公开(公告)号：US06992014B2

公开(公告)日：2006-01-31

申请号：US10065720

申请日：2002-11-13

申请人： Casey J. Grant ,  Joel M. Sharrow ,  John J. Snyder

发明人： Casey J. Grant ,  Joel M. Sharrow ,  John J. Snyder

IPC分类号： H01L21/302 ,  H01L21/461

CPC分类号： H01L21/67253 ,  H01L21/31111

摘要： A method for controlling a process on a substrate. The method comprising: providing the substrate, the substrate having an upper surface, an opposite lower surface and an edge between the upper and lower surfaces; processing the upper surface of the substrate with a first fluid; directing a second fluid against a portion of the lower surface proximate to the edge of the substrate, wherein the second fluid flows adjacent to the edge of the substrate; and controlling the temperature of the second fluid in order to affect a processing of an edge region of the upper side of the substrate.

摘要翻译： 一种用于控制衬底上的工艺的方法。 所述方法包括：提供所述基底，所述基底具有上表面，相对的下表面和所述上表面和所述下表面之间的边缘; 用第一流体处理衬底的上表面; 将第二流体引导靠近所述基底的边缘的所述下表面的一部分，其中所述第二流体邻近所述基底的边缘流动; 以及控制第二流体的温度，以便影响衬底的上侧的边缘区域的处理。

公开(公告)号：US06884722B2

公开(公告)日：2005-04-26

申请号：US09964918

申请日：2001-09-27

申请人： Casey J. Grant ,  Robert K. Leidy ,  Joel M. Sharrow

发明人： Casey J. Grant ,  Robert K. Leidy ,  Joel M. Sharrow

IPC分类号： H01L21/28 ,  H01L21/3213 ,  H01L21/336 ,  H01L21/302

CPC分类号： H01L29/6659 ,  H01L21/28114 ,  H01L21/32134 ,  H01L21/32139

摘要： Disclosed is a method of fabricating a polysilicon line, comprising: forming a patterned hard mask layer over a polysilicon layer; patterning the polysilicon layer to provide a hard mask-capped polysilicon line having a first width; and isotropically removing portions of the polysilicon line to a second width.

摘要翻译： 公开了一种制造多晶硅线的方法，包括：在多晶硅层上形成图案化的硬掩模层; 图案化多晶硅层以提供具有第一宽度的硬掩模帽多晶硅线; 并且将多晶硅线的各向同性地去除到第二宽度。

公开(公告)号：US09230725B2

公开(公告)日：2016-01-05

申请号：US13404485

申请日：2012-02-24

申请人： Mete Erturk ,  John D. Gillis ,  Casey J. Grant ,  David Scagnelli ,  Anthony K. Stamper

发明人： Mete Erturk ,  John D. Gillis ,  Casey J. Grant ,  David Scagnelli ,  Anthony K. Stamper

IPC分类号： H01F17/06 ,  H01F41/04 ,  H01F17/00 ,  H01L23/522 ,  H01L23/528 ,  H01L23/64 ,  H01L49/02 ,  H01F17/04 ,  H01F27/28

CPC分类号： H01F17/0006 ,  H01F17/04 ,  H01F27/2847 ,  H01F41/04 ,  H01F41/041 ,  H01F41/045 ,  H01F2017/0053 ,  H01F2017/0073 ,  H01F2017/046 ,  H01L23/5227 ,  H01L23/528 ,  H01L23/645 ,  H01L28/10 ,  H01L2924/0002 ,  H01L2924/3011 ,  Y10T29/49004 ,  Y10T29/4902 ,  Y10T29/49069 ,  Y10T29/49073 ,  Y10T29/49156 ,  H01L2924/00

摘要： Embodiments are provided that include methods of designing an inductor. The inductor can include a conductive line including at least one turn and an opening positioned within an interior of a region of the conductive line. Embodiments of forming the inductor can include: providing an inductor design including a conductive line having at least one turn; determining a region of the conductive line that has current density below a threshold; and forming an opening in the region, the opening enclosed within the conductive line.

摘要翻译： 提供了包括设计电感器的方法的实施例。 电感器可以包括包括至少一个匝的导电线和位于导电线的区域的内部内的开口。 形成电感器的实施例可以包括：提供包括具有至少一匝的导线的电感器设计; 确定电流密度低于阈值的导线的区域; 以及在该区域中形成开口，封闭在导电线内的开口。

公开(公告)号：US08193893B2

公开(公告)日：2012-06-05

申请号：US12055336

申请日：2008-03-26

申请人： Mete Erturk ,  John D. Gillis ,  Casey J. Grant ,  David Scagnelli ,  Anthony K. Stamper

发明人： Mete Erturk ,  John D. Gillis ,  Casey J. Grant ,  David Scagnelli ,  Anthony K. Stamper

IPC分类号： H01F5/00 ,  H01F27/28

CPC分类号： H01F17/0006 ,  H01F17/04 ,  H01F27/2847 ,  H01F41/04 ,  H01F41/041 ,  H01F41/045 ,  H01F2017/0053 ,  H01F2017/0073 ,  H01F2017/046 ,  H01L23/5227 ,  H01L23/528 ,  H01L23/645 ,  H01L28/10 ,  H01L2924/0002 ,  H01L2924/3011 ,  Y10T29/49004 ,  Y10T29/4902 ,  Y10T29/49069 ,  Y10T29/49073 ,  Y10T29/49156 ,  H01L2924/00

摘要： Embodiments of an inductor including a conductive line including at least one turn and an opening positioned within an interior of a region of the conductive line are disclosed. Embodiments of a related method of designing the inductor are also disclosed.

摘要翻译： 公开了一种电感器的实施例，其包括包括至少一个匝的导线和位于导线的区域内部的开口。 还公开了设计电感器的相关方法的实施例。

公开(公告)号：US07872692B2

公开(公告)日：2011-01-18

申请号：US12056795

申请日：2008-03-27

申请人： Ahmed Y. Ginawi ,  Casey J. Grant ,  Christopher Ro ,  Sebastian T. Ventrone

发明人： Ahmed Y. Ginawi ,  Casey J. Grant ,  Christopher Ro ,  Sebastian T. Ventrone

IPC分类号： H04N5/50 ,  H04N5/44

CPC分类号： H04N7/163 ,  H04N21/4383 ,  H04N21/4394 ,  H04N21/44008 ,  H04N21/472 ,  H04N21/812

摘要： A design structure for systems for switching a displayed signal for a display between a plurality of signals are disclosed. In one embodiment, the design structure is embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit, and includes: a system for switching a displayed signal for a display between a plurality of signals, the system including: a microcontroller; a chooser for setting a primary signal from a plurality of program-variable signals; a monitor tuner coupled to the microcontroller for tuning the primary signal during switching of the displayed signal from the primary signal to a secondary signal; a detector coupled to the monitor tuner and the microcontroller for detecting a predetermined condition in the primary signal; and a selector coupled to the microcontroller for switching the displayed signal from the secondary signal to the primary signal upon occurrence of the predetermined condition.

摘要翻译： 公开了用于在多个信号之间切换用于显示的显示信号的系统的设计结构。 在一个实施例中，设计结构体现在用于设计，制造或测试集成电路的机器可读介质中，并且包括：用于在多个信号之间切换用于显示的显示信号的系统，所述系统包括：微控制器 ; 用于从多个可编程信号设置主信号的选择器; 耦合到微控制器的监视器调谐器，用于在将所显示的信号从主信号切换到辅助信号期间调谐主信号; 耦合到所述监视器调谐器和所述微控制器的检测器，用于检测所述主信号中的预定条件; 以及耦合到微控制器的选择器，用于在发生预定条件时将显示的信号从次级信号切换到主信号。

公开(公告)号：US20090243778A1

公开(公告)日：2009-10-01

申请号：US12055336

申请日：2008-03-26

申请人： Mete Erturk ,  John D. Gillis ,  Casey J. Grant ,  David Scagnelli ,  Anthony K. Stamper

发明人： Mete Erturk ,  John D. Gillis ,  Casey J. Grant ,  David Scagnelli ,  Anthony K. Stamper

IPC分类号： H01F5/00 ,  G06F17/50

CPC分类号： H01F17/0006 ,  H01F17/04 ,  H01F27/2847 ,  H01F41/04 ,  H01F41/041 ,  H01F41/045 ,  H01F2017/0053 ,  H01F2017/0073 ,  H01F2017/046 ,  H01L23/5227 ,  H01L23/528 ,  H01L23/645 ,  H01L28/10 ,  H01L2924/0002 ,  H01L2924/3011 ,  Y10T29/49004 ,  Y10T29/4902 ,  Y10T29/49069 ,  Y10T29/49073 ,  Y10T29/49156 ,  H01L2924/00

摘要： Embodiments of an inductor including a conductive line including at least one turn and an opening positioned within an interior of a region of the conductive line are disclosed. Embodiments of a related method of designing the inductor are also disclosed.

摘要翻译： 公开了一种电感器的实施例，其包括包括至少一个匝的导线和位于导线的区域内部的开口。 还公开了设计电感器的相关方法的实施例。

公开(公告)号：US06776171B2

公开(公告)日：2004-08-17

申请号：US09892954

申请日：2001-06-27

申请人： Nicole S. Carpenter ,  Joseph R. Drennan ,  Alison K. Easton ,  Casey J. Grant ,  Andrew S. Hoadley ,  Kenneth F. McAvey, Jr. ,  Joel M. Sharrow ,  William A. Syverson ,  Kenneth H. Yao

发明人： Nicole S. Carpenter ,  Joseph R. Drennan ,  Alison K. Easton ,  Casey J. Grant ,  Andrew S. Hoadley ,  Kenneth F. McAvey, Jr. ,  Joel M. Sharrow ,  William A. Syverson ,  Kenneth H. Yao

IPC分类号： B08B700

CPC分类号： B08B7/0014

摘要： An apparatus and method are provided for removing contaminate particulate matter from substrate surfaces such as semiconductor wafers. The method and apparatus use a material, preferably a liquid curable polymer, which is applied as a sacrificial coating to the surface of a substrate containing contaminate particulate matter thereon. An energy source is used to dislodge the contaminate particulate matter from the surface of the wafer into the sacrificial coating so that the particles are partially or fully encapsulated and suspended in the sacrificial coating. The sacrificial coating is then removed. The coating is preferably formed into a film to facilitate removal of the coating by pulling (stripping) the film providing a cleaner substrate surface.