摘要:
A processing apparatus includes: a tank configured to store water; vapor generating unit configured to turn the water supplied from the tank into vapor; a processing chamber in which vapor supplied from the vapor generating unit is used to remove residues from a workpiece; cooling unit; and filtering unit. The cooling unit cools waste liquid ejected from the processing chamber. The filtering unit is provided between the cooling unit and the tank, and the filtering unit filters the waste liquid cooled in the cooling unit. A processing method includes: supplying vapor into a processing chamber; removing residues from a workpiece using the vapor; cooling waste liquid containing the removed residues to precipitate the residues as solids; and filtering the waste liquid containing the precipitates.
摘要:
An illumination apparatus includes a plurality of semiconductor light-emitting devices, a reflective layer, a plurality of conductor parts and a translucent adhesive layer. Each of the semiconductor light-emitting devices has a translucent substrate, and a semiconductor light-emitting layer formed on the substrate. The reflective layer has a size on which semiconductor light-emitting devices are arranged at intervals. The conductor parts are provided on the reflective layer, and electrically connected to the semiconductor light-emitting devices. The adhesive layer bonds the substrates of the semiconductor light-emitting devices onto the reflective layer, and thereby holds the semiconductor light-emitting devices on the reflective layer.
摘要:
In a magnetic refrigerator, a permanent magnet unit shaped like a hub is so rotated as to face an annular magnetic unit having magnetic blocks arranged in a circumferential direction. The permanent magnet unit is also arranged to be concentric with a magnetic unit and has an inner and outer diameters substantially equal to those of the magnetic unit. Each of the magnetic blocks has positive and negative magnetic segments alternately arranged with predetermined gaps. As the permanent magnet unit rotates, heat conducting members are inserted into and removed from the gaps between the magnetic segments of the magnetic block. This allows heat generated from the magnetic segments to conduct in one direction.
摘要:
A magnetic refrigeration material includes: at least one selected from the group consisting of Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm and Tb by a range of 4 to 15 atomic percentages; at least one selected from the group consisting of Fe, Co, Ni, Mn and Cr by a range of 60 to 93 atomic percentages; at least one selected from the group consisting of Si, C, Ge, Al, Ga and In by a range of 2.9 to 23.5 atomic percentages; and at least one selected from the group consisting of Ta, Nb and W by a range of 1.5 atomic percentages or less, wherein the magnetic refrigeration material includes a NaZn13 type crystal structure as a main phase.
摘要:
An alloy is used for production of magnetic refrigeration material particles. The alloy contains La in a range of 4 to 15 atomic %, Fe in a range of 60 to 93 atomic %, Si in a range of 3.5 to 23.5 atomic % and at lease one element M selected from B and Ti in a range of 0.5 to 1.5 atomic %. The alloy includes a main phase containing Fe as a main component element and Si, and a subphase containing La as a main component element and Si. The main phase has a bcc crystal structure and an average grain diameter of 20 μm or less.
摘要:
A polishing cloth used in the chemical mechanical polishing treatment comprises a molded body of (meth)acrylic copolymer having an acid value of 10 to 100 mg KOH/g and a hydroxyl group value of 50 to 150 mg KOH/g.
摘要:
A processing apparatus includes: a processing chamber configured to contain a workpiece; a first nozzle provided in the processing chamber, the first nozzle discharging vapor onto the workpiece; a wall enclosing the processing chamber; a fluid channel provided inside the wall; a fluid inlet; and a fluid outlet. The fluid inlet is provided in communication with the fluid channel. The fluid outlet is provided in communication with the fluid channel, where a fluid flows into the fluid inlet, passes through the fluid channel, and flows out of the fluid outlet. A processing method for processing a workpiece moving in a processing chamber, the processing method includes: discharging a vapor from a first nozzle toward the workpiece while flowing a fluid through a fluid channel which is provided inside a wall, the wall enclosing the processing chamber.
摘要:
In a magnetic refrigerator, a permanent magnet unit shaped like a hub is so rotated as to face an annular magnetic unit having magnetic blocks arranged in a circumferential direction. The permanent magnet unit is also arranged to be concentric with a magnetic unit and has an inner and outer diameters substantially equal to those of the magnetic unit. Each of the magnetic blocks has positive and negative magnetic segments alternately arranged with predetermined gaps. As the permanent magnet unit rotates, heat conducting members are inserted into and removed from the gaps between the magnetic segments of the magnetic block. This allows heat generated from the magnetic segments to conduct in one direction.
摘要:
The magnetic composite material of the present invention is used as a working substance in the magnetic refrigeration system and comprising at least two phases, including, a first phase composed of an intermetallic compound represented by a general formula: La(Fe(Co, Ni)Si)13, having an NaZn13 type crystal structure, and a second phase is composed of an iron alloy containing Si. The first phase is precipitated in an expansion size of 100 μm or less in average. Preferably, the magnetic composite material contains Fe as a principal component, La in an amount from 4 atomic % to 12 atomic %, Si in an amount from 2 atomic % to 21 atomic %, and Co and Ni in a total amount from 0 atomic % to 11 atomic %, and the total amount of Fe, Co and Ni being from 75 atomic % to 92 atomic %.
摘要:
A powder raw material is prepared by mixing at least two kinds of powders selected from a powder A, a powder B, a powder C, and a powder D. A sintered body of a magnetic material having an NaZn13 crystal structure phase is formed by heating the powder raw material while applying a pressure treatment. The powder A is at least one of elemental powder of element R selected from Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb. The powder B is at least one of elemental powder of element T selected from Fe, Co, Ni, Mn, and Cr. The powder C is at least one of elemental powder of element M selected from Si, B, C, Ge, Al, Ga, and In. The powder D is a compound powder composed of at least two kinds of elements selected from the element R, the element T, and the element M.