公开(公告)号：US20210013258A1

公开(公告)日：2021-01-14

申请号：US16908462

申请日：2020-06-22

Applicant: Applied Materials, Inc.

Inventor： Mingwei Zhu ,  Sivapackia Ganapathiappan ,  Boyi Fu ,  Hou T. Ng ,  Nag B. Patibandla

IPC: H01L27/15 ,  H01L33/00 ,  H01L21/683 ,  H01L23/00 ,  H01L21/66 ,  H01L33/48

Abstract: An apparatus for positioning micro-devices on a substrate includes one or more supports to hold a donor substrate and a destination substrate, an adhesive dispenser to deliver adhesive on micro-devices on the donor substrate, a transfer device including a transfer surface to transfer the micro-devices from the donor substrate to the destination substrate, and a controller. The controller is configured to operate the adhesive dispenser to selectively dispense the adhesive onto selected micro-devices on the donor substrate based on a desired spacing of the selected micro-devices on the destination substrate. The controller is configured to operate the transfer device such that the transfer surface engages the adhesive on the donor substrate to cause the selected micro-devices to adhere to the transfer surface and the transfer surface then transfers the selected micro-devices from the donor substrate to the destination substrate

公开(公告)号：US10882111B2

公开(公告)日：2021-01-05

申请号：US15212098

申请日：2016-07-15

Applicant: Applied Materials, Inc.

Inventor： Hou T. Ng ,  Nag B. Patibandla ,  Ajey M. Joshi ,  Bharath Swaminathan ,  Ashavani Kumar ,  Eric Ng ,  Bernard Frey ,  Kasiraman Krishnan

IPC: B22F3/10 ,  B22F3/105 ,  B33Y10/00 ,  B29C64/153 ,  B33Y50/02 ,  B22F1/00 ,  B22F3/00 ,  B33Y30/00

Abstract: Additive manufacturing includes successively forming a plurality of layers on a support. Depositing a layer from the plurality of layers includes dispensing first particles, selectively dispensing second particles in selected regions corresponding to a surface of the object, and fusing at least a portion of the layer. The layer has the first particles throughout and the second particles in the selected regions. Alternatively or in addition, forming the plurality of layers includes depositing multiple groups of layers. Depositing a group of layers includes, for each layer in the group of layers dispensing a feed material to provide the layer, and after dispensing the feed material and before dispensing a subsequent layer fusing a selected portion of the layer. After all layers in the group of layers are dispensed, a volume of the group of layers that extends through all the layers in the group of layers is fused.

公开(公告)号：US10773509B2

公开(公告)日：2020-09-15

申请号：US15452053

申请日：2017-03-07

Applicant: Applied Materials, Inc.

Inventor： Hou T. Ng ,  Nag B. Patibandla ,  Rajeev Bajaj ,  Daniel Redfield ,  Ashwin Chockalingam ,  Mayu Yamamura ,  Mario Cornejo

IPC: B33Y10/00 ,  G03F7/00 ,  G03F7/20 ,  B33Y30/00 ,  B33Y80/00 ,  B24B37/22 ,  B29K105/00

Abstract: A method and apparatus for manufacturing polishing articles used in polishing processes are provided. In one implementation, a method of forming a polishing pad is provided. The method comprises depositing an uncured first layer of a pad forming photopolymer on a substrate. The method further comprises positioning a first optical mask over the first layer of the uncured pad forming photopolymer. The first optical mask includes a patterned sheet of material having at least one aperture. The method further comprises exposing the uncured first layer of the pad forming photopolymer to electromagnetic radiation to selectively polymerize exposed portions of the uncured first layer of the pad forming photopolymer to form pad-supporting structures within the first layer of pad forming photopolymer.

公开(公告)号：US10730240B2

公开(公告)日：2020-08-04

申请号：US15811533

申请日：2017-11-13

Applicant: Applied Materials, Inc.

Inventor： Hou T. Ng ,  Nag B. Patibandla ,  Ajey M. Joshi ,  Raanan Zehavi ,  Jeffrey L. Franklin ,  Kashif Maqsood

IPC: B29C64/268 ,  B29C64/135 ,  B22F3/105 ,  B23K26/082 ,  B33Y10/00 ,  B28B1/00 ,  B33Y30/00 ,  B29C64/153 ,  B29C64/245 ,  B29C64/205 ,  B29C64/209 ,  B29C64/277 ,  B29C64/273 ,  G02B26/12 ,  G02B26/08 ,  B29C64/295

Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense a plurality of layers of feed material on a top surface of the platform, and an energy delivery system. The energy deliver system includes a light source to emit a light beam, and a reflective member having a plurality of reflective facets. The reflective member is positioned in a path of the light beam to receive the light beam and redirect the light beam toward the top surface of the platform to deliver energy to an uppermost layer of the layers of feed material to fuse the feed material. The reflective member is rotatable such that sequential facets sweep the light beam sequentially along a path on the uppermost layer.

公开(公告)号：US10322574B2

公开(公告)日：2019-06-18

申请号：US15266420

申请日：2016-09-15

Applicant: Applied Materials, Inc.

Inventor： Hou T. Ng ,  Raanan Zehavi ,  Nag B. Patibandla

IPC: B33Y30/00 ,  B29C64/153 ,  B29C64/20

Abstract: An apparatus includes a platen and a dispensing system overlying the platen. The dispensing system includes a powder source. The dispensing system further includes a powder conveyor extending over the top surface of the platen, rings arranged coaxially along a longitudinal axis of the powder conveyor, and a cap plate extending along a length of the tube. The powder conveyor is configured to receive powder from the powder source. The powder conveyor is configured to move the powder. The rings form a tube surrounding the powder conveyor to contain the powder. Each concentric ring includes a ring opening. Each ring is configured to be independently rotatable. The cap plate includes a cap plate opening. The powder is dispensed from the tube through the ring opening and the cap plate opening when the ring opening and the cap plate opening are aligned.

公开(公告)号：US20190111484A1

公开(公告)日：2019-04-18

申请号：US16206986

申请日：2018-11-30

Applicant: Applied Materials, Inc.

Inventor： Bharath Swaminathan ,  Eric Ng ,  Nag B. Patibandla ,  Hou T. Ng ,  Ashavani Kumar ,  Ajey M. Joshi ,  Bernard Frey ,  Kasiraman Krishnan

IPC: B22F3/105 ,  B29C64/20 ,  B33Y30/00

Abstract: An additive manufacturing system includes a platen having a top surface to support an object being manufactured, a dispenser to deliver a plurality of successive layers of precursor material over the platen, a plurality of lamps disposed below the top surface of the platen to heat the platen, and an energy source to fuse at least some of the outermost layer of precursor material.

公开(公告)号：US20180079152A1

公开(公告)日：2018-03-22

申请号：US15494302

申请日：2017-04-21

Applicant: Applied Materials, Inc.

Inventor： Hou T. Ng ,  Nag B. Patibandla ,  Sivapackia Ganapathiappan

IPC: B29C67/00 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  B24D18/00

CPC classification number: G01B11/0608 ,  B24B37/20 ,  B24B37/245 ,  B24B37/26 ,  B24D18/009 ,  B29C64/112 ,  B29C64/129 ,  B29C64/277 ,  B29C64/386 ,  B29L2031/736 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y40/00 ,  B33Y80/00 ,  G01N2015/1075 ,  G01N2015/1493

Abstract: An additive manufacturing apparatus for forming a polishing pad for chemical mechanical polishing includes a platform, an actuator system coupled to the platform to adjust a tilt of the platform, one or more printheads supported above the platform, the one or more printheads configured to dispense successive layers of feed material on the platform to be form the polishing pad, a sensing system to detect a height of a surface on or above the platform at each of a plurality of horizontally spaced points, and a controller configured to selectively operate the actuator system to adjust the tilt of the platform based on the detected height of the platform at each of the points such that the surface is moved closer to horizontal.

公开(公告)号：US20170203363A1

公开(公告)日：2017-07-20

申请号：US15324672

申请日：2015-07-08

Applicant: APPLIED MATERIALS ,INC.

Inventor： Christopher A. Rowland ,  Anantha K. Subramani ,  Kasiraman Krishnan ,  Kartik Ramaswamy ,  Thomas B. Brezoczky ,  Swaminathan Srinivasan ,  Jennifer Y. Sun ,  Simon Yavelberg ,  Srinivas D. Nemani ,  Nag B. Patibandla ,  Hou T. Ng

IPC: B22F3/00 ,  B33Y10/00 ,  H05B3/00 ,  B33Y50/02 ,  B23K10/02 ,  B23K10/00 ,  B28B1/00 ,  B33Y30/00

CPC classification number: B22F3/008 ,  B22F2003/1051 ,  B22F2003/1057 ,  B22F2998/10 ,  B23K10/006 ,  B23K10/027 ,  B28B1/001 ,  B29C64/153 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  H05B3/0061

Abstract: An additive manufacturing system that includes a platen, a feed material delivery system configured to deliver feed material to a location on the platen specified by a computer aided design program and a heat source configured to raise a temperature of the feed material simultaneously across all of the layer or across a region that extends across a width of the platen and scans the region across a length of the platen. The heat source can be an array of heat lamps, or a plasma source.

公开(公告)号：US20170072467A1

公开(公告)日：2017-03-16

申请号：US15268176

申请日：2016-09-16

Applicant: Applied Materials, Inc.

Inventor： Raanan Zehavi ,  Hou T. Ng ,  Nag B. Patibandla

IPC: B22F3/105 ,  B33Y30/00 ,  B33Y10/00

CPC classification number: B22F3/1055 ,  B22F2003/1056 ,  B22F2003/1058 ,  B22F2003/1059 ,  B29C64/153 ,  B29C64/40 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  Y02P10/24 ,  Y02P10/295

Abstract: An apparatus for forming an object includes a platform and a dispensing system overlying the platform to dispense successive layers of powder. The successive layers include support layers and object layers on the support layers. The apparatus further includes an energy source to fuse the powder. A controller is configured to cause the energy source to fuse a support region of each of the support layers to form a part support base. The controller is further configured to cause the energy source to fuse an enclosure region of each of the object layers to form an enclosure dividing each of the object layers into an inner region and outer region. The controller is also configured to cause the energy source to fuse an object portion of the inner region of each of the object layers. A parallel projection of the object defines a part area contained within the inner region.

Abstract translation: 用于形成物体的装置包括平台和覆盖平台的分配系统以分配连续的粉末层。 连续的层包括支撑层和支撑层上的物体层。 该装置还包括熔化粉末的能源。 控制器被配置为使能源熔化每个支撑层的支撑区域以形成部件支撑基座。 控制器还被配置成使能源熔化每个物体层的外壳区域，以形成将每个物体层分成内部区域和外部区域的外壳。 控制器还被配置为使能量源融合每个对象层的内部区域的对象部分。 物体的平行投影限定了包含在内部区域内的部分区域。

公开(公告)号：US20170072466A1

公开(公告)日：2017-03-16

申请号：US15267772

申请日：2016-09-16

Applicant: Applied Materials, Inc.

Inventor： Raanan Zehavi ,  Hou T. Ng ,  Nag B. Patibandla

IPC: B22F3/105 ,  B33Y10/00 ,  B33Y30/00 ,  B23K26/144 ,  B28B1/00 ,  B23K26/342 ,  B23K26/70 ,  B23K26/08 ,  B29C67/00 ,  B33Y50/02

CPC classification number: B22F3/1055 ,  B22F2003/1057 ,  B22F2003/1059 ,  B22F2999/00 ,  B23K15/0086 ,  B23K15/0093 ,  B23K26/03 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/144 ,  B23K26/147 ,  B23K26/342 ,  B23K26/702 ,  B28B1/001 ,  B29C64/153 ,  B29C64/20 ,  B29C64/245 ,  B29C64/357 ,  B29C64/40 ,  B29K2105/251 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y40/00 ,  Y02P10/24 ,  Y02P10/295 ,  B22F2003/1058 ,  B22F2207/20

Abstract: An apparatus for forming an object includes a platform to support the object. The platform includes a first support plate including first holes and a second support plate arranged below the first support plate and including second holes. The second support plate is movable relative to the first support plate between an aligned configuration and a misaligned configuration. The apparatus further includes a dispensing system overlying the support plate to dispense a powder over the top surface of the first support plate and an energy source to apply energy to the powder dispensed on the top surface of the first support plate to form a fused portion of the powder. In the aligned configuration, the first holes are aligned with the second holes such that unfused powder can pass through the first holes into the second holes. In the misaligned configuration, the first holes are misaligned with the second holes.

Abstract translation: 用于形成物体的装置包括用于支撑物体的平台。 平台包括第一支撑板和第二支撑板，第一支撑板包括第一孔和布置在第一支撑板下方并包括第二孔的第二支撑板。 第二支撑板可以在对准构型和不对准构型之间相对于第一支撑板移动。 该设备还包括一个分配系统，该分配系统覆盖在支撑板上以将粉末分配在第一支撑板的顶表面上，并且能量源将能量施加到分配在第一支撑板的顶表面上的粉末，以形成熔融部分 粉末。 在对准构造中，第一孔与第二孔对准，使得未熔化的粉末可以穿过第一孔进入第二孔。 在不对准配置中，第一个孔与第二个孔不对齐。