公开(公告)号：US07323354B2

公开(公告)日：2008-01-29

申请号：US10995406

申请日：2004-11-24

Applicant: Naokatsu Ikegami

Inventor： Naokatsu Ikegami

IPC: H01L21/00

CPC classification number: B81C3/008 ,  G01P15/0802 ,  G01P2015/0828

Abstract: The present invention provides a method of manufacturing MEMS devices, comprising the steps of forming MEMS device bodies in a first substrate, defining concave portions around the MEMS device bodies over the first substrate, forming convex portions coincident with the concave portions in a second substrate, fitting the convex portions in the concave portions, respectively, to join the first substrate and the second substrate to each other, thereby forming a third substrate, sticking the third substrate to a UV sheet on the second substrate side, and dicing the third substrate to separate the MEMS device bodies from one another.

Abstract translation: 本发明提供一种制造MEMS器件的方法，包括以下步骤：在第一衬底中形成MEMS器件本体，在第一衬底上限定围绕MEMS器件本体的凹部，形成与第二衬底中的凹部重合的凸部， 将凹部分别嵌入凹部，使第一基板和第二基板彼此接合，由此形成第三基板，将第三基板粘贴在第二基板侧的UV片上，将第三基板切割成 将MEMS器件本体彼此分开。

公开(公告)号：US07296363B2

公开(公告)日：2007-11-20

申请号：US11160401

申请日：2005-06-22

Applicant: Lee Danisch ,  Murray Lowery-Simpson

Inventor： Lee Danisch ,  Murray Lowery-Simpson

IPC: G01B5/20

CPC classification number: G01P15/18 ,  G01P15/125 ,  G01P2015/0828

Abstract: The present invention provides for a sensor array having at least one field-measuring sensor and at least one curvature-measuring sensor within a flexible substrate, the field-measuring sensors capable of providing orientation data of the flexible substrate relative to a field and the curvature-measuring sensors capable of providing relative orientation data within the substrate, for measuring dynamic and static shapes and vibration of geotechnical, structural and biological bodies.

Abstract translation: 本发明提供了一种传感器阵列，其具有至少一个场测量传感器和柔性基底内的至少一个曲率测量传感器，所述场测量传感器能够相对于场和曲率提供柔性基板的取向数据 - 测量能够在基板内提供相对取向数据的传感器，用于测量岩土，结构和生物体的动态和静态形状和振动。

公开(公告)号：US20070119252A1

公开(公告)日：2007-05-31

申请号：US11600175

申请日：2006-11-16

Applicant: Scott Adams ,  Scott Miller ,  June Shen-Epstein ,  Keith Epstein

Inventor： Scott Adams ,  Scott Miller ,  June Shen-Epstein ,  Keith Epstein

IPC: G01P15/18 ,  G01P15/125 ,  H01L21/00

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0828

Abstract: In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor.

Abstract translation: 在本发明的一个实施例中，提供了一种包括基板，第一传感器和第二传感器的微机电（MEMS）加速度计。 第一传感器被配置为测量沿着平行于衬底的平面的第一轴的加速度。 第二传感器被配置成沿垂直于基板的平面的轴测量加速度。 第二传感器包括第一梁，第二梁和单个支撑结构。 单个支撑结构相对于基板支撑第一和第二光束，其中第一和第二光束围绕第一传感器。

公开(公告)号：US07207423B2

公开(公告)日：2007-04-24

申请号：US10491734

申请日：2002-09-13

Applicant: Peter Lohberg ,  Michael Zydek ,  Wolfgang Ziebart

Inventor： Peter Lohberg ,  Michael Zydek ,  Wolfgang Ziebart

IPC: F16D66/00

CPC classification number: B60G17/0165 ,  B60G17/019 ,  B60G17/01908 ,  B60G17/01933 ,  B60G2400/102 ,  B60G2400/206 ,  B60G2400/208 ,  B60G2400/52 ,  B60G2400/91 ,  B60G2800/70 ,  B60G2800/702 ,  B60G2800/916 ,  G01P1/023 ,  G01P15/08 ,  G01P2015/0828 ,  G08C19/02

Abstract: An acceleration sensing unit (1) includes an acceleration sensor element (4), wherein said sensing unit (1) emits an electric signal at a signal output (k3, k4), the sensing unit (1) is electrically active and supplied with electric energy through the signal output.In an assembly composed of the above-mentioned sensing unit and a control unit, the sensing unit includes at least one signal line (3) connected to control unit (2), with said control unit being in particular an electronic motor vehicle brake control unit, and the control unit (2) transmits the energy for the connected sensing unit(s) (1) by way of the signal lines (3).

Abstract translation: 加速度检测单元（1）包括加速度传感器元件（4），其中所述检测单元（1）以信号输出（k 3，k 4）发射电信号，所述感测单元（1）是电活动的并且被提供 用电能通过信号输出。 在由上述检测单元和控制单元组成的组件中，感测单元包括连接到控制单元（2）的至少一个信号线（3），其中所述控制单元尤其是电子机动车辆制动控制单元 ，并且控制单元（2）通过信号线（3）传送所连接的感测单元（1）的能量。

公开(公告)号：US07178401B2

公开(公告)日：2007-02-20

申请号：US11105474

申请日：2005-04-14

Applicant: Douglas S. Byrd

Inventor： Douglas S. Byrd

IPC: G01P15/10

CPC classification number: G01P15/18 ,  G01P15/097 ,  G01P2015/0828

Abstract: The accelerometer includes an inertial mass, a fixed base and at least one or more supports/sensors for supporting the mass from the base rendering the support system statically indeterminate. The supports/sensors are preferably double-ended dual beam tuning forks suspended between mounting pads and vibrated by an oscillator. By adding one or more supports/sensors beyond those supports/sensors necessary for a statically determinate support system, the support system is rendered statically indeterminate and therefore sensitive in one or more directions.

Abstract translation: 加速度计包括惯性质量块，固定基座和至少一个或多个支撑/传感器，用于从基座支撑质量，从而使得支撑系统静止不动。 支撑/传感器优选是悬挂在安装焊盘之间并由振荡器振动的双端双梁调谐叉。 通过在静态确定的支持系统所需的支撑/传感器之外增加一个或多个支撑/传感器，支撑系统呈现静态不确定性，因此在一个或多个方向上敏感。

公开(公告)号：US07178398B2

公开(公告)日：2007-02-20

申请号：US11010588

申请日：2004-12-13

Applicant: Robert E. Stewart

Inventor： Robert E. Stewart

IPC: G01P15/00

CPC classification number: G01P15/18 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0828 ,  G01P2015/0831

Abstract: An apparatus in one example comprises a first proofmass employable to sense a first acceleration along a first input axis; a second proofmass employable to sense a second acceleration along a second input axis; and a third proofmass employable to sense a third acceleration along a third input axis. The first input axis, the second input axis, and the third input axis are substantially orthogonal. The first proofmass, the second proofmass, and the third proofmass are substantially coplanar.

Abstract translation: 一个示例中的装置包括可用于感测沿着第一输入轴的第一加速度的第一校正; 第二校正可用于感测沿着第二输入轴的第二加速度; 以及可用于感测沿着第三输入轴的第三加速度的第三校对。 第一输入轴，第二输入轴和第三输入轴基本上是正交的。 第一个校对，第二个校对和第三个校对是基本共面的。

公开(公告)号：US20060258038A1

公开(公告)日：2006-11-16

申请号：US11127457

申请日：2005-05-12

Applicant: David Rich ,  Steven Crist

Inventor： David Rich ,  Steven Crist

IPC: H01L21/00

CPC classification number: B81C1/00142 ,  B81B2201/0235 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81C2201/016 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0828

Abstract: A technique for manufacturing a piezoresistive sensing structure includes a number of process steps. Initially, a piezoresistive element is implanted into a first side of an assembly that includes a semiconductor material. A passivation layer is then formed on the first side of the assembly over the element. The passivation layer is then removed from selected areas on the first side of the assembly. A first mask is then provided on the passivation layer in a desired pattern. A beam, which includes the element, is then formed in the assembly over at least a portion of the assembly that is to provide a cavity. The passivation layer provides a second mask, in the formation of the beam, that determines a width of the formed beam.

Abstract translation: 制造压阻感测结构的技术包括多个工艺步骤。 最初，将压阻元件植入包括半导体材料的组件的第一侧。 然后在元件的组件的第一侧上形成钝化层。 然后从组件的第一侧上的选定区域去除钝化层。 然后以期望的图案在钝化层上提供第一掩模。 包括元件的梁然后在组件中形成在组件的至少一部分上以提供空腔。 钝化层在形成光束时提供第二掩模，其确定形成的光束的宽度。

公开(公告)号：US20060086577A1

公开(公告)日：2006-04-27

申请号：US10491734

申请日：2002-09-13

Applicant: Peter Lohberg ,  Michael Zydek ,  Wolfgang Ziebart

Inventor： Peter Lohberg ,  Michael Zydek ,  Wolfgang Ziebart

IPC: F16D66/00

CPC classification number: B60G17/0165 ,  B60G17/019 ,  B60G17/01908 ,  B60G17/01933 ,  B60G2400/102 ,  B60G2400/206 ,  B60G2400/208 ,  B60G2400/52 ,  B60G2400/91 ,  B60G2800/70 ,  B60G2800/702 ,  B60G2800/916 ,  G01P1/023 ,  G01P15/08 ,  G01P2015/0828 ,  G08C19/02

Abstract: An acceleration sensing unit (1) includes an acceleration sensor element (4), wherein said sensing unit (1) emits an electric signal at a signal output (k3, k4), the sensing unit (1) is electrically active and supplied with electric energy through the signal output. In an assembly composed of the above-mentioned sensing unit and a control unit, the sensing unit includes at least one signal line (3) connected to control unit (2), with said control unit being in particular an electronic motor vehicle brake control unit, and the control unit (2) transmits the energy for the connected sensing unit(s) (1) by way of the signal lines (33).

Abstract translation: 加速度检测单元（1）包括加速度传感器元件（4），其中所述检测单元（1）以信号输出（k 3，k 4）发射电信号，所述感测单元（1）是电活动的并且被提供 用电能通过信号输出。 在由上述检测单元和控制单元组成的组件中，感测单元包括连接到控制单元（2）的至少一个信号线（3），其中所述控制单元尤其是电子机动车辆制动控制单元 ，并且控制单元（2）通过信号线（3 3）传送所连接的感测单元（1）的能量。

公开(公告)号：US20050202585A1

公开(公告)日：2005-09-15

申请号：US11000652

申请日：2004-11-30

Applicant: Mark Eskridge

Inventor： Mark Eskridge

IPC: B81B3/00 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/125 ,  H01L21/00 ,  G01P15/00

CPC classification number: G01P15/125 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C2201/0133 ,  G01P15/08 ,  G01P15/097 ,  G01P2015/0828 ,  G01P2015/0831

Abstract: A method for suspending a movable structure form a support structure wherein first and second flat and thin arcuately shaped flexures are formed having spaced apart substantially planar and parallel opposing surfaces, each of the first and second flexures being structured for connection between a support structure and a movable structure to be suspended from the support structure and being aligned along a common axis of rotation between the support structure and the movable structure.

Abstract translation: 一种用于将可移动结构悬挂形成支撑结构的方法，其中形成具有间隔开的基本上平坦且平行的相对表面的第一和第二扁平和细弧形弯曲的弯曲部，所述第一和第二挠曲中的每一个构造成用于在支撑结构和 可移动结构从支撑结构悬挂并且沿着支撑结构和可移动结构之间的公共旋转轴对准。

公开(公告)号：US20050194652A1

公开(公告)日：2005-09-08

申请号：US11070786

申请日：2005-03-02

Applicant: Bertrand Dutoit ,  Sophie Birling ,  Jean-Michel Stauffer ,  Yves Dupraz

Inventor： Bertrand Dutoit ,  Sophie Birling ,  Jean-Michel Stauffer ,  Yves Dupraz

IPC: G01P1/00 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18 ,  H01L29/84

CPC classification number: G01P15/18 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0828

Abstract: Microelectromechanical system (MEMS) comprising: an active part (5) comprising an electromechanical device (28), at least one base (6) for fastening said microsystem on a support (8), at least one fastener (21, 21′) fastening said active part (5) to said at least one base (6) and allowing a displacement of said active part (5) relatively to said at least one base (6) along an axis (Z) more or less perpendicular to the plane of said support (8) when said microsystem is fastened onto said support (8), bumper elements (27, 27′, 37′) for limiting the amplitude of the displacements of said active part (5) relatively to said at least one base (6) along said perpendicular axis (Z). The active part (5) being capable of moving relatively to the base (6) to which it is fastened, it is isolated from any mechanical constraint that could be sustained by the base (6), in particular torsion or flexion due to it being fastened onto a support (8). On the other hand, since the movements of the active part (5) are limited by the bumper elements (27, 37, 27′, 37′), it can be guaranteed thanks to the invention that the fastener or fasteners (21, 21′) will not be stretched beyond their elasticity range, thus avoiding their irreversible deformation and/or their rupture.

Abstract translation: 微机电系统（MEMS）包括：包括机电装置（28）的活动部分（5），用于将所述微系统紧固在支撑件（8）上的至少一个基座（6），至少一个紧固件（21,21'）， 所述活动部分（5）到所述至少一个基座（6）并且允许所述有源部分（5）相对于所述至少一个基座（6）沿着轴线（Z）移位或多或少垂直于 当所述微系统被固定到所述支撑件（8）上时，所述支撑件（8），缓冲元件（27,27'，37'），用于限制所述有效部件（5）相对于所述至少一个基座 6）沿着所述垂直轴线（Z）。 有源部分（5）能够相对于其被紧固的基座（6）移动，它与由基座（6）可以承受的任何机械约束隔离，特别是由于它是扭转或屈曲 固定在支架（8）上。 另一方面，由于活动部件（5）的运动受到保险杠元件（27,37,27'，37'）的限制，因此可以确保紧固件或紧固件（21,21 '）不会超出其弹性范围，从而避免其不可逆变形和/或其破裂。