Abstract:
A reaction apparatus comprising a heat exchanger 5 and a reactor 1 with a heater 2, which are enclosed in an outer casing 6, the top of the heat exchanger 5 being connected to the reactor 1, the other end part of the heat exchanger 5 and the bottom of the outer casing 6 being fixed to each other by a flange 4, and a double piping 7 for introducing a gas to be treated and discharging the treated gas being connected to the other end part of the heat exchanger 5, such that the gas passes through the heat exchanger 5, the reactor 1 and the heat exchanger 5 during the process from introducing gas through one of the inner tube and the outer tube in the double piping to discharging the gas through the other tube, and reaction method using the apparatus. Using the apparatus of the present invention, the temperature distribution inside the reactor can be kept uniform and efficiency in energy recovery is enhanced.
Abstract:
A reactive agent for decomposing fluorine compounds comprising alumina and an alkaline earth metal compound; a process for decomposing fluorine compounds, comprising contacting the reactive agent with a fluorine compound at a temperature of 200° C. or more; and a process for manufacturing a semiconductor device, comprising an etching or cleaning and a decomposing using the reactive agent.
Abstract:
To provide a process and an apparatus for treating a waste anesthetic gas containing a volatile anesthetic and nitrous oxide, discharged from an operating room. In the present invention, a waste anesthetic gas containing a volatile anesthetic and nitrous oxide is introduced into an adsorbing cylinder filled with an adsorbent, where the volatile anesthetic contained in the waste anesthetic gas is adsorbed and thereby removed, and successively this gas is introduced into a catalyst layer filled with a nitrous oxide decomposition catalyst, where nitrous oxide is decomposed into nitrogen and oxygen.
Abstract:
A method for decomposing nitrous oxide comprises contacting a catalyst for decomposing nitrous oxide with a nitrous oxide-containing gas at 200 to 600° C. The catalyst comprises a support and supported thereon at least one noble metal selected from rhodium, ruthenium and palladium. The support comprises silica or silica alumina. At least one metal selected from zinc, iron and manganese can be supported on the support.
Abstract:
[Problem to be Solved]To provide a process and an apparatus for treating a waste anesthetic gas containing a volatile anesthetic and nitrous oxide, discharged from an operating room. [Means to Solve the Problem]A waste anesthetic gas containing a volatile anesthetic and nitrous oxide is introduced into an adsorbing cylinder filled with an adsorbent, where the volatile anesthetic contained in the waste anesthetic gas is adsorbed and thereby removed, and successively this gas is introduced into a catalyst layer filled with a nitrous oxide decomposition catalyst, where nitrous oxide is decomposed into nitrogen and oxygen.