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101.发明申请METHOD OF MANUFACTURING DISCRETE TRACK RECORDING MEDIUM AND DISCRETE TRACK RECORDING MEDIUM 失效分离轨迹记录介质和分离轨迹记录介质的制造方法公开(公告)号：US20090195929A1
公开(公告)日：2009-08-06
申请号：US12400446
申请日：2009-03-09
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a discrete track recording medium includes forming protruded magnetic patterns on a substrate, and repeating processes of depositing a nonmagnetic material so as to be filled in recesses between the magnetic patterns and etching back the nonmagnetic material two or more times with rotating the substrate in a plane thereof by an angle less than one revolution.
摘要翻译： 根据一个实施例，制造离散轨道记录介质的方法包括在基板上形成突出的磁图案，并且重复沉积非磁性材料以便填充在磁性图案之间的凹部中并且蚀刻非磁性材料2或 更多次，使基板在其平面内以小于一转的角度旋转。
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公开(公告)号：US20070172584A1
公开(公告)日：2007-07-26
申请号：US11657720
申请日：2007-01-25
IPC分类号： B05D5/12
CPC分类号： G11B5/855
摘要： A method of manufacturing a patterned magnetic recording medium includes coating a magnetic film with a resist which is decomposed by exposure to electromagnetic radiation or an electron beam to have a low molecular weight, forming a pattern on the resist by an imprinting method, transferring the pattern to the magnetic film by using the resist having the pattern formed thereon as a mask, and removing the resist by exposing the resist to the electromagnetic radiation or the electron beam.
摘要翻译： 图案化磁记录介质的制造方法包括：通过用电磁辐射或电子束分解的抗蚀剂涂覆磁性膜以具有低分子量，通过压印方法在抗蚀剂上形成图案，转印图案 通过使用其上形成有图案的抗蚀剂作为掩模，并且通过将抗蚀剂暴露于电磁辐射或电子束来除去抗蚀剂到磁性膜。
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公开(公告)号：US08551348B2
公开(公告)日：2013-10-08
申请号：US12548374
申请日：2009-08-26
IPC分类号： B44C1/22
CPC分类号： G11B5/855
摘要： A magnetic recording medium has magnetic patterns formed of a patterned ferromagnetic layer, and a non-magnetic layer including a component of the ferromagnetic layer and separating the magnetic patterns, in which a thickness “a” of the non-magnetic layer and a thickness “b” of the magnetic patterns satisfy a relationship of: a
摘要翻译： 磁记录介质具有由图案化的铁磁层形成的磁图案和包含铁磁性层的成分的非磁性层，并分离磁性图案，其中非磁性层的厚度“a”和厚度“ 磁性图案的“b”满足以下关系：a
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104.发明授权公开(公告)号：US08349163B2
公开(公告)日：2013-01-08
申请号：US12961388
申请日：2010-12-06
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , C25D1/003 , C25D1/10 , G03F7/0002 , G11B5/746 , G11B5/865
摘要： According to one embodiment, an electroforming master comprises a patterns of protrusions and recesses formed on one major surface of an Si substrate having two major surfaces, corresponding to information for positioning of a read/write head (a preamble, address, and burst), recording tracks or recording bits. Impurity ions are doped in the surface of this patterns of protrusions and recesses. The impurity ion concentration distribution in the film thickness direction of the Si substrate has a peak in a portion from the patterns of protrusions and recesses surface to a depth of 40 nm in the film thickness direction. The impurity concentration of this peak is 1×1020 to 2×1021 ions/cm3.
摘要翻译： 根据一个实施例，电铸母版包括形成在具有两个主表面的Si衬底的一个主表面上的突起和凹槽的图案，其对应于用于定位读/写头（前导码，地址和突发）的信息， 记录轨道或记录位。 杂质离子掺杂在这种突起和凹陷图案的表面。 Si衬底的膜厚方向上的杂质离子浓度分布在从薄膜厚度方向的突起和凹陷表面的图案到深度为40nm的部分中具有峰值。 该峰的杂质浓度为1×1020〜2×1021离子/ cm3。
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公开(公告)号：US08343362B2
公开(公告)日：2013-01-01
申请号：US12641135
申请日：2009-12-17
CPC分类号： G11B5/855 , C23C14/04 , C23C14/185 , C23C14/34
摘要： According to one embodiment, when forming first, second, and third stampers by transferring three-dimensional patterns of a master, a height adjusting layer having a film thickness greater on the upper surface of a projection than on the bottom surface of a recess is formed between the second stamper and a second release layer, and the surface of the third stamper is etched with an acidic solution having a pH of less than 3.
摘要翻译： 根据一个实施例，当通过传送主机的三维图案来形成第一，第二和第三压模时，形成在突起的上表面上比在凹部的底表面上具有更大的膜厚度的高度调节层 在第二压模和第二剥离层之间，并且用pH小于3的酸性溶液蚀刻第三压模的表面。
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106.发明授权Stamper, method of manufacturing the stamper, and magnetic recording medium manufacturing method using the stamper 失效压模，制造压模的方法以及使用压模的磁记录介质制造方法公开(公告)号：US08308965B2
公开(公告)日：2012-11-13
申请号：US13093221
申请日：2011-04-25
申请人： Masatoshi Sakurai , Satoshi Shirotori , Seiji Morita , Shinobu Sugimura , Takuya Shimada , Yoshiyuki Kamata
发明人： Masatoshi Sakurai , Satoshi Shirotori , Seiji Morita , Shinobu Sugimura , Takuya Shimada , Yoshiyuki Kamata
摘要： According to one embodiment, a stamper manufacturing method includes forming a conductive material concentration gradient layer including the projections pattern, and a composition ratio of a buffering agent to a conductive material in the conductive material concentration gradient layer reducing in a thickness direction from a master side.
摘要翻译： 根据一个实施例，压模制造方法包括形成包括突起图案的导电材料浓度梯度层，并且导电材料浓度梯度层中的缓冲剂与导电材料的组成比在厚度方向上从主侧减小 。
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公开(公告)号：US08300340B2
公开(公告)日：2012-10-30
申请号：US13039158
申请日：2011-03-02
CPC分类号： G11B5/59688 , B82Y10/00 , G11B5/743 , G11B5/855
摘要： According to one embodiment, a servo area of a magnetic recording medium includes magnetic dots arrayed at a period L0. The magnetic dots include a plurality of magnetic dot regions divided in the cross track direction. A width Wm in the down track direction of the mth magnetic dot region from the innermost circumference and a number Nm of dot rows in the down track direction of the mth region meet a relationship represented by L0{Nm√3/2−0.3}≦Wm≦L0{Nm√3/2+0.3} (1).
摘要翻译： 根据一个实施例，磁记录介质的伺服区包括以周期L0排列的磁点。 磁点包括沿交叉磁道方向分割的多个磁点区域。 第m个区域的第m个磁性区域的向下轨道方向的宽度Wm和第m个区域的向下轨道方向的点行数为Nm满足L0 {Nm3 / 2-0.3}＆nlE ; Wm＆nlE; L0 {Nm√3/ 2 + 0.3}（1）。
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108.发明授权Patterned media and method of manufacturing the same, and magnetic recording apparatus 有权图案化介质及其制造方法以及磁记录装置公开(公告)号：US08257560B2
公开(公告)日：2012-09-04
申请号：US12805471
申请日：2010-08-02
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/59655 , G11B5/743 , G11B5/855
摘要： A patterned media has a substrate, and a magnetic recording layer on the substrate including protruded magnetic patterns and a nonmagnetic material filled in between the protruded magnetic patterns. In the patterned media, a depth Db and a depth Da, which are defined that Db is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a first central part between the magnetic patterns adjacent to each other in a cross-track direction or a down-track direction, and Da is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a second central part in a portion surrounded by the magnetic patterns, have a relationship that the depth Da is greater than the depth Db.
摘要翻译： 图案化介质具有基板，并且在基板上的磁记录层包括突出的磁图案和填充在突出磁图案之间的非磁性材料。 在图案化介质中，深度Db和深度Da被定义为Db是从磁图案的表面到填充在彼此相邻的磁图案之间的第一中心部分的非磁性材料的表面的深度 交叉轨道方向或向下轨道方向，并且Da是从磁图案的表面到填充在由磁图案包围的部分中的第二中心部分中的非磁性材料的表面的深度，具有如下关系： 深度Da大于深度Db。
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公开(公告)号：US08097351B2
公开(公告)日：2012-01-17
申请号：US11341849
申请日：2006-01-30
申请人： Takeshi Okino , Seiji Morita , Yoshiyuki Kamata , Satoshi Shirotori , Masatoshi Sakurai , Hiroaki Nakamura
发明人： Takeshi Okino , Seiji Morita , Yoshiyuki Kamata , Satoshi Shirotori , Masatoshi Sakurai , Hiroaki Nakamura
IPC分类号： G11B5/66
CPC分类号： G11B5/855
摘要： A magnetic recording apparatus has a magnetic recording media including a substrate and a magnetic layer containing magnetic patterns on the substrate, the magnetic layer including data zones to constitute recoding tracks and servo zones, the magnetic patterns of the servo zones being used as address bits, and a magnetic head configured to read signals from the magnetic recording media while flying over the magnetic recording media, in which, in a case where two magnetic patterns used as address bits on the servo zones corresponding to two adjacent recording tracks are arranged in such a manner that one corner of one magnetic pattern is closest to one corner of the other magnetic pattern, the corners of the two magnetic patterns are substantially separated from each other.
摘要翻译： 磁记录装置具有包括基板和在基板上包含磁图案的磁性层的磁记录介质，磁层包括构成记录轨道和伺服区的数据区，伺服区的磁图用作地址位， 以及磁头，被配置为在磁记录介质上飞行时从磁记录介质读取信号，其中在用于作为与两个相邻记录轨道对应的伺服区上的地址位的两个磁图案布置在这样的 一个磁性图案的一个角最靠近另一个磁性图案的一个角的方式，两个磁性图案的角部基本上彼此分离。
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公开(公告)号：US08057689B2
公开(公告)日：2011-11-15
申请号：US12705490
申请日：2010-02-12
IPC分类号： B44C1/22
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist by means of a first etching gas, etching the second hard mask by means of the first etching gas using the patterned resist as a mask to transfer the patterns to the second hard mask, etching the first hard mask by means of a second etching gas different from the first etching gas using the second hard mask as a mask to transfer the patterns to the first hard mask, and performing ion beam etching in order to deactivate the magnetic recording layer exposed in the recesses and to remove the second hard mask.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂，将压模压印到抗蚀剂上，以将凹凸图案转印到抗蚀剂上， 通过第一蚀刻气体去除残留在图案化抗蚀剂的凹部中的残留物，利用第一蚀刻气体，使用图案化抗蚀剂作为掩模蚀刻第二硬掩模，以将图案转移到第二硬掩模，蚀刻第一 通过不同于使用第二硬掩模的第一蚀刻气体作为掩模的第二蚀刻气体将硬掩模转印到第一硬掩模，并且执行离子束蚀刻以使暴露在凹部中的磁记录层失活 并移除第二个硬掩模。
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