摘要:
To reduce read and write errors caused by depleted memory array cells being turned on even when not selected, the nonselected memory cells are so biased as to present a floating terminal and a terminal at a positive voltage with respect to the substrate region. The threshold voltage of nonselected cells (i.e., the minimum voltage between the gate and source terminals for the cell to be turned on) increases due to a "body effect", whereby the threshold voltage depends on the voltage drop between the source terminal and the substrate. The source line of a selected cell is biased to a positive value greater than that of the bit line of the selected cell. Methods for reading, writing and erasing cells using certain voltage levels are disclosed.
摘要:
A method for measuring the degree of planarity in an integrated circuit includes depositing, onto a dielectric layer to be measured for planarity, a predetermined measure path of a conductive film and measuring the electric resistance of said measure path. The resistance of such a measure path is minimal where the surface on which it has been deposited is perfectly planar, and increases with the surface deviation from perfect planarity. An integrated circuit containing a measurement portion of conductive film and a reference portion of conductive film is described.
摘要:
The process calls for covering of the dielectric with a thin additional layer of polysilicon which has the function of protecting the dielectric from any defects which would otherwise be introduced from the subsequent masking.
摘要:
After growth of gate oxide, deposit and separation of a first polycrystalline silicon layer, growth of dielectric oxide and removal thereof from the transistor area, and deposit of a second polycrystalline layer, a single mask makes possible first etching of the second silicon layer and of the dielectric oxide and then of the first silicon layer of the gate oxide at the sides of the cell and transistor areas.