摘要:
A copolymer expressed by the following structural formula was obtained by loading adamantyl methacrylate monomer and t-butyl acrylate monomer by 1:1, then conducting polymerization, adding AIBN as a polymerization initiator, and then conducting precipitation purification with methanol. Then to the copolymer, triphenylsulfonium hexafluoroantimonate was added to prepare a cyclohexanone solution. This solution was applied to a wafer, and exposed to a KrF excimer stepper and developed. The threshold energy Eth was 50 mJ/cm2. A 0.45 μm-wide L & S was formed at 130 mJ/cm2. The radiation sensitive material has good transparency and etching resistance, high sensitivity, and little peeling.
摘要翻译:通过将甲基丙烯酸金刚烷酯单体和丙烯酸叔丁酯单体以1:1的比例加载,然后进行聚合,加入AIBN作为聚合引发剂,然后用甲醇进行沉淀纯化,得到由以下结构式表示的共聚物。 然后向共聚物中加入三苯基锍六氟锑酸盐以制备环己酮溶液。 将该溶液施加到晶片上,暴露于KrF准分子步进机并显影。 阈值能量Eth为50mJ / cm 2。 在130mJ / cm 2下形成0.45μm的L&S。 辐射敏感材料具有良好的透明度和耐蚀刻性,灵敏度高,剥离少。
摘要:
A heat-resistant cast steel excellent in high-temperature strength, aged ductility and creep rupture strength for use as a material for steam reforming reaction tubes in fuel cell hydrogen generation systems and the like. The cast steel has a chemical composition comprising, in mass %, 0.1 to 0.5% of C, up to 2.5% of Si, up to 2.5% of Mn, 15 to 26% of Cr, 8 to 23% of Ni, 0.1 to 1.2% of Nb, 0.01 to 1.0% of Ti, 0.001 to 0.15% of Ce, up to 0.06% of N and the balance substantially Fe, the cast steel being 20 to 45 in the parameter value P calculated from the expression: P=89.3−78.4C+0.1Si−5.7Mn−1.7Cr +0.01Ni+2Nb+5.3Ti−36.5N−50.8Ce. When desired, the steel contains at least one of 0.001 to 0.05% of B, 0.01 to 0.5% of Zr and 0.001 to 0.15% of La, and/or 0.01 to 0.3% of Al. Further when desired, the C, Cr and Ni contents are limited to 0.1 to 0.3% of C, 15 to 20% of Cr and 8 to 18% of Ni.
摘要:
A flexible disk drive includes a case and a disk holder provided in the case. A flexible disk is mounted on the disk holder. A part of the disk holder abuts against an inner face of the case. Preferably, the part of the disk holder is a tip end portion of the disk holder. The tip end portion of the disk holder is bent in a slanted direction so as to enlarge an inlet of the disk holder for the flexible disk to be inserted.
摘要:
Filtering is performed on original waveform to remove components of a predetermined frequency band from the waveform, and dividing positions of the original waveform data are determined on the basis of envelope levels of the filtered waveform. The dividing positions may be determined on the basis of differentiation of an envelope of the filtered waveform. Rise positions in the original waveform data are detected, and one rise position may be selected from among one or more rise positions detected within a predetermined range of the original waveform and extracted as a dividing position of the original waveform. Presumed beat positions in the original waveform may be detected, and rise positions of the original waveform may be detected within predetermined ranges corresponding to the presumed beat positions. In parallel with reproduction of automatic performance, waveform data are stored in memory along with synchronization control data indicative of relationship in processing timing between the automatic performance and the waveform data.
摘要:
The present invention has an object of enhancing the tolerance of setup positioning error of an optical multiplexer/demultiplexer which uses a multi-mode optical waveguide. For this sake, the invention is designed to couple the multi-mode optical waveguide with a single-mode optical waveguide directly. In another configuration of this invention, there is provided between both optical waveguides a single-mode optical waveguide having its length set to be approximately equal to zero, or equal or approximately equal to the period of interference between the 0th-order mode and a radiative higher-order mode of the single-mode optical waveguide.
摘要:
A novel optical film is disclosed. The film comprises an optically anisotropic layer formed of a composition comprising at least one liquid crystal compound and at least one polymer having a fluoro-aliphatic group and a hydrophilic group selected from the group consisting of a carboxyl group (—COOH), a sulfo group (—SO3H), a phosphono group {—PO(OH)2} and salts thereof; and a substrate supporting the layer.
摘要:
A main steam valve with improved flow characteristic and enhanced reliability comprises a valve seat, a main valve body, and a bypass valve body. A side surface of the bypass valve body slidably fits into the inner surface of the main valve body and forms a steam inlet comprised of a plurality of rows of inlet openings arranged along the side surface. The openings are diametrically symmetrically arranged in the bypass valve, and the positions of the openings in each of the rows are shifted from the positions of openings in the next row.
摘要:
The present invention provides a burst transfer memory comprising a first memory having a cell array arranged in a matrix, a second memory which has a cell array arranged in a matrix and which performs a random access operation at a higher speed than the first memory, and an interface circuit which controls the first and second memories as one burst transfer memory, and wherein the interface circuit allocates addresses to the first and second memories as consecutive addresses, and the interface circuit substantially simultaneously starts the first random access to the first and second memories, accesses the second memory before a word line of the first memory is activated, and consecutively accesses a page of the first memory after the word line of the first memory has been activated.
摘要:
A joined structure has high strength, which is used for manufacturing a joint made from different metal materials. In the joined structure in which the different metal materials are joined, a reaction product layer to be generated on the joined interface is set to have a thickness of 0.5 &mgr;m or less. Moreover, the reaction product layer is allowed to intermittently exist on the joined interface. Furthermore, the reaction product layer contains a base material crystal consisting of base material atoms of 90 atom % or more on the joined interface.
摘要:
Method for the formation of resist patterns by using a chemically amplified resist which comprises an alkali-insoluble base polymer or copolymer and an acid generator, in which the patternwise exposed film of said resist is developed with an organic alkaline developer in the presence of a surface active agent containing a higher alkyl group in a molecule thereof. The resist patterns have no drawback such as cracks and peeling, and thus can be advantageously used in the production of semiconductor devices such as LSIs and VLSIs.