公开(公告)号：US07105815B2

公开(公告)日：2006-09-12

申请号：US11020255

申请日：2004-12-27

Applicant: Kenji Obara ,  Toshifumi Honda ,  Toshiro Kubo

Inventor： Kenji Obara ,  Toshifumi Honda ,  Toshiro Kubo

IPC: G01N23/00 ,  G21K7/00

CPC classification number: H01J37/28 ,  H01J37/241 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/2809 ,  H01J2237/2817

Abstract: To acquire defect images even when a defect exists below an optically transparent film, an electron optical system of an electron microscope is set to a first imaging condition. A defect position of a specimen is set so as to fall within the visual field of the electron microscope, using position data of a defect of the specimen. The position of the defect is imaged by the electron microscope set to the first imaging condition to obtain a first image corresponding to the defect position. The first image is processed to determine whether a defect exists. The electron optical system is then set to a second imaging condition on the basis of the result of determination. A point imaged under the first imaging condition is imaged by the electron microscope set to the second imaging condition to acquire a second image corresponding to a defect position.

Abstract translation: 为了获得缺陷图像，即使当缺陷存在于光学透明膜下方时，将电子显微镜的电子光学系统设置为第一成像条件。 使用试样的缺陷的位置数据，将试样的缺陷位置设定为落入电子显微镜的视野内。 通过设置为第一成像条件的电子显微镜对缺陷的位置成像，以获得对应于缺陷位置的第一图像。 处理第一个图像以确定是否存在缺陷。 然后基于确定的结果将电子光学系统设置为第二成像条件。 在第一成像条件下成像的点通过设置为第二成像条件的电子显微镜成像，以获得对应于缺陷位置的第二图像。

公开(公告)号：US20060087244A1

公开(公告)日：2006-04-27

申请号：US11259549

申请日：2005-10-25

Applicant: Kenneth Regan

Inventor： Kenneth Regan

IPC: H01J7/24

CPC classification number: H01J37/3171 ,  H01J27/026 ,  H01J37/08 ,  H01J37/241 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/0206 ,  H01J2237/0812 ,  H02H7/003

Abstract: In an ion bean acceleration system, transient electrical arc suppression and ion beam accelerator biasing circuitry. Two-terminal circuitry, connectable in series, for suppressing arcs by automatically sensing arc conditions and switch from at least a first operating state providing a relatively low resistance electrical pathway for current between source and load terminals to at least a second, relatively high resistance electrical pathway. Selection of circuit component characteristics permits controlling the delay in returning from the second state to the first state after the arc has been suppressed.

Abstract translation: 在离子豆加速系统中，瞬态电弧抑制和离子束加速器偏置电路。 两端子电路，可串联连接，用于通过自动感测电弧条件并从至少第一工作状态切换来抑制电弧，从而提供用于源极和负载端子之间的电流的相对较低电阻的电路，至少第二相对高电阻的电 途径。 选择电路元件特性允许控制在电弧被抑制之后从第二状态返回到第一状态的延迟。

公开(公告)号：US5610452A

公开(公告)日：1997-03-11

申请号：US445827

申请日：1995-05-22

Applicant: Daniel W. Shimer ,  Arnold C. Lange

Inventor： Daniel W. Shimer ,  Arnold C. Lange

IPC: H01J37/248 ,  H01J37/24 ,  H01L21/027 ,  H02H7/00 ,  H02J1/00 ,  H02M3/28 ,  H02M3/337 ,  H02M7/08 ,  H02M7/12 ,  H02M7/537

CPC classification number: H01J37/241 ,  H02H7/00 ,  H02M3/3376 ,  Y10T307/582 ,  Y10T307/707

Abstract: A high power, solid state power supply is described for producing a controllable, constant high voltage output under varying and arcing loads suitable for powering an electron beam gun or other ion source. The present power supply is most useful for outputs in a range of about 100-400 kW or more. The power supply is comprised of a plurality of discrete switching type dc-dc converter modules, each comprising a voltage regulator, an inductor, an inverter for producing a high frequency square wave current of alternating polarity, an improved inverter voltage clamping circuit, a step up transformer, and an output rectifier for producing a dc voltage at the output of each module. The inputs to the converter modules are fed from a common dc rectifier/filter and are linked together in parallel through decoupling networks to suppress high frequency input interactions. The outputs of the converter modules are linked together in series and connected to the input of the transmission line to the load through a decoupling and line matching network. The dc-dc converter modules are phase activated such that for n modules, each module is activated equally 360.degree./n out of phase with respect to a successive module. The phased activation of the converter modules, combined with the square current waveforms out of the step up transformers, allows the power supply to operate with greatly reduced output capacitance values which minimizes the stored energy available for discharge into an electron beam gun or the like during arcing. The present power supply also provides dynamic response to varying loads by controlling the voltage regulator duty cycle using simulated voltage feedback signals and voltage feedback loops. Circuitry is also provided for sensing incipient arc currents reflected at the output of the power supply and for simultaneously decoupling the power supply circuitry from the arcing load.

Abstract translation: 描述了一种高功率固态电源，用于在适于为电子束枪或其他离子源供电的变化和电弧负载下产生可控的恒定高压输出。 目前的电源对于在约100-400kW或更大的范围内的输出是最有用的。 电源由多个分立开关型DC-DC转换器模块组成，每个模块包括电压调节器，电感器，用于产生交流极性的高频方波电流的逆变器，改进的逆变器电压钳位电路，步骤 以及用于在每个模块的输出处产生直流电压的输出整流器。 转换器模块的输入从公共直流整流器/滤波器馈送，并通过去耦网络并联在一起，以抑制高频输入相互作用。 转换器模块的输出串联在一起，并通过去耦和线路匹配网络连接到传输线的输入端到负载。 DC-DC转换器模块被相位激活，使得对于n个模块，每个模块相对于连续模块同步360°/ n异相激活。 转换器模块的分阶段激活与升压变压器之间的平方电流波形相结合，允许电源以大大降低的输出电容值运行，这使得可用于放电到电子束枪等中的存储能量最小化 电弧 目前的电源还通过使用模拟电压反馈信号和电压反馈回路控制电压调节器占空比来提供对变化负载的动态响应。 还提供电路用于感测在电源的输出处反射的初始电弧电流，并且同时将电源电路与电弧负载分离。

公开(公告)号：US5566060A

公开(公告)日：1996-10-15

申请号：US445826

申请日：1995-05-22

Applicant: Daniel W. Shimer ,  Arnold C. Lange

Inventor： Daniel W. Shimer ,  Arnold C. Lange

IPC: H01J37/248 ,  H01J37/24 ,  H01L21/027 ,  H02H7/00 ,  H02J1/00 ,  H02M3/28 ,  H02M3/337 ,  H02M7/08 ,  H02M7/12 ,  H02M7/537

CPC classification number: H01J37/241 ,  H02H7/00 ,  H02M3/3376 ,  Y10T307/582 ,  Y10T307/707

Abstract: A high-power power supply produces a controllable, constant high voltage put under varying and arcing loads. The power supply includes a voltage regulator, an inductor, an inverter for producing a high frequency square wave current of alternating polarity, an improved inverter voltage clamping circuit, a step up transformer, an output rectifier for producing a dc voltage at the output of each module, and a current sensor for sensing output current. The power supply also provides dynamic response to varying loads by controlling the voltage regulator duty cycle and circuitry is provided for sensing incipient arc currents at the output of the power supply to simultaneously decouple the power supply circuitry from the arcing load. The power supply includes a plurality of discrete switching type dc--dc converter modules.

Abstract translation: 大功率电源在变化和电弧负载下产生可控的恒定高压输出。 电源包括电压调节器，电感器，用于产生交流极性的高频方波电流的逆变器，改进的逆变器电压钳位电路，升压变压器，用于在每个输出端产生直流电压的输出整流器 模块和用于感测输出电流的电流传感器。 电源还通过控制电压调节器占空比提供对变化负载的动态响应，并且提供用于感测电源输出端处的初始电弧电流的电路，以同时将电源电路与电弧负载分离。 电源包括多个分立开关型dc-dc转换器模块。

公开(公告)号：US4095083A

公开(公告)日：1978-06-13

申请号：US491556

申请日：1974-07-24

Applicant: Boris Grigorievich Sokolov ,  Georgy Fomich Zaboronok

Inventor： Boris Grigorievich Sokolov ,  Georgy Fomich Zaboronok

IPC: B23K15/02 ,  H01J37/24 ,  B23K15/00

CPC classification number: B23K15/02 ,  H01J37/241

Abstract: An electron-beam apparatus for thermal treatment by electron bombardment, comprising a power supply, a vacuum chamber accomodating an object being treated, an electron gun including a cathode which is the source of an electron flow and an accelerating electrode which, together with the cathode, forms the electron flow into an electron beam directed to the object being treated, and a supplementary source of accelerating voltage, one leadout which is connected to the cathode and the other leadout is coupled to the accelerating electrode, the cathode and the accelerating electrode being electrically insulated from each other and from the object being treated, and the power supply has one of its leadouts connected to the cathode and the other leadout connected to the object being treated.

Abstract translation: 一种用于通过电子轰击进行热处理的电子束装置，包括电源，容纳被处理物体的真空室，包括作为电子流源的阴极的电子枪和加速电极，与阴极 形成电子流向被引导到被处理物体的电子束，以及辅助加速电压源，其一个引出线连接到阴极，而另一个引出端耦合到加速电极，阴极和加速电极 彼此电绝缘并且与被处理物体电绝缘，并且电源具有连接到阴极的引线中的一个和连接到被处理物体的另一引出线。

公开(公告)号：US4000423A

公开(公告)日：1976-12-28

申请号：US529629

申请日：1974-12-05

Applicant: George Sargent Janes ,  Leonard N. Litzenberger ,  Donald F. Twombly

Inventor： George Sargent Janes ,  Leonard N. Litzenberger ,  Donald F. Twombly

IPC: B01D59/34 ,  C23C14/54 ,  H01J37/24 ,  H01J37/305 ,  B23K9/00 ,  C08J1/02 ,  H01J27/00

CPC classification number: C23C14/54 ,  B01D59/34 ,  H01J37/241 ,  H01J37/3053

Abstract: An electron beam vapor source for use in laser enrichment of uranium and providing fast response intermittent vaporization to permit interruption of the enrichment process without wasting vapor or requiring long term reheating.

Abstract translation: 用于激光富集铀的电子束蒸气源，并提供快速反应间歇蒸发，以允许中断富集过程，而不浪费蒸气或需要长期再加热。

公开(公告)号：US3921078A

公开(公告)日：1975-11-18

申请号：US40991873

申请日：1973-10-26

Applicant: JEOL LTD

Inventor： AIHARA RYUZO ,  OTA SUSUMU ,  KOBAYASHI NOBUYUKI

IPC: G01Q20/00 ,  H01J37/073 ,  H01J37/24 ,  H02H7/20 ,  H02H7/09 ,  H01J37/285

CPC classification number: H01J37/241 ,  H01J37/073 ,  H02H7/20

Abstract: This invention relates to a field emission type electron gun capable of protecting the emitter tip from damage when electrical breakdown occurs in the gun chamber. The preferred embodiments incorporate circuitry for decreasing the impedance between the emitter and its associated electrode when electrical breakdown occurs.

Abstract translation: 本发明涉及一种场致发射型电子枪，能够在枪室发生电击穿时保护发射极尖免受损坏。 优选的实施例结合电路，用于当发生电击穿时减小发射极及其相关电极之间的阻抗。

公开(公告)号：US3810025A

公开(公告)日：1974-05-07

申请号：US24523272

申请日：1972-04-18

Applicant: JEOL LTD

Inventor： AIHARA R ,  OTA S ,  KOBAYASHI N

IPC: H01J3/02 ,  H01J37/073 ,  H01J37/24 ,  H02H7/20

CPC classification number: H01J37/241 ,  H01J3/021 ,  H01J37/073 ,  H02H7/20

Abstract: This invention relates to a field emission type electron gun capable of protecting the emitter tip from damage when electrical breakdown occurs in the gun chamber. The preferred embodiments incorporate circuitry for decreasing the impedance between the emitter and its associated electrode when electrical breakdown occurs.

Abstract translation: 本发明涉及一种场致发射型电子枪，能够在枪室发生电击穿时保护发射极尖免受损坏。 优选的实施例结合电路，用于当发生电击穿时减小发射极及其相关电极之间的阻抗。

公开(公告)号：US3767927A

公开(公告)日：1973-10-23

申请号：US3767927D

申请日：1971-08-25

Applicant: PHILIPS CORP

Inventor： RUS P ,  LE POOLE J ,  KRAMER J

IPC: G01T1/29 ,  H01J37/04 ,  H01J37/147 ,  H01J37/24 ,  H01J37/26

CPC classification number: H01J37/241 ,  G01T1/29 ,  H01J37/04 ,  H01J37/147

Abstract: A high-voltage electron microscope is provided with a double focussing bending magnet for stabilizing the beam velocity. The beam path between an entrance diaphragm in front of the magnet and an image produced by the bending magnet of this diaphragm on the exit side of the magnet are used as a reference for the signal to be detected on the output side of the bending magnet. Near this image, a detector device is provided which intercepts a fraction of from 1 to 10 percent of the beam from which it derives a control signal for the high voltage.

Abstract translation: 高压电子显微镜设有双重聚焦弯曲磁体，用于稳定光束速度。 作为在磁体的输出侧检测信号的基准，将磁体前方的入射光阑和由该光阑的弯曲磁体产生的图像在磁体的出射侧的光束路径作为基准。 在该图像附近，提供了一种检测器装置，其拦截了从其导出高电压控制信号的光束的1％至10％的一部分。

公开(公告)号：US3609200A

公开(公告)日：1971-09-28

申请号：US3609200D

申请日：1970-07-23

Applicant: AIR REDUCTION

Inventor： ANDERSON EMMETT R

IPC: H01J37/24 ,  H02M1/08 ,  H05B7/00

CPC classification number: H01J37/241 ,  H02M1/081

Abstract: A power supply is described for use with an electron gun employed in an electron beam furnace system. The power supply includes a transformer and a rectifier connecting the secondary of the transformer to the electron beam gun for supplying current thereto. The power supply also includes a semiconductor-switching circuit connected to the primary of the transformer for supplying current to the primary. The switching circuit is controlled by a pulsing circuit, and a trigger circuit is controlled by a pulsing circuit, and a trigger circuit is connected to the pulsing circuit and to means for sensing a rise in current to the electron gun in the presence of an arc. Upon the sensing of such rise in current, the trigger circuit disables the pulsing circuit to thereby render the switching circuit inoperative and cut off current to the electron beam gun.