公开(公告)号：US08754664B2

公开(公告)日：2014-06-17

申请号：US13810512

申请日：2011-07-27

申请人： Yasuhiko Nara ,  Tohru Ando

发明人： Yasuhiko Nara ,  Tohru Ando

IPC分类号： G01R1/26 ,  G01R31/28

CPC分类号： G01R31/2887 ,  G01R31/2891 ,  G01R31/307 ,  G01R31/311 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/20221 ,  H01J2237/208 ,  H01J2237/24564 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： The high magnification, high resolution and real-time property of an SEM image are realized when the electrical characteristics of an inspection object are measured, without affecting the electrical characteristics of the inspection object. A high-quality, high-magnification first image including an image of a target position in the inspection object on a sample is acquired. Next, a low-quality, low-magnification second image including the image of the target position in the inspection object on the sample and probe images is acquired. Next, data on the first image is built into the second image to generate an image for coarse-access observation which is the same in magnification as the second image. The generation of the image for coarse-access observation is repeated until a probe comes close to the target position in the inspection object.

摘要翻译： 当测量检查对象的电气特性而不影响检查对象的电气特性时，可实现SEM图像的高放大倍数，高分辨率和实时性。 获取包括样本中的检查对象中的目标位置的图像的高质量，高倍率的第一图像。 接下来，获取包括样本上的检查对象中的目标位置的图像和探测图像的低质量，低倍率的第二图像。 接下来，将第一图像上的数据内置到第二图像中，以生成与第二图像放大率相同的粗略观察的图像。 重复进行用于粗略观察的图像的生成，直到探针接近检查对象中的目标位置。

公开(公告)号：US20130112871A1

公开(公告)日：2013-05-09

申请号：US13810512

申请日：2011-07-27

申请人： Yasuhiko Nara ,  Tohru Ando

发明人： Yasuhiko Nara ,  Tohru Ando

IPC分类号： H01J37/26

CPC分类号： G01R31/2887 ,  G01R31/2891 ,  G01R31/307 ,  G01R31/311 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/20221 ,  H01J2237/208 ,  H01J2237/24564 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： The high magnification, high resolution and real-time property of an SEM image are realized when the electrical characteristics of an inspection object are measured, without affecting the electrical characteristics of the inspection object. A high-quality, high-magnification first image including an image of a target position in the inspection object on a sample is acquired. Next, a low-quality, low-magnification second image including the image of the target position in the inspection object on the sample and probe images is acquired. Next, data on the first image is built into the second image to generate an image for coarse-access observation which is the same in magnification as the second image. The generation of the image for coarse-access observation is repeated until a probe comes close to the target position in the inspection object.

摘要翻译： 当测量检查对象的电气特性而不影响检查对象的电气特性时，可实现SEM图像的高放大倍数，高分辨率和实时性。 获取包括样本中的检查对象中的目标位置的图像的高质量，高倍率的第一图像。 接下来，获取包括样本上的检查对象中的目标位置的图像和探测图像的低质量，低倍率的第二图像。 接下来，将第一图像上的数据内置到第二图像中，以生成与第二图像放大率相同的粗略观察的图像。 重复进行用于粗略观察的图像的生成，直到探针接近检查对象中的目标位置。

公开(公告)号：US20110291692A1

公开(公告)日：2011-12-01

申请号：US13147759

申请日：2010-01-20

申请人： Tohru Ando ,  Masaaki Komori ,  Takao Matsuura

发明人： Tohru Ando ,  Masaaki Komori ,  Takao Matsuura

IPC分类号： G01R31/26

CPC分类号： H01J37/244 ,  G01R31/307 ,  H01J37/20 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01L22/14 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided is an apparatus for automatically detecting a failure position on a specified wiring line. The apparatus and a method for automatically detecting the failure position even on a long wiring line by applying a probe and an electron beam onto a sample and using an image of the current absorbed by the sample are provided. The apparatus obtains an absorbed current image, while laterally moving at right angle with the probe applied onto the sample, and based on the obtained absorbed current image, correction is performed by means of both an image shift and a stage. Countermeasures are taken, using a stage not having a sample rotating stage, against factors including a hardware factor of not moving at a correct angle, such as backlash, the wiring line is accurately and continuously displayed even when the apparatus moves to the ends of the long wiring line, and the failure position is detected, while the apparatus automatically reciprocates several times between the both ends of the wiring line.

摘要翻译： 提供一种用于自动检测指定布线上的故障位置的装置。 提供了通过将探针和电子束施加到样品上并使用由样品吸收的电流的图像来自动检测在长布线上的故障位置的装置和方法。 该装置获得吸收的当前图像，同时与施加到样本上的探针成直角地横向移动，并且基于所获得的吸收的当前图像，通过图像偏移和阶段两者进行校正。 使用不具有样品旋转台的阶段，针对包括不以正确角度移动的硬件因素（例如齿隙）的因素进行对策，即使当装置移动到 并且检测到故障位置，同时设备在布线两端之间自动往复运动数次。

公开(公告)号：US20100177954A1

公开(公告)日：2010-07-15

申请号：US12728562

申请日：2010-03-22

申请人： Tohru ANDO ,  Tsutomu Saito ,  Yasuhiko Nara ,  Mikio Takagi ,  Koichi Takauchi

发明人： Tohru ANDO ,  Tsutomu Saito ,  Yasuhiko Nara ,  Mikio Takagi ,  Koichi Takauchi

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2200/24 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/2817 ,  Y10S715/964

摘要： A navigation system for easily determining defective positions is provided. In the case of CAD navigation to defective positions, logical information for indicating defective positions is created in a CAD format, instead of CAD data of physical information indicating circuit design. Specifically, by attaching marks such as rectangles, characters, or lines, to an electron microscope image with software, quick navigation is performed with required minimum information. By using created CAD data, re-navigation with the same equipment and CAD navigation to heterogeneous equipment are performed.

摘要翻译： 提供了用于容易地确定缺陷位置的导航系统。 在CAD导航到缺陷位置的情况下，代替用于指示电路设计的物理信息的CAD数据，以CAD格式创建用于指示缺陷位置的逻辑信息。 具体地，通过用软件将诸如矩形，字符或线的标记附加到电子显微镜图像上，使用所需的最小信息进行快速导航。 通过使用创建的CAD数据，执行使用相同设备和CAD导航到异构设备的重新导航。

公开(公告)号：US07732791B2

公开(公告)日：2010-06-08

申请号：US11834207

申请日：2007-08-06

申请人： Tohru Ando ,  Yasuhiko Nara ,  Tsutomu Saito ,  Shinichi Kato ,  Takeshi Sunaoshi

发明人： Tohru Ando ,  Yasuhiko Nara ,  Tsutomu Saito ,  Shinichi Kato ,  Takeshi Sunaoshi

IPC分类号： H01J49/00 ,  G06K9/00 ,  G06K9/62

CPC分类号： G01N23/225 ,  H01J2237/2817 ,  H01J2237/2826

摘要： A semiconductor testing method capable of quickly counting semiconductor cells in which a seemingly horizontal or vertical line is drawn with a mouse, and raster rotation is performed in alignment with the closer axis. After that, the stage is horizontally moved, pattern matching is performed on an image on a position where the image should be disposed, and an angle is adjusted. The stage is moved evenly along the X-axis and the Y-axis, achieving a movement to a destination like a straight line. In synchronization with the smooth movement of the stage, a cell is surrounded in a rectangular frame by a ruler, and the number of cells is displayed with a numeric value.

摘要翻译： 一种半导体测试方法，其能够快速计算其中用鼠标绘制看似水平或垂直线的半导体单元，并且执行与较近轴线对准的光栅旋转。 之后，水平移动台，对应该设置图像的位置上的图像执行图案匹配，并且调整角度。 舞台沿着X轴和Y轴均匀移动，实现了像直线一样的目的地移动。 与舞台的平滑移动同步，通过标尺将单元围成矩形框，并且以数值显示单元数。

公开(公告)号：US07663104B2

公开(公告)日：2010-02-16

申请号：US12038079

申请日：2008-02-27

申请人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

发明人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

IPC分类号： G01N23/00 ,  G21K7/00 ,  G01R31/302 ,  G01R31/305

CPC分类号： G01N23/225 ,  H01J2237/2449 ,  H01J2237/24564 ,  H01J2237/2817

摘要： An object of the present invention is to obtain a clear absorbed current image without involving the difference in gain of amplifier between inputs, from absorbed currents detected by using a plurality of probes and to improve measurement efficiency.In the present invention, a plurality of probes are brought in contact with a specimen. While irradiating the specimen with an electron beam, currents flowing in the probes are measured. Signals from at least two probes are input to a differential amplifier. An output of the differential amplifier is amplified. On the basis of the amplified output and scanning information of the electron beam, an absorbed current image is generated. According to the invention, a clear absorbed current image can be obtained without involving the difference in gain of amplifier between inputs. Thus, measurement efficiency in a failure analysis of a semiconductor device can be improved.

摘要翻译： 本发明的目的是获得清晰的吸收电流图像，而不涉及放大器在输入之间的增益差异，从吸收的电流通过使用多个探针检测并提高测量效率。 在本发明中，多个探针与试样接触。 在用电子束照射样品的同时，测量在探针中流动的电流。 至少两个探头的信号被输入到差分放大器。 差分放大器的输出被放大。 基于电子束的放大输出和扫描信息，产生吸收的当前图像。 根据本发明，可以获得清晰的吸收电流图像而不涉及放大器在输入之间的增益差。 因此，可以提高半导体器件的故障分析中的测量效率。

公开(公告)号：US08309922B2

公开(公告)日：2012-11-13

申请号：US13148205

申请日：2010-01-20

申请人： Tohru Ando ,  Masahiro Sasajima

发明人： Tohru Ando ,  Masahiro Sasajima

IPC分类号： H01J37/28 ,  G01N23/00

CPC分类号： H01L22/10 ,  G01R31/307 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/2817

摘要： Disclosed is a device capable of probing with minimal effect from electron beams. Rough probing is made possible using a lower magnification than the magnification usually viewed. When target contact of semiconductor is detected, measurement position is set in the center of picture usually to move probe without moving stage. With the miniaturization, contact can be confirmed only at high magnification, although probe can be confirmed at low magnification on the contrary but it is necessary to display it in real time. Static image obtained at high magnification once is combined with image obtained at low magnification in real time from target contact required for probing and characteristic of probe to be displayed, so that probing at low magnification can be realized to reduce the effects of electron beams and obtain accurate electrical characteristics.

摘要翻译： 公开了一种能够以电子束影响最小的装置。 使用比通常观看的放大率更低的放大倍数可以进行粗略探测。 当检测到半导体的目标接触时，通常将测量位置设置在图像中心，无需移动平台移动探头。 随着小型化，只能在高放大倍率下确认接触，尽管可以在低放大倍率下确认探针，但需要实时显示。 以高放大倍数一次获得的静态图像与实验中从目标探针所需的接触和探针的特性实时地获得的图像组合，从而可以实现低倍率下的探测，以减少电子束的影响并获得 准确的电气特性。

公开(公告)号：US08178837B2

公开(公告)日：2012-05-15

申请号：US12728562

申请日：2010-03-22

申请人： Tohru Ando ,  Tsutomu Saito ,  Yasuhiko Nara ,  Mikio Takagi ,  Koichi Takauchi

发明人： Tohru Ando ,  Tsutomu Saito ,  Yasuhiko Nara ,  Mikio Takagi ,  Koichi Takauchi

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： G06T7/001 ,  G06T2200/24 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/2817 ,  Y10S715/964

摘要： A navigation system for easily determining defective positions is provided. In the case of CAD navigation to defective positions, logical information for indicating defective positions is created in a CAD format, instead of CAD data of physical information indicating circuit design. Specifically, by attaching marks such as rectangles, characters, or lines, to an electron microscope image with software, quick navigation is performed with required minimum information. By using created CAD data, re-navigation with the same equipment and CAD navigation to heterogeneous equipment are performed.

摘要翻译： 提供了用于容易地确定缺陷位置的导航系统。 在CAD导航到缺陷位置的情况下，代替用于指示电路设计的物理信息的CAD数据，以CAD格式创建用于指示缺陷位置的逻辑信息。 具体地，通过用软件将诸如矩形，字符或线的标记附加到电子显微镜图像上，使用所需的最小信息进行快速导航。 通过使用创建的CAD数据，执行使用相同设备和CAD导航到异构设备的重新导航。

公开(公告)号：US20100116986A1

公开(公告)日：2010-05-13

申请号：US12691331

申请日：2010-01-21

申请人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

发明人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

IPC分类号： G01N23/225

CPC分类号： G01N23/225 ,  H01J2237/2449 ,  H01J2237/24564 ,  H01J2237/2817

摘要： An object of the present invention is to obtain a clear absorbed current image without involving the difference in gain of amplifier between inputs, from absorbed currents detected by using a plurality of probes and to improve measurement efficiency.In the present invention, a plurality of probes are brought in contact with a specimen. While irradiating the specimen with an electron beam, currents flowing in the probes are measured. Signals from at least two probes are input to a differential amplifier. An output of the differential amplifier is amplified. On the basis of the amplified output and scanning information of the electron beam, an absorbed current image is generated. According to the invention, a clear absorbed current image can be obtained without involving the difference in gain of amplifier between inputs. Thus, measurement efficiency in a failure analysis of a semiconductor device can be improved.

摘要翻译： 本发明的目的是获得清晰的吸收电流图像，而不涉及放大器在输入之间的增益差异，从吸收的电流通过使用多个探针检测并提高测量效率。 在本发明中，使多个探针与试样接触。 在用电子束照射样品的同时，测量在探针中流动的电流。 至少两个探头的信号被输入到差分放大器。 差分放大器的输出被放大。 基于电子束的放大输出和扫描信息，产生吸收的当前图像。 根据本发明，可以获得清晰的吸收电流图像而不涉及放大器在输入之间的增益差。 因此，可以提高半导体器件的故障分析中的测量效率。

公开(公告)号：US20080237462A1

公开(公告)日：2008-10-02

申请号：US11834207

申请日：2007-08-06

申请人： Tohru ANDO ,  Yasuhiko Nara ,  Tsutomu Saito ,  Shinichi Kato ,  Takeshi Sunaoshi

发明人： Tohru ANDO ,  Yasuhiko Nara ,  Tsutomu Saito ,  Shinichi Kato ,  Takeshi Sunaoshi

IPC分类号： G01N23/00 ,  G06K9/00

CPC分类号： G01N23/225 ,  H01J2237/2817 ,  H01J2237/2826

摘要： A semiconductor testing method capable of quickly counting semiconductor cells with accuracy is achieved. Since an SEM is adjusted in a specific condition, the rotation axis of a stage and the axis of an optical system are deviated from each other in a different observation environment and a different adjustment environment. The deviation between the axes is easily adjusted in each observation environment, so that the deviation is reduced. A seemingly horizontal or vertical line is drawn with a mouse and raster rotation is performed in alignment with the closer axis. After that, the stage is horizontally moved, pattern matching is performed on an image on a position where the image should be disposed, and an angle is adjusted. The stage is moved evenly along the X-axis and the Y-axis, achieving a movement to a destination like a straight line. In synchronization with the smooth movement of the stage, a cell 201 is surrounded in a rectangular frame 205 by a ruler 301 and the number of cells is displayed with a numeric value 302. Thus by using a correct direction and a stable velocity, image correction (501 to 504) is further performed during the movement of the stage (403), so that the cells 201 can be easily counted with accuracy.

摘要翻译： 实现了能够精确地快速计数半导体单元的半导体测试方法。 由于在特定条件下调整SEM，因此在不同的观察环境和不同的调节环境下，台的旋转轴和光学系统的轴线彼此偏离。 在每个观察环境中容易调整轴之间的偏差，从而减小偏差。 用鼠标绘制一个看似水平或垂直的线条，并且与更靠近的轴线对齐进行光栅旋转。 之后，水平移动台，对应该设置图像的位置上的图像执行图案匹配，并且调整角度。 舞台沿着X轴和Y轴均匀移动，实现了像直线一样的目的地移动。 与平台的平滑移动同步，单元201由标尺301在矩形框205中包围，并且以数值302显示单元的数量。 因此，通过使用正确的方向和稳定的速度，在台（403）的移动期间进一步执行图像校正（501〜504），使得可以容易地对单元201进行计数。