Method of reading, erasing and programming a nonvolatile flash-EEPROM
memory arrray using source line switching transistors
    11.
    发明授权
    Method of reading, erasing and programming a nonvolatile flash-EEPROM memory arrray using source line switching transistors 失效
    使用源极线开关晶体管读取,擦除和编程非易失性闪存EEPROM存储器的方法

    公开(公告)号:US5587946A

    公开(公告)日:1996-12-24

    申请号:US212907

    申请日:1994-03-15

    摘要: To reduce read and write errors caused by depleted memory array cells being turned on even when not selected, the nonselected memory cells are so biased as to present a floating terminal and a terminal at a positive voltage with respect to the substrate region. The threshold voltage of nonselected cells (i.e., the minimum voltage between the gate and source terminals for the cell to be turned on) increases due to a "body effect", whereby the threshold voltage depends on the voltage drop between the source terminal and the substrate. The source line of a selected cell is biased to a positive value greater than that of the bit line of the selected cell. Methods for reading, writing and erasing cells using certain voltage levels are disclosed.

    摘要翻译: 为了减少由于耗尽的存储器阵列单元即使未被选择而导通的读取和写入错误,非选择的存储器单元被偏置以使浮动端子和端子相对于衬底区域处于正电压。 非选择单元的阈值电压(即,用于导通的单元的栅极和源极端子之间的最小电压)由于“体效应”而增加,由此阈值电压取决于源极端子与源极端子之间的电压降 基质。 所选单元格的源极线被偏置为大于所选单元的位线的正值。 公开了使用特定电压电平读取,写入和擦除单元的方法。

    Process and structure for measuring the planarity degree of a dielectric
layer in an integrated circuit and integrated circuit including means
for performing said process
    12.
    发明授权
    Process and structure for measuring the planarity degree of a dielectric layer in an integrated circuit and integrated circuit including means for performing said process 失效
    用于测量集成电路中的电介质层的平面度的集成电路和集成电路的工艺和结构,包括用于执行所述工艺的装置

    公开(公告)号:US5543633A

    公开(公告)日:1996-08-06

    申请号:US92717

    申请日:1993-07-15

    CPC分类号: G01B21/30 G01B7/345

    摘要: A method for measuring the degree of planarity in an integrated circuit includes depositing, onto a dielectric layer to be measured for planarity, a predetermined measure path of a conductive film and measuring the electric resistance of said measure path. The resistance of such a measure path is minimal where the surface on which it has been deposited is perfectly planar, and increases with the surface deviation from perfect planarity. An integrated circuit containing a measurement portion of conductive film and a reference portion of conductive film is described.

    摘要翻译: 一种用于测量集成电路中的平面度的方法包括:将待测量的电介质层平坦化地沉积在导电膜的预定测量路径上并测量所述测量路径的电阻。 这种测量路径的电阻在其沉积的表面是完全平坦的时是最小的,并且随着与完美平面性的表面偏差而增加。 描述了包含导电膜的测量部分和导电膜的参考部分的集成电路。