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公开(公告)号：US11187301B2
公开(公告)日：2021-11-30
申请号：US16952265
申请日：2020-11-19
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Hiroki Tanioka
Abstract: There is provided a mechanical paradox planetary gear mechanism, including: a sun gear configured to be rotatable together with rotation of an input shaft; a plurality of first planetary gears arranged around the sun gear at equal intervals, and configured to rotate about their own axes while revolving around the sun gear in a state in which the first planetary gears mesh with the sun gear; a first internal gear arranged around the plurality of first planetary gears, and configured to mesh with the plurality of first planetary gears; a second internal gear arranged in the same axis as the first internal gear; and a plurality of second planetary gears respectively arranged on the same axes as the plurality of first planetary gears, and configured to mesh with the second internal gear.
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12.发明申请公开(公告)号：US20210215752A1
公开(公告)日：2021-07-15
申请号：US17214410
申请日：2021-03-26
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Izumi Ito , Tomoya Mizutani
Abstract: A method of diagnosing a load port includes identifying a plurality of entities for a plurality of substrate storage containers by a plurality of load ports capable of transferring a substrate into and out of the plurality of substrate storage containers; detecting directly or indirectly a plurality of states of the plurality of substrate storage containers by a plurality of sensors provided at the plurality of load ports; associating the plurality of load ports, the plurality of entities and a plurality of sensor values, with each other; accumulating, in a database, data associated in the act of associating the plurality of load ports, the plurality of entities, and the plurality of sensor values; and analyzing the data in the database and determining a state of each of the plurality of load ports.
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公开(公告)号：US10923377B2
公开(公告)日：2021-02-16
申请号：US16592677
申请日：2019-10-03
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Toshimitsu Morihana
IPC: H01L21/677 , H01L21/67
Abstract: There is provided a load port provided to a loading/unloading port of a semiconductor-processing apparatus to transfer a semiconductor wafer, including: a FOUP support configured to support a FOUP that includes a FOUP lid and move the FOUP in a front-rear direction with respect to the loading/unloading port; a lid configured to open and close the loading/unloading port; a FOUP lid sensor provided to perform a detection operation between a position of the lid in a closed state and a position of the FOUP lid when unloading is normally completed by retreating the FOUP by a predetermined distance with respect to the loading/unloading port; and an observer configured to observe that the FOUP lid sensor has performed the detection operation after the unloading is completed.
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公开(公告)号：US10923372B2
公开(公告)日：2021-02-16
申请号：US15757560
申请日：2016-08-19
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Toshihiro Kawai , Yasushi Taniyama , Munekazu Komiya , Takashi Shigeta
IPC: F16K31/122 , H01L21/673 , F16K15/14 , H01L21/677 , F16K15/02
Abstract: There is provided a gas injection device configured to prevent entry of atmospheric air when charging gas into a FOUP. In order to realize such a gas injection device, the gas injection device is structured so as to include: a gas supply port 72 through which inert gas is supplied; a nozzle main body 71 including a gas passage 77 communicating with the gas supply port 72; an opening/closing mechanism 92 configured to close the gas supply port 72; and an opener 96 configured to cause the opening/closing mechanism 92 to open the gas supply port 72 closed by the opening/closing mechanism 92.
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公开(公告)号：US10781416B2
公开(公告)日：2020-09-22
申请号：US15766037
申请日：2016-10-04
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Haruki Takeuchi , Yoshimasa Suda
Abstract: A connection mechanism includes two connection parts. Each connection part includes a first flange including a through hole and an attaching portion by which the first flange is attached to a partial wall portion while the through hole faces an opening. The attaching portion includes: a vertical adjuster which adjusts the attaching position of the first flange so that a surface of the first flange, which is opposite to a surface of the first flange facing the partial wall portion, is vertical; and a rotation adjuster which adjusts the attaching position of the first flange about a horizontal axis passing the center of the through hole and extending in the thickness direction. The attaching position of a first flange can be individually adjusted.
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Patent Agency Ranking
公开(公告)号：US20200224237A1
公开(公告)日：2020-07-16
申请号：US16740868
申请日：2020-01-13
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Shoko Tsuzuki
Abstract: A soft sphere transfer device, includes: a water tank into which soft spheres are introduced; a transfer rotation member rotatably disposed in the water tank and including a plurality of accommodation grooves formed along a peripheral edge of the transfer rotation member; and an injection device configured to inject a predetermined substance into the soft spheres by piercing a needle into each of the soft spheres transferred to a needle piercing part by rotation of the transfer rotation member, wherein the water tank includes a pair of side walls facing each other in a width direction, and wherein a narrow width portion having a width equal to or smaller than a diameter of the soft spheres is provided on at least one portion in the width direction among portions of the side walls corresponding to the needle piercing part.
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公开(公告)号：US20200212829A1
公开(公告)日：2020-07-02
申请号：US16639089
申请日：2018-05-14
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Makoto Maruyama
Abstract: A control device 1 for a synchronous electric motor that switches a drive control of the synchronous electric motor to a PWM drive control and a rectangular wave drive control includes a PWM signal generator 14 configured to generate a PWM signal, a rectangular wave signal generator 22 configured to generate a rectangular wave signal, a rotation speed detector 40 configured to detect a rotation speed of the motor 2, a signal switching determination part 50 configured to determine, according to at least the rotation speed, whether the PWM signal or the rectangular wave signal is used as a control signal when controlling the drive of the motor 2, and a drive controller 30 configured to control the drive of the motor 2 using a signal determined by the signal switching determination part 50 to be used as the control signal.
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公开(公告)号：US20200071091A1
公开(公告)日：2020-03-05
申请号：US16678661
申请日：2019-11-08
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Atsushi SUZUKI , Yasushi TANIYAMA
IPC: B65G49/00 , H01L21/67 , H01L21/677 , H01L21/673
Abstract: A load port including: a base as part of a wall partitioning a transportation space from an external space; an opening provided to the base; a door configured to open and close the opening and securing a lid to, and releasing a lid from, a container containing contents; and a first seal member for sealing the space between the base and the container. At least some of the container-side end surface of the door is located nearer to the transportation space than the container-side end part of the first seal member. The load port can keep a surrounding space clean when a FOUP is connected to a casing.
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公开(公告)号：US20200013653A1
公开(公告)日：2020-01-09
申请号：US16458759
申请日：2019-07-01
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Junichi Otani , Manabu Funato , Tatsuya Hirota
IPC: H01L21/677 , B65G47/60 , B25J9/10 , H01L21/68 , H01L21/687
Abstract: A transfer device includes a first parallel four-joint link mechanism in which base end portions of a pair of first links are rotatably connected to a first link base and distal end portions of the first links are rotatably connected to an intermediate link base, a second parallel four-joint link mechanism in which base end portions of a pair of second links are rotatably connected to the intermediate link base and distal end portions of the second links are rotatably connected to a second link base, and a belt transmission mechanism including a pair of first pulleys respectively connected to the first links, a second pulley connected to one of the second links, and a belt provided around the first pulleys and the second pulley. The belt transmission mechanism transmits a rotational driving force such that the first links and the second links rotate in opposite directions to each other.
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公开(公告)号：US20190326796A1
公开(公告)日：2019-10-24
申请号：US16390286
申请日：2019-04-22
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Hiroki Wakabayashi , Masashi Kutsuna , Yutaka Wakita , Tetsuhiro Tomita
Abstract: A shaft includes a main refrigerant passage capable of supplying a refrigerant in one direction on an axial center part and a test piece side sub-refrigerant passage having a starting end communicating with the vicinity of a downstream end in a refrigerant supply direction of the main refrigerant passage. The downstream end in the refrigerant supply direction of the main refrigerant passage is set at the position before an end of the shaft at the side to which a test piece is connected and a predetermined position on the downstream side in the refrigerant supply direction relative to a test piece side bearing. An ending end (discharge port) of the test piece side sub-refrigerant passage is set on the upstream side (counter test piece side) in the refrigerant supply direction relative to the test piece side bearing.
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