Electron gun and electron beam exposure apparatus
    102.
    发明申请
    Electron gun and electron beam exposure apparatus 有权
    电子枪和电子束曝光装置

    公开(公告)号:US20100019648A1

    公开(公告)日:2010-01-28

    申请号:US12586792

    申请日:2009-09-28

    IPC分类号: H01J29/54

    摘要: An electron gun includes: an electron source; an accelerating electrode; an extraction electrode for extracting electrons from an electron emission surface of the electron source; a suppressor electrode for suppressing emission of electrons from a side surface of the electron source; and an electron beam converging unit for converging an electron beam of thermal field emission electrons emitted from the electron emission surface by applying an electric field to the electron emission surface. The electron beam converging unit is an electrostatic lens electrode which is placed between the extraction electrode and the accelerating electrode and having an opening portion in its center. A voltage is applied to the electrostatic lens electrode to converge the electron beam.

    摘要翻译: 电子枪包括:电子源; 加速电极; 用于从电子源的电子发射表面提取电子的提取电极; 用于抑制从电子源的侧表面发射电子的抑制电极; 以及电子束会聚单元,用于通过向电子发射表面施加电场而会聚从电子发射表面发射的热场发射电子的电子束。 电子束会聚单元是放置在提取电极和加速电极之间并且在其中心具有开口部分的静电透镜电极。 电压施加到静电透镜电极以会聚电子束。

    Production process of tetrahydropyran compound and tetrahydropyran compound produced by the production process
    103.
    发明授权
    Production process of tetrahydropyran compound and tetrahydropyran compound produced by the production process 失效
    生产工艺生产四氢吡喃化合物和四氢吡喃化合物的生产工艺

    公开(公告)号:US07518003B2

    公开(公告)日:2009-04-14

    申请号:US11791944

    申请日:2005-12-05

    IPC分类号: C07D309/04

    摘要: The invention provides a production process of a tetrahydropyran compound, characterized by allowing 3,4-dihydro-2-alkoxy-2H-pyran compound or tetrahydro-2-alkoxy-2H-pyran compound which can be easily prepared through reaction between acrolein and alkylvinylether, with hydrogen in the presence of a catalyst containing an element of Groups VIII to X under acidic condition. The production process of the invention is useful for production of Grignard reaction solvent or polymer solvent and intermediate of organic compound.

    摘要翻译: 本发明提供四氢吡喃化合物的制备方法,其特征在于使3,4-二氢-2-烷氧基-2H-吡喃化合物或四氢-2-烷氧基-2H-吡喃化合物可以容易地通过丙烯醛和烷基乙烯基醚 在酸性条件下在含有第VIII至X族元素的催化剂存在下氢气。 本发明的制备方法可用于生产格氏反应溶剂或聚合物溶剂和有机化合物的中间体。

    Lead-Acid Rechargeable Battery
    104.
    发明申请
    Lead-Acid Rechargeable Battery 审中-公开
    铅酸充电电池

    公开(公告)号:US20090061290A1

    公开(公告)日:2009-03-05

    申请号:US11887921

    申请日:2006-03-27

    IPC分类号: H01M2/12 H01M10/06

    摘要: A liquid-inlet cap (13) is installed in a liquid inlet (11) provided in a battery casing, the liquid-inlet cap (13) having a ventilating hole (12) for expelling a gas from the inside of a battery to the outside of the battery. A control valve section (21) is installed inside a cylindrical body (20) of the liquid-inlet cap (13) separately from the cylindrical body (20) and responds to the internal pressure of the battery to form a ventilating passage from a vent hole (22) provided on one end to a ventilating opening (28) provided on the other end.

    摘要翻译: 液体入口盖(13)安装在设置在电池壳体内的液体入口(11)中,液体入口盖(13)具有通气孔(12),用于将气体从电池内部排出到通风孔 在电池外面。 控制阀部分(21)与圆筒体(20)分开地安装在液体入口盖(13)的圆柱体(20)的内部,并响应于电池的内部压力,以形成通气孔 一端设置在设置在另一端的通风口(28)上的孔(22)。

    Electron beam exposure apparatus and method for cleaning the same
    105.
    发明申请
    Electron beam exposure apparatus and method for cleaning the same 有权
    电子束曝光装置及其清洗方法

    公开(公告)号:US20080169433A1

    公开(公告)日:2008-07-17

    申请号:US12077153

    申请日:2008-03-17

    IPC分类号: A61N5/00

    摘要: Provided is an electron beam exposure apparatus for forming a desired pattern on a sample mounted on a wafer stage by exposure with an electron beam generated form an electron gun. The electron beam exposure apparatus includes: supplying device of injecting a reducing gas into a column in which the electron gun and the wafer stage are housed; and control unit of performing control so that the injection of the reducing gas into the column is continued for a predetermined period of time. Organic contamination is combined with H generated from the reducing gas by irradiation of an electron beam, and then evaporates. Further included is supplying device of injecting an ozone gas into the column. The control unit may perform control so that the injection of the ozone gas into the column in addition to the injection of the reducing gas is continued for a predetermined period of time.

    摘要翻译: 提供一种电子束曝光装置,用于通过用电子枪产生的电子束曝光在安装在晶片台上的样品上形成所需图案。 电子束曝光装置包括:将还原气体注入到容纳电子枪和晶片台的列中的供给装置; 以及执行控制的控制单元,使得将还原气体注入到所述列中持续预定时间段。 有机污染与通过照射电子束从还原气体生成的H结合,然后蒸发。 还包括将臭氧气体注入塔的供给装置。 控制单元可以执行控制,使得除了注入还原气体之外,将臭氧气体注入到塔中持续预定的时间段。

    Mask inspection apparatus, mask inspection method, and electron beam exposure system
    106.
    发明授权
    Mask inspection apparatus, mask inspection method, and electron beam exposure system 有权
    掩模检查装置,掩模检查方法和电子束曝光系统

    公开(公告)号:US07394068B2

    公开(公告)日:2008-07-01

    申请号:US11235727

    申请日:2005-09-26

    IPC分类号: H01L21/66

    摘要: A mask inspection apparatus includes: an electron gun for generating an electron beam; an exposure mask for shaping the electron beam into a predetermined cross-sectional shape; means for scanning the electron beam shaped by the exposure mask; means for selecting and transmitting part of the shaped electron beam, which selecting means includes a thin film having a small transmission aperture transmitting the electron beam scanned by the scanning means and includes a thick substrate having an opening larger than the small transmission aperture and a thickness greater than that of the thin film; and means for detecting the electron beam passed through the selecting means and outputting a current signal. The detecting means includes: a reflective body for reflecting the electron beam selected by the selecting means; and a detector for detecting the electron beam reflected by the reflective body.

    摘要翻译: 掩模检查装置包括:用于产生电子束的电子枪; 用于将电子束成形为预定横截面形状的曝光掩模; 用于扫描由曝光掩模形成的电子束的装置; 用于选择和传送部分成形电子束的装置,该选择装置包括具有传输由扫描装置扫描的电子束的小透射孔的薄膜,并且包括具有大于小透射孔的开口的厚基底和厚度 大于薄膜; 以及用于检测通过选择装置的电子束并输出电流信号的装置。 检测装置包括:用于反射由选择装置选择的电子束的反射体; 以及用于检测由反射体反射的电子束的检测器。

    Method of Fabricating an Integrated Circuit with Gate Self-Protection, and an Integrated Circuit with Gate Self-Protection
    108.
    发明申请
    Method of Fabricating an Integrated Circuit with Gate Self-Protection, and an Integrated Circuit with Gate Self-Protection 有权
    具有栅极自保护的集成电路的制造方法以及具有栅极自保护的集成电路

    公开(公告)号:US20070057281A1

    公开(公告)日:2007-03-15

    申请号:US11470760

    申请日:2006-09-07

    IPC分类号: H01L29/74

    摘要: An integrated circuit with gate self-protection comprises a MOS device and a bipolar device, wherein the integrated circuit further comprises a semiconductor layer with electrically active regions in which and on which the MOS device and the bipolar device are formed and electrically inactive regions for isolating the electrically active regions from each other. The MOS device comprises a gate structure and a body contacting structure, wherein the body contacting structure is formed of a base layer deposited in a selected region over an electrically active region of the semiconductor layer, and the body contacting structure is electrically connected with the gate structure. The base layer forming the body contacting structure also forms the base of the bipolar device. The present invention further relates to a method for fabricating such an integrated circuit.

    摘要翻译: 具有栅极自保护的集成电路包括MOS器件和双极器件,其中所述集成电路还包括具有电活性区域的半导体层,在其上形成MOS器件和双极器件,并且在其上形成用于隔离的电无活性区域 电活性区域彼此。 MOS器件包括栅极结构和体接触结构,其中所述体接触结构由沉积在所述半导体层的电活性区域上的选定区域中的基底层形成,并且所述体接触结构与所述栅极电连接 结构体。 形成身体接触结构的基层也形成双极器件的基部。 本发明还涉及一种用于制造这种集成电路的方法。

    Communication terminal equipment and call incoming control method
    109.
    再颁专利
    Communication terminal equipment and call incoming control method 有权
    通信终端设备和呼叫控制方式

    公开(公告)号:USRE39231E1

    公开(公告)日:2006-08-08

    申请号:US09998426

    申请日:2001-11-30

    IPC分类号: H04Q7/20 H04Q7/32 H04Q7/38

    摘要: In a communication terminal equipment and in a method of controlling call incoming, unnecessary noises in a period from the start of an alert sound to carrying out of the next operation can be reduced. When a predetermined operation is effected under the condition that an alert sound is ringing, the alert sound is stopped or the volume of the alert sound is reduced at least over a duration of call incoming. Thus, such a fear that persons in the surroundings may be troubled by the continuous ringing of the alert sound can be remarkably reduced. Further, since the situation that a power supply is cut off forcibly during all origination can be avoided, the fear that a person on the call origination side may be given an unpleasant feeling can be eliminated.

    摘要翻译: 在通信终端设备和控制呼叫的方法中,可以减少从警报声音开始到执行下一个操作的时间段中的不必要的噪声。 当在警报声响起的条件下进行预定操作时,至少在呼叫持续时间内停止警报声音或警报声音的音量减少。 因此,可以显着地减少周围的人可能因警报声的持续振铃而困扰的恐惧。 此外,由于可以避免在全部发送期间强制切断电源的情况,所以可以消除呼叫发起侧的人受到不愉快感的担心。