公开(公告)号：US20170146420A1

公开(公告)日：2017-05-25

申请号：US15421805

申请日：2017-02-01

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker

IPC: G01L21/32 ,  H01J41/04 ,  H01J1/52 ,  G01L19/06

CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

公开(公告)号：US07847559B2

公开(公告)日：2010-12-07

申请号：US12313778

申请日：2008-11-24

Applicant: Richard A. Knott

Inventor： Richard A. Knott

IPC: G01L21/30 ,  H01J1/53

CPC classification number: H01J41/04 ,  Y10T29/49002

Abstract: Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.

Abstract translation: 提供了用于热阴极电离计的馈通针绝缘子的屏蔽，以增加电离计在有害工艺环境中的使用寿命。 根据仪表设计和其他因素，可以采用各种屏蔽材料，设计和构造。 在一个实施例中，屏蔽件可以包括孔，通过该孔可插入馈通引脚和间隔件，以在屏蔽件附接到量规之前在屏蔽件和馈通销绝缘体之间提供最佳距离。 屏蔽件还可以包括用于将屏蔽件附接到量规的部件的突出部，例如量规的馈通引脚。 通过使用绝缘体屏蔽的示例性实施例，电离计的寿命通过防止来自真空室中的过程的气体产物或从电离计溅射的材料沉积在馈通销绝缘体上并导致来自量规的电泄漏 电极。

公开(公告)号：US07456634B2

公开(公告)日：2008-11-25

申请号：US11588109

申请日：2006-10-26

Applicant: Richard A. Knott

Inventor： Richard A. Knott

IPC: G01L21/30 ,  H01J1/53

CPC classification number: H01J41/04 ,  Y10T29/49002

Abstract: Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.

公开(公告)号：US20080018337A1

公开(公告)日：2008-01-24

申请号：US11488457

申请日：2006-07-18

Applicant: Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

Inventor： Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

IPC: G01L21/30

CPC classification number: H01J41/04

Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

公开(公告)号：US20070071638A1

公开(公告)日：2007-03-29

申请号：US11603404

申请日：2006-11-22

Applicant: Karsten Kraiczek ,  Bernd Glatz ,  Patrick Mueller ,  Jan Eickhoff ,  Martin Baeuerle ,  Herbert Anderer

Inventor： Karsten Kraiczek ,  Bernd Glatz ,  Patrick Mueller ,  Jan Eickhoff ,  Martin Baeuerle ,  Herbert Anderer

IPC: G01N21/00

CPC classification number: G01N30/466 ,  B01L3/5025 ,  B01L3/502738 ,  B01L2400/0622 ,  G01N30/20 ,  G01N30/6095 ,  G01N30/724 ,  G01N2030/085 ,  G01N2030/201 ,  G01N2030/202 ,  H01J41/04 ,  H01J49/04

Abstract: A microfluidic chip with at least one inlet port, with at least one microfluidic flow path coupled to the inlet port, and with at least one analytical element adapted for analyzing and/or separating components of a liquid within the flow path which is arranged within or adjacent to, and/or is coupled to the microfluidic flow path. The microfluidic chip is adapted to execute at least two processes in parallel.

Abstract translation: 具有至少一个入口端口的微流体芯片，其具有耦合到入口端口的至少一个微流体流动路径，以及适于分析和/或分离流路内部的液体的组分的至少一个分析元件， 邻近和/或耦合到微流体流动路径。 微流控芯片适于并行执行至少两个过程。

公开(公告)号：US20060202701A1

公开(公告)日：2006-09-14

申请号：US11389007

申请日：2006-03-27

Applicant: Wolfram Knapp ,  Martin Wuest

Inventor： Wolfram Knapp ,  Martin Wuest

IPC: G01L21/30

CPC classification number: G01L21/32 ,  G01L21/12 ,  H01J1/3042 ,  H01J41/04

Abstract: An electron-emitting cathode consists of an electrically conducting emitter layer attached to a side wall which consists of stainless steel and a gate which is fixed at a mall distance inside a concave emitter surface of the emitter layer. The cathode surrounds a reaction area containing a cylindrical grid-like anode and a central ion collector which consists of a straight axial filament. An ion collector current reflecting the density of the gas in the reaction region is measured by a current meter while a gate voltage is kept between the ground voltage of the emitter layer and a higher anode voltage and is regulated in such a way that an anode current is kept constant. The emitter layer may consists of carbon nanotubes, diamond-like carbon, a metal or a mixture of metals or a semiconductor material, e.g., silicon which may be coated, e.g., with carbide or molybdenum. The emitter surface can, however, also be a portion of the inside surface of the side wall roughened by, e.g., chemical etching. The gate may be a grid or it may be made up of patches of metal film covering spacers distributed over the emitter area or a metal film covering an electron permeable layer placed on the emitter surface.

Abstract translation: 电子发射阴极由连接到侧壁的导电发射极层组成，该侧壁由不锈钢和在发射极层的凹面发射器表面内的商场距离处固定的栅极组成。 阴极围绕包含圆柱形网状阳极和中心离子收集器的反应区域，其由直轴向丝线组成。 通过电流计测量反映反应区域中气体密度的离子集电极电流，同时将栅极电压保持在发射极层的接地电压和较高的阳极电压之间，并以这样的方式进行调节，使得阳极电流 保持不变。 发射极层可由碳纳米管，类金刚石碳，金属或金属或半导体材料的混合物组成，例如可以用碳化物或钼涂覆的硅。 然而，发射体表面也可以是通过例如化学蚀刻使侧壁的内表面的一部分变粗糙。 栅极可以是栅格，或者它可以由分布在发射极区域上的覆盖间隔的金属膜的贴片或覆盖放置在发射器表面上的电子渗透层的金属膜构成。

公开(公告)号：US06198105B1

公开(公告)日：2001-03-06

申请号：US09528472

申请日：2000-03-17

Applicant: Daniel Granville Bills

Inventor： Daniel Granville Bills

IPC: G01L2132

CPC classification number: H01J41/04

Abstract: An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axially extending anode support posts for supporting the open anode, the anode support posts being electrically connected to the open anode; and the plurality of ion collector electrodes being respectively located sufficiently close to the plurality of axially extending anode support posts so as to substantially repel the electrons from the anode support posts.

Abstract translation: 包括电子源的电离计; 限定阳极体积的开放阳极，其中电子源设置在阳极体积的外部; 设置在阳极容积内的多个离子收集电极; 多个轴向延伸的阳极支撑柱，用于支撑开放的阳极，阳极支撑柱电连接到开放的阳极; 并且所述多个离子集电极分别位于与所述多个轴向延伸的阳极支撑柱足够接近的位置，以便基本上排斥所述阳极支撑柱的电子。

公开(公告)号：US5602441A

公开(公告)日：1997-02-11

申请号：US935214

申请日：1992-08-26

Applicant: Nobuharu Ohsako ,  Toshio Kikuchi ,  Wakao Watanabe

Inventor： Nobuharu Ohsako ,  Toshio Kikuchi ,  Wakao Watanabe

IPC: G01L21/30 ,  G01L21/32 ,  H01J41/14 ,  H01J27/00

CPC classification number: H01J41/04

Abstract: A vacuum ionization gauging tube, particularly a Bayard-Alpert (B-A) type vacuum ionization gauging tube, has a firmly compact construction, and provides the capabilities for minimizing outgassing gases and measuring pressures accurately without affecting the ultimate pressure range. The B-A vacuum ionization gauging tube includes a filament having a total surface area of between 6 mm.sup.2 and 20 mm.sup.2, a grid formed like a coil from a 0.1 mm to 0.3 mm diameter metal wire, the coil having a diameter of 5 mm to 7 mm and a length of 15 mm to 20 mm and across which it can be energized, an ion collector electrode having substantially the same length as the filament, and a metal envelope for enclosing the above electrode elements and which is maintained at a potential lower than that of the filament. The grid coil has a winding pitch of between 1.5 mm and 2.5 mm. The filament and grid are spaced apart from each other by the distance of between 2 mm and 4 mm. The metal envelope has an inner diameter of 20 mm to 30 mm, and the filament is located not more than 8 mm away from the inner wall of the metal envelope.

Abstract translation: 真空电离测量管，特别是Bayard-Alpert（B-A）型真空电离测量管，具有牢固的紧凑结构，并且能够在不影响极限压力范围的情况下精确地最小化除气和精确测量压力。 BA真空电离测定管包括总表面积在6mm 2和20mm 2之间的细丝，由直径为0.1mm至0.3mm的金属线形成为线圈的格栅，线圈的直径为5mm至7mm 长度为15mm〜20mm，能够通电的离子集电极长度与长丝大致相同的离子集电极，以及用于封闭上述电极元件的金属外壳，并保持在比该电极要低的电位 的长丝。 网格线圈的绕组间距在1.5mm和2.5mm之间。 灯丝和栅格彼此隔开2mm至4mm之间的距离。 金属外壳的内径为20mm至30mm，并且灯丝位于离金属外壳内壁不超过8mm的位置。

公开(公告)号：US5250906A

公开(公告)日：1993-10-05

申请号：US778371

申请日：1991-10-17

Applicant: Daniel G. Bills ,  Michael D. Borenstein

Inventor： Daniel G. Bills ,  Michael D. Borenstein

IPC: G01L21/32 ,  H01J41/04

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: Controller circuitry and method for controlling the operation of an ionization gauge having a source of electrons, an anode, and an ion collector electrode, including storing a plurality of calibration data sets for at least collector electrode currents and gauge sensitivities obtained with at least one reference gauge at representative values of known pressures; and calculating the gauge sensitivity corresponding to an unknown pressure in response to at least one of the data sets together with a measured value of the ion collector current. The data sets may also include representative values of the heating powers of the electron source so that the calculated sensitivity may also be compensated for variations in the electron source heating power. The ionization gauge may be of the Bayard-Alpert type and include a shield which defines a shielded volume within which an electron source, anode, and collector electrode are disposed where the shield is at least partially open to permit transfer of gas molecules into the shielded volume and where the shield completely encloses the electron source, the anode and the collector electrode so that potentials external to the shield means do not disturb the electric charge distribution within the shielded volume to thus stabilize the sensitivity of the gauge.

Abstract translation: 用于控制具有电子源，阳极和离子收集电极的电离计的操作的控制器电路和方法，包括存储多个校准数据集，用于至少采集电极电流和用至少一个参考获得的测量灵敏度 测量已知压力的代表值; 以及响应于所述数据集中的至少一个以及所述离子集电极电流的测量值来计算对应于未知压力的所述量度灵敏度。 数据集还可以包括电子源的加热功率的代表值，使得计算的灵敏度也可以补偿电子源加热功率的变化。 电离计可以是Bayard-Alpert型，并且包括限定了屏蔽体积的屏蔽物，其中电子源，阳极和集电极设置在屏蔽体至少部分开放的位置，以允许气体分子转移到屏蔽 体积，并且屏蔽完全包围电子源，阳极和集电极电极，使得屏蔽装置外部的电位不会扰乱屏蔽体积内的电荷分布，从而稳定仪表的灵敏度。

公开(公告)号：US4792763A

公开(公告)日：1988-12-20

申请号：US72672

申请日：1987-07-13

Applicant: G/u/ nther Haas

Inventor： G/u/ nther Haas

IPC: G01L21/32 ,  H01J41/04

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: A hot cathode ionization gauge with which neutral gas densities in the ra 10.sup.17 to 10.sup.21 m.sup.-3 can be measured, in particular under the conditions typical of fusion-orientated plasma experiments (magnetic field strength from 0 to more than 3 tesla, magnetic field direction varying by up to +/-20 degrees or more and strong plasma-induced noise background), and which is of robust design, reliable in operation and very compact and has a high sensitivity which depends in a reproducible manner on the magnetic field strength and is independent, in a certain degree which is predetermined and can be influenced by the construction, of the field direction and, within a wide range, of the gas density comprises the following electrodes arranged in mutually spaced relationship in the stated order along an axis: a cathode consisting of a tungsten wire at least 0.5 mm thick and which has a middle, active portion, a plane control electrode of diaphragm form arranged at a close distance from and parallel to the active portion of the cathode and having an elongated opening with which the active portion of the cathode is in alignment, a plane accelerating electrode arranged at a distance from and parallel to the control electrode and having a series of parallel slit-shaped apertures extending perpendicularly to the longitudinal direction of the active cathode portion, and a plane, plate-shaped ion collector electrode parallel to the control electrode.

Abstract translation: 特别是在熔融取向等离子体实验的典型条件（0至3特斯拉的磁场强度，磁场方向变化）的条件下，可以测量中性气体浓度在1017至1021m-3范围内的热阴极电离计 高达+/- 20度以上和强烈的等离子体引起的噪声背景），其设计坚固，操作可靠，结构紧凑，灵敏度高，可以以可重现的方式取决于磁场强度，是 独立的，一定程度上预定的并且可以受到构造的影响，并且在大范围内的气体密度包括沿着轴以相互间隔的关系布置的以下电极：a 阴极由至少0.5mm厚的钨丝组成，并且具有中间有源部分，隔离片形式的平面控制电极，其布置在距离并且平行 到阴极的有源部分并且具有阴极的有源部分对准的细长开口，平面加速电极，其设置在与控制电极相距一定距离处并且具有一系列平行的狭缝状孔，其延伸 垂直于活性阴极部分的纵向方向，平行于板状离子集电极平行于控制电极。