公开(公告)号：US10167189B2

公开(公告)日：2019-01-01

申请号：US14502475

申请日：2014-09-30

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael W. Judy ,  George M. Molnar ,  Christopher Needham ,  Kemiao Jia

IPC: H01L21/00 ,  B81B7/00

Abstract: A MEMS product includes a stress-isolated MEMS platform surrounded by a stress-relief gap and suspended from a substrate. The stress-relief gap provides a barrier against the transmission of mechanical stress from the substrate to the platform.

公开(公告)号：US20170073218A1

公开(公告)日：2017-03-16

申请号：US14853251

申请日：2015-09-14

Applicant: Analog Devices. Inc.

Inventor： Bradley C. Kaanta ,  Kemiao Jia

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/0048 ,  B81B2203/0163

Abstract: A MEMS device has a substrate with a structure surface and an opposing exterior surface, microstructure formed on the structure surface of the substrate, and a cap coupled with the substrate to form a hermetically sealed interior chamber containing the microstructure. The substrate forms a trench extending from, and being open to, the opposing exterior surface to produce a sensor region and a second region. Specifically, the second region is radially outward of the sensor region. The MEMS device also has a spring integrally formed at least in part within the trench to mechanically connect the sensor region and the second region, and other structure integral with the substrate. The spring or the other structure at least in part hermetically seal the interior chamber.

Abstract translation: MEMS器件具有具有结构表面和相对的外表面的基底，形成在基底的结构表面上的微结构，以及与基底结合以形成包含微结构的气密密封的内部腔的盖。 衬底形成从相对的外表面延伸并开口的沟槽，以产生传感器区域和第二区域。 具体地，第二区域在传感器区域的径向外侧。 MEMS器件还具有至少部分地在沟槽内整体形成的弹簧以机械地连接传感器区域和第二区域以及与衬底一体的其它结构。 弹簧或其他结构至少部分地密封内部腔室。

公开(公告)号：US11892467B2

公开(公告)日：2024-02-06

申请号：US17555002

申请日：2021-12-17

Applicant: Analog Devices, Inc.

Inventor： Kemiao Jia ,  Xin Zhang ,  Michael Judy

IPC: G01P15/125 ,  G01P1/00

CPC classification number: G01P15/125 ,  G01P1/00

Abstract: A microelectromechanical systems (MEMS) accelerometer is provided, comprising a substrate disposed in a plane defined by a first axis and a second axis perpendicular to the first axis; a first proof mass and a second proof mass coupled to the substrate and configured to translate in opposite directions of each other along a third axis perpendicular to the first and second axes; and at least one lever coupling the first proof mass to the second proof mass, wherein, the MEMS accelerometer is configured to detect acceleration along the third axis via detection of translation of the first and second proof masses along the third axis; and the MEMS accelerometer exhibits symmetry about the first and second axes.

公开(公告)号：US11614541B2

公开(公告)日：2023-03-28

申请号：US16570538

申请日：2019-09-13

Applicant: Analog Devices, Inc.

Inventor： Kemiao Jia

IPC: H04B10/00 ,  G01S17/88 ,  G02B26/10 ,  G01S7/481 ,  G02B27/30 ,  G02B27/16

Abstract: This disclosure describes techniques for operating a lidar device. The techniques include emitting light resulting in a plurality of non-parallel laser beam waves; directing the plurality of non-parallel laser beam waves towards a laser beam scanner; reflecting the non-parallel plurality of beam waves by the laser beam scanner towards a collimator device; collimating, with the collimator device, the plurality of non-parallel laser beam waves reflected by the laser beam scanner into a corresponding plurality of parallel plane waves; and directing the plurality of plane waves from the collimator device towards a field of interest.

公开(公告)号：US20220057210A1

公开(公告)日：2022-02-24

申请号：US17515271

申请日：2021-10-29

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

公开(公告)号：US11193771B1

公开(公告)日：2021-12-07

申请号：US16894717

申请日：2020-06-05

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

公开(公告)号：US10514259B2

公开(公告)日：2019-12-24

申请号：US15253792

申请日：2016-08-31

Applicant: Analog Devices, Inc.

Inventor： Kemiao Jia ,  Xin Zhang ,  Jianglong Zhang ,  Jinbo Kuang

IPC: G01C19/5705 ,  G01C19/5712

Abstract: A two-axis microelectromechanical systems (MEMS) gyroscope having four proof masses disposed in respective quadrants of a plane is described. The quad proof mass gyroscope may comprise an inner coupler passing between a first and a third proof mass and between a second and a fourth proof mass, and coupling the four proof masses with one another. The quad proof mass gyroscope may further comprising a first outer coupler coupling the first and the second proof masses and a second outer coupler coupling the third and the fourth proof masses. The outer couplers may have masses configured to balance the center of masses of the four proof masses, and may have elastic constants matching the elastic constant of the inner coupler. The quad gyroscope may further comprise a plurality of sense capacitors configured to sense angular rates.

公开(公告)号：US20160090297A1

公开(公告)日：2016-03-31

申请号：US14502475

申请日：2014-09-30

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael W. Judy ,  George M. Molnar ,  Christopher R. Needham ,  Kemiao Jia

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/0048

Abstract: A MEMS product includes a stress-isolated MEMS platform surrounded by a stress-relief gap and suspended from a substrate. The stress-relief gap provides a barrier against the transmission of mechanical stress from the substrate to the platform.

Abstract translation: MEMS产品包括由应力消除间隙围绕并从衬底悬挂的应力隔离MEMS平台。 应力消除间隙提供阻挡机械应力从基板传递到平台的障碍。