Use of perfluoro-n-alkanes in vacuum ultraviolet applications
    19.
    发明授权
    Use of perfluoro-n-alkanes in vacuum ultraviolet applications 失效
    在真空紫外线应用中使用全氟正烷烃

    公开(公告)号:US07402377B2

    公开(公告)日:2008-07-22

    申请号:US10903526

    申请日:2004-07-30

    CPC classification number: G03F7/2041 G03F7/70341 G03F7/7035 G03F7/70958

    Abstract: This invention concerns liquid perfluoro-n-alkanes for use in applications demanding high transparency at UV wavelengths ranging from about 150 to 165 nm, especially 157 nm. Uses include optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and most especially immersion photolithography at 157 nm exposure wavelength.

    Abstract translation: 本发明涉及用于在约150至165nm,特别是157nm的UV波长下要求高透明度的应用中的液体全氟正烷烃。 用途包括光学耦合剂,光学胶粘剂,光学元件,用于半导体晶片和器件的光学检测介质,最特别是157nm曝光波长的浸没式光刻技术。

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