公开(公告)号：US20180299664A1

公开(公告)日：2018-10-18

申请号：US16008772

申请日：2018-06-14

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Alexander Payne ,  James Hunter ,  Lars Eng

IPC: G02B26/08 ,  G02B27/00

Abstract: A capacitive micro-electromechanical system (MEMS) structure or device and methods of making and operating the same are described. Generally, the MEMS device provides a large stroke while maintaining good damping, enabling fast beam steering and large scan angles. In one embodiment, the capacitive MEMS device includes a bottom electrode formed over a substrate; an electrically permeable damping structure formed over the bottom electrode, the electrically permeable damping structure including a first air-gap and a dielectric layer suspended above and separated from the bottom electrode by the first air-gap; and a plurality of movable members suspended above the damping structure and separated therefrom by a second air-gap, each of the plurality of movable members including a top electrode and being configured to deflect towards the bottom electrode by electrostatic force. Other embodiments are also described.

公开(公告)号：US08639101B1

公开(公告)日：2014-01-28

申请号：US13633376

申请日：2012-10-02

Applicant: Silicon Light Machines Corporation

Inventor： Gregory A. Myatt ,  Alexander P. Payne ,  Jahja I. Trisnadi ,  Harold A. Zarem

IPC: G03B37/02

CPC classification number: G02B26/0808 ,  G03B21/2033 ,  G03B27/528 ,  G03B27/73 ,  G03B33/06 ,  H04N5/846

Abstract: A film recorder including a linear diffractive spatial light modulator (LDSLM) and methods of using the same to record a digital image on a strip of photographic film are provided. In one embodiment, the recorder includes: an illuminator including at least one monochromatic light source generating a light beam; a spatial light modulator assembly including at least one linear diffractive spatial light modulator (LDSLM) to receive the light beam from the illuminator and modulate the light beam from the illuminator; a film transport for transporting a photographic film on an imaging plane; and imaging optics disposed in a light path between the LDSLM and the imaging plane to image the light beam simultaneously on a substantially linear portion of the photographic film to record an image on the photographic film. Other embodiments are also provided.

Abstract translation: 提供了一种包括线性衍射空间光调制器（LDSLM）的胶卷记录器及其使用方法，用于在照相胶片条上记录数字图像。 在一个实施例中，记录器包括：照明器，包括产生光束的至少一个单色光源; 空间光调制器组件，其包括至少一个线性衍射空间光调制器（LDSLM），以接收来自照明器的光束并调制来自照明器的光束; 用于在成像平面上传送照相胶片的胶片传送装置; 以及设置在LDSLM和成像平面之间的光路中的成像光学器件，以将光束同时成像在照相胶片的基本上线性的部分上，以在照相胶片上记录图像。 还提供了其他实施例。

公开(公告)号：US08570638B2

公开(公告)日：2013-10-29

申请号：US13648932

申请日：2012-10-10

Applicant: Silicon Light Machines Corporation

Inventor： Joshua Lu ,  Gregory Beach ,  Alexander P. Payne ,  James Hunter

IPC: G02B26/00

CPC classification number: G02B26/0808 ,  B81B2201/047 ,  B81C1/00238 ,  B81C1/00246 ,  G02B26/0833

Abstract: A method of fabricating an integrated device including a MicroElectroMechanical system (MEMS) and an associated microcircuit is provided. In one embodiment, the method comprises: forming a high temperature contact through a dielectric layer to an underlying element of a microcircuit formed adjacent to a MicroElectroMechanical System (MEMS) structure on a substrate; and depositing a layer of conducting material over the dielectric layer, and patterning the layer of conducting material to form a local interconnect (LI) for the microcircuit overlying and electrically coupled to the contact and a bottom electrode for the adjacent MEMS structure. Other embodiments are also provided.

Abstract translation: 提供了一种制造包括微电子机械系统（MEMS）和相关微电路的集成装置的方法。 在一个实施例中，该方法包括：通过电介质层形成高温接触到邻近微电子机械系统（MEMS）结构的衬底上形成的微电路的下层元件; 以及在所述电介质层上沉积导电材料层，以及图案化所述导电材料层以形成用于所述微电路的局部互连（L1），所述微电路覆盖并电耦合到所述触点和所述相邻MEMS结构的底部电极。 还提供了其他实施例。

公开(公告)号：US20040036950A1

公开(公告)日：2004-02-26

申请号：US10225370

申请日：2002-08-20

Applicant: Silicon Light Machines

Inventor： Jim Hunter ,  David Amm ,  Christopher Gudeman

IPC: G02B026/00

CPC classification number: G02B26/0808

Abstract: An optical MEM devices which utilizes individually addressable ribbon pairs configured to modulate light is disclosed. The ribbon pairs preferably comprise silicon nitride with a reflective aluminum layers, wherein at least one ribbon from each ribbon pair is in electrical communication with a driver circuit for controllably addressing the ribbon pairs individually. The ribbons are preferably configured to modulate light having wavelengths in a range of 0.4 to 2.0 microns suitable for display and optical communication technologies. The system preferably comprises optical fibers for transmitting light to individually addressable ribbon pairs and for transmitting reflected light from individually addressable ribbon pairs.

Abstract translation: 公开了一种使用被配置为调制光的单独可寻址的色带对的光学MEM器件。 带对优选地包括具有反射铝层的氮化硅，其中来自每个带对的至少一个带与驱动电路电连通，用于可控地单独地对着带对。 带优选地配置成调制适于显示和光通信技术的波长在0.4至2.0微米范围内的光。 该系统优选地包括用于将光传输到单独可寻址的色带对并用于从单独可寻址的色带对传送反射光的光纤。

公开(公告)号：US20030223675A1

公开(公告)日：2003-12-04

申请号：US10160305

申请日：2002-05-29

Applicant: Silicon Light Machines

Inventor： Josef Berger ,  Gregory Miller ,  Ronald Miles

IPC: G02B006/35 ,  G02B006/26

CPC classification number: G02B6/3536 ,  G02B6/12002 ,  G02B6/3502 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3582 ,  G02B6/3584 ,  G02B2006/12147

Abstract: An optical switch comprises a substrate, first and second optical waveguide, and first and second conducting elements. The first optical waveguide is coupled to the substrate. The first conducting element is coupled to the first optical waveguide. The second optical waveguide is coupled to the substrate. The second conducting element is coupled to the second optical waveguide. In operation, a first electrical bias applied between the first and second conducting elements causes the first optical waveguide to not optically couple to the second optical waveguide. Further in operation, a second electric bias applied between the first and second conducting elements causes the first optical waveguide to optically couple to the second optical waveguide.

Abstract translation: 光开关包括基板，第一和第二光波导以及第一和第二导电元件。 第一光波导耦合到衬底。 第一导电元件耦合到第一光波导。 第二光波导耦合到衬底。 第二导电元件耦合到第二光波导。 在操作中，施加在第一和第二导电元件之间的第一电偏压使得第一光波导不与第二光波导光学耦合。 进一步在操作中，施加在第一和第二导电元件之间的第二电偏压使第一光波导光学耦合到第二光波导。

公开(公告)号：US20020196492A1

公开(公告)日：2002-12-26

申请号：US10051972

申请日：2002-01-15

Applicant: Silicon Light Machines

Inventor： Jahja I. Trisnadi ,  Clinton B. Carlisle

IPC: H04J014/02

CPC classification number: G02B6/29311 ,  G02B6/2713 ,  G02B6/272 ,  G02B6/2793 ,  G02B6/2931 ,  G02B6/29314 ,  G02B6/29391 ,  H04B10/25073 ,  H04B2210/258 ,  H04J14/0221

Abstract: An adjustable diffractive light modulator is used to equalize the power level of wavelength multiplexed signals in wavelength division multiplexing applications. An optical channel transmits a multi-wavelength input signal through a wavelength demultiplexer. The input signal comprises a plurality of component signals defined according to a plurality of wavelengths. The de-multiplexer spatially separates the multi-wavelength input signal into its respective plurality of component signals, which are transmitted through a plurality of optical channels onto a plurality of controllable diffractive light modulators. The diffractive light modulators are advantageously comprised of grating light valves. Component signals are reflected off their respective diffractive light modulators and collected in a plurality of optical channels for re-transmission into a wavelength multiplexer. The reflected signals are combined through a multiplexing process and transmitted as an output beam. Control of the diffractive light modulator is achieved by sensors measuring the power level of signals passing through the plurality of optical channels. The measured power levels of light are converted to digital values which are input into an electronic controller for processing. Control output signals from the controller are used to independently control individual pixels within the diffractive light modulator to equalize the reflected light signals.

Abstract translation: 可调式衍射光调制器用于均衡波分复用应用中的波长复用信号的功率电平。 光通道通过波长解复用器发送多波长输入信号。 输入信号包括根据多个波长限定的多个分量信号。 去多路复用器将多波长输入信号空间分离成其相应的多个分量信号，其通过多个光学信道传输到多个可控衍射光调制器上。 衍射光调制器有利地包括光栅光阀。 分量信号从它们各自的衍射光调制器反射并被收集在多个光信道中，用于重新传输到波长多路复用器中。 反射信号通过复用过程进行组合并作为输出光束传输。 衍射光调制器的控制通过测量通过多个光通道的信号的功率电平的传感器来实现。 所测量的光功率电平被转换为输入到电子控制器进行处理的数字值。 来自控制器的控制输出信号用于独立地控制衍射光调制器内的各个像素以均衡反射光信号。

公开(公告)号：US20020145806A1

公开(公告)日：2002-10-10

申请号：US09832699

申请日：2001-04-10

Applicant: Silicon Light Machines

Inventor： David T. Amm

IPC: G02B027/10 ,  G02B026/00

CPC classification number: H04N9/3161 ,  G02B5/1828 ,  G02B26/0808 ,  H04N5/7416

Abstract: A display apparatus projects an image onto a display screen and includes a grating light valve, a focusing arrangement and a scanning device. The grating light valve is located near but not at a focal plane of a line illumination such that in operation the grating light valve produces real or virtual two dimensional images. The grating light valve is configured such that the modular members on the surface of the grating light valve are neither parallel nor perpendicular to the effective pixel are, thereby arranged diagonally across the pixel area in order to eliminate any imperfections or defects in the line illumination. A seal glass is coupled with the grating light valve and forms an air gap between itself and the grating light valve such that the line illumination must pass through the seal glass and the air gap before reaching the grating light valve. Additionally, an absorbing aperture is affixed to the surface of the seal glass at the focal point of the line illumination in order to further filter background light.

Abstract translation: 显示装置将图像投影到显示屏上，并且包括光栅光阀，聚焦装置和扫描装置。 光栅光阀位于线照明的焦平面附近但不在焦平面处，使得在操作中光栅光阀产生真实或虚拟的二维图像。 光栅光阀被构造成使得光栅光阀表面上的模块化构件既不平行也不垂直于有效像素，由此斜对角地布置在像素区域上，以消除线照明中的任何缺陷或缺陷。 密封玻璃与光栅光阀耦合，并在其与光栅光阀之间形成气隙，使得线路照明必须在到达光栅光阀之前通过密封玻璃和气隙。 此外，在线照明的焦点处，吸收孔附着到密封玻璃的表面，以进一步过滤背景光。

公开(公告)号：US20240239040A1

公开(公告)日：2024-07-18

申请号：US18416708

申请日：2024-01-18

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Gregory Jacob ,  Stephen Hamann ,  Alexander Payne ,  Lars Eng ,  James Hunter ,  Tianbo Liu ,  Hirofumi Mizuno

IPC: B29C64/135 ,  B29C64/273 ,  B33Y10/00 ,  B33Y30/00 ,  B41J2/44 ,  B41J2/47 ,  B41M3/00 ,  B41M5/00 ,  B41M5/26 ,  G02B26/08 ,  G02B26/10

CPC classification number: B29C64/135 ,  B29C64/273 ,  B33Y10/00 ,  B33Y30/00 ,  B41J2/442 ,  B41J2/471 ,  B41M3/008 ,  B41M5/0058 ,  B41M5/0064 ,  B41M5/262 ,  B41M5/267 ,  G02B26/0808 ,  G02B26/10

Abstract: A laser manufacturing system including a spatial light modulator (SLM) with a rectangular array of electrically actuated two-dimensional (2D) diffractors arranged to form multiple pixels spaced linearly along a long-axis thereof, each pixel including a plurality of 2D diffractors electrically ganged together and arranged along a short-axis perpendicular to the long-axis. The system further includes a laser and optics to illuminate the SLM, and projection optics to project modulated light from the SLM onto a surface of a workpiece to form an anamorphic image of the SLM that is demagnified along the long-axis of the SLM and tightly focused along the short-axis to form a condensed line beam to mark the workpiece. The line beam has a sinc2 profile along the short-axis and a top-hat along the long-axis. Demagnification and the resulting long-axis length at the workpiece is chosen based on the pulse-energy of the laser and targeted peak fluence.

公开(公告)号：US20230022807A1

公开(公告)日：2023-01-26

申请号：US17872777

申请日：2022-07-25

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Olav Solgaard ,  Stephen Hamann ,  Alexander Payne ,  Lars Eng ,  James Hunter ,  Tianbo Liu

IPC: B81B7/02

Abstract: An optical system including a dual-layer microelectromechanical systems (MEMS) device, and methods of fabricating and operating the same are disclosed. Generally, the MEMS device includes a substrate having an upper surface; a top modulating layer including a number of light modulating micro-ribbons, each micro-ribbon supported above and separated from the upper surface of the substrate by spring structures in at least one lower actuating layer; and a mechanism for moving one or more of the micro-ribbons relative to the upper surface and/or each other. The spring structures are operable to enable the light modulating micro-ribbons to move continuously and vertically relative to the upper surface of the substrate while maintaining the micro-ribbons substantially parallel to one another and the upper surface of the substrate. The micro-ribbons can be reflective, transmissive, partially reflective/transmissive, and the device is operable to modulate a phase and/or amplitude of light incident thereon.

公开(公告)号：US11453165B2

公开(公告)日：2022-09-27

申请号：US16780543

申请日：2020-02-03

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Alexander Payne ,  Lars Eng ,  James Hunter

IPC: G02B26/08 ,  G02B26/06 ,  B29C64/268 ,  B33Y10/00 ,  B29C64/135 ,  B29C64/153 ,  B29C64/277 ,  B33Y30/00 ,  B29C64/393 ,  B33Y50/02

Abstract: A spatial light modulator (SLM) including a two-dimensional (2D) array of n rows of m pixels, and a stacked drive circuit including at least one, one-dimensional (1D) array of n*m drivers monolithically integrated on the same substrate and methods of fabricating and methods of using the same in materials processing applications are provided. Generally, each pixel includes at least one modulator, and is configured to modulate light incident thereon in response to drive signals received from the stacked drive circuit. The 1D array of the stacked drive circuit includes a single row of n*m drivers arranged adjacent to and laterally separated from the 2D array of pixels. Other embodiments are also described.