System and method for detecting integrated circuit pattern defects
    1.
    发明授权
    System and method for detecting integrated circuit pattern defects 有权
    检测集成电路图案缺陷的系统和方法

    公开(公告)号:US07558419B1

    公开(公告)日:2009-07-07

    申请号:US10917060

    申请日:2004-08-12

    IPC分类号: G06K9/00

    摘要: There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a technique of, and system for inspecting integrated circuits, including, for example, patterns projected, provided or formed on a wafer using photomasks, or patterns on the photomask itself. The inspection system and technique of this aspect includes first identifying, determining and/or detecting areas and/or patterns that are potentially defective by removing, filtering and/or eliminating from a set of potential defects any and/or all typical, regular or normal patterns. The identification, determination and/or detection of potential defects may be performed relatively quickly by a rapidly executing algorithm. In this way, a first or “coarse” analysis is performed rapidly and some, many, all or substantially all of the regular, normal or typical patterns are eliminated from further analysis. Thereafter, a second more detailed analysis is performed. This second analysis focuses on the set of potential defects that were identified, determined and/or detected during the first analysis of the photomask or wafer (i.e., the “coarse” analysis). The second analysis may be considerably a more detailed or a “fine” analysis relative to the first or “coarse” analysis. Indeed, in one embodiment, the second analysis may implement a more computational intensive process, without sacrificing throughput, since only a small portion of the photomask or wafer is inspected in the second analysis. In this way, the detailed analysis of the defect candidates may identify (i) all or substantially all of the actual defects and/or (ii) only the actual defects from the potential defects identified during the first analysis.

    摘要翻译: 这里描述和说明了许多发明。 在一个方面,本发明涉及用于检查集成电路的技术和系统,包括例如使用光掩模投影,提供或形成在晶片上的图案或光掩模本身上的图案。 该方面的检查系统和技术包括首先识别,确定和/或检测潜在缺陷的区域和/或图案,该区域和/或图案通过去除,过滤和/或从一组潜在的缺陷中消除任何和/或所有典型的,规则的或正常的 模式。 可能通过快速执行的算法相对较快地执行潜在缺陷的识别,确定和/或检测。 以这种方式,快速执行第一个或“粗略”分析,并从进一步的分析中消除一些,许多,全部或基本上所有常规,正常或典型的模式。 此后,进行第二更详细的分析。 该第二分析集中在在光掩模或晶片的第一次分析期间(即,“粗略”分析))中识别,确定和/或检测到的潜在缺陷集合。 第二次分析可能相对于第一次或“粗略”分析可能是更详细或“精细”的分析。 实际上,在一个实施例中,第二分析可以实现更加计算密集的过程,而不会牺牲吞吐量,因为在第二次分析中只检查了一小部分光掩模或晶片。 以这种方式,缺陷候选人的详细分析可以识别(i)所有或基本上所有的实际缺陷和/或(ii)仅在第一次分析期间识别的潜在缺陷的实际缺陷。

    Apparatus for magnetic separation of cells
    4.
    发明授权
    Apparatus for magnetic separation of cells 有权
    细胞磁分离装置

    公开(公告)号:US09267943B2

    公开(公告)日:2016-02-23

    申请号:US13284482

    申请日:2011-10-28

    IPC分类号: G01N33/543 B03C1/01 B03C1/28

    摘要: Described here is an automated robotic device that isolates circulating tumor cells (CTCs) or other biological structures with extremely high purity. The device uses powerful magnetic rods covered in removable plastic sleeves. These rods sweep through blood samples, capturing, e.g., cancer cells labeled with antibodies linked to magnetically responsive particles such as superparamagnetic beads. Upon completion of the capturing protocol, the magnetic rods undergo several rounds of washing, thereby removing all contaminating blood cells. The captured target cells are released into a final capture solution by removing the magnetic rods from the sleeves. Additionally, cells captured by this device show no reduced viability when cultured after capture. Cells are captured in a state suitable for genetic analysis. Also disclosed are methods for single cell analysis. Being robotic allows the device to be operated with high throughput.

    摘要翻译: 这里描述了一种自动化的机器人装置,其以非常高的纯度分离循环肿瘤细胞(CTC)或其他生物结构。 该设备使用强大的磁棒覆盖在可拆卸的塑料袖子。 这些棒穿过血液样品,捕获例如用与磁性响应颗粒例如超顺磁珠连接的抗体标记的癌细胞。 在完成捕获方案后,磁棒经历几轮洗涤,从而除去所有污染的血细胞。 通过从袖子中取出磁棒将捕获的靶细胞释放到最终的捕获溶液中。 此外,由该装置俘获的细胞在捕获后培养时显示出不降低的活力。 以适合于遗传分析的状态捕获细胞。 还公开了用于单细胞分析的方法。 机器人允许设备以高吞吐量运行。

    Methods and apparatus for magnetic separation of cells
    5.
    发明授权
    Methods and apparatus for magnetic separation of cells 有权
    细胞磁分离的方法和装置

    公开(公告)号:US08071395B2

    公开(公告)日:2011-12-06

    申请号:US12333213

    申请日:2008-12-11

    IPC分类号: G01N33/551

    摘要: Described here is an automated robotic device that isolates circulating tumor cells (CTCs) or other biological structures with extremely high purity. The device uses powerful magnetic rods covered in removable plastic sleeves. These rods sweep through blood samples, capturing, e.g., cancer cells labeled with antibodies linked to magnetically responsive particles such as superparamagnetic beads. Upon completion of the capturing protocol, the magnetic rods undergo several rounds of washing, thereby removing all contaminating blood cells. The captured target cells are released into a final capture solution by removing the magnetic rods from the sleeves. Additionally, cells captured by this device show no reduced viability when cultured after capture. Cells are captured in a state suitable for genetic analysis. Also disclosed are methods for single cell analysis. Being robotic allows the device to be operated with high throughput.

    摘要翻译: 这里描述了一种自动化的机器人装置,其以非常高的纯度分离循环肿瘤细胞(CTC)或其他生物结构。 该设备使用强大的磁棒覆盖在可拆卸的塑料袖子。 这些棒穿过血液样品,捕获例如用与磁性响应颗粒例如超顺磁珠连接的抗体标记的癌细胞。 在完成捕获方案后,磁棒经历几轮洗涤,从而除去所有污染的血细胞。 通过从袖子中取出磁棒将捕获的靶细胞释放到最终的捕获溶液中。 此外,由该装置俘获的细胞在捕获后培养时显示出不降低的活力。 以适合于遗传分析的状态捕获细胞。 还公开了用于单细胞分析的方法。 机器人允许设备以高吞吐量运行。

    Methods and Apparatus for Magnetic Separation of Cells
    6.
    发明申请
    Methods and Apparatus for Magnetic Separation of Cells 有权
    细胞磁分离的方法和装置

    公开(公告)号:US20090220979A1

    公开(公告)日:2009-09-03

    申请号:US12333213

    申请日:2008-12-11

    摘要: Described here is an automated robotic device that isolates circulating tumor cells (CTCs) or other biological structures with extremely high purity. The device uses powerful magnetic rods covered in removable plastic sleeves. These rods sweep through blood samples, capturing, e.g., cancer cells labeled with antibodies linked to magnetically responsive particles such as superparamagnetic beads. Upon completion of the capturing protocol, the magnetic rods undergo several rounds of washing, thereby removing all contaminating blood cells. The captured target cells are released into a final capture solution by removing the magnetic rods from the sleeves. Additionally, cells captured by this device show no reduced viability when cultured after capture. Cells are captured in a state suitable for genetic analysis. Also disclosed are methods for single cell analysis. Being robotic allows the device to be operated with high throughput.

    摘要翻译: 这里描述了一种自动化的机器人装置,其以非常高的纯度分离循环肿瘤细胞(CTC)或其他生物结构。 该设备使用强大的磁棒覆盖在可拆卸的塑料袖子。 这些棒穿过血液样品,捕获例如用与磁性响应颗粒例如超顺磁珠连接的抗体标记的癌细胞。 在完成捕获方案后,磁棒经历几轮洗涤,从而除去所有污染的血细胞。 通过从袖子中取出磁棒将捕获的靶细胞释放到最终的捕获溶液中。 此外,由该装置俘获的细胞在捕获后培养时显示出不降低的活力。 以适合于遗传分析的状态捕获细胞。 还公开了用于单细胞分析的方法。 机器人允许设备以高吞吐量运行。

    Apparatus for Magnetic Separation of Cells
    7.
    发明申请
    Apparatus for Magnetic Separation of Cells 有权
    细胞磁分离装置

    公开(公告)号:US20120045828A1

    公开(公告)日:2012-02-23

    申请号:US13284482

    申请日:2011-10-28

    IPC分类号: C12N5/09 C12M3/00

    摘要: Described here is an automated robotic device that isolates circulating tumor cells (CTCs) or other biological structures with extremely high purity. The device uses powerful magnetic rods covered in removable plastic sleeves. These rods sweep through blood samples, capturing, e.g., cancer cells labeled with antibodies linked to magnetically responsive particles such as superparamagnetic beads. Upon completion of the capturing protocol, the magnetic rods undergo several rounds of washing, thereby removing all contaminating blood cells. The captured target cells are released into a final capture solution by removing the magnetic rods from the sleeves. Additionally, cells captured by this device show no reduced viability when cultured after capture. Cells are captured in a state suitable for genetic analysis. Also disclosed are methods for single cell analysis. Being robotic allows the device to be operated with high throughput.

    摘要翻译: 这里描述了一种自动化的机器人装置,其以非常高的纯度分离循环肿瘤细胞(CTC)或其他生物结构。 该设备使用强大的磁棒覆盖在可拆卸的塑料袖子。 这些棒穿过血液样品,捕获例如用与磁性响应颗粒例如超顺磁珠连接的抗体标记的癌细胞。 在完成捕获方案后,磁棒经历几轮洗涤,从而除去所有污染的血细胞。 通过从袖子中取出磁棒将捕获的靶细胞释放到最终的捕获溶液中。 此外,由该装置俘获的细胞在捕获后培养时显示出不降低的活力。 以适合于遗传分析的状态捕获细胞。 还公开了用于单细胞分析的方法。 机器人允许设备以高吞吐量运行。