中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

56 records (took 0.017 seconds)

    Isolation valve
    12.
    发明授权
    Isolation valve 有权

    公开(公告)号：US11982359B2

    公开(公告)日：2024-05-14

    申请号：US16936012

    申请日：2020-07-22

    Applicant: Applied Materials, Inc.

    Inventor： Benjamin Riordon ,  Anantha K. Subramani ,  Charles T. Carlson

    IPC: F16K1/20 ,  F16K49/00 ,  H01L21/67

    CPC classification number: F16K1/2042 ,  F16K1/2007 ,  F16K49/005 ,  H01L21/67017

    Abstract: Described are isolation valves, and chamber systems incorporating and methods of using the isolation valves. In some embodiments, an isolation valve may include a valve body and a flapper assembly. The valve body may define a first fluid volume, a second fluid volume, and a seating surface. The flapper assembly may include a flapper disposed inside the valve body having a flapper surface complimentary to the seating surface. The flapper may be pivotable within the valve body to a first position such that the flapper surface may be away from the seating surface to allow fluid flow between the first fluid volume and the second fluid volume. The flapper may be pivotable within the valve body to a second position such that the flapper surface may be proximate the seating surface to form a non-contact seal to restrict fluid flow between the first fluid volume and the second fluid volume.

    Isolation valve
    13.
    发明授权
    Isolation valve 有权

    公开(公告)号：US11953097B2

    公开(公告)日：2024-04-09

    申请号：US16936012

    申请日：2020-07-22

    Applicant: Applied Materials, Inc.

    Inventor： Benjamin Riordon ,  Anantha K. Subramani ,  Charles T. Carlson

    IPC: F16K1/20 ,  F16K49/00 ,  H01L21/67

    CPC classification number: F16K1/2042 ,  F16K1/2007 ,  F16K49/005 ,  H01L21/67017

    Abstract: Described are isolation valves, and chamber systems incorporating and methods of using the isolation valves. In some embodiments, an isolation valve may include a valve body and a flapper assembly. The valve body may define a first fluid volume, a second fluid volume, and a seating surface. The flapper assembly may include a flapper disposed inside the valve body having a flapper surface complimentary to the seating surface. The flapper may be pivotable within the valve body to a first position such that the flapper surface may be away from the seating surface to allow fluid flow between the first fluid volume and the second fluid volume. The flapper may be pivotable within the valve body to a second position such that the flapper surface may be proximate the seating surface to form a non-contact seal to restrict fluid flow between the first fluid volume and the second fluid volume.

    High-density substrate processing systems and methods
    17.
    发明授权
    High-density substrate processing systems and methods 有权

    公开(公告)号：US11574826B2

    公开(公告)日：2023-02-07

    申请号：US16922874

    申请日：2020-07-07

    Applicant: Applied Materials, Inc.

    Inventor： Jason M. Schaller ,  Steve Hongkham ,  Charles T. Carlson ,  Tuan A. Nguyen ,  Swaminathan T. Srinivasan ,  Khokan Chandra Paul

    IPC: H01L21/67 ,  H01L21/687

    Abstract: Exemplary substrate processing systems may include a factory interface and a load lock coupled with the factory interface. The systems may include a transfer chamber coupled with the load lock. The transfer chamber may include a robot configured to retrieve substrates from the load lock. The systems may include a chamber system positioned adjacent and coupled with the transfer chamber. The chamber system may include a transfer region laterally accessible to the robot. The transfer region may include a plurality of substrate supports disposed about the transfer region. Each substrate support of the plurality of substrate supports may be vertically translatable. The transfer region may also include a transfer apparatus rotatable about a central axis and configured to engage substrates and transfer substrates among the plurality of substrate supports. The chamber system may also include a plurality of processing regions vertically offset and axially aligned with an associated substrate support.

    ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER
    18.
    发明申请
    ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER 有权

    公开(公告)号：US20230005783A1

    公开(公告)日：2023-01-05

    申请号：US17940369

    申请日：2022-09-08

    Applicant: Applied Materials, Inc.

    Inventor： Jason M. Schaller ,  Luke Bonecutter ,  Charles T. Carlson ,  Rajkumar Thanu ,  Karuppasamy Muthukamatchi ,  Jeff Hudgens ,  Benjamin Riordon

    IPC: H01L21/687 ,  B65G47/90 ,  H01L21/67

    Abstract: Exemplary substrate processing systems may include a transfer region housing defining a transfer region fluidly coupled with a plurality of processing regions. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The systems may include a plurality of substrate supports disposed within the transfer region. The systems may also include a transfer apparatus having a central hub including a first shaft and a second shaft counter-rotatable with the first shaft. The transfer apparatus may include an eccentric hub extending at least partially through the central hub, and which is radially offset from a central axis of the central hub. The transfer apparatus may also include an end effector coupled with the eccentric hub. The end effector may include a plurality of arms having a number of arms equal to the number of substrate supports of the plurality of substrate supports.

Patent Agency Ranking