Thin film transistor
    102.
    发明授权
    Thin film transistor 失效
    薄膜晶体管

    公开(公告)号:US4843438A

    公开(公告)日:1989-06-27

    申请号:US235728

    申请日:1988-08-19

    摘要: A thin film transistor which includes an insulative substrate, and a gate electrode, a gate isulating film, a semi-conductor film, a source electrode, and a drain electrode, which are all laminated in that order onto the insulating substrate in the form of an array. The gate electrode is made of tantalum, and the gate insulating film is formed into a double-layered construction of an anodized tantalum film and a silicon nitride film, while the semi-conductor film is provided at each intersection between the gate electrode and the source electrode.This application is a continuation of application Ser. No. 057,743 filed on June 3, 1987, abandoned, which is a continuation of application Ser. No. 797,660 filed on Nov. 13, 1985, now abandoned.

    摘要翻译: 一种薄膜晶体管,其包括绝缘基板,以及栅极电极,栅极隔离膜,半导体膜,源电极和漏电极,它们均按顺序层叠在绝缘基板上,形式为 数组。 栅电极由钽制成,并且栅极绝缘膜形成为阳极氧化钽膜和氮化硅膜的双层结构,而半导体膜设置在栅电极和源极之间的每个交叉处 电极。 这个应用程序是应用程序的延续。 1987年6月3日提交的第057,743号被遗弃,这是继续申请。 1985年11月13日提交的第797,660号,现已放弃。

    ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION METHOD, AND LIGHT POLARIZATION UNIT
    104.
    发明申请
    ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION METHOD, AND LIGHT POLARIZATION UNIT 有权
    照明光学系统,曝光装置,装置生产方法和光偏振装置

    公开(公告)号:US20140233008A1

    公开(公告)日:2014-08-21

    申请号:US14124034

    申请日:2011-11-25

    IPC分类号: G03F7/20 G02B26/08 G02B27/28

    摘要: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.

    摘要翻译: 照明光学系统,其利用来自光源的光照射照明物镜表面。 照明光学系统包括:空间光调制器,其包括布置在预定平面内的多个光学元件,并分别控制,并且在照明光学系统的照明光瞳中形成光强度分布; 以及偏振单元,其布置在与所述预定平面光学共轭的位置,并且使具有第一和第二部分光束的入射光束偏振到所述偏振单元中,使得所述第一和第二部分光束具有偏振状态 彼此不同,并且发射偏振入射光束作为输出光束,其中偏振单元在出射光束的横截面中改变第一和第二部分光束的横截面积之间的比率。

    Illumination optical system, exposure apparatus, and device manufacturing method
    107.
    发明授权
    Illumination optical system, exposure apparatus, and device manufacturing method 有权
    照明光学系统,曝光装置和装置制造方法

    公开(公告)号:US08520291B2

    公开(公告)日:2013-08-27

    申请号:US12252274

    申请日:2008-10-15

    申请人: Hirohisa Tanaka

    发明人: Hirohisa Tanaka

    IPC分类号: G02B26/00 G02F1/29

    摘要: An illumination optical system which illuminates an irradiated plane with illumination light provided from a light source includes a spatial light modulator which is arranged in an optical path of the illumination optical system and cooperates with part of the illumination optical system to form a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position. A detection unit detects the light intensity distribution of the illumination light at a position in an optical path extending from the light source to the spatial light modulator. The detection unit includes a light receiving surface which receives some of the illumination light. A control unit controls the spatial light modulator based on the light intensity distribution detected by the detection unit.

    摘要翻译: 利用从光源提供的照明光照射被照射平面的照明光学系统包括布置在照明光学系统的光路中的空间光调制器,并与照明光学系统的一部分配合以形成期望的光强度分布 在照明光学系统的光瞳位置处或与光瞳位置光学共轭的位置。 检测单元检测在从光源延伸到空间光调制器的光路中的位置处的照明光的光强度分布。 检测单元包括接收一些照明光的光接收表面。 控制单元基于由检测单元检测到的光强度分布来控制空间光调制器。

    Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method
    109.
    发明授权
    Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method 有权
    空间光调制器,照明光学系统,调整照明光学系统的方法,曝光装置和装置制造方法的检查装置和检查方法

    公开(公告)号:US08456624B2

    公开(公告)日:2013-06-04

    申请号:US12952197

    申请日:2010-11-22

    IPC分类号: G01N21/00

    摘要: There is disclosed an inspection device for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, said inspection device comprising, a conjugate optical system which is arranged optically downstream the spatial light modulator and which forms a conjugate plane optically conjugate with an array plane where the plurality of optical elements are arrayed, a photodetector having a detection surface arranged on or near the conjugate plane, and an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector.

    摘要翻译: 公开了一种检查装置,用于检查具有二维排列并被单独控制的多个光学元件的空间光调制器,所述检查装置包括:共轭光学系统,其在空间光调制器的光学下游配置并形成共轭平面 与排列多个光学元件的阵列平面光学共轭,具有布置在共轭平面上或附近的检测表面的光电检测器,以及基于检测结果检查多个光学元件的光学特性的检查单元 通过光电检测器。