Illumination optical system, exposure apparatus, and device manufacturing method
    3.
    发明授权
    Illumination optical system, exposure apparatus, and device manufacturing method 有权
    照明光学系统,曝光装置和装置制造方法

    公开(公告)号:US08947635B2

    公开(公告)日:2015-02-03

    申请号:US13168068

    申请日:2011-06-24

    IPC分类号: G03B27/72 G02B27/09 G03F7/20

    摘要: According to one embodiment, an illumination optical system is provided with an optical integrator which forms a predetermined light intensity distribution on an illumination pupil plane in an illumination optical path of the illumination optical system with incidence of exposure light from a light source device thereinto; a transmission filter arranged on the reticle side with respect to the optical integrator and in a first adjustment region set including the illumination pupil plane in an optical-axis direction of the illumination optical system, and having a transmittance characteristic varying according to positions of the exposure light incident thereinto; and a movement mechanism which moves the transmission filter along the optical-axis direction in the first adjustment region.

    摘要翻译: 根据一个实施例,照明光学系统设置有光学积分器,其在照明光学系统的照明光路中在照明光瞳平面上形成预定的光强度分布,其中光源装置的曝光光入射到照明光学系统中; 相对于光积分器布置在光罩侧的透射滤光器和在照明光学系统的光轴方向上包括照明光瞳面的第一调整区域,并且具有根据曝光位置而变化的透射率特性 光线事件 以及在第一调整区域中沿着光轴方向移动发送滤波器的移动机构。

    Illumination optics apparatus, exposure method, exposure apparatus, and method of manufacturing electronic device
    5.
    发明授权
    Illumination optics apparatus, exposure method, exposure apparatus, and method of manufacturing electronic device 有权
    照明光学装置,曝光方法,曝光装置和制造电子装置的方法

    公开(公告)号:US08300213B2

    公开(公告)日:2012-10-30

    申请号:US12287497

    申请日:2008-10-08

    申请人: Hirohisa Tanaka

    发明人: Hirohisa Tanaka

    IPC分类号: G03B27/72 G03B27/54

    摘要: An illumination optical apparatus which constantly controls a plurality of polarization states with high accuracy. An illumination optical system, which illuminates a pattern surface of a mask with illumination light, includes a polarization optical system and a depolarizer. The polarization optical system includes a half wavelength plate and PBS, which varies a polarization state of the illumination light to form a linear polarization state having a predetermined polarization direction. The depolarizer is arranged toward the mask from the polarization optical system and varies the polarization state of the illumination light emitted from the polarization optical system.

    摘要翻译: 一种以高精度恒定地控制多个偏振状态的照明光学装置。 利用照明光照射掩模的图案表面的照明光学系统包括偏振光学系统和去偏振器。 偏振光学系统包括半波长板和PBS,其改变照明光的偏振状态以形成具有预定偏振方向的线偏振状态。 偏振器从偏振光学系统朝向掩模布置,并且改变从偏振光学系统发射的照明光的偏振状态。

    Illumination optical apparatus, exposure apparatus, and device manufacturing method
    6.
    发明授权
    Illumination optical apparatus, exposure apparatus, and device manufacturing method 有权
    照明光学装置,曝光装置和装置的制造方法

    公开(公告)号:US08094290B2

    公开(公告)日:2012-01-10

    申请号:US12266321

    申请日:2008-11-06

    IPC分类号: G03B27/54 G03B27/72 G03B27/32

    摘要: An illumination optical system with a simple structure reduces the effects of illumination variations caused by a spatial coherency of illumination light, while maintaining a high usage efficiency of illumination light that is emitted in pulses. The illumination optical system illuminates an irradiated plane with pulse-emitted illumination light and includes a spatial light modulator including a plurality of mirror elements each of which spatially modulates the illumination light in accordance with an incident position of the illumination light. A modulation control unit controls the mirror elements, whenever at least one pulse of illumination light is emitted, in a manner such that the optical elements spatially modulate the pulses of illumination light differently from one another and form substantially the same intensity distribution for the pulses of illumination light on a predetermined plane.

    摘要翻译: 具有简单结构的照明光学系统降低了由照明光的空间相干性引起的照明变化的影响,同时保持以脉冲发射的照明光的高使用效率。 照明光学系统用脉冲发射的照明光照射被照射的平面,并且包括空间光调制器,其包括多个反射镜元件,每个反射镜元件根据照明光的入射位置对照明光进行空间调制。 每当发射照明光的至少一个脉冲时,调制控制单元控制镜元件,使得光学元件彼此空间地调制照明光的脉冲,并且形成基本相同的强度分布,用于脉冲的 在预定平面上的照明光。

    FUEL CELL SYSTEM
    7.
    发明申请
    FUEL CELL SYSTEM 有权
    燃油电池系统

    公开(公告)号:US20100221643A1

    公开(公告)日:2010-09-02

    申请号:US12733446

    申请日:2008-09-04

    IPC分类号: H01M8/04

    摘要: A fuel cell system of the present invention includes a fixing unit that fixes or releases hydrazine, a fuel cell to which hydrazine released in the fixing unit is supplied as fuel, a supply line for supplying an aqueous hydrazine solution from a hydrazine supply source to the fixing unit, a drain line for draining drained water from the fixing unit, a first sensing unit for detecting a hydrazine concentration in an aqueous hydrazine solution flowing in the supply line, a second sensing unit for detecting a hydrazine concentration in drained water flowing in the drain line, and a detection unit that detects the amount of hydrazine fixed in the fixing unit based on the concentration values detected by the first sensing unit and the second sensing unit.

    摘要翻译: 本发明的燃料电池系统包括固定或释放肼的固定单元,将作为燃料供给到定影单元中的肼释放的燃料电池,用于从肼供给源供应肼水溶液的供给管线, 定影单元,用于从定影单元排出排出的水的排水管,用于检测在供应管线中流动的肼水溶液中的肼浓度的第一感测单元,用于检测在该供液管中流动的排水中的肼浓度的第二感测单元 以及检测单元,其基于由第一感测单元和第二感测单元检测的浓度值来检测固定在定影单元中的肼的量。

    Multi-pole coaxial connector
    10.
    发明授权
    Multi-pole coaxial connector 失效
    多极同轴连接器

    公开(公告)号:US07607944B2

    公开(公告)日:2009-10-27

    申请号:US12046609

    申请日:2008-03-12

    IPC分类号: H01R9/05

    摘要: To provide a multi-pole coaxial connector that can be made more compact. More specifically, to provide a multi-pole coaxial connector in which a pitch between members is reduced to reduce a connecting body in size. In a multi-pole coaxial connector in which when a housing block and a receptacle are coupled to each other, a signal post and a signal contact are brought into conduction, a ground contact and a ground case are brought into conduction, an internal conductor and a signal SMD terminal are brought into conduction, and an external conductor and a ground SMD terminal are brought into conduction, and a cross section of the ground contact is formed into substantially U-shape in which adjacent ground contact side is opened.

    摘要翻译: 提供可以制造得更紧凑的多极同轴连接器。 更具体地,提供一种多极同轴连接器,其中减小了构件之间的间距以减小连接体的尺寸。 在多极同轴连接器中,其中当壳体块和插座相互耦合时,信号柱和信号触点被导通,接地触头和接地壳体导通,内部导体和 使信号SMD端子导通,并且使外部导体和接地SMD端子导通,并且接地触头的横截面形成为大致U形,其中相邻的接地侧被打开。