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    THREE-DIMENSIONAL MASK MODEL FOR PHOTOLITHOGRAPHY SIMULATION
    161.
    发明申请
    THREE-DIMENSIONAL MASK MODEL FOR PHOTOLITHOGRAPHY SIMULATION 有权
    用于光刻模拟的三维掩模模型

    公开(公告)号：US20100162199A1

    公开(公告)日：2010-06-24

    申请号：US12721343

    申请日：2010-03-10

    申请人： Peng Liu ,  Yu Cao ,  Luoqi Chen ,  Jun Ye

    发明人： Peng Liu ,  Yu Cao ,  Luoqi Chen ,  Jun Ye

    IPC分类号： G06F17/50

    CPC分类号： G06F17/5081 ,  G03F1/144 ,  G03F1/36 ,  G03F7/705 ,  G06F17/5009

    摘要： A three-dimensional mask model of the invention provides a more realistic approximation of the three-dimensional effects of a photolithography mask with sub-wavelength features than a thin-mask model. In one embodiment, the three-dimensional mask model includes a set of filtering kernels in the spatial domain that are configured to be convolved with thin-mask transmission functions to produce a near-field image. In another embodiment, the three-dimensional mask model includes a set of correction factors in the frequency domain that are configured to be multiplied by the Fourier transform of thin-mask transmission functions to produce a near-field image.

    摘要翻译： 本发明的三维掩模模型提供了比薄膜模型具有亚波长特征的光刻掩模的三维效果更逼真的近似。 在一个实施例中，三维掩模模型包括空间域中的一组过滤内核，其被配置为与薄膜传输函数进行卷积以产生近场图像。 在另一个实施例中，三维掩模模型包括频域中的一组校正因子，其被配置为乘以薄膜传输函数的傅立叶变换以产生近场图像。

    PATTERN SELECTION FOR LITHOGRAPHIC MODEL CALIBRATION
    162.
    发明申请
    PATTERN SELECTION FOR LITHOGRAPHIC MODEL CALIBRATION 有权
    图形模型校准的图案选择

    公开(公告)号：US20100122225A1

    公开(公告)日：2010-05-13

    申请号：US12613244

    申请日：2009-11-05

    申请人： Yu Cao ,  Wenjin Shao ,  Jun Ye ,  Ronaldus Johannes Gljsbertus Goossens

    发明人： Yu Cao ,  Wenjin Shao ,  Jun Ye ,  Ronaldus Johannes Gljsbertus Goossens

    IPC分类号： G06F17/50

    CPC分类号： G06F17/50 ,  G03F1/14 ,  G03F1/44 ,  G03F1/68 ,  G03F7/70433 ,  G03F7/705 ,  G06F17/10 ,  G06F17/5009

    摘要： The present invention relates generally to methods and apparatuses for test pattern selection for computational lithography model calibration. According to some aspects, the pattern selection algorithms of the present invention can be applied to any existing pool of candidate test patterns. According to some aspects, the present invention automatically selects those test patterns that are most effective in determining the optimal model parameter values from an existing pool of candidate test patterns, as opposed to designing optimal patterns. According to additional aspects, the selected set of test patterns according to the invention is able to excite all the known physics and chemistry in the model formulation, making sure that the wafer data for the test patterns can drive the model calibration to the optimal parameter values that realize the upper bound of prediction accuracy imposed by the model formulation.

    摘要翻译： 本发明一般涉及用于计算光刻模型校准的测试图案选择的方法和装置。 根据一些方面，本发明的模式选择算法可以应用于任何现有的候选测试模式池。 根据一些方面，与设计最佳图案相反，本发明自动选择从现有的候选测试图案池中确定最佳模型参数值最有效的测试图案。 根据另外的方面，根据本发明的所选择的一组测试图案能够激发模型配方中的所有已知物理和化学，确保用于测试图案的晶片数据可以将模型校准驱动到最佳参数值 实现了模型公式对预测精度的上限。

    System and method for detecting integrated circuit pattern defects
    164.
    发明授权
    System and method for detecting integrated circuit pattern defects 有权
    检测集成电路图案缺陷的系统和方法

    公开(公告)号：US07558419B1

    公开(公告)日：2009-07-07

    申请号：US10917060

    申请日：2004-08-12

    申请人： Jun Ye ,  Yu Cao ,  R. Fabian Pease

    发明人： Jun Ye ,  Yu Cao ,  R. Fabian Pease

    IPC分类号： G06K9/00

    CPC分类号： G06T7/001 ,  G03F1/84 ,  G06T2207/30148

    摘要： There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a technique of, and system for inspecting integrated circuits, including, for example, patterns projected, provided or formed on a wafer using photomasks, or patterns on the photomask itself. The inspection system and technique of this aspect includes first identifying, determining and/or detecting areas and/or patterns that are potentially defective by removing, filtering and/or eliminating from a set of potential defects any and/or all typical, regular or normal patterns. The identification, determination and/or detection of potential defects may be performed relatively quickly by a rapidly executing algorithm. In this way, a first or “coarse” analysis is performed rapidly and some, many, all or substantially all of the regular, normal or typical patterns are eliminated from further analysis. Thereafter, a second more detailed analysis is performed. This second analysis focuses on the set of potential defects that were identified, determined and/or detected during the first analysis of the photomask or wafer (i.e., the “coarse” analysis). The second analysis may be considerably a more detailed or a “fine” analysis relative to the first or “coarse” analysis. Indeed, in one embodiment, the second analysis may implement a more computational intensive process, without sacrificing throughput, since only a small portion of the photomask or wafer is inspected in the second analysis. In this way, the detailed analysis of the defect candidates may identify (i) all or substantially all of the actual defects and/or (ii) only the actual defects from the potential defects identified during the first analysis.

    摘要翻译： 这里描述和说明了许多发明。 在一个方面，本发明涉及用于检查集成电路的技术和系统，包括例如使用光掩模投影，提供或形成在晶片上的图案或光掩模本身上的图案。 该方面的检查系统和技术包括首先识别，确定和/或检测潜在缺陷的区域和/或图案，该区域和/或图案通过去除，过滤和/或从一组潜在的缺陷中消除任何和/或所有典型的，规则的或正常的 模式。 可能通过快速执行的算法相对较快地执行潜在缺陷的识别，确定和/或检测。 以这种方式，快速执行第一个或“粗略”分析，并从进一步的分析中消除一些，许多，全部或基本上所有常规，正常或典型的模式。 此后，进行第二更详细的分析。 该第二分析集中在在光掩模或晶片的第一次分析期间（即，“粗略”分析））中识别，确定和/或检测到的潜在缺陷集合。 第二次分析可能相对于第一次或“粗略”分析可能是更详细或“精细”的分析。 实际上，在一个实施例中，第二分析可以实现更加计算密集的过程，而不会牺牲吞吐量，因为在第二次分析中只检查了一小部分光掩模或晶片。 以这种方式，缺陷候选人的详细分析可以识别（i）所有或基本上所有的实际缺陷和/或（ii）仅在第一次分析期间识别的潜在缺陷的实际缺陷。

    PRICING AND AUCTIONING OF BUNDLED ITEMS AMONG MULTIPLE SELLERS AND BUYERS
    165.
    发明申请
    PRICING AND AUCTIONING OF BUNDLED ITEMS AMONG MULTIPLE SELLERS AND BUYERS 有权
    多个卖家和买家的定价和定价

    公开(公告)号：US20090125414A1

    公开(公告)日：2009-05-14

    申请号：US12262059

    申请日：2008-10-30

    申请人： Leonard Kleinrock ,  Yu Cao

    发明人： Leonard Kleinrock ,  Yu Cao

    IPC分类号： G06Q30/00

    CPC分类号： G06Q30/06 ,  G06Q30/0283 ,  G06Q30/0601 ,  G06Q30/0631 ,  G06Q30/0633 ,  G06Q30/0641

    摘要： A number of sets of methods and apparatuses applicable to online shopping are disclosed. One set, “Bin Packing Methods with Approximate Membership”, includes methods in pricing and auctioning a bundle of items, some of which could belong to another bundle. Significantly, the membership of a bundle, during pricing and auction, could change. Another set, the “Shopping Console”, puts a structure into the online shopping experience, so that through one interface various shopping activities can be facilitated, including but not limited to researching, pricing, negotiation, group buying, and tracking of purchases. Still another set, “Flash Mob Shopping”, allows sellers and a (spontaneous) group of shoppers to connect on prices without requiring shoppers' hard commitments, and with sellers revealing only necessary price information.

    摘要翻译： 披露了适用于在线购物的多套方法和装置。 一套“具有近似成员身份的Bin包装方法”包括定价和拍卖一系列项目的方法，其中一些可能属于另一个包。 重要的是，在定价和拍卖期间，捆绑包的成员可能会改变。 另一套“购物台”将网络购物体验结合在一起，通过一个界面可以促进各种购物活动，包括但不限于研究，定价，谈判，团购，跟踪采购。 另一套“Flash Mob购物”允许卖家和（自发的）购物者组合价格连接，而不需要购买者的艰难承诺，卖家只显示必要的价格信息。

    Closed region defect detection system
    166.
    发明授权
    Closed region defect detection system 有权
    闭区缺陷检测系统

    公开(公告)号：US07499156B2

    公开(公告)日：2009-03-03

    申请号：US11584714

    申请日：2006-10-19

    申请人： George Q. Chen ,  Lih-Huah Yiin ,  Yu Cao

    发明人： George Q. Chen ,  Lih-Huah Yiin ,  Yu Cao

    IPC分类号： G01N21/00

    CPC分类号： G01N21/9501 ,  G01N21/956

    摘要： A method and apparatus for inspecting specimens or patterned transmissive substrates, such as photomasks, for unwanted particles and features, particularly those associated with contacts, including irregularly shaped contacts. A specimen is illuminated by a laser through an optical system comprised of a laser scanning system, individual transmitted and/or reflected light collection optics and detectors collect and generate signals representative of the light transmitted by the substrate. The defect identification of the substrate is performed using those transmitted light signals. Defect identification is performed using an inspection algorithm by comparing image feature representations of a test specimen with a reference specimen, and using a boundary computer and flux comparison device to establish tight boundaries around contacts and compute flux differences between the test and reference specimen contacts. Defect sizes are reported as ratio of flux difference, and entire contacts are highlighted for review.

    摘要翻译： 用于检查样品或图案化的透射基底（例如光掩模）的方法和装置，用于不期望的颗粒和特征，特别是与触点相关联的那些，包括不规则形状的触点。 通过由激光扫描系统，单独发射和/或反射光收集光学器件组成的光学系统，激光照射样品，并且检测器收集并产生表示由衬底透射的光的信号。 使用这些透射光信号进行衬底的缺陷识别。 通过比较测试样本的图像特征表示和参考样本，并使用边界计算机和通量比较装置在接触周围建立紧密的边界并计算测试和参考样本接触之间的通量差，使用检查算法执行缺陷识别。 缺陷尺寸报告为通量差的比率，并且整个触点被突出显示以供审查。

    Method of performing model-based scanner tuning
    167.
    发明申请
    Method of performing model-based scanner tuning 有权
    执行基于模型的扫描仪调整的方法

    公开(公告)号：US20090053628A1

    公开(公告)日：2009-02-26

    申请号：US11892407

    申请日：2007-08-22

    申请人： Jun Ye ,  Yu Cao

    发明人： Jun Ye ,  Yu Cao

    IPC分类号： G03F7/20

    CPC分类号： G03F7/705 ,  G03F7/70125 ,  G03F7/70458 ,  G03F7/70516 ,  G03F7/70525

    摘要： A model-based tuning method for tuning a first lithography system utilizing a reference lithography system, each of which has tunable parameters for controlling imaging performance. The method includes the steps of defining a test pattern and an imaging model; imaging the test pattern utilizing the reference lithography system and measuring the imaging results; imaging the test pattern utilizing the first lithography system and measuring the imaging results; calibrating the imaging model utilizing the imaging results corresponding to the reference lithography system, where the calibrated imaging model has a first set of parameter values; tuning the calibrated imaging model utilizing the imaging results corresponding to the first lithography system, where the tuned calibrated model has a second set of parameter values; and adjusting the parameters of the first lithography system based on a difference between the first set of parameter values and the second set of parameter values.

    摘要翻译： 一种基于模型的调谐方法，用于利用参考光刻系统调整第一光刻系统，每个参考光刻系统具有用于控制成像性能的可调参数。 该方法包括定义测试图案和成像模型的步骤; 使用参考光刻系统成像测试图案并测量成像结果; 使用第一光刻系统成像测试图案并测量成像结果; 使用对应于参考光刻系统的成像结果校准成像模型，其中校准的成像模型具有第一组参数值; 使用对应于第一光刻系统的成像结果来调整校准的成像模型，其中调谐的校准模型具有第二组参数值; 以及基于第一组参数值和第二组参数值之间的差异来调整第一光刻系统的参数。

    Searching with Consideration of User Convenience
    169.
    发明申请
    Searching with Consideration of User Convenience 审中-公开

    公开(公告)号：US20070288314A1

    公开(公告)日：2007-12-13

    申请号：US11754081

    申请日：2007-05-25

    申请人： Yu Cao ,  Feng Lu ,  Kai Lu ,  Woodrow Cannon

    发明人： Yu Cao ,  Feng Lu ,  Kai Lu ,  Woodrow Cannon

    IPC分类号： G06Q30/00

    CPC分类号： G06Q30/0273 ,  G06F16/951 ,  G06Q30/0275 ,  G06Q30/0277

    摘要： A system that enables the search for providers of services or products, for a given user query that's in free text, and typically the services or products are focused on a particular area, such as an industry, a sector, etc. The system thus enables a searcher to submit queries that are substantially similar to those asked to an expert in the area, and get back results that are helpful in their decision making in obtaining services or products. Thus the searcher's experience is substantially similar to that of consulting a human expert. The system employs methods in matching and placing advertisements in relation to user queries and the concepts contained in these queries. Still further, it employs other various methods to enhance the searcher's effectiveness in their decision making. Finally, the system searches for queries that are composes of at least two languages. The system further comprises a method to (a) turn a large number of records, typically web pages crawled from the entire Web, into hundreds or even thousands of logical partitions, where each partition is associated with an identifier; and (b) take a user query that typically contains an identifier or several identifiers, and match records in those partitions with the identifier(s), or alternatively, take a user query, return multiple results, and then take the user's selection of identifier(s) and re-process the results so that only those associated with the selected identifier(s) are returned to the user.

    Facilitated Search Systems and Methods for Domains
    170.
    发明申请
    Facilitated Search Systems and Methods for Domains 审中-公开
    便利的域搜索系统和方法

    公开(公告)号：US20070266024A1

    公开(公告)日：2007-11-15

    申请号：US11694639

    申请日：2007-03-30

    申请人： Yu Cao

    发明人： Yu Cao

    IPC分类号： G06F17/30

    CPC分类号： G06F16/9537

    摘要： A system that enables the search for providers of services or products, for a given user query that's in free text, and typically the services or products are focused on a particular area, such as an industry, a sector, etc. The system thus enables a searcher to submit queries that are substantially similar to those asked to an expert in the area, and get back results that are helpful in their decision making in obtaining services or products. Thus the searcher's experience is substantially similar to that of consulting a human expert. The system employs methods in creating a parameterized database from records such as web pages from the entire Web, with a focus on the area. It also employs methods in segmenting a free-text user query into one or more pieces of information, applying rules to individual pieces as well as their relationship so as to deduct knowledge to be used in search. It also employs methods in performing Proximity Search on records of multi-dimensions for queries of multi-dimensions. Further, it employs methods in matching and placing advertisements in relation to user queries and the concepts contained in these queries. Still further, it employs other various methods to enhance the searcher's effectiveness in their decision making. Finally, the system is aware of a user query's language and region, and serves results, including advertisements, accordingly. The system comprised of automatically discerning the best combinations of a user query's geographical origin and language, retrieving and displaying search results accordingly. A record on the system are associated with a geographic location and a language. A record could be composed of two or more records, each of which associates with a location and a language. A record could be in rich media format.

    摘要翻译： 一种能够搜索服务或产品提供商的系统，针对给定的用户查询是免费文本，通常是服务或产品集中在一个特定的领域，如行业，部门等。因此，系统启用 搜索者提交与该地区的专家所提出的查询大致相似的查询，并返回有助于他们在获取服务或产品方面的决策。 因此，搜索者的经验与咨询人类专家的经验基本相似。 该系统采用从诸如来自整个Web的网页的记录创建参数化数据库的方法，重点是该区域。 它还采用将自由文本用户查询分割成一个或多个信息的方法，将规则应用于各个部分以及它们的关系，以便扣除在搜索中使用的知识。 它还使用多维度查询的多维度记录执行近似搜索的方法。 此外，它采用与用户查询相关的广告匹配和放置方法以及这些查询中包含的概念。 此外，它采用其他各种方法来提高搜索者在决策中的有效性。 最后，系统知道用户查询的语言和区域，并且相应地提供包括广告在内的结果。 该系统包括自动识别用户查询的地理来源和语言的最佳组合，相应地检索和显示搜索结果。 系统上的记录与地理位置和语言相关联。 记录可以由两个或多个记录组成，每个记录与位置和语言相关联。 记录可以是富媒体格式。