Abstract:
There is provided a control device for a synchronous electric motor that controls a drive of the synchronous electric motor. The control device includes: a limit value setting part configured to set a limit value for an output torque related value that is related to an output torque of the synchronous electric motor according to a rotation speed of the synchronous electric motor; a command generator configured to generate a voltage command based on an input command and the limit value without feeding back a current flowing through the synchronous electric motor; a PWM signal generator configured to generate a PWM signal for controlling the drive of the synchronous electric motor based on the voltage command; and a drive controller configured to control the drive of the synchronous electric motor using the PWM signal.
Abstract:
A load port provided adjacent to a wafer transport chamber for taking in and out a wafer W between the wafer transport chamber and a FOUP, includes a plate-shaped part that constitutes a part of a wall of the wafer transport chamber, and has an opening for opening the wafer transport chamber; a door part for opening and closing the opening; a mounting table that is configured to mount a wafer storage container so as to oppose a lid part for opening and closing an internal space to the door part, and to move to and from the plate-shaped part; and an elastic part that is provided on the mounting table side of the plate-shaped part along the peripheral edge of the opening, wherein the elastic part elastically contacts the periphery of the lid part in the wafer storage container by moving the mounting table toward the plate-shaped part.
Abstract:
There is provided an exhaust nozzle unit capable of discharging a gas atmosphere in a substrate storage container having a loading/unloading opening from the container to an outside of the container through a port formed on a bottom surface of the container. The exhausted nozzle includes a nozzle capable of switching the port from a closed state to an open state by pressing a valve of the port; and a housing configured to hold the nozzle so as to be movable up and down between a use posture in which the port is in the open state and a standby posture in which the port is in the closed state.
Abstract:
Provided is a cargo carrying vehicle including; an elevating table 2 elevatable in the vertical direction; a plurality of rotating bodies 31 located on the elevating table 2 and configured to rotate so as to carry a cargo C in a conveyance direction X that is a direction toward a loading-unloading part of an aircraft; and a support 32 configured to support the plurality of rotating bodies 31, wherein the support 32 and the plurality of rotating bodies 31 constitute the conveying unit 3, and the conveying unit 3 is movable on the elevating table 2 in a position adjusting direction Y that is a direction intersecting the vertical direction and the conveyance direction.
Abstract:
A germ-free glove box includes: a housing in which a germ-free space is formed, the housing including a connector to which a container housing an object is connected; and a glove provided at a front plate of the housing to allow an operating personnel to perform an operation in the germ-free space from the outside of the housing. In this germ-free glove box, the connector is provided on an upper plate of the housing. In the germ-free glove box outside spaces beside the box are effectively utilized, and a large working space is secured at around the bottom surface of a germ-free space.
Abstract:
A linear actuator is provided that has a configuration capable of inhibiting contact between an inner core and a plate spring that is connected to the inner core and an outer core, and which is realized by a configuration that is easy to assemble. A stator is arranged in an opening section of a through-hole in the inner core, and has a spacer through which a shaft passes. An outer frame section of the plate spring is connected to the outer core, and a fixed section of the plate spring is connected to the inner core through the spacer in a state in which the shaft passes therethrough. The spacer includes a penetration section having an insertion hole which the shaft is inserted through, and restriction sections and which restrict a displacement of a predetermined amount or more of the plate spring to the inner core side.
Abstract:
Even when power supply to a gas supply target device is stopped and then resumed, the state of gas supply to a chamber is grasped and a process is performed in accordance with the state. The gas supply target device includes a retaining unit 12 which is able to selectively take one of three states A to C each indicating a state of gas supply to the chamber 10a and is able to maintain, when power supply to the gas supply target device is stopped, one of the states at stop of the power supply, when power supply to the gas supply target device is stopped and then resumed, in which one of the states A to C the retaining unit 12 is set is determined, and a process is performed in accordance with the state of the gas supply to the chamber 10a.
Abstract:
There is provided a power transmission device to switch a coupled state and an uncoupled state between a first member and a second member which are arranged in a transmission path of a driving force to thereby control transmission of the driving force. The device includes a movable body having ferromagnetic property, a first magnetic path and a second magnetic path, and a permanent magnet. The device also includes a driving portion to excite the electromagnet in the forward direction and then increases an attraction force on a side on which a magnetic flux is increased or decreased.
Abstract:
The Electronic Module includes body case 2 that comprises a plurality of case members 3, 4 by abutting each other and that has an internal space (S) where the first opening P1 is formed on one side surface of the internal space (S) and the second opening P2 that opens in a direction different from that of the first opening P1 is in an exposed state when a plurality of the case members 3, 4 are separated each other, a substrate 5 on which a sensor IC 51 is mounted and that is housed in the internal space (S) of the body case 2, and a resin body 6 that covers the substrate 5 by being filled in the internal space (S) of the body case 2 and solidified or hardened, and is characterized by that a plurality of the case members 3, 4.
Abstract:
There is provided an end structure of a nozzle 11 including a gas-flow passage 13 communicable with an opening 104 provided through a bottom of a container 100 configured to contain an object, the nozzle 11 configured so that gas is injected into or discharged from the container 100 through the gas-flow passage 13 and the opening 104. The end structure includes a contact portion 19 provided at an upper end portion of the nozzle 11 and around the gas-flow passage 13, and the contact portion 19 is configured to be brought into contact with a contacted portion 103 provided around the opening 104. The contact portion 19 includes a flat portion 19b and protruding portions 19a and 19c each protruding upward relative to the flat portion 19b, and the flat portion 19b is made of material softer than that of the protruding portions 19a and 19c.