Semiconductor pressure sensor and its fabrication method
    101.
    发明授权
    Semiconductor pressure sensor and its fabrication method 有权
    半导体压力传感器及其制造方法

    公开(公告)号:US07786541B2

    公开(公告)日:2010-08-31

    申请号:US12067426

    申请日:2006-08-30

    IPC分类号: H01L29/84

    摘要: A semiconductor pressure sensor comprises a silicon support substrate (1), an insulating layer (2) formed on the silicon support substrate (1), and a silicon thin plate (3) formed on the insulating layer (2). A through-hole (1a) extending in the thickness direction of the silicon support substrate (1) is formed in the silicon support substrate (1). The silicon thin plate (3) located on an extension of the through-hole (1a) functions as a diaphragm (23) that is deformed by an external pressure. The insulating layer (2) remains over the entire lower surface of the diaphragm (23). The thickness of the insulating layer (2) decreases from the peripheral portion toward the central portion of the diaphragm (23). This provides the semiconductor pressure sensor capable of reducing both the offset voltage and the variation of output voltage caused by the variation of temperature and its fabrication method.

    摘要翻译: 半导体压力传感器包括硅支撑基板(1),形成在硅支撑基板(1)上的绝缘层(2)和形成在绝缘层(2)上的硅薄板(3)。 在硅支撑基板(1)上形成在硅支撑基板(1)的厚度方向上延伸的通孔(1a)。 位于通孔(1a)的延伸部上的硅薄板(3)用作通过外部压力变形的隔膜(23)。 绝缘层(2)保持在隔膜(23)的整个下表面上。 绝缘层(2)的厚度从隔膜(23)的周边部分向中心部分减小。 这提供了半导体压力传感器能够降低偏移电压和由温度变化引起的输出电压的变化及其制造方法。

    SEMICONDUCTOR PRESSURE SENSOR AND ITS FABRICATION METHOD
    105.
    发明申请
    SEMICONDUCTOR PRESSURE SENSOR AND ITS FABRICATION METHOD 有权
    半导体压力传感器及其制造方法

    公开(公告)号:US20090140355A1

    公开(公告)日:2009-06-04

    申请号:US12067426

    申请日:2006-08-30

    IPC分类号: H01L23/58 H01L21/00

    摘要: A semiconductor pressure sensor comprises a silicon support substrate (1), an insulating layer (2) formed on the silicon support substrate (1), and a silicon thin plate (3) formed on the insulating layer (2). A through-hole (1a) extending in the thickness direction of the silicon support substrate (1) is formed in the silicon support substrate (1). The silicon thin plate (3) located on an extension of the through-hole (1a) functions as a diaphragm (23) that is deformed by an external pressure. The insulating layer (2) remains over the entire lower surface of the diaphragm (23). The thickness of the insulating layer (2) decreases from the peripheral portion toward the central portion of the diaphragm (23). This provides the semiconductor pressure sensor capable of reducing both the offset voltage and the variation of output voltage caused by the variation of temperature and its fabrication method.

    摘要翻译: 半导体压力传感器包括硅支撑基板(1),形成在硅支撑基板(1)上的绝缘层(2)和形成在绝缘层(2)上的硅薄板(3)。 在硅支撑基板(1)上形成在硅支撑基板(1)的厚度方向上延伸的通孔(1a)。 位于通孔(1a)的延伸部上的硅薄板(3)用作通过外部压力变形的隔膜(23)。 绝缘层(2)保持在隔膜(23)的整个下表面上。 绝缘层(2)的厚度从隔膜(23)的周边部分向中心部分减小。 这提供了半导体压力传感器能够降低偏移电压和由温度变化引起的输出电压的变化及其制造方法。

    Highly Crimped Conjugated Fiber Cheese Package and Process for Its Production
    106.
    发明申请
    Highly Crimped Conjugated Fiber Cheese Package and Process for Its Production 审中-公开
    高度卷曲的共轭纤维奶酪包装及其生产工艺

    公开(公告)号:US20080317984A1

    公开(公告)日:2008-12-25

    申请号:US12090456

    申请日:2006-10-19

    摘要: A highly crimped conjugate fiber cheese package which is obtained by layering on a paper bobbin a conjugate fiber consisting of a plurality of single filament composed of polytrimethylene terephthalate components having different intrinsic viscosities and consisting of at least 90 mol % of a trimethylene terephthalate unit and no more than 10 mol % of another ester repeating unit and laminated to each other in a side-by-side type, the cheese package being characterized by satisfying the following conditions (1)-(4).(1) The single filament composing the conjugate fiber has cross-sectional shape which is flat cross-section with a flatness of 1.1-3 as the ratio between the long axis and short axis.(2) The developed crimp elongation of the conjugate fiber is 30-200%.(3) The relationship between the contact area (compressed net area) S (cm2) between the paper bobbin and conjugate fiber and the wound weight W (kg) satisfies the following formula (1): 2≦W≦0.02S  (Formula 1) where 240≦S≦1000 (4) The package density of the conjugate fiber cheese package is 0.92-1.05 g/cm3.

    摘要翻译: 一种高度卷曲的复合纤维干酪包装,其通过在纸卷轴上层叠由多个由具有不同特性粘度的聚对苯二甲酸丙二醇酯组分组成的单丝组成并由至少90摩尔%的对苯二甲酸丙二醇酯单元组成的复合纤维 大于10摩尔%的另一个酯重复单元并且并排地层叠,所述奶酪包装的特征在于满足以下条件(1) - (4)。 (1)构成复合纤维的单丝具有截面形状,其横截面为扁平度,长度与短轴之比为1.1-3。 (2)复合纤维的显影卷曲伸长率为30〜200%。 (3)纸筒与复合纤维之间的接触面积(压缩净面积)S(cm 2)与卷绕重量W​​(kg)之间的关系满足下式(1):<?在线公式描述= “在线公式”end =“lead”?> 2 <= W <= 0.02S(公式1)<?in-line-formula description =“In-line Formulas”end =“tail”?>其中240 < = S <= 1000(4)复合纤维干酪包装的包装密度为0.92-1.05g / cm 3。

    Thermo-sensitive flow rate sensor
    108.
    发明授权
    Thermo-sensitive flow rate sensor 有权
    热敏流量传感器

    公开(公告)号:US06675644B2

    公开(公告)日:2004-01-13

    申请号:US09289393

    申请日:1999-04-12

    IPC分类号: G01F168

    CPC分类号: G01F1/6845 G01F1/692

    摘要: A thermo-sensitive flow rate sensor that comprises a plate-like substrate, a part of which is removed so that a space is provided therein, a diaphragm portion formed like a thin layer above the space in such a manner as to be integral with the plate-like substrate, and a heating element constituted by a thermo-sensitive electrically resistant film formed on the diaphragm. Plural holes penetrating the diaphragm portion are bored in an outer peripheral portion of the heating element. Each of the plurality of holes is shaped in such a way as to have obtuse corner portions or to have substantially no corner portions. The thermo-sensitive flow rate sensor measures the flow rate of a fluid, which is to be measured, according to an amount of heat transferred to the fluid from a part heated by energizing the heating element.

    摘要翻译: 一种热敏流量传感器,其包括板状基板,其一部分被移除以便在其中设置空间;隔膜部分,其形成为与空间上方的薄层形成为一体, 板状基板和由形成在隔膜上的热敏电阻膜构成的加热元件。 穿透隔膜部分的多个孔在加热元件的外周部分中钻孔。 多个孔中的每一个成形为具有钝角部分或基本上没有角部。 热敏流量传感器根据通过激励加热元件加热的部件传递到流体的热量来测量要测量的流体的流量。

    Heat-sensitive type flow rate detecting element and holder therefor
    109.
    发明授权
    Heat-sensitive type flow rate detecting element and holder therefor 有权
    热敏型流量检测元件及其支架

    公开(公告)号:US06615655B1

    公开(公告)日:2003-09-09

    申请号:US10031148

    申请日:2002-01-17

    IPC分类号: G01F168

    CPC分类号: G01F1/692 G01F1/6845

    摘要: A flow rate detecting element measuring the flow rates of various fluids, particularly the intake air of an internal combustion engine. The flow rate detecting element has a thin film layer including a support film and a protective film on one surface of a flat substrate, a heating resistance section and a comparative resistance section thermosensitive resistor having patterns and located between the support film and the protective film. The flat substrate has a recess which penetrates the flat substrate in the thickness direction thereof and facing the heating resistance section and the comparative resistance section. A fluid flow passage communicates with the recess which faces the comparative resistance section for fluid flow into the recess. Flow rate or velocity of a fluid can be measured accurately using the heating resistance section according to the fluid temperature reported by the comparative resistance section.

    摘要翻译: 流量检测元件,其测量各种流体的流量,特别是内燃机的进气。 流量检测元件具有在平坦基板的一个表面上包括支撑膜和保护膜的薄膜层,具有图案并位于支撑膜和保护膜之间的加热电阻部分和比较电阻部分热敏电阻器。 平面基板具有在其平坦基板的厚度方向上贯通平板状基板的面向加热电阻部和比较电阻部的凹部。 流体流动通道与面向比较电阻部分的凹部连通,以使流体流入凹部。 可以使用根据比较电阻部报告的流体温度的加热电阻部分精确地测量流体的流速或速度。

    Processes for producing polyesters and producing sorbic acid
    110.
    发明授权
    Processes for producing polyesters and producing sorbic acid 失效
    生产聚酯和生产山梨酸的方法

    公开(公告)号:US06590122B1

    公开(公告)日:2003-07-08

    申请号:US09555228

    申请日:2000-05-26

    IPC分类号: C07C5710

    摘要: The invented process for producing a polyester supplies a crotonaldehyde with a purity of 95% by weight or more to a reaction system in the reaction of ketene with crotonaldehyde. In this process, unreacted crotonaldehyde may be recovered from a reaction mixture obtained by the reaction of ketene with crotonaldehyde and may be recycled to the reaction system. The &agr;vinylcrotonaldehyde content of the crotonaldehyde to be supplied to the reaction system is, for example, less than 0.5% by weight, and the paraldehyde content of the crotonaldehyde to be supplied to the reaction system is, for example, less than 5% by weight. By decomposing the above-prepared polyester with, for example, hydrochloric acid, a sorbic acid having a satisfactory hue can be efficiently obtained.

    摘要翻译: 本发明的生产聚酯的方法是在乙烯酮与巴豆醛的反应中向反应体系提供纯度为95重量%以上的巴豆醛。 在该方法中,未反应的巴豆醛可以从通过乙烯酮与巴豆醛反应获得的反应混合物中回收,并且可以再循环到反应体系中。 供给到反应体系中的巴豆醛的α-乙烯基巴豆醛含量例如小于0.5重量%,供给到反应体系中的巴豆醛的二甲醛含量例如小于5重量% 。 通过用例如盐酸分解上述制备的聚酯,可以有效地获得具有令人满意的色调的山梨酸。