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公开(公告)号:US5376591A
公开(公告)日:1994-12-27
申请号:US895472
申请日:1992-06-08
Applicant: Kazuo Maeda , Noboru Tokumasu , Yuko Nishimoto
Inventor: Kazuo Maeda , Noboru Tokumasu , Yuko Nishimoto
IPC: H01L21/3105 , H01L21/316 , H01L21/02
CPC classification number: H01L21/02164 , H01L21/02271 , H01L21/0228 , H01L21/0234 , H01L21/3105 , H01L21/31662 , Y10S148/118
Abstract: A, method for forming semiconductor device, includes forming an insulating film on a body by chemical vapor deposition, at low temperature raising the temperature of, the body, and exposing the body to plasma gas.
Abstract translation: A,形成半导体器件的方法包括:通过化学气相沉积在体上形成绝缘膜,在低温下使身体的温度升高,并使身体暴露于等离子体气体。
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公开(公告)号:US5324539A
公开(公告)日:1994-06-28
申请号:US949807
申请日:1992-12-16
Applicant: Kazuo Maeda , Noboru Tokumasu , Yuko Nishimoto
Inventor: Kazuo Maeda , Noboru Tokumasu , Yuko Nishimoto
IPC: H01L21/205 , C03B8/04 , C03C17/02 , C23C16/40 , H01L21/31 , H01L21/3105 , H01L21/316 , H01L21/768 , C23C16/00
CPC classification number: H01L21/76801 , C03C17/02 , C23C16/401 , H01L21/3105 , H01L21/31604
Abstract: The present invention provides a method for forming a chemical vapor deposition film which is suitable for an interlevel insulator between Al and Al or an interlevel insulator between Al and a gate, and provides an improved chemical vapor deposition film suitable for mass production. An organic siloxane or alkoxysilane and an alkoxy compound of germanium are mixed in a vapor phase, and reacted with oxygen or ozone to thereby form a thin glass film composed of a two-component system of silicon oxide and germanium oxide on a substrate.
Abstract translation: PCT No.PCT / JP92 / 00467 Sec。 371日期:1992年12月16日 102(e)1992年12月16日的PCT日期1992年4月14日PCT。本发明提供一种形成化学气相沉积膜的方法,其适用于Al和Al之间的层间绝缘体或Al与Al之间的层间绝缘体 并提供适合批量生产的改进的化学气相沉积膜。 将有机硅氧烷或烷氧基硅烷和锗的烷氧基化合物在气相中混合,并与氧或臭氧反应,从而在基板上形成由氧化硅和氧化锗的双组分体系组成的薄玻璃膜。
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公开(公告)号:US5302209A
公开(公告)日:1994-04-12
申请号:US930709
申请日:1992-10-27
Applicant: Kazuo Maeda , Kouichi Ohira , Mitsuo Hirose
Inventor: Kazuo Maeda , Kouichi Ohira , Mitsuo Hirose
IPC: C23C14/56 , C23C16/458 , C23C16/54 , C30B25/12 , C30B25/14 , H01L21/00 , H01L21/205 , H01L21/31 , H01L21/677 , H01L21/68 , C23C16/00
CPC classification number: H01L21/68764 , C23C16/4584 , C23C16/54 , H01L21/67167 , H01L21/67778 , H01L21/68771
Abstract: A continuous type automated apparatus for manufacturing a semiconductor device by forming a film on a wafer by a CVD method. The apparatus moves the wafer while maintaining the wafer at a predetermined temperature, and controls production of individual wafers and formation of multi-layer films of different types. The apparatus includes a wafer holder, a rotary shaft for supporting the wafer holder so that wafer loading surfaces of the wafer holder rotate in a circle within a single plane. A gas dispersion unit is provided separate from the wafer holder and facing the wafer loading surface of the wafer holder. A first pair of contacts are electrically connected to a heater and are mounted on the rotary shaft and a second pair of contacts are connected to a power source are in sliding contact with the first pair of contacts so that the rotation of the rotary shaft is not obstructed. This apparatus is useful as a continuous type automated CVD apparatus.
Abstract translation: PCT No.PCT / JP92 / 00135 Sec。 371日期:1992年10月27日 102(e)日期1992年10月27日PCT提交1992年2月12日PCT公布。 公开号WO92 / 15114 日期:1992年9月3日。一种用于通过CVD方法在晶片上形成薄膜制造半导体器件的连续型自动化装置。 该装置在将晶片保持在预定温度的同时移动晶片,并且控制单个晶片的生产和形成不同类型的多层膜。 该装置包括晶片保持器,用于支撑晶片保持器的旋转轴,使得晶片保持器的晶片加载表面在单个平面内以圆形旋转。 气体分散单元与晶片保持器分离设置并面向晶片保持器的晶片装载表面。 第一对触点电连接到加热器并且安装在旋转轴上,并且连接到电源的第二对触点与第一对触点滑动接触,使得旋转轴的旋转不是 阻碍了 该装置可用作连续型自动化CVD装置。
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公开(公告)号:US4583560A
公开(公告)日:1986-04-22
申请号:US511688
申请日:1983-07-07
Applicant: Takashi Sakai , Kazuo Maeda , Masuo Kawabata , Mituo Kono
Inventor: Takashi Sakai , Kazuo Maeda , Masuo Kawabata , Mituo Kono
Abstract: A tobacco smoke filter includes a corrugated tape-like wrapping which, together with an outer perforated or otherwise air-permeable paper, defines a set of longitudinal grooves. Each of the grooves includes a blocking member, so as to inhibit direct smoke flow through the grooves and promote a ventilation effect. The blocking members in each groove are longitudinally staggered from one groove to the next to simplify the production of the device.
Abstract translation: 烟草烟雾过滤器包括波纹带状包装,其与外部穿孔或其它透气纸一起限定一组纵向凹槽。 每个凹槽包括阻挡构件,以便阻止直接烟雾流过凹槽并促进通风效果。 每个槽中的阻挡构件从一个槽纵向交错到另一个槽,以简化装置的生产。
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公开(公告)号:US4508318A
公开(公告)日:1985-04-02
申请号:US524634
申请日:1983-08-19
Applicant: Kazuo Maeda
Inventor: Kazuo Maeda
CPC classification number: B66D3/22 , B66D1/58 , Y10S254/903
Abstract: An electric hoist includes an electric motor, a driving shaft connected to a rotor shaft of said electric motor, a reduction gear train for transmitting rotation of the driving shaft to a load sheave, and a mechanical brake assembly in the reduction gear train. According to the invention between the driving shaft and the rotor shaft of the motor is arranged an overload safety device comprising a casing fitted through a one-way clutch onto the rotor shaft, a first support member fixed to the rotor shaft, a second support member slidably fitted on the driving shaft, a retainer member fixed to the casing, friction plates respectively arranged between the first and second support members and between the second support member and the retainer member, and dish-shaped springs for urging the retainer member against the first support member, thereby transmitting torque through one of the friction plates in raising a load and through both the friction plates in lowering the load and effecting such a changing-over by means of the one-way clutch. With this arrangement, the electric hoist according to the invention is able to automatically prevent lifting, lowering and dragging a load under overload condition, and enables the once raised load to be securely lowered irrespective of its light or heavy weight.
Abstract translation: 电动葫芦包括电动机,连接到所述电动机的转子轴的驱动轴,用于将驱动轴的旋转传递到负载滑轮的减速齿轮系和减速齿轮系中的机械制动组件。 根据本发明,电动机的驱动轴和转子轴之间布置有过载安全装置,其包括通过单向离合器安装到转子轴上的壳体,固定到转子轴的第一支撑构件,第二支撑构件 可滑动地装配在驱动轴上的固定构件,固定在壳体上的保持构件,分别布置在第一和第二支撑构件之间以及第二支撑构件和保持构件之间的摩擦板,以及盘形弹簧, 从而在提升负载时通过摩擦板中的一个传递扭矩,并且通过两个摩擦板在降低负载并通过单向离合器进行这种转换的同时传递扭矩。 通过这种布置,根据本发明的电动葫芦能够在过载状态下自动地防止起重,下降和拖曳负载,并且使得一旦提高的载荷无论其轻或重量如何都可以牢固地降低。
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公开(公告)号:US4496136A
公开(公告)日:1985-01-29
申请号:US524636
申请日:1983-08-19
Applicant: Kazuo Maeda
Inventor: Kazuo Maeda
CPC classification number: B66D1/58 , B66D3/22 , Y10S254/903
Abstract: A hoist includes a shaft driven by external force, a driving shaft connected to the shaft, a reduction gear train for transmitting rotation of the driving shaft to a load sheave, and a mechanical brake assembly in the reduction gear train. According to the invention in the reduction gear train is arranged an overload safety device comprising a driven gear having a one-way clutch and rotatively driven by the driving shaft and radially inward and outward dual friction plates located between the driven gear and an element of the mechanical brake assembly so as to transmit torque through the radially outward friction plates in winding-up and through both the radially inward and outward friction plates in winding-off. With this arrangement, the electric hoist according to the invention is able to automatically prevent lifting, lowering and dragging a load under overload condition, and enables the once lifted load to be securely lowered irrespective of its light or heavy weight.
Abstract translation: 起重机包括由外力驱动的轴,连接到轴的驱动轴,用于将驱动轴的旋转传递到负载滑轮的减速齿轮系和减速齿轮系中的机械制动组件。 根据本发明,在减速齿轮系中布置有过载安全装置,其包括具有单向离合器的从动齿轮,并由驱动轴和径向向内和向外的双摩擦板驱动,位于从动齿轮和从动齿轮 机械制动器组件,以便在卷绕时通过径向向外的摩擦板传递扭矩,并且通过两个径向向内和向外的摩擦片在绕线时传递扭矩。 通过这种结构,根据本发明的电动葫芦能够在过载状态下自动地防止起重,降低和拖曳负载,并且能够一次提起的负载被牢固地降低,而不管其轻或重量重。
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公开(公告)号:US4233183A
公开(公告)日:1980-11-11
申请号:US9962
申请日:1979-02-06
Applicant: Hideya Inaba , Kenichi Nagai , Yasumi Kamino , Kazuo Maeda
Inventor: Hideya Inaba , Kenichi Nagai , Yasumi Kamino , Kazuo Maeda
CPC classification number: B01J37/024 , B01D53/8628 , B01J35/06 , B01D2251/2062 , B01D2255/102 , B01D2255/207
Abstract: A plate-shaped denitrating catalyst is produced by the steps of preparing a slurry from hydrated titania and a sol selected from the group consisting of silica sol, alumina sol and titania sol, firing the slurry to obtain a porous material, pulverizing the porous material to a powder, causing a metal net to support the powder thereon with a binder to form a plate-like piece, drying or firing the piece to obtain a porous carrier and depositing a catalytically active component on the carrier.
Abstract translation: 通过从水合二氧化钛制备浆料和选自二氧化硅溶胶,氧化铝溶胶和二氧化钛溶胶的溶剂的步骤制备板状脱硝催化剂,烧制浆料以获得多孔材料,将多孔材料粉碎至 粉末,使金属网用粘合剂在其上支撑粉末以形成板状件,干燥或烧制该零件以获得多孔载体并在载体上沉积催化活性成分。
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128.
公开(公告)号:US4081521A
公开(公告)日:1978-03-28
申请号:US683671
申请日:1976-05-05
Applicant: Kousuke Yamamoto , Ahinji Takenaka , Kazuo Maeda
Inventor: Kousuke Yamamoto , Ahinji Takenaka , Kazuo Maeda
IPC: C01B17/66
CPC classification number: C01B17/66
Abstract: A process for continuously producing anhydrous sodium dithionite in the form of large granules which comprises reacting formic acid, sodium formate, sodium hydroxide and sulfurous acid anhydride in hydrous methanol using a multi-stage reaction apparatus, wherein all the required amounts of the formic acid or sodium formate, sodium hydroxide, methanol and water, and at least 60%, based on the required amount, of sulfurous acid anhydride are introduced into a first reactor, and the residence time in the first reactor is adjusted so that the conversion of the sulfurous acid anhydride to anhydrous sodium dithionite is within the range of 25 to 50%; the remainder of the sulfurous acid anhydride is introduced into a second reactor; and the reaction temperature in any given reactor is maintained at a point not lower than the reaction temperature in the immediately preceding reactor.
Abstract translation: 一种连续生产大颗粒形式的无水连二亚硫酸钠的方法,该方法包括使用多级反应装置在甲酸甲酯中使甲酸,甲酸钠,氢氧化钠和亚硫酸酐反应,其中所需的所需量的甲酸或 甲酸钠,氢氧化钠,甲醇和水,并将至少60%的基于所需量的亚硫酸酐引入到第一反应器中,并调节在第一反应器中的停留时间,使得亚硫酸盐的转化率 酸酐至无水连二硫酸钠的含量在25〜50%的范围内; 将剩余的亚硫酸酐引入第二反应器中; 并且任何给定的反应器中的反应温度保持在不低于紧接在前的反应器中的反应温度的点。
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129.
公开(公告)号:US3979241A
公开(公告)日:1976-09-07
申请号:US346095
申请日:1973-03-29
Applicant: Kazuo Maeda , Bunya Matsui
Inventor: Kazuo Maeda , Bunya Matsui
IPC: H01L21/311 , H01L21/3213 , H01L21/60 , H01L21/302 , H01L21/316
CPC classification number: H01L24/80 , H01L21/31111 , H01L21/32134 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01032 , H01L2924/01033
Abstract: An etching liquid comprises ammonium fluoride or alkali fluoride dissolved in a polyvalent or higher alcohol.
Abstract translation: 蚀刻液包含溶解在多元醇或高级醇中的氟化铵或碱金属氟化物。
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