摘要:
An active matrix substrate for the liquid crystal display has a switching circuit for switching on each of picture elements which includes a corresponding gate bus line, source bus line and a switching transistor. Further, the switching circuit includes at least one redundant structure to avoid inoperativeness of the switching circuit.
摘要:
A thin film transistor which includes an insulative substrate, and a gate electrode, a gate isulating film, a semi-conductor film, a source electrode, and a drain electrode, which are all laminated in that order onto the insulating substrate in the form of an array. The gate electrode is made of tantalum, and the gate insulating film is formed into a double-layered construction of an anodized tantalum film and a silicon nitride film, while the semi-conductor film is provided at each intersection between the gate electrode and the source electrode.This application is a continuation of application Ser. No. 057,743 filed on June 3, 1987, abandoned, which is a continuation of application Ser. No. 797,660 filed on Nov. 13, 1985, now abandoned.
摘要:
An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
摘要:
An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
摘要:
A power-generating system includes a heat source which is able to produce temporal temperature variation, a first device in which polarization occurs based on the temperature change of the heat source, and a second device for taking out a net generating power from the first device, wherein 80% or higher of the total surface area of the first device is heated and/or cooled with the heat source.
摘要:
An electrode for plasma generation according to the present invention includes a plurality of collecting portions having a plurality of through holes, the plurality of collecting portions facing a gas flow in a direction where gas to be treated flows and provided spaced apart from each other. The electrode is applied to a plasma reactor of a treatment device to be provided for a device which discharges the smoke including PM, for example, an exhaust gas purifying device for automobile, or a smoke treatment device used in a facility where the smoke is discharged such as a plant.
摘要:
An illumination optical system which illuminates an irradiated plane with illumination light provided from a light source includes a spatial light modulator which is arranged in an optical path of the illumination optical system and cooperates with part of the illumination optical system to form a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position. A detection unit detects the light intensity distribution of the illumination light at a position in an optical path extending from the light source to the spatial light modulator. The detection unit includes a light receiving surface which receives some of the illumination light. A control unit controls the spatial light modulator based on the light intensity distribution detected by the detection unit.
摘要:
An illumination optical system for illuminating an irradiated plane M with illumination light provided from a light source includes a spatial light modulator, which is arranged in an optical path of the illumination optical system and forms a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position, and a diffuser, which is arranged at an incidence side of the spatial light modulator through which the illumination light enters.
摘要:
There is disclosed an inspection device for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, said inspection device comprising, a conjugate optical system which is arranged optically downstream the spatial light modulator and which forms a conjugate plane optically conjugate with an array plane where the plurality of optical elements are arrayed, a photodetector having a detection surface arranged on or near the conjugate plane, and an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector.
摘要:
In Suzuki Cross-Couplings, a palladium-containing perovskite-type composite oxide represented by the following general formula (1) is used as a catalyst for synthesis reaction: Ln2MyCu1-x-yPdxO4±δ (1) wherein Ln represents elements composed of at least one essential element selected from La, Pr, Nd, Sm, Eu, and Gd and at least one optional element selected from Y, Ce, Yb, Ca, Sr, and Ba; M represents at least one element selected from Cr, Mn, Fe, Co, Ni, and Al; x, indicating an atomic proportion, is 0.001≦x≦0.4; y, indicating an atomic proportion, is 0≦y≦0.5; and δ indicates an oxygen excess amount or an oxygen deficiency amount.