first and second memories, accesses the second memory before a word line of the first memory is activated, and consecutively accesses a page of the first memory after the word line of the first memory has been activated.

    摘要翻译: 本发明提供了一种突发传输存储器,包括具有以矩阵形式排列的单元阵列的第一存储器,具有以矩阵形式布置的单元阵列并且以比第一存储器更高速度执行随机存取操作的第二存储器,以及 接口电路,其将第一和第二存储器控制为一个突发传送存储器,并且其中接口电路将地址分配给第一和第二存储器作为连续地址,并且接口电路基本上同时开始对第一和第二存储器的第一随机存取 在第一存储器的字线被激活之前访问第二存储器,并且在第一存储器的字线已经被激活之后连续地访问第一存储器的页面。

    Method for the formation of resist patterns
    110.
    发明授权
    Method for the formation of resist patterns 失效
    形成抗蚀剂图案的方法

    公开(公告)号:US06699645B2

    公开(公告)日:2004-03-02

    申请号:US08810773

    申请日:1997-03-05

    IPC分类号: B03F730

    CPC分类号: G03F7/322

    摘要: Method for the formation of resist patterns by using a chemically amplified resist which comprises an alkali-insoluble base polymer or copolymer and an acid generator, in which the patternwise exposed film of said resist is developed with an organic alkaline developer in the presence of a surface active agent containing a higher alkyl group in a molecule thereof. The resist patterns have no drawback such as cracks and peeling, and thus can be advantageously used in the production of semiconductor devices such as LSIs and VLSIs.

    摘要翻译: 通过使用包含碱不溶性基础聚合物或共聚物和酸产生剂的化学放大抗蚀剂形成抗蚀剂图案的方法,其中所述抗蚀剂的图案曝光膜在表面存在下用有机碱性显影剂显影 其分子中含有较高级烷基的活性剂。 抗蚀剂图案没有诸如裂纹和剥离的缺点,因此可以有利地用于制造诸如LSI和VLSI的半导体器件。