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公开(公告)号:US08058150B2
公开(公告)日:2011-11-15
申请号:US12170494
申请日:2008-07-10
申请人: Weng-Jin Wu , Ku-Feng Yang , Jung-Chih Hu , Wen-Chih Chiou , Chen-Hua Yu
发明人: Weng-Jin Wu , Ku-Feng Yang , Jung-Chih Hu , Wen-Chih Chiou , Chen-Hua Yu
IPC分类号: H01L21/00
CPC分类号: H01L21/78
摘要: A method for singulating semiconductor wafers is disclosed. A preferred embodiment comprises forming scrub lines on one side of the wafer and filling the scrub lines with a temporary fill material. The wafer is then thinned by removing material from the opposite side of the wafer from the scrub lines, thereby exposing the temporary fill material on the opposite side. The temporary fill material is then removed, and the individual die are removed from the wafer.
摘要翻译: 公开了一种用于分离半导体晶片的方法。 优选的实施方案包括在晶片的一侧上形成擦洗线,并用临时填充材料填充擦洗线。 然后通过从磨擦线从晶片的相对侧移除材料来使晶片变薄,从而在相对侧上暴露临时填充材料。 然后移除临时填充材料,并且将单个模具从晶片上移除。
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公开(公告)号:US20110186967A1
公开(公告)日:2011-08-04
申请号:US13084204
申请日:2011-04-11
申请人: Weng-Jin Wu , Hung-Jung Tu , Ku-Feng Yang , Jung-Chih Hu , Wen-Chih Chiou
发明人: Weng-Jin Wu , Hung-Jung Tu , Ku-Feng Yang , Jung-Chih Hu , Wen-Chih Chiou
IPC分类号: H01L23/544 , H01L23/48
CPC分类号: H01L23/3157 , H01L25/0657 , H01L25/50 , H01L2224/0554 , H01L2224/0557 , H01L2224/05571 , H01L2224/05573 , H01L2224/16 , H01L2225/06513 , H01L2924/00014 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要: A method of forming integrated circuits includes laminating a patterned film including an opening onto a wafer, wherein a bottom die in the wafer is exposed through the opening. A top die is placed into the opening. The top die fits into the opening with substantially no gap between the patterned film and the top die. The top die is then bonded onto the bottom die, followed by curing the patterned film.
摘要翻译: 一种形成集成电路的方法包括将包括开口的图案化膜层压到晶片上,其中晶片中的底模裸露通过开口。 将顶模放入开口。 顶部模具装配到开口中,在图案化膜和顶模之间基本上没有间隙。 然后将顶模结合到底模上,随后固化图案化膜。
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公开(公告)号:US07943421B2
公开(公告)日:2011-05-17
申请号:US12329322
申请日:2008-12-05
申请人: Weng-Jin Wu , Hung-Jung Tu , Ku-Feng Yang , Jung-Chih Hu , Wen-Chih Chiou
发明人: Weng-Jin Wu , Hung-Jung Tu , Ku-Feng Yang , Jung-Chih Hu , Wen-Chih Chiou
IPC分类号: H01L23/28
CPC分类号: H01L23/3157 , H01L25/0657 , H01L25/50 , H01L2224/0554 , H01L2224/0557 , H01L2224/05571 , H01L2224/05573 , H01L2224/16 , H01L2225/06513 , H01L2924/00014 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要: A method of forming integrated circuits includes laminating a patterned film including an opening onto a wafer, wherein a bottom die in the wafer is exposed through the opening. A top die is placed into the opening. The top die fits into the opening with substantially no gap between the patterned film and the top die. The top die is then bonded onto the bottom die, followed by curing the patterned film.
摘要翻译: 一种形成集成电路的方法包括将包括开口的图案化膜层压到晶片上,其中晶片中的底模裸露通过开口。 将顶模放入开口。 顶部模具装配到开口中,在图案化膜和顶模之间基本上没有间隙。 然后将顶模结合到底模上,随后固化图案化膜。
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公开(公告)号:US06858123B1
公开(公告)日:2005-02-22
申请号:US10070000
申请日:2000-08-25
申请人: Jung-Chih Hu , Wu-Chun Gau , Ting-Chang Chang , Ming-Shiann Feng , Chun-Lin Cheng , You-Shin Lin , Ying-Hao Li , Lih-Juann Chen
发明人: Jung-Chih Hu , Wu-Chun Gau , Ting-Chang Chang , Ming-Shiann Feng , Chun-Lin Cheng , You-Shin Lin , Ying-Hao Li , Lih-Juann Chen
IPC分类号: C25D3/38 , C25D7/12 , H01L21/28 , H01L21/288 , C23C18/00
CPC分类号: C25D3/38
摘要: The invention relates to a novel galvanizing solution for the galvanic deposition of copper. Hydroxylamine sulfate or hydroxylamine hydrochloride are utilized as addition reagents and added to the galvanizing solution during the galvanic deposition of copper which is used in the manufacture of semiconductors.
摘要翻译: 本发明涉及一种用于铜的电沉积的新型镀锌溶液。 使用硫酸羟胺或盐酸羟胺作为添加剂,并在用于制造半导体的铜的电沉积期间加入到镀锌溶液中。
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