公开(公告)号：US06891240B2

公开(公告)日：2005-05-10

申请号：US10136683

申请日：2002-04-30

Applicant: John L. Dunec ,  Eric Peeters ,  Armin R. Volkel ,  Michel A. Rosa ,  Dirk DeBruyker ,  Thomas Hantschel

Inventor： John L. Dunec ,  Eric Peeters ,  Armin R. Volkel ,  Michel A. Rosa ,  Dirk DeBruyker ,  Thomas Hantschel

IPC: B81B3/00 ,  G02B26/08 ,  H01L29/82

CPC classification number: B81B3/0008 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  G02B26/0841 ,  H02N1/002

Abstract: A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.

Abstract translation: 一种MEMS系统，包括可在宽范围的运动中控制的固定电极和悬挂的可移动电极。 在固定电极位于可动电极下方的传统系统中，由于支撑可移动电极的支撑结构在可移动电极移动得太靠近固定电极时，运动范围受到限制。 通过将固定电极重新定位在移动电极的正下方，可以实现更宽范围的可控运动。 宽范围的可控运动在光交换应用中尤其重要。

公开(公告)号：US20050042117A1

公开(公告)日：2005-02-24

申请号：US10807128

申请日：2004-03-24

Applicant: Wen-Jian Lin

Inventor： Wen-Jian Lin

IPC: G02B26/08 ,  B81B3/00 ,  B81B7/00 ,  B81B7/02 ,  B81C1/00 ,  F04B37/02 ,  F04F99/00 ,  G02B26/00 ,  G09F9/00 ,  G09F9/30 ,  F04F11/00

CPC classification number: G02B26/001 ,  B81B7/0012 ,  B81B2201/045

Abstract: A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial layer and the supports, thus forming a micro electro mechanical system structure. Afterward, an adhesive is used to adhere and fix a protection structure to the substrate for forming a chamber to enclose the micro electro mechanical system structure, and at least one second opening is preserved on sidewalls of the chamber. A release etch process is subsequently employed to remove the sacrificial layer through the second opening in order to form cavities in an optical interference reflection structure. Finally, the second opening is closed to seal the optical interference reflection structure between the substrate and the protection structure.

Abstract translation: 第一电极和牺牲层依次形成在基板上，然后在第一电极和牺牲层中形成用于形成支撑件的第一开口。 支撑件形成在第一开口中，然后在牺牲层和支撑件上形成第二电极，从而形成微机电系统结构。 之后，使用粘合剂将保护结构粘附并固定到基底上以形成腔室以包围微机电系统结构，并且至少一个第二开口保留在腔室的侧壁上。 随后采用释放蚀刻工艺以通过第二开口去除牺牲层，以便在光学干涉反射结构中形成空腔。 最后，关闭第二个开口以密封衬底和保护结构之间的光学干涉反射结构。

公开(公告)号：US20040247237A1

公开(公告)日：2004-12-09

申请号：US09932433

申请日：2001-08-18

Inventor： Murali Chaparala ,  Michael J. Daneman

IPC: G02B006/26 ,  G02B006/42

CPC classification number: G02B26/0841 ,  B81B3/0008 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/32 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B2006/12104

Abstract: A method is disclosed for operating a MEMS device having a flap that is movable with respect to a base. The method includes applying a force to the flap to move the flap at least partially out of contact with an underlying base. Means for applying such a biasing force may be incorporated into a microelectromechanical (MEMS) apparatus having a base and a flap with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position Electrodes may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. The base may be made from a substrate portion of a silicon-on-insulator (SOI) wafer and the flap defined from a device layer of the SOI wafer. The flap may be connected to the base by one or more flexures such as torsional beams. An array of one or more of such structures may be used to form an optical switch.

Abstract translation: 公开了一种用于操作具有相对于基座可移动的翼片的MEMS装置的方法。 所述方法包括向所述翼片施加力以使所述翼片至少部分地与下面的基座接触。 用于施加这种偏压力的装置可以结合到具有基部和翼片的微机电（MEMS）装置中，该翼片具有联接到基部的部分，使得翼片可以在第一和第二位置之间移动离开基部的平面。 底座可以具有一个具有很大垂直侧壁的空腔，当翼片处于第二位置时，电极可以被放置在垂直侧壁上并与基座电隔离以提供瓣片向侧壁的静电夹持。 基底可以由绝缘体上硅（SOI）晶片的衬底部分和从SOI晶片的器件层限定的瓣形成。 翼片可以通过一个或多个挠曲件（例如扭转梁）连接到基座。 可以使用一个或多个这样的结构的阵列来形成光学开关。

公开(公告)号：US20040227428A1

公开(公告)日：2004-11-18

申请号：US10868603

申请日：2004-06-14

Applicant: Microsoft Corporation

Inventor： Michael J. Sinclair

IPC: H02K005/16 ,  H02K007/08 ,  H02N001/00

CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

Abstract translation: 静电双压电晶片致动器包括悬臂式柔性双压电晶臂，其在一端固定并绝缘到平面衬底。 在静电激活状态下，双压电晶片臂通常平行于平面衬底。 在松弛状态下，双压电晶片臂中的残余应力使其自由端从平面基板向外延伸。 致动器包括固定到基板并与基板绝缘并位于双压电晶片臂下方并与之对准的基板电极。 施加在双压电晶片臂和衬底电极之间的电势差使得双压电晶片臂和衬底电极之间的静电吸引力激活致动器。 作为可以使用这种致动器的示例性应用，描述了一种微电子机械光学显示系统。

公开(公告)号：US06795603B2

公开(公告)日：2004-09-21

申请号：US10195741

申请日：2002-07-16

Applicant: Motoyasu Utsunomiya

Inventor： Motoyasu Utsunomiya

IPC: G02B635

CPC classification number: G02B6/357 ,  B81B3/0062 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3556

Abstract: An analog beam-steering free-space optical switch for connecting and switching a plurality of optical signals includes a plurality of optical devices and electrostatic actuators for driving the optical devices. Each optical device is pivotally borne so as to allow rotation around a prescribed center of rotation, and each electrostatic actuator includes the substrate that holds the optical devices and a plurality of driving electrodes that are secured to the substrate. The application of electrostatic voltage between an optical device and the driving electrodes generates electrostatic driving torque for causing the optical device to tilt with respect to the substrate around the center of rotation, whereby the direction of reflection of an optical signal is changed. The plurality of driving electrodes are arranged in a radial pattern relative to the electrode center.

Abstract translation: 用于连接和切换多个光信号的模拟光束转向自由空间光开关包括用于驱动光学装置的多个光学装置和静电致动器。 每个光学装置枢转地支承以允许围绕规定的旋转中心旋转，并且每个静电致动器包括保持光学装置的基板和固定到基板的多个驱动电极。 在光学器件和驱动电极之间施加静电电压产生静电驱动转矩，以使光学元件相对于旋转中心周围的衬底倾斜，从而改变光信号的反射方向。 多个驱动电极相对于电极中心以径向图案布置。

公开(公告)号：US06759787B2

公开(公告)日：2004-07-06

申请号：US10191917

申请日：2002-07-09

Applicant: Samuel Lee Miller ,  Paul Jackson McWhorter ,  Murray Steven Rodgers ,  Jeffry J. Sniegowski ,  Stephen M. Barnes

Inventor： Samuel Lee Miller ,  Paul Jackson McWhorter ,  Murray Steven Rodgers ,  Jeffry J. Sniegowski ,  Stephen M. Barnes

IPC: H02N108

CPC classification number: B81B3/004 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0307 ,  B81B2203/053 ,  B81B2203/058 ,  G02B6/122 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0841 ,  G02B2006/12104 ,  G11B7/0927 ,  H02N1/006 ,  H02N1/008

Abstract: A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display. The MEM apparatus with-the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.

Abstract translation: 公开了一种微机电（MEM）装置，其具有能够在基板上升高并以任意角度倾斜的平台，该平台使用支撑平台并控制其运动的多个柔性构件。 每个柔性构件由一个或多个用于弯曲柔性构件的MEM致动器进一步控制。 MEM致动器可以是静电梳状致动器或垂直拉链致动器，或其组合。 MEM装置可以包括镜面涂层以形成用于重定向或切换用于投影显示器的一个或多个光束的可编程镜子。 具有镜面涂层的MEM装置还具有用于在用于局域光纤网络的光纤之间切换光束或用于光纤电信或数据通信系统的应用。

公开(公告)号：US20040109215A1

公开(公告)日：2004-06-10

申请号：US10703827

申请日：2003-11-07

Inventor： James A. Hunter

IPC: H01L021/00 ,  G02F001/00 ,  G02B026/00 ,  G02F001/03

CPC classification number: G02B26/0808 ,  B81B2201/045 ,  B81B2207/015 ,  B81B2207/07 ,  B81C1/00246 ,  B81C2201/016 ,  B81C2203/0735 ,  B81C2203/0778 ,  H01L27/0611

Abstract: An integrated device including one or more device drivers and a diffractive light modulator monolithically coupled to the one or more driver circuits. The one or more driver circuits are configured to process received control signals and to transmit the processed control signals to the diffractive light modulator. A method of fabricating the integrated device preferably comprises fabricating a front-end portion for each of a plurality of transistors, isolating the front-end portions of the plurality of transistors, fabricating a front-end portion of a diffractive light modulator, isolating the front end portion of the diffractive light modulator, fabricating interconnects for the plurality of transistors, applying an open array mask and wet etch to access the diffractive light modulator, and fabricating a back-end portion of the diffractive light modulator, thereby monolithically coupling the diffractive light modulator and the plurality of transistors.

Abstract translation: 包括一个或多个器件驱动器和单片耦合到所述一个或多个驱动器电路的衍射光调制器的集成器件。 一个或多个驱动器电路被配置为处理接收到的控制信号并将经处理的控制信号传送到衍射光调制器。 一种制造集成器件的方法优选包括制造用于多个晶体管中的每一个晶体管的前端部分，隔离多个晶体管的前端部分，制造衍射光调制器的前端部分，将前部 衍射光调制器的端部，制造用于多个晶体管的互连，施加开放阵列掩模和湿蚀刻以访问衍射光调制器，以及制造衍射光调制器的后端部分，从而将衍射光 调制器和多个晶体管。

公开(公告)号：US20040106221A1

公开(公告)日：2004-06-03

申请号：US10720498

申请日：2003-11-24

Inventor： James A. Hunter ,  Charles B. Roxlo ,  Alexander Payne

IPC: H01L021/00

CPC classification number: G02B26/0808 ,  B81B2201/045 ,  B81B2207/015 ,  B81B2207/07 ,  B81C1/00246 ,  B81C2201/016 ,  B81C2203/0735 ,  B81C2203/0778 ,  H01L27/0611

Abstract: An integrated device includes one or more device drivers and a micro-electro-mechanical system (MEMS) structure monolithically coupled to the one or more device drivers. The one or more device drivers are configured to process received control signals and to transmit the processed control signals to the MEMS structure. Methods of fabricating integrated devices are also disclosed.

Abstract translation: 集成器件包括一个或多个器件驱动器和与该一个或多个器件驱动器单片耦合的微机电系统（MEMS）结构。 一个或多个设备驱动器被配置为处理接收的控制信号并将经处理的控制信号传送到MEMS结构。 还公开了制造集成器件的方法。

公开(公告)号：US20040061961A1

公开(公告)日：2004-04-01

申请号：US10468060

申请日：2003-08-14

Inventor： Serge Valette

IPC: G02B007/182

CPC classification number: B81B3/0062 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B26/0841

Abstract: This invention relates to a micro-mirror comprising a fixed part (31), a movable part (41, 48) comprising means of reflection (48) and means of articulation linking the movable part to the fixed part, this micro-mirror is characterised in that the means of articulation are made of a pivot hinge (47) located under the movable part between the latter and the fixed part and capable of allowing displacement of the movable part according to axes of rotation contained in the movable part and going through the axis of the pivot hinge, and in which the fixed comprises at least a cavity (36) facing at least a zone of an end of the movable part. The invention also relates to a matrix of pivoting micro-mirrors and a manufacturing process of such micro-mirrors. These micro-mirrors can notably be used in optical routing systems or in image projection systems.

Abstract translation: 本发明涉及一种微镜，其包括固定部分（31），包括反射装置（48）的可移动部分（41,48）以及将可移动部分连接到固定部分的铰接装置，该微反射镜的特征在于 其特征在于，所述铰接装置由枢轴铰链（47）构成，所述枢转铰链（47）位于所述枢轴铰链（47）之下，所述枢转铰链（47）位于所述枢转铰链（47）之间，所述枢转铰链（47）位于所述枢转铰链 枢轴铰链的轴线，并且其中固定件包括至少面向至少可移动部件的端部的区域的空腔（36）。 本发明还涉及一种旋转微镜的矩阵和这种微镜的制造过程。 这些微镜可以显着地用于光路由系统或图像投影系统中。

公开(公告)号：US20040027225A1

公开(公告)日：2004-02-12

申请号：US10307367

申请日：2002-12-02

Inventor： Hsiao-Wen Lee ,  Wen-I Wu ,  Shih-Yi Wen ,  Wu-Cheng Kuo ,  Jui-Ping Weng

IPC: H01H071/16

CPC classification number: B81B3/0051 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/053 ,  G02B26/001 ,  G02B26/0808

Abstract: A micro electromechanical differential actuator is comprised of a suspension arm structure and/or a bridge structure to make a two-degree-of-freedom and bi-directional motion. The actuator support base can make out-of-plane or in-plane vertical and horizontal motions. The invention is applicable in optical micro electromechanical devices such as optical switches, variable optical attenuators, optical tunable filters, modulators, tunable VCSEL's, grating modulators, micro displays, and RF switches.

Abstract translation: 微机电差速器致动器由悬臂结构和/或桥结构构成，以实现两自由度和双向运动。 致动器支撑基座可以进行平面外或平面内垂直和水平运动。 本发明可应用于诸如光开关，可变光衰减器，光可调谐滤波器，调制器，可调VCSEL，光栅调制器，微显示器和RF开关等光学微机电器件。