公开(公告)号：US20070002908A1

公开(公告)日：2007-01-04

申请号：US11420294

申请日：2006-05-25

申请人： Tsunehiko Yamazaki ,  Naoomi Miyakawa

发明人： Tsunehiko Yamazaki ,  Naoomi Miyakawa

IPC分类号： H01S3/098

CPC分类号： H01S3/106 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/0665 ,  H01S3/034 ,  H01S3/0805

摘要： A device for automatically selecting a beam mode by limiting an outer diameter size of a laser beam in a laser resonator of a laser processing machine is provided. A laser emitting device 100 emits a laser beam LB in a housing 110 to supply it through an output lens 130 to a processing torch 10. A device for automatically selecting a beam mode 200 is mounted in a direction which is perpendicular to a center axis of the laser beam LB, and has a diaphragm member 220 which is guided by a linear guide. A piston rod 244 is driven by a cylinder 240 mounted outside of a housing 210, and drives a permanent magnet 250 which has one polarity. A permanent magnet 230 which is mounted to the diaphragm member 220 and has the other polarity is driven in a noncontact manner, so that an openings 222 or 224 of the diaphragm member 220 is automatically selected.

摘要翻译： 提供了一种通过限制激光加工机的激光谐振器中的激光束的外径尺寸来自动选择光束模式的装置。 激光发射装置100在壳体110中发射激光束LB，以将其通过输出透镜130提供给处理焊炬10.用于自动选择光束模式200的装置安装在垂直于 激光束LB，并且具有由线性引导件引导的隔膜构件220。 活塞杆244由安装在外壳210外侧的圆筒240驱动，并驱动具有一个极性的永磁体250。 安装到隔膜构件220并具有另一极性的永磁体230以非接触方式被驱动，从而自动选择隔膜构件220的开口222或224。

公开(公告)号：US20070001127A1

公开(公告)日：2007-01-04

申请号：US11173988

申请日：2005-06-30

申请人： Daniel Reiley ,  German Rylov ,  Robert Bergstedt

发明人： Daniel Reiley ,  German Rylov ,  Robert Bergstedt

IPC分类号： A61N5/00

CPC分类号： G03F7/70575 ,  G03F7/70025 ,  H01S3/005 ,  H01S3/08036 ,  H01S3/106 ,  H01S3/137 ,  H01S3/225

摘要： In a first aspect, a lithography apparatus may comprise a mask designed using optical proximity correction (OPC), a pulsed laser source, and an active bandwidth control system configured to increase the bandwidth of a subsequent pulse in response to a measured pulse bandwidth that is below a predetermined bandwidth range and increase a bandwidth of a subsequent pulse in response to a measured pulse bandwidth that is above the predetermined bandwidth range. In another aspect an active bandwidth control system may include an optic for altering a wavefront of a laser beam in a laser cavity of the laser source to selectively adjust an output laser bandwidth in response to the control signal. In yet another aspect, the bandwidth of a laser having a wavelength variation across an aperture may be actively controlled by an aperture blocking element that is moveable to adjust a size of the aperture.

摘要翻译： 在第一方面，光刻设备可以包括使用光学邻近校正（OPC），脉冲激光源和有源带宽控制系统设计的掩模，该有源带宽控制系统被配置为响应于测量的脉冲带宽来增加后续脉冲的带宽， 低于预定带宽范围，并且响应于高于预定带宽范围的测量脉冲带宽增加随后脉冲的带宽。 在另一方面，有源带宽控制系统可以包括用于改变激光源的激光腔中的激光束的波前的光学器件，用于响应于控制信号选择性地调节输出激光器带宽。 在另一方面，具有穿过孔的波长变化的激光器的带宽可以由可移动以调节孔径的孔径阻挡元件主动地控制。

公开(公告)号：US20060198415A1

公开(公告)日：2006-09-07

申请号：US11364046

申请日：2006-03-01

申请人： Hiroyuki Yamazaki

发明人： Hiroyuki Yamazaki

IPC分类号： H01S3/04 ,  H01S3/07 ,  H01S3/091 ,  H01S3/083

CPC分类号： G02F1/0147 ,  G02B6/12007 ,  G02F1/011 ,  G02F2203/15 ,  H01S3/106 ,  H01S5/0064 ,  H01S5/02216 ,  H01S5/02248 ,  H01S5/02284 ,  H01S5/02446 ,  H01S5/142 ,  Y10S372/70

摘要： The object is to overcome issues of the conventional tunable laser and achieve a highly reliable, high-performance, and low-price tunable laser by a simpler structure than a wavelength monitor. The tunable laser comprises: a multiple ring resonator that is formed by coupling ring resonant elements having different optical path length from each other; an input/output-side waveguide connected to one of the ring resonant elements; a reflection-side wave guide connected to another one of the ring resonant elements; a PLC substrate on which the multiple ring resonator, the input/output side waveguide, and the reflection-side waveguide are formed; a high reflection film provided to the reflection-side waveguide; an SOA connected to the input/output-side waveguide; film heaters and a phase control region of the SOA for changing the resonant wavelength of the multiple ring resonator; and a light-receiving element for detecting the resonant wavelength of the multiple ring resonator in a thru port of a directional coupler.

摘要翻译： 目的是克服常规可调激光器的问题，通过比波长监视器更简单的结构实现高可靠性，高性能和低价格的可调谐激光器。 可调激光器包括：通过将具有不同光程长度的环形谐振元件彼此耦合而形成的多环谐振器; 连接到所述环形谐振元件中的一个的输入/输出侧波导; 连接到所述环形谐振元件中的另一个的反射侧波导; 形成有多个环形谐振器，输入/输出侧波导和反射侧波导的PLC基板; 设置在反射侧波导上的高反射膜; 连接到输入/输出侧波导的SOA; 膜加热器和用于改变多环谐振器的谐振波长的SOA的相位控制区域; 以及用于检测定向耦合器的通孔中的多环谐振器的谐振波长的光接收元件。

公开(公告)号：US07046711B2

公开(公告)日：2006-05-16

申请号：US10006396

申请日：2001-12-10

申请人： Daniel Kopf ,  Michael Schmidt

发明人： Daniel Kopf ,  Michael Schmidt

IPC分类号： H01S3/091

CPC分类号： H01S3/1115 ,  H01S3/025 ,  H01S3/0604 ,  H01S3/0817 ,  H01S3/09415 ,  H01S3/106 ,  H01S3/107 ,  H01S3/1075 ,  H01S3/109 ,  H01S3/1103 ,  H01S3/1118 ,  H01S3/115 ,  H01S3/1611 ,  H01S3/1673 ,  H01S3/235 ,  H01S2301/20

摘要： A diode pumped solid state laser for producing a high aspect ratio beam comprises a diode pumping array (1) on a diode array mount (3) and optical means for imaging a pump light beam onto a substantially asymmetrical spot with a smooth intensity profile. The pump light beam is pumping a laser medium (4). Both the pump and the lasing mode have strong asymmetries. In combination with the right choice of laser medium (4), this results in high power laser performance. The axis of the pump light beam is adjustable by a simple adjusting means (110) to a defined plane or direction relative to a mounting frame (111) of a diode array pumping device (103). The adjusting means (110) compensates small tolerances on mounting of the diode array (1) and/or at least one optical element (2). The adjusting means include at least one wedged window (127). Because of this adjustment the axis of the light beam lies in a defined plane relative to the mounting frame (111) of the pumping device (103). Therefore the diode array pumping device (103) of a laser is replaceable without any further adjustment.

摘要翻译： 用于产生高纵横比光束的二极管泵浦固体激光器包括二极管阵列安装件（3）上的二极管泵浦阵列（1）和用于将泵浦光束成像到具有平滑强度分布的基本不对称点上的光学装置。 泵浦光束泵浦激光介质（4）。 泵和激光模式都具有很强的不对称性。 结合激光介质（4）的正确选择，可实现高功率激光性能。 泵浦光束的轴线可以通过简单的调节装置（110）相对于二极管阵列泵送装置（103）的安装框架（111）的限定平面或方向来调节。 调节装置（110）补偿二极管阵列（1）和/或至少一个光学元件（2）的安装时的小公差。 调整装置包括至少一个楔形窗口（127）。 由于这种调节，光束的轴线相对于泵送装置（103）的安装框架（111）位于限定的平面中。 因此，激光器的二极管阵列泵送装置（103）可以被替换，而无需进一步的调整。

公开(公告)号：US07012940B2

公开(公告)日：2006-03-14

申请号：US10619303

申请日：2003-07-14

申请人： Yusuke Tamaki ,  Hitoshi Sekita ,  Kazuya Takasago ,  Taisuke Miura

发明人： Yusuke Tamaki ,  Hitoshi Sekita ,  Kazuya Takasago ,  Taisuke Miura

IPC分类号： H01S3/00

CPC分类号： H01S3/235 ,  H01S3/08 ,  H01S3/08072 ,  H01S3/106

摘要： The present invention has the object of offering a laser resonator capable of maintaining high amplification efficiency even if the thermal lensing effect occurring in the laser medium varies during operation or over repeated operation and suspension of the laser device. The laser resonator comprises at least a pair of reflection portions (planar reflective mirrors 3) provided such as to allow a laser beam to oscillate therebetween; a laser medium provided on the optical path of the laser between the pair of reflection portions; an excitation portion (excitation laser device 5) for exciting the laser medium; an optical system (convex lens 1) provided on the optical path of the laser beam between the laser medium and the pair of reflection portions for changing the state of the laser in the laser medium; and a movement portion for moving the optical system along the optical axis of the laser.

摘要翻译： 本发明的目的是提供一种激光谐振器，即使在激光介质中发生的热透镜效应在操作期间或者在激光装置的重复操作和暂停时都会发生变化时，其能够保持高的放大效率。 激光谐振器包括至少一对反射部分（平面反射镜3），其被设置为允许激光束在它们之间振荡; 设置在所述一对反射部之间的所述激光的光路上的激光介质; 用于激发激光介质的激励部分（激发激光装置5） 在激光介质和一对反射部分之间设置在激光束的光路上的光学系统（凸透镜1），用于改变激光介质中激光的状态; 以及用于沿着激光的光轴移动光学系统的移动部分。

公开(公告)号：US20060002436A1

公开(公告)日：2006-01-05

申请号：US11023985

申请日：2004-12-29

申请人： Kazumasa Takabayashi ,  Tadao Nakazawa ,  Yumi Nakazawa ,  Takashi Shiraishi

发明人： Kazumasa Takabayashi ,  Tadao Nakazawa ,  Yumi Nakazawa ,  Takashi Shiraishi

IPC分类号： H01S3/10

CPC分类号： H01S3/106 ,  H01S5/141

摘要： A wavelength tunable laser is constituted by including a resonator composed of a pair of reflectors arranged to face each other, and inside the resonator, a SOA radiating a laser beam with a gain for a wide range of wavelengths, a transmission-type wavelength tunable filter having an asymmetric filter characteristic, and a phase controller controlling a phase of the laser beam resonating inside the resonator.

摘要翻译： 波长可调激光器由包括由一对反射器组成的谐振器构成，谐振器内部设置有用于宽波长增益的激光束，透射型波长可调滤波器 具有非对称滤波器特性，以及控制在谐振器内共振的激光束的相位的相位控制器。

公开(公告)号：US20050068996A1

公开(公告)日：2005-03-31

申请号：US10673534

申请日：2003-09-29

申请人： Raghuram Narayan

发明人： Raghuram Narayan

IPC分类号： H01S3/10 ,  H01S5/00 ,  H01S5/02 ,  H01S5/024 ,  H01S5/14

CPC分类号： H01S5/141 ,  H01S3/106 ,  H01S5/005 ,  H01S5/0085 ,  H01S5/02248 ,  H01S5/02415 ,  H01S5/02438 ,  H01S5/0617 ,  H01S5/0654 ,  H01S5/143

摘要： External cavity optical transmitters are disclosed which include a gain chip and a mirror that define an optical cavity. The optical cavity may include collimating lenses, electro-optic crystals for controlled phase shift, and additional frequency selective optical components such as a grating and/or an etalon. The external cavity laser is capable of lasing at any of the specified ITU wavelengths (frequencies) in the L, C, or any other band in the optical spectrum. The optical transmitter is wavelength tuned by a lens mounted on an actuator.

摘要翻译： 公开了外腔光发射机，其包括限定光腔的增益芯片和反射镜。 光学腔可以包括准直透镜，用于受控相移的电光晶体，以及附加的频率选择性光学部件，例如光栅和/或标准具。 外腔激光器能够在L，C或光谱中的任何其他频带中的任何指定的ITU波长（频率）下进行激光。 光发射机由安装在致动器上的镜头进行波长调谐。

公开(公告)号：US06801561B2

公开(公告)日：2004-10-05

申请号：US09960875

申请日：2001-09-21

申请人： Juergen Kleinschmidt

发明人： Juergen Kleinschmidt

IPC分类号： H01S3223

CPC分类号： H01S3/225 ,  H01S3/1055 ,  H01S3/106

摘要： An excimer or molecular fluorine laser system a wavefront compensating optic within its resonator for adjusting the curvature of the wavefront of the beam for compensating wavefront distortions and thereby enhancing the spectral purity of the beam. The wavefront compensating optic may be a plate, such as a null lens. One or both surfaces of the null lens may be adjustable and/or have an adjustable curvature for controlling the wavefront distortion compensation. A multi-compartment enclosure may be included having at least one optical component of the line-narrowing unit within each compartment. An atmosphere within at least one compartment is preferably controlled for controlling the spectral purity of the beam by controlling an amount of wavefront distortion compensation. The wavefront compensating optic may be sealably disposed between adjacent compartments.

摘要翻译： 准分子或分子氟激光系统在其谐振器内的波前补偿光学器件，用于调整波束的波前的曲率以补偿波前失真，从而增强光束的光谱纯度。 波前补偿光学元件可以是板，例如零透镜。 零透镜的一个或两个表面可以是可调节的和/或具有用于控制波前失真补偿的可调曲率。 可以包括多隔室外壳，其具有每个隔室内的线条变窄单元的至少一个光学部件。 优选地控制至少一个室内的气氛，以通过控制波前失真补偿量来控制光束的光谱纯度。 波前补偿光学元件可以密封地设置在相邻的隔室之间。

公开(公告)号：US06763044B2

公开(公告)日：2004-07-13

申请号：US10159312

申请日：2002-05-31

申请人： Emmerich Mueller ,  Ralf Haeussler ,  Wolf Steffens ,  Ulrich Kallmann

发明人： Emmerich Mueller ,  Ralf Haeussler ,  Wolf Steffens ,  Ulrich Kallmann

IPC分类号： H01S510

CPC分类号： H01S5/141 ,  H01S3/106 ,  H01S3/1066 ,  H01S3/1068 ,  H01S3/107 ,  H01S5/143

摘要： The invention relates to a method of tuning a laser, comprising the steps of: providing a laser beam to an external cavity, the laser beam traveling through material along a path between a cavity end element and a tuning element, the path having an optical path length, selecting at least one mode of the laser by introducing a dispersion element in the path of the laser, rotating the tuning element about a pivot axis theoretically defined by the intersection of the surface planes of the cavity end element, the dispersion element and the tuning element to tune the laser, changing the optical path length of the path in order to at least partly compensate a shift between the real position of the pivot axis and the theoretically defined position.

摘要翻译： 本发明涉及一种调谐激光的方法，包括以下步骤：向外腔提供激光束，激光束沿着空腔端元件和调谐元件之间的路径传播通过材料，该路径具有光路 长度，通过在激光的路径中引入色散元素来选择激光的至少一种模式，使调谐元件围绕理论上由空腔端元件，色散元件和色散元件的表面相交界定的枢转轴线旋转 调谐元件以调整激光器，改变路径的光路长度，以便至少部分地补偿枢转轴线的实际位置与理论上定义的位置之间的偏移。

公开(公告)号：US06710914B2

公开(公告)日：2004-03-23

申请号：US09863842

申请日：2001-05-22

申请人： Mark A. Arbore ,  Lawrence E. Myers

发明人： Mark A. Arbore ,  Lawrence E. Myers

IPC分类号： G02F139

CPC分类号： H01S3/1083 ,  G02F1/39 ,  H01S3/0637 ,  H01S3/094096 ,  H01S3/106 ,  H01S3/1312

摘要： A tunable light source equipped with an optical parametric amplifier (OPA) placed in a cavity for performing an optical parametric oscillation (OPO) driven by a pump beam at a pump frequency selected within a certain range such that the OPO is driven near degeneracy. An adjustment mechanism adjusts the pump frequency within a wavelength tuning range to select a gain spectrum of the OPO and a spectral control mechanism sets a resonant frequency of the cavity within that gain spectrum. Thus, only one of the idler and signal beams within the passband set by the narrowband tuner is supported inside the cavity. Other nonlinear frequency conversion operations can also be performed within the cavity in conjunction with the OPO. The light source can be operated in cw, near-cw and pulsed operation modes as a broadly tunable narrowband source covering a wavelength window of 250 nm.

摘要翻译： 配备有光学参量放大器（OPA）的可调光源，其放置在腔中，用于执行由在一定范围内选择的泵频率的泵浦光束驱动的光参量振荡（OPO），使得OPO被驱动接近简并性。 调节机构调节波长调谐范围内的泵浦频率，以选择OPO的增益谱，并且光谱控制机构设定该增益谱内腔的谐振频率。 因此，由窄带调谐器设定的通带内的惰轮和信号波束中只有一个被支撑在空腔内。 其他非线性频率转换操作也可以在腔内结合OPO进行。 光源可以cw，near-cw和脉冲操作模式操作，作为覆盖250nm波长窗口的广泛可调窄带源。