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    Gyroscope that Compensates for Fluctuations in Sensitivity
    12.
    发明申请
    Gyroscope that Compensates for Fluctuations in Sensitivity 有权
    补偿灵敏度波动的陀螺仪

    公开(公告)号：US20170023364A1

    公开(公告)日：2017-01-26

    申请号：US14664034

    申请日：2015-03-20

    Applicant: Analog Devices, Inc.

    Inventor： Jeffrey A. Gregory

    IPC: G01C19/5776

    CPC classification number: G01C19/5776 ,  G01C19/56 ,  G01C19/5607 ,  G01C19/5642 ,  G01C19/5649 ,  G01C19/5719 ,  G01P15/125 ,  G01P15/13 ,  G01P21/00

    Abstract: A method compensates for a sensitivity of an inertial sensor having a resonator and an accelerometer. The method includes adding a test signal to a quadrature tuning voltage applied to the resonator of the inertial sensor. The method also includes receiving a quadrature error signal from the accelerometer of the inertial sensor. The method also includes detecting a phase difference between the quadrature error signal and the test signal. The method also includes determining a bandwidth of the accelerometer based on the detected phase difference, the bandwidth indicating the sensitivity of the accelerometer.

    Abstract translation: 一种补偿具有谐振器和加速度计的惯性传感器的灵敏度的方法。 该方法包括将测试信号添加到施加到惯性传感器的谐振器的正交调谐电压。 该方法还包括从惯性传感器的加速度计接收正交误差信号。 该方法还包括检测正交误差信号和测试信号之间的相位差。 该方法还包括基于检测到的相位差来确定加速度计的带宽，带宽表示加速度计的灵敏度。

    Time Multiplexed Electrodes in MEMS Inertial Sensors
    13.
    发明申请
    Time Multiplexed Electrodes in MEMS Inertial Sensors 审中-公开
    MEMS惯性传感器中的时间复用电极

    公开(公告)号：US20160131480A1

    公开(公告)日：2016-05-12

    申请号：US14534467

    申请日：2014-11-06

    Applicant: Analog Devices, Inc.

    Inventor： Jeffrey A. Gregory ,  Michael W. Judy

    IPC: G01C19/56

    CPC classification number: G01C19/5776

    Abstract: In certain exemplary embodiments of the present invention, rather than having two or more electrodes connected to separate bond pads for making electrical connections to separate electrical circuits to perform various electrode functions (e.g., a drive electrode for performing a drive function and a sense electrode for performing a sense function as in FIG. 1), a common electrode that can perform multiple electrode functions is electrically connected to a single bond pad, with the two electrical circuits connected to the single bond pad. The two electrical circuits are then time-multiplexed so that the electrode can be used for both electrode functions. Among other things, such an arrangement reduces the number of bond pads and therefore allows for reduction of the size of the MEMS die.

    Abstract translation: 在本发明的某些示例性实施例中，不是具有连接到分离的接合焊盘的两个或更多个电极，用于进行到分离的电路的电连接以执行各种电极功能（例如，用于执行驱动功能的驱动电极和用于 执行如图1所示的感测功能），可以执行多个电极功能的公共电极电连接到单键焊盘，其中两个电路连接到单键焊盘。 然后对两个电路进行时间复用，使得电极可用于两种电极功能。 除此之外，这种布置减少了接合焊盘的数量，因此允许减小MEMS管芯的尺寸。

    MEMS Sensor Cap with Multiple Isolated Electrodes
    14.
    发明申请
    MEMS Sensor Cap with Multiple Isolated Electrodes 有权
    具有多个隔离电极的MEMS传感器盖

    公开(公告)号：US20160130139A1

    公开(公告)日：2016-05-12

    申请号：US14534663

    申请日：2014-11-06

    Applicant: Analog Devices, Inc.

    Inventor： Jeffrey A. Gregory ,  See-Ho Tsang

    IPC: B81C1/00 ,  B81B7/00

    CPC classification number: B81B7/007 ,  B81B2203/0118 ,  B81B2203/04 ,  B81B2207/097 ,  B81C1/00095 ,  B81C2203/0109 ,  B81C2203/0118

    Abstract: The cap wafer for a MEMS device includes multiple electrically isolated electrodes that can be bonded and electrically connected to separate electrical contacts on a MEMS device wafer. The electrically isolated electrodes can be used for any of a variety of functions, such as for apply a force to a movable MEMS structure on the MEMS device wafer (e.g., for driving resonance of the movable MEMS structure or for adjusting a resonance or sense mode of the movable MEMS structure) or for sensing motion of a movable MEMS structure on the MEMS device wafer. Since the electrodes are electrically isolated, different electrodes may be used for different functions.

    Abstract translation: 用于MEMS器件的盖晶片包括多个电隔离电极，其可以结合并电连接到MEMS器件晶片上的分离的电触点。 电隔离电极可以用于各种功能中的任何一种，例如用于向MEMS器件晶片上的可移动MEMS结构施加力（例如，用于驱动可移动MEMS结构的谐振或用于调整谐振或感测模式 的可移动MEMS结构）或用于感测MEMS装置晶片上的可移动MEMS结构的运动。 由于电极是电隔离的，所以不同的电极可以用于不同的功能。

    LOW-PARASITIC CAPACITANCE MEMS INERTIAL SENSORS AND RELATED METHODS
    16.
    发明申请
    LOW-PARASITIC CAPACITANCE MEMS INERTIAL SENSORS AND RELATED METHODS 有权

    公开(公告)号：US20220162059A1

    公开(公告)日：2022-05-26

    申请号：US17668326

    申请日：2022-02-09

    Applicant: Analog Devices, Inc.

    Inventor： Charles Blackmer ,  Jeffrey A. Gregory ,  Nikolay Pokrovskiy ,  Bradley C. Kaanta

    IPC: B81C1/00 ,  G01C19/5755 ,  G01P15/08

    Abstract: Microelectromechanical system (MEMS) inertial sensors exhibiting reduced parasitic capacitance are described. The reduction in the parasitic capacitance may be achieved by forming localized regions of thick dielectric material. These localized regions may be formed inside trenches. Formation of trenches enables an increase in the vertical separation between a sense capacitor and the substrate, thereby reducing the parasitic capacitance in this region. The stationary electrode of the sense capacitor may be placed between the proof mass and the trench. The trench may be filled with a dielectric material. Part of the trench may be filled with air, in some circumstances, thereby further reducing the parasitic capacitance. These MEMS inertial sensors may serve, among other types of inertial sensors, as accelerometers and/or gyroscopes. Fabrication of these trenches may involve lateral oxidation, whereby columns of semiconductor material are oxidized.

    MEMS gyroscopes with in-line springs and related systems and methods
    18.
    发明授权
    MEMS gyroscopes with in-line springs and related systems and methods 有权

    公开(公告)号：US10948294B2

    公开(公告)日：2021-03-16

    申请号：US15946119

    申请日：2018-04-05

    Applicant: Analog Devices, Inc.

    Inventor： Jeffrey A. Gregory ,  Charles Blackmer

    IPC: G01C19/5712 ,  G01C19/5747

    Abstract: Microelectromechanical systems (MEMS) devices (such as gyroscopes) configured to reject quadrature motion are described. Quadrature motion arises for example when the drive motion of a gyroscope couples to the sense motion of a gyroscope even in the absence of an angular motion. In some circumstances, quadrature motion may result from the fact that the springs used in a gyroscope have slanted sidewall, which can impart torque in the mechanics of the gyroscope. MEMS gyroscope of the type described herein may be configured to reject quadrature motion by using only springs oriented substantially parallel to the drive direction. One such spring includes only beams parallel the drive directions, and optionally. These MEMS gyroscopes may be used to sense, among others, roll and pitch angular rates.

    Balanced runners synchronizing motion of masses in micromachined devices
    19.
    发明授权
    Balanced runners synchronizing motion of masses in micromachined devices 有权

    公开(公告)号：US10697774B2

    公开(公告)日：2020-06-30

    申请号：US15383366

    申请日：2016-12-19

    Applicant: Analog Devices, Inc.

    Inventor： Igor P. Prikhodko ,  John A. Geen ,  Jeffrey A. Gregory

    IPC: G01C19/574

    Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.

    MEMS Sensor Cap with Multiple Isolated Electrodes
    20.
    发明申请
    MEMS Sensor Cap with Multiple Isolated Electrodes 审中-公开

    公开(公告)号：US20170174504A1

    公开(公告)日：2017-06-22

    申请号：US15450797

    申请日：2017-03-06

    Applicant: Analog Devices, Inc.

    Inventor： Jeffrey A. Gregory ,  See-Ho Tsang

    IPC: B81B7/00

    CPC classification number: B81B7/007 ,  B81B2203/0118 ,  B81B2203/04 ,  B81B2207/097 ,  B81C1/00095 ,  B81C2203/0109 ,  B81C2203/0118

    Abstract: The cap wafer for a MEMS device includes multiple electrically isolated electrodes that can be bonded and electrically connected to separate electrical contacts on a MEMS device wafer. The electrically isolated electrodes can be used for any of a variety of functions, such as for apply a force to a movable MEMS structure on the MEMS device wafer (e.g., for driving resonance of the movable MEMS structure or for adjusting a resonance or sense mode of the movable MEMS structure) or for sensing motion of a movable MEMS structure on the MEMS device wafer. Since the electrodes are electrically isolated, different electrodes may be used for different functions.

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