公开(公告)号：US11753726B2

公开(公告)日：2023-09-12

申请号：US17313858

申请日：2021-05-06

Applicant: Applied Materials, Inc.

Inventor： David Britz ,  Pravin K. Narwankar ,  David Thompson ,  Yuriy Melnik ,  Sukti Chatterjee

IPC: F01D5/28 ,  C23C28/00 ,  F01D5/18 ,  C23C16/455 ,  C23C16/52 ,  C23C28/04 ,  C23C16/40 ,  C23C14/08

CPC classification number: C23C28/3455 ,  C23C16/45525 ,  C23C16/52 ,  C23C28/3215 ,  C23C28/345 ,  F01D5/186 ,  F01D5/288 ,  C23C14/083 ,  C23C16/40 ,  C23C28/042 ,  F05D2230/31 ,  F05D2240/24 ,  F05D2260/95 ,  F05D2300/121 ,  F05D2300/132 ,  F05D2300/134 ,  Y10T428/2462

Abstract: Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component. The CMAS interception can occur while the engine is in operation in flight or in a testing or quality control environment. The metal oxide protective coating can be applied over other coatings, including Gd-zirconates (GZO) or yttria-stabilized zirconia (YSZ). The metal oxide protective coating is applied at original equipment manufacturers (OEM) and can also be applied in-situ using a gas injection system during engine use in-flight or during maintenance or quality testing. The metal oxide protective coating contains a rare earth element, aluminum, zirconium, chromium, or combinations thereof.

公开(公告)号：US11732353B2

公开(公告)日：2023-08-22

申请号：US16850856

申请日：2020-04-16

Applicant: Applied Materials, Inc.

Inventor： Sukti Chatterjee ,  Lance A. Scudder ,  Yuriy Melnik ,  David A. Britz ,  Thomas Knisley ,  Kenichi Ohno ,  Pravin K. Narwankar

IPC: C23C16/40 ,  C23C16/455 ,  C23C28/02 ,  C23C16/56 ,  B64F5/40

CPC classification number: C23C16/403 ,  C23C16/405 ,  C23C16/45525 ,  C23C16/56 ,  C23C28/02 ,  B64F5/40

Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. In one or more embodiments, a method for depositing a coating on an aerospace component includes depositing one or more layers on a surface of the aerospace component using an atomic layer deposition or chemical vapor deposition process, and performing a partial oxidation and annealing process to convert the one or more layers to a coalesced layer having a preferred phase crystalline assembly. During oxidation cycles, an aluminum depleted region is formed at the surface of the aerospace component, and an aluminum oxide region is formed between the aluminum depleted region and the coalesced layer. The coalesced layer forms a protective coating, which decreases the rate of aluminum depletion from the aerospace component and the rate of new aluminum oxide scale formation.

公开(公告)号：US11697879B2

公开(公告)日：2023-07-11

申请号：US16560838

申请日：2019-09-04

Applicant: Applied Materials, Inc.

Inventor： Sukti Chatterjee ,  Kenichi Ohno ,  Lance A. Scudder ,  Yuriy Melnik ,  David A. Britz ,  Pravin K. Narwankar ,  Thomas Knisley ,  Mark Saly ,  Jeffrey Anthis

IPC: C23C16/56 ,  C23C16/40 ,  C22C19/03

CPC classification number: C23C16/56 ,  C22C19/03 ,  C23C16/405

Abstract: Embodiments of the present disclosure generally relate to protective coatings on aerospace components and methods for depositing the protective coatings. In one or more embodiments, a method for producing a protective coating on an aerospace component includes depositing a metal oxide template layer on the aerospace component containing nickel and aluminum (e.g., nickel-aluminum superalloy) and heating the aerospace component containing the metal oxide template layer during a thermal process and/or an oxidation process. The thermal process and/or oxidation process includes diffusing aluminum contained within the aerospace component towards a surface of the aerospace component containing the metal oxide template layer, oxidizing the diffused aluminum to produce an aluminum oxide layer disposed between the aerospace component and the metal oxide template layer, and removing at least a portion of the metal oxide template layer while leaving the aluminum oxide layer.

公开(公告)号：US11560804B2

公开(公告)日：2023-01-24

申请号：US17832568

申请日：2022-06-03

Applicant: Applied Materials, Inc.

Inventor： Yuriy Melnik ,  Sukti Chatterjee ,  Kaushal Gangakhedkar ,  Jonathan Frankel ,  Lance A. Scudder ,  Pravin K. Narwankar ,  David Alexander Britz ,  Thomas Knisley ,  Mark Saly ,  David Thompson

IPC: F01D5/28 ,  C23C16/455 ,  C23C16/34 ,  C23C16/40 ,  C23C16/30 ,  C23C16/56 ,  F01D9/02 ,  F01D25/12 ,  F01D25/28 ,  F23R3/28 ,  C07F11/00 ,  F01D25/14

Abstract: Methods for forming protective coatings on aerospace components are provided. In one or more embodiments, the method includes exposing an aerospace component to a first precursor and a first reactant to form a first deposited layer on a surface of the aerospace component by a first deposition process (e.g., CVD or ALD), and exposing the aerospace component to a second precursor and a second reactant to form a second deposited layer on the first deposited layer by a second deposition process. The first deposited layer and the second deposited layer have different compositions from each other. The method also includes repeating the first deposition process and the second deposition process to form a nanolaminate film stack having from 2 pairs to about 1,000 pairs of the first deposited layer and the second deposited layer consecutively deposited on each other.

公开(公告)号：US11466364B2

公开(公告)日：2022-10-11

申请号：US16670555

申请日：2019-10-31

Applicant: Applied Materials, Inc.

Inventor： Kenichi Ohno ,  Eric H. Liu ,  Sukti Chatterjee ,  Yuriy Melnik ,  Thomas Knisley ,  David Alexander Britz ,  Lance A. Scudder ,  Pravin K. Narwankar

IPC: C23C16/455 ,  C23C16/02 ,  C23C16/56 ,  C23C16/40

Abstract: Embodiments of the present disclosure generally relate to protective coatings on substrates and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on a substrate includes depositing a chromium oxide layer containing amorphous chromium oxide on a surface of the substrate during a first vapor deposition process and heating the substrate containing the chromium oxide layer comprising the amorphous chromium oxide to convert at least a portion of the amorphous chromium oxide to crystalline chromium oxide during a first annealing process. The method also includes depositing an aluminum oxide layer containing amorphous aluminum oxide on the chromium oxide layer during a second vapor deposition process and heating the substrate containing the aluminum oxide layer disposed on the chromium oxide layer to convert at least a portion of the amorphous aluminum oxide to crystalline aluminum oxide during a second annealing process.