公开(公告)号：US20050151963A1

公开(公告)日：2005-07-14

申请号：US10758696

申请日：2004-01-14

申请人： Sandeep Pulla ,  Homer Eaton

发明人： Sandeep Pulla ,  Homer Eaton

IPC分类号： G01B21/04 ,  G06T7/00 ,  G01B11/26

CPC分类号： G06T11/60 ,  G01B9/02023 ,  G01B9/02029 ,  G01B9/0203 ,  G01B9/02031 ,  G01B9/0205 ,  G01B21/02 ,  G01B21/04 ,  G06T7/73 ,  G06T2207/20221

摘要： A system and methods for transprojection of geometry data acquired by a coordinate measuring machine (CMM). The CMM acquires geometry data corresponding to 3D coordinate measurements collected by a measuring probe that are transformed into scaled 2D data that is transprojected upon various digital object image views captured by a camera. The transprojection process can utilize stored image and coordinate information or perform live transprojection viewing capabilities in both still image and video modes.

摘要翻译： 用坐标测量机（CMM）获取的几何数据投影的系统和方法。 CMM获取对应于由测量探针收集的3D坐标测量数据的几何数据，该几何数据被转换成经相机拍摄的各种数字对象图像视图上投影的缩放2D数据。 投影过程可以利用存储的图像和坐标信息，或者在静止图像和视频模式下执行实时的投影观察功能。

公开(公告)号：US20050046863A1

公开(公告)日：2005-03-03

申请号：US10652903

申请日：2003-08-29

申请人： James Millerd ,  Neal Brock ,  John Hayes ,  James Wyant

发明人： James Millerd ,  Neal Brock ,  John Hayes ,  James Wyant

IPC分类号： G01B9/02 ,  G01J9/02

CPC分类号： G01B9/02022 ,  G01B9/02023 ,  G01B9/02024 ,  G01B9/02038 ,  G01B9/02057 ,  G01B9/02081 ,  G01B9/02097 ,  G01B2290/30 ,  G01B2290/70 ,  G01J9/02

摘要： A polarizing point-diffraction plate is used to produce common-path test and reference wavefronts with mutually orthogonal polarizations from an input wavefront. The common-path test and reference wavefronts are collimated, phase shifted and interfered, and the resulting interferograms are imaged on a detector. The interference patterns are then processed using conventional algorithms to characterize the input light wavefront.

摘要翻译： 偏振点衍射板用于产生具有来自输入波前的相互正交偏振的共路径测试和参考波前。 公共路径测试和参考波前被准直，相移和干扰，并将所得的干涉图成像在检测器上。 然后使用常规算法处理干涉图案以表征输入光波前。

公开(公告)号：US06842254B2

公开(公告)日：2005-01-11

申请号：US10270647

申请日：2002-10-16

申请人： Richard Van Neste ,  Claude Belleville ,  Daniel Pronovost ,  Alain Proulx

发明人： Richard Van Neste ,  Claude Belleville ,  Daniel Pronovost ,  Alain Proulx

IPC分类号： G01B9/02

CPC分类号： G01B9/02012 ,  G01B9/02007 ,  G01B9/02023 ,  G01B9/02081 ,  G01B9/0209 ,  G01B2290/25 ,  G01B2290/45

摘要： An apparatus and a method of measuring an optical path difference in a sensing interferometer. Light from a source is directed in the sensing interferometer. The light reflected from the sensing interferometer is splitted into first and second beams respectively directed into two reference interferometers having optical path differences greater than the coherence length of the source and such that the optical signals are in quadrature. The intensities of the light transmitted by the reference interferometers and recombined light reflected from the reference interferometers are detected for measuring the optical path difference in the sensing interferometer. Additional light sources allow for correction of internal perturbations and absolute measurement of the optical path difference in the sensing interferometer.

摘要翻译： 一种测量感测干涉仪中的光程差的装置和方法。 来自光源的光被引导到感测干涉仪中。 从感测干涉仪反射的光被分裂成分别引导到具有大于源的相干长度的光程差的两个参考干涉仪中的第一和第二光束，并且使得光信号是正交的。 检测由参考干涉仪透射的光的强度和从参考干涉仪反射的复合光，以测量感测干涉仪中的光程差。 附加的光源允许校正内部扰动和传感干涉仪光程差的绝对测量。

公开(公告)号：US06813401B1

公开(公告)日：2004-11-02

申请号：US10069422

申请日：2002-06-11

申请人： Timothy Noel Mills ,  Paul Beard ,  David Delpy

发明人： Timothy Noel Mills ,  Paul Beard ,  David Delpy

IPC分类号： G02B600

CPC分类号： G01B9/02023 ,  G01B2290/25

摘要： A method of forming an interferometer film for an interferometer sensor comprises forming a parylene polymer layer (8) of substantially uniform thickness directly on an interferometer substrate (4;45), the layer forming the interferometer film. Since the interferometer film (8) formed directly onto the surface of the interferometer substrate, there is improved conformity between the two surfaces at the interface between the polymer layer and the substrate and improved uniformity in the thickness of the film.

摘要翻译： 形成用于干涉仪传感器的干涉仪膜的方法包括在干涉仪基板（4; 45）上直接形成基本上均匀厚度的聚对二甲苯聚合物层（8），该层形成干涉仪膜。 由于直接形成在干涉仪基板的表面上的干涉膜（8），因此在聚合物层和基板之间的界面处的两个表面之间的一致性得到改善，并且改善了膜的厚度均匀性。

公开(公告)号：US20040036884A1

公开(公告)日：2004-02-26

申请号：US10451096

申请日：2003-06-18

发明人： Selim M. Unlu ,  Anna Swan ,  Bennett B. Goldberg ,  Stephen Ippolito ,  Lev Moiseev ,  Samuel Lipolf ,  Yunjie Tong

IPC分类号： G01J003/45 ,  G01B009/02

CPC分类号： G01B9/02044 ,  G01B9/02023 ,  G01B9/04 ,  G01N21/4795 ,  G01N21/6458 ,  G01N2021/6417 ,  G01N2021/6441 ,  G02B21/22

摘要： A method and apparatus for performing optical microscopy in one to three dimensions employs a spectral self-interference fluorescent microscopy technique that includes providing at least one fluorescent microscopy sample (220a, 220b), at least one objective lens (201), and a reflecting surface (204). The fluorescent sample is disposed between the objective lens and the reflecting surface, the distance (d1, d2) from the sample to the reflecting surface is several to several tens times an excitation wavelength. Excitation light (216) causes the fluorescent sample to emit light (214), at least a portion (214b) of which is reflected by the reflecting surface. The objective lens collects both the reflected light and the light emitted directly by the fluorescent sample (214a). The direct and reflected light interferences causing spectral oscillations in the emission spectrum. The periodicity and the peak wavelengths of the emission spectrum are then spectroscopically analyzed to determine the optical path length between the fluorescent sample and the reflecting surface.

摘要翻译： 用于在一到三维中执行光学显微镜的方法和装置采用光谱自干涉荧光显微镜技术，其包括提供至少一个荧光显微镜样品（220a，220b），至少一个物镜（201）和反射表面 （204）。 荧光试样配置在物镜与反射面之间，从样品到反射面的距离（d1，d2）为激发波长的数倍〜数十倍。 激发光（216）使得荧光样品发射光（214），其中至少一部分（214b）被反射表面反射。 物镜收集反射光和由荧光样品（214a）直接发射的光。 直接和反射的光干扰导致发射光谱中的光谱振荡。 然后对发射光谱的周期和峰值波长进行光谱分析，以确定荧光样品和反射表面之间的光程长度。

公开(公告)号：US20020015155A1

公开(公告)日：2002-02-07

申请号：US09906817

申请日：2001-07-18

发明人： Ralf-Dieter Pechstedt ,  James Stuart McKenzie ,  Yicheng Lu ,  Arnold Peter Roscoe Harpin

IPC分类号： G01B009/02

CPC分类号： G02B6/423 ,  G01B9/02023 ,  G01B9/02051 ,  G01B9/0209 ,  G01B2290/25 ,  G01B2290/40 ,  G01D5/266 ,  G02B6/4214 ,  G02F1/0121 ,  G02F1/0147 ,  G02F1/0327 ,  G02F1/225 ,  G02F1/2257 ,  G02F2201/126

摘要： An interferometer is integrated on an optical chip. The optical chip is formed on a layer of silicon separated from a substrate by a layer of insulating material. The optical chip includes an integrated fiber connector for connecting the optical chip to one or more optical fibers. The fiber connector includes a groove formed in the substrate for receiving an optical fiber and a waveguide for transmitting light to or from the fiber connector. The waveguide includes rib waveguides formed in the layer of silicon and at least one phase modulator for altering the phase of light traveling along one of the rib waveguides. This arrangement forms an interferometer in which light transmitted along different optical paths can be combined and the effective path length of at least one of the optical paths can be altered by the phase modulator.

摘要翻译： 干涉仪集成在光学芯片上。 光学芯片形成在通过绝缘材料层从衬底分离的硅层上。 光学芯片包括用于将光学芯片连接到一个或多个光纤的集成光纤连接器。 光纤连接器包括形成在基板中的用于接收光纤的槽和用于向光纤连接器传输光的波导。 波导包括形成在硅层中的肋波导和至少一个相位调制器，用于改变沿着肋波导中的一个行进的光的相位。 这种布置形成干涉仪，其中可以组合沿着不同光路传输的光，并且可以通过相位调制器改变至少一个光路的有效路径长度。

公开(公告)号：US6078706A

公开(公告)日：2000-06-20

申请号：US159566

申请日：1998-09-24

申请人： Gregory Nau ,  Dominique M. Dagenais ,  Frank Bucholtz

发明人： Gregory Nau ,  Dominique M. Dagenais ,  Frank Bucholtz

IPC分类号： A61B5/0452 ,  A61B5/0402 ,  A61B5/0456 ,  A61N1/365 ,  A61N1/37 ,  G01B9/02 ,  G01D5/353 ,  G06F9/38

CPC分类号： G01B9/02044 ,  G01B9/02023 ,  G01B9/02067 ,  G01B9/02074 ,  G01B9/0209 ,  G01D5/35303 ,  G01B2290/25

摘要： This invention is a quasi-static fiber pressure sensor using self-referenced interferometry based on a broadband semiconductor source which probes the pressure plate deflection within a Fabry-Perot cavity where phase is demodulated with a dual grating spectrometer providing real-time, high resolution remote measurement of pressure using optical interrogation of a deflecting pressure plate. This technique yields absolute gap measurement in real time over a wide range of gap lengths with nanometer resolution. By tailoring the pressure plate design to cover the range of gaps and deflection that can be resolved, pressure sensing with psi resolution can be obtained in a kpsig pressure range.

摘要翻译： 本发明是使用基于宽带半导体源的自参考干涉测量的准静态光纤压力传感器，其在Fabry-Perot腔室内探测压力板偏转，其中相位用双光栅光谱仪解调，提供实时，高分辨率的远程 使用光学询问偏转压力板测量压力。 该技术在纳米分辨率的宽范围的间隙长度内实时产生绝对间隙测量。 通过调整压板设计以覆盖可以解决的间隙和偏转范围，可以在kpsig压力范围内获得psi分辨率的压力感测。

公开(公告)号：US5891747A

公开(公告)日：1999-04-06

申请号：US456189

申请日：1995-05-30

申请人： John Farah

发明人： John Farah

IPC分类号： G01B9/02 ,  G01D5/26 ,  G01H9/00 ,  G01P15/093 ,  G02B6/02 ,  G02B6/35 ,  G01B11/16

CPC分类号： G01D5/268 ,  G01B9/02023 ,  G01B9/02056 ,  G01H9/004 ,  G01H9/006 ,  G01P15/093 ,  G02B6/02061 ,  G02B6/02066 ,  G02B6/3502 ,  G02B6/3552 ,  G02B6/3566 ,  G02B6/3568 ,  G02B6/357 ,  G02B6/3584

摘要： A method is presented to produce a change in the optical path length in the gap between two single mode optical fibers proportional to the lateral displacement of either fiber end normal to its axis. This is done with the use of refraction or diffraction at the interface between a guiding and non-guiding media to change the direction of propagation of the light in the gap. A method is also presented for laying a waveguide on a cantilever so that the displacement of the tip of the cantilever produces a proportional path length change in the gap by distancing the waveguide from the neutral axis of the cantilever. The fiber is supported as a cantilever or a waveguide is deposited on a micromachined cantilever and incorporated in an interferometer which is made totally on a silicon substrate with the use of integrated-optic technology. A resonant element in the form of a micro-bridge is incorporated in the ridge waveguide and produces a frequency output which is readily digitizeable and immune to laser frequency noise. Finally, monolithic mechanical means for phase modulation are provided on the same sensor substrate. This is done by vibrating the cantilever or micro-bridge either electrically or optically.

公开(公告)号：US5420688A

公开(公告)日：1995-05-30

申请号：US990622

申请日：1992-12-14

申请人： John Farah

发明人： John Farah

IPC分类号： G01B9/02 ,  G01D5/26 ,  G01H9/00 ,  G01P15/093 ,  G02B6/02 ,  G02B6/35 ,  G01B11/16

CPC分类号： G01D5/268 ,  G01B9/02023 ,  G01B9/02056 ,  G01H9/004 ,  G01H9/006 ,  G01P15/093 ,  G02B6/02061 ,  G02B6/02066 ,  G02B6/3502 ,  G02B6/3552 ,  G02B6/3566 ,  G02B6/3568 ,  G02B6/357 ,  G02B6/3584

摘要： A method is presented to produce a change in the optical path length in the gap between two single mode optical fibers proportional to the lateral displacement of either fiber end normal to its axis. This is done with the use of refraction or diffraction at the interface between a guiding and non-guiding media to change the direction of propagation of the light in the gap. A method is also presented for laying a waveguide on a cantilever so that the displacement of the tip of the cantilever produces a proportional path length change in the gap by distancing the waveguide from the neutral axis of the cantilever. The fiber is supported as a cantilever or a waveguide is deposited on a micromachined cantilever and incorporated in an interferometer which is made totally on a silicon substrate with the use of integrated-optic technology. A resonant element in the form of a micro-bridge is incorporated in the ridge waveguide and produces a frequency output which is readily digitizeable and immune to laser frequency noise. Finally, monolithic mechanical means for phase modulation are provided on the same sensor substrate. This is done by vibrating the cantilever or micro-bridge either electrically or optically.

摘要翻译： 提出了一种方法来产生两个单模光纤之间的间隙中的光程长度的变化，该两个单模光纤与光纤端法线与其轴线的横向位移成比例。 这是通过在引导介质和非引导介质之间的界面处使用折射或衍射来改变光在间隙中的传播方向来完成的。 还提出了一种用于将波导铺设在悬臂上的方法，使得悬臂的尖端的位移通过将波导与悬臂的中性轴间隔开而产生间隙中的比例路径长度变化。 光纤作为悬臂支撑，或者波导沉积在微加工悬臂上，并且结合到使用集成光学技术完全在硅衬底上制成的干涉仪中。 微波形式的谐振元件被并入脊形波导中，并产生频率输出，该频率输出容易地可数字化并且不受激光频率噪声的影响。 最后，在相同的传感器基板上提供用于相位调制的单片机械装置。 这是通过电动或光学振动悬臂或微桥来完成的。

公开(公告)号：US4509858A

公开(公告)日：1985-04-09

申请号：US458709

申请日：1983-01-17

申请人： Robert A. Smythe ,  Joachim Bunkenburg ,  Gunnar D. Richardson

发明人： Robert A. Smythe ,  Joachim Bunkenburg ,  Gunnar D. Richardson

IPC分类号： G01B9/02

CPC分类号： G01B9/02023 ,  G01B9/02031

摘要： A linear measurement interferometer 10 with a measurement axis directed toward a surface of a work piece 17 has a light source 11, a detection system 12, and a beam splitter 13 arranged to divide light from the source into test beams 21, 22, and 34 and reference beams 23, 24, and 33 that travel test and reference paths and recombine for detection by the detection system. Beam splitter 13 is arranged on the measurement axis with the work piece surface on one side of the beam splitter and the test beam path straddling the measurement axis on the opposite side of the beam splitter. A test beam retroreflector 25 mounted in the test path on the measurement axis reflects back the test beam from beam splitter 13 and is movable along the measurement axis without causing abbe error. A probe or focusing lens 15 movable along the measurement axis for measuring the work piece surface is interconnected with the test beam retroreflector 25 for movement together to determine a distance moved in measuring the work piece surface. A preferred way of arranging beam splitter 13 on the measurement axis while accommodating a probe is to bore a central aperture 20 in the beam splitter allowing the probe to pass through the beam splitter.

摘要翻译： 具有指向工件17的表面的测量轴的线性测量干涉仪10具有光源11，检测系统12和分束器13，光束分离器13被布置成将来自光源的光分离成测试光束21,22和34 以及参考光束23,24和33，其行进测试和参考路径并重新组合以供检测系统检测。 分束器13布置在测量轴上，其中工件表面在分束器的一侧上，并且测试光束路径跨越分束器的相对侧上的测量轴。 安装在测量轴上的测试路径中的测试光束后向反射器25反射来自分束器13的测试光束，并且可以沿着测量轴线移动而不会产生误差。 可以沿着测量轴线移动以测量工件表面的探针或聚焦透镜15与测试光束后向反射器25互连，以一起移动，以确定在测量工件表面时移动的距离。 在容纳探头的同时将分束器13布置在测量轴上的优选方式是在分束器中钻一个中心孔20，允许探针穿过分束器。