Air supply systems and pressure adjustment devices for use therewith
    9.
    发明授权
    Air supply systems and pressure adjustment devices for use therewith 有权
    供气系统和与其一起使用的压力调节装置

    公开(公告)号:US07285147B2

    公开(公告)日:2007-10-23

    申请号:US11001770

    申请日:2004-12-02

    IPC分类号: F24F11/00

    摘要: An air supply system for a clean room with a critical machine. An intake duct connects the exterior of the clean room to a make-up air unit, and is configured to transport external air into the make-up air unit. A first air duct connects the make-up air unit to an air conditioning cabinet including a first chemical filter, and is configured to transport the air flowing through the make-up air unit into the air conditioning cabinet. The first chemical filter removes airborne molecular contamination from the air transported into the air conditioning cabinet. A second air duct connects the air conditioning cabinet to the critical machine, and is configured to transport the air flowing through the first chemical filter of the air conditioning cabinet into the critical machine. An exhaust duct connects the critical machine to the exterior of the clean room, discharging waste gas produced in the critical machine.

    摘要翻译: 具有关键机器的洁净室的供气系统。 进气管将洁净室的外部连接到补充空气单元,并且被配置为将外部空气输送到补给空气单元中。 第一风道将补充空气单元连接到包括第一化学过滤器的空调柜,并且被配置为将流经补充空气单元的空气输送到空调柜中。 第一个化学过滤器可以将空气中的分子污染物从运送到空调柜中的空气中去除。 第二个风道将空调机柜连接到关键机器,并配置为将流经空调机柜的第一化学过滤器的空气输送到关键机器中。 排气管将关键机器连接到洁净室的外部,排放在关键机器中产生的废气。

    Air supply systems and pressure adjustment devices for use therewith
    10.
    发明申请
    Air supply systems and pressure adjustment devices for use therewith 有权
    供气系统和与其一起使用的压力调节装置

    公开(公告)号:US20060117722A1

    公开(公告)日:2006-06-08

    申请号:US11001770

    申请日:2004-12-02

    IPC分类号: B01D50/00

    摘要: An air supply system for a clean room with a critical machine. An intake duct connects the exterior of the clean room to a make-up air unit, and is configured to transport external air into the make-up air unit. A first air duct connects the make-up air unit to an air conditioning cabinet including a first chemical filter, and is configured to transport the air flowing through the make-up air unit into the air conditioning cabinet. The first chemical filter removes airborne molecular contamination from the air transported into the air conditioning cabinet. A second air duct connects the air conditioning cabinet to the critical machine, and is configured to transport the air flowing through the first chemical filter of the air conditioning cabinet into the critical machine. An exhaust duct connects the critical machine to the exterior of the clean room, discharging waste gas produced in the critical machine.

    摘要翻译: 具有关键机器的洁净室的供气系统。 进气管将洁净室的外部连接到补充空气单元,并且被配置为将外部空气输送到补给空气单元中。 第一风道将补充空气单元连接到包括第一化学过滤器的空调柜,并且被配置为将流经补充空气单元的空气输送到空调柜中。 第一个化学过滤器可以将空气中的分子污染物从运送到空调柜中的空气中去除。 第二个风道将空调机柜连接到关键机器,并配置为将流经空调机柜的第一化学过滤器的空气输送到关键机器中。 排气管将关键机器连接到洁净室的外部,排放在关键机器中产生的废气。