公开(公告)号：US06675654B2

公开(公告)日：2004-01-13

申请号：US10138519

申请日：2002-05-06

申请人： Frank Hegner ,  Andreas Rossberg ,  Elke Schmidt ,  Ulfert Drewes ,  Michael Kirst ,  Bernhard Walter

发明人： Frank Hegner ,  Andreas Rossberg ,  Elke Schmidt ,  Ulfert Drewes ,  Michael Kirst ,  Bernhard Walter

IPC分类号： G01L708

CPC分类号： B01D39/2093

摘要： A chamber in the interior of a housing communicates with the environment of the housing by means of a gas esxchange path, wherein a filter element with a hydrophobic and/or hydrophobicized, nanoporous material is placed in the gas exchange path. The chamber serves, e.g. to accomodate electronic circuitry, or it is chamed as a reference pressure chamber of a relative pressure sensor. The relative pressure sensor according to the present invention for capturing a measured pressure with respect to a reference pressure comprises a reference pressure path 23 which extends between a surface which can be exposed to the reference pressure and an opening in a reference pressure chamber 22, a filter element 30 which is arranged in the reference pressure path comprising a hydrophobic or hydrophobicized, nanoporous material. The filter element allows pressure compensation on account of its permeability to N2 and O2, while water molecules are selectively blocked. The nanoporous material preferably comprises an inorganic material, in particular Al2O3, TiO2 or SiO2. The nanoporous material is preferably hydrophobic and/or can be impregnated with a hydrophobic layer, preferably a silane, in order to optimize the hydrophobic properties.

摘要翻译： 壳体内部的腔室通过气体交换路径与壳体的环境连通，其中具有疏水和/或疏水化的纳米多孔材料的过滤元件被放置在气体交换路径中。 该室供应，例如 以适应电子电路，或者将其作为相对压力传感器的参考压力室进行加工。 根据本发明的用于捕获相对于参考压力的测量压力的相对压力传感器包括在可暴露于参考压力的表面和参考压力室22中的开口之间延伸的参考压力路径23， 过滤元件30布置在参考压力路径中，包括疏水或疏水化的纳米多孔材料。 过滤元件由于其对N2和O2的渗透性而允许压力补偿，而水分子被选择性地阻挡。 纳米多孔材料优选包含无机材料，特别是Al 2 O 3，TiO 2或SiO 2。 纳米多孔材料优选是疏水性的和/或可以用疏水层，优选硅烷浸渍，以优化疏水性质。

公开(公告)号：US06422085B1

公开(公告)日：2002-07-23

申请号：US09354628

申请日：1999-07-16

申请人： Frank Hegner ,  Andreas Rossberg ,  Ulfert Drewes ,  Elke Schmidt

发明人： Frank Hegner ,  Andreas Rossberg ,  Ulfert Drewes ,  Elke Schmidt

IPC分类号： G01L700

CPC分类号： G01L19/0654 ,  G01L19/0636

摘要： In this flush-diaphragm relative pressure sensor (1), the reference air reaches its current dew point before getting into the interior of the housing. The sensor has a capacitive, resistive, or piezoelectric sensing element (2) with a diaphragm (21) an external surface of which comes into direct contact with a medium under pressure. A housing (7) has an interior space (71) and a front portion (72) open across the interior space in the vicinity of which the diaphragm closes the interior space such that the front portion projects beyond the diaphragm. Further, the housing has a bore (721) extending through the front portion from an outer side thereof to the interior space for guiding the reference air. The bore is closed from the outer side with an open-pore, highly heat-conducting and hydrophobic filter (8), so that the filter and the diaphragm are at the same or nearly the same temperature. The filter can be made of a sintered metal, e.g. high-grade steel or bronze, or of a metallic sponge, e.g. titanium or zirconium.

摘要翻译： 在该冲洗隔膜相对压力传感器（1）中，参考空气在进入壳体内部之前达到其目前的露点。 传感器具有电容式，电阻式或压电传感元件（2），其具有隔膜（21），其外表面与压力介质直接接触。 壳体（7）具有内部空间（71）和横跨内部空间开放的前部（72），隔膜在其附近敞开内部空间，使得前部突出超过隔膜。 此外，壳体具有从其外侧延伸穿过前部到内部空间的孔（721），用于引导参考空气。 孔从外侧封闭，具有开孔，高度导热和疏水的过滤器（8），使得过滤器和隔膜处于相同或接近相同的温度。 过滤器可以由烧结金属制成，例如， 高级钢或青铜，或金属海绵，例如。 钛或锆。

公开(公告)号：US09625335B2

公开(公告)日：2017-04-18

申请号：US14000450

申请日：2012-02-10

申请人： Andrea Berlinger ,  Ulfert Drewes ,  Michael Philipps ,  Andreas Rossberg ,  Elke Schmidt

发明人： Andrea Berlinger ,  Ulfert Drewes ,  Michael Philipps ,  Andreas Rossberg ,  Elke Schmidt

IPC分类号： G01L9/00

CPC分类号： G01L9/00 ,  G01L9/0075

摘要： A pressure measuring cell includes at least one ceramic measuring membrane body; and at least one ceramic platform, wherein the measuring membrane body is connected with the platform along an annular, peripheral joint. The joint is formed as a welded connection between the measuring membrane body and the platform, wherein the measuring membrane body has a pressure-dependently deformable measuring membrane. A pressure sensor includes a pressure measuring cell and a housing, wherein the pressure measuring cell is held by the housing, and wherein the pressure measuring cell closes a housing opening, through which the pressure measuring cell communicates with an environment of the housing. A seal is clamped between a sealing surface surrounding the opening of the housing and a sealing surface of the pressure measuring cell.

公开(公告)号：US20130327151A1

公开(公告)日：2013-12-12

申请号：US14000450

申请日：2012-02-10

申请人： Andrea Berlinger ,  Ulfert Drewes ,  Michael Philipps ,  Andreas Rossberg ,  Elke Schmidt

发明人： Andrea Berlinger ,  Ulfert Drewes ,  Michael Philipps ,  Andreas Rossberg ,  Elke Schmidt

IPC分类号： G01L9/00

CPC分类号： G01L9/00 ,  G01L9/0075

摘要： A pressure measuring cell includes at least one ceramic measuring membrane body; and at least one ceramic platform, wherein the measuring membrane body is connected with the platform along an annular, peripheral joint. The joint is formed as a welded connection between the measuring membrane body and the platform, wherein the measuring membrane body has a pressure-dependently deformable measuring membrane. A pressure sensor includes a pressure measuring cell and a housing, wherein the pressure measuring cell is held by the housing, and wherein the pressure measuring cell closes a housing opening, through which the pressure measuring cell communicates with an environment of the housing. A seal is clamped between a sealing surface surrounding the opening of the housing and a sealing surface of the pressure measuring cell.

摘要翻译： 压力测量单元包括至少一个陶瓷测量膜体; 和至少一个陶瓷平台，其中所述测量膜主体沿着环形的周边接头与所述平台连接。 接头形成为测量膜体和平台之间的焊接连接，其中测量膜体具有压力可变形的测量膜。 压力传感器包括压力测量单元和壳体，其中所述压力测量单元由所述壳体保持，并且其中所述压力测量单元关闭壳体开口，所述压力测量单元通过所述壳体开口与所述壳体的环境连通。 密封件夹在围绕壳体开口的密封表面和压力测量单元的密封表面之间。

公开(公告)号：US09816887B2

公开(公告)日：2017-11-14

申请号：US14004228

申请日：2012-02-10

申请人： Andrea Berlinger ,  Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt ,  Thomas Uehlin

发明人： Andrea Berlinger ,  Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt ,  Thomas Uehlin

IPC分类号： G01L9/12 ,  G01L9/00 ,  C04B35/111 ,  C04B37/00 ,  B23K26/211 ,  B23K26/32 ,  B23K1/00 ,  B23K1/008 ,  B23K35/30 ,  B23K35/32 ,  C22C16/00 ,  C22C30/02 ,  B23K103/00 ,  B23K103/16 ,  B23K101/40

CPC分类号： G01L9/0048 ,  B23K1/0016 ,  B23K1/008 ,  B23K26/211 ,  B23K26/32 ,  B23K35/302 ,  B23K35/32 ,  B23K2101/40 ,  B23K2103/172 ,  B23K2103/52 ,  C04B35/111 ,  C04B37/006 ,  C04B2235/6565 ,  C04B2235/6581 ,  C04B2235/665 ,  C04B2235/786 ,  C04B2235/96 ,  C04B2237/122 ,  C04B2237/124 ,  C04B2237/126 ,  C04B2237/127 ,  C04B2237/343 ,  C04B2237/592 ,  C04B2237/60 ,  C04B2237/708 ,  C22C16/00 ,  C22C30/02 ,  G01L9/0075

摘要： A method for manufacturing a pressure measuring cell, which has a ceramic platform and a ceramic measuring membrane, wherein the measuring membrane is joined with the platform pressure tightly by an active hard solder, or braze, wherein the method includes: providing the platform, the measuring membrane and the active hard solder, or braze, positioning the active hard solder, or braze, between the platform and the measuring membrane; melting the active hard solder, or braze, by irradiating the active hard solder, or braze, by a laser, wherein the irradiating of the active hard solder, or braze, occurs through the measuring membrane; and letting the active hard solder, or braze, solidify by cooling.

公开(公告)号：US08966989B2

公开(公告)日：2015-03-03

申请号：US13383696

申请日：2010-06-22

申请人： Ulfert Drewes ,  Thomas Uehlin ,  Elke Schmidt ,  Andreas Rossberg

发明人： Ulfert Drewes ,  Thomas Uehlin ,  Elke Schmidt ,  Andreas Rossberg

IPC分类号： G01L9/12 ,  G01L9/00

CPC分类号： G01L9/0075

摘要： A capacitive pressure measuring cell, including a ceramic platform and a ceramic measuring membrane, which are connected pressure tightly along a joint to form a reference pressure chamber between them. The measuring membrane has a first electrode facing the platform, and the platform has at least a second electrode facing the measuring membrane. The capacitance between the first and second electrodes depends on the difference between a pressure externally acting on the measuring membrane and a pressure reigning in the reference pressure chamber, wherein the joint has a thickness d, which defines an equilibrium distance between the measuring membrane and the front side of the platform. On the front side of the platform, a support layer is arranged, which comprises an inorganic insulator, wherein the support layer has a thickness of at least 0.2, and wherein the second electrode is arranged on the support layer.

摘要翻译： 一种电容式压力测量单元，包括陶瓷平台和陶瓷测量膜，它们沿接头压紧，在它们之间形成参考压力室。 测量膜具有面向平台的第一电极，并且平台具有面向测量膜的至少第二电极。 第一和第二电极之间的电容取决于外部作用在测量膜上的压力与参考压力室中的压力差之间的差异，其中接头具有厚度d，其限定了测量膜与测量膜之间的平衡距离 平台前方 在平台的前侧，布置有支撑层，其包括无机绝缘体，其中支撑层具有至少0.2的厚度，并且其中第二电极布置在支撑层上。

公开(公告)号：US20120258322A1

公开(公告)日：2012-10-11

申请号：US13515342

申请日：2010-11-10

申请人： Andrea Berlinger ,  Ulfert Drewes ,  Andreas Rossberg ,  Detlef Schleiferböck ,  Elke Schmidt

发明人： Andrea Berlinger ,  Ulfert Drewes ,  Andreas Rossberg ,  Detlef Schleiferböck ,  Elke Schmidt

IPC分类号： B32B7/12 ,  B23K1/19 ,  G01L7/00

CPC分类号： G01L9/0075 ,  C04B37/006 ,  C04B2237/122 ,  C04B2237/343 ,  C04B2237/403 ,  C04B2237/708 ,  C04B2237/72

摘要： A ceramic product 1 includes a first ceramic part 2 and a second ceramic part 3, wherein the first ceramic part 2 is connected with the second ceramic part 3 via a joint, wherein the joint comprises an active hard solder, or braze, characterized in that the joint has an inhomogeneous distribution of the components of the active hard solder, or braze, wherein at least at an interface between the active hard solder, or braze, and the ceramic, the at least one active component of the active hard solder, or braze, is enriched. For manufacture of the product, the active hard solder, or braze, material is provided in such a manner, that at least one surface section of at least one of the ceramic parts is first coated with at least one active component of the active hard solder, or braze, and that on the coated section, an alloy is provided, which, by melting of the alloy during the heating, alloys with the coating and forms a metal joint between the two ceramic parts.

摘要翻译： 陶瓷制品1包括第一陶瓷部件2和第二陶瓷部件3，其中第一陶瓷部件2经由接头与第二陶瓷部件3连接，其中接头包括活性硬焊料或钎焊，其特征在于， 接头具有活性硬焊料或钎焊的组分的不均匀分布，其中至少在活性硬焊料或钎焊之间的界面处，和陶瓷，活性硬焊料的至少一种活性组分或 钎焊，富集。 为了制造产品，以这样的方式提供活性硬焊料或钎焊材料，即至少一个陶瓷部件的至少一个表面部分首先涂覆有活性硬焊料的至少一种活性组分 或钎焊，并且在涂覆部分上，提供合金，其通过在加热期间熔化合金而与涂层合金，并在两个陶瓷部件之间形成金属接头。

公开(公告)号：US20120174681A1

公开(公告)日：2012-07-12

申请号：US13383696

申请日：2010-06-22

申请人： Ulfert Drewes ,  Thomas Uehlin ,  Elke Schmidt ,  Andreas Rossberg

发明人： Ulfert Drewes ,  Thomas Uehlin ,  Elke Schmidt ,  Andreas Rossberg

IPC分类号： G01L9/12

CPC分类号： G01L9/0075

摘要： A capacitive pressure measuring cell, including a ceramic platform and a ceramic measuring membrane, which are connected pressure tightly along a joint to form a reference pressure chamber between them. The measuring membrane has a first electrode facing the platform, and the platform has at least a second electrode facing the measuring membrane. The capacitance between the first and second electrodes depends on the difference between a pressure externally acting on the measuring membrane and a pressure reigning in the reference pressure chamber, wherein the joint has a thickness d, which defines an equilibrium distance between the measuring membrane and the front side of the platform. On the front side of the platform, a support layer is arranged, which comprises an inorganic insulator, wherein the support layer has a thickness of at least 0.2, and wherein the second electrode is arranged on the support layer.

摘要翻译： 一种电容式压力测量单元，包括陶瓷平台和陶瓷测量膜，它们沿接头压紧，在它们之间形成参考压力室。 测量膜具有面向平台的第一电极，并且平台具有面向测量膜的至少第二电极。 第一和第二电极之间的电容取决于外部作用在测量膜上的压力与参考压力室中的压力差之间的差异，其中接头具有厚度d，其限定了测量膜与测量膜之间的平衡距离 平台前方 在平台的前侧，布置有支撑层，其包括无机绝缘体，其中支撑层具有至少0.2的厚度，并且其中第二电极布置在支撑层上。

公开(公告)号：US20060254363A1

公开(公告)日：2006-11-16

申请号：US10560339

申请日：2004-06-09

申请人： Frank Hegner ,  Andreas Rossberg ,  Thomas Uehlin

发明人： Frank Hegner ,  Andreas Rossberg ,  Thomas Uehlin

IPC分类号： G01L9/12

CPC分类号： G01L19/0654 ,  G01L9/0075 ,  G01L19/148

摘要： A pressure sensor includes: a measuring cell having a base plate and a measuring membrane connected along its edge with the base plate, and means for generating an electrical quantity dependent on deformation of the measuring membrane; a circuit for registering the electrical quantity; and a capsule having a capsule body and a sealing element, with which the capsule is hermetically sealed along a joint. The capsule encloses the circuit, in order to protect such from influences of moisture; and the joint of the capsule is mechanically decoupled from the base plate. The mechanical decoupling of the joint means, for example, that at least the axial support of the pressure measuring cell in a housing is not allowed to be transferred through the joint. Despite arranging of the capsule on the base plate, pressure-related and temperature-related distortions of the base plate are not permitted to have any effects on the joint of the capsule.

摘要翻译： 压力传感器包括：测量单元，具有基板和沿其边缘与基板连接的测量膜，以及用于产生取决于测量膜的变形的电量的装置; 用于注册电量的电路; 以及胶囊，其具有胶囊主体和密封元件，胶囊通过该胶囊沿着关节气密地密封。 胶囊包围电路，以保护其免受潮湿的影响; 并且胶囊的接头与基板机械地分离。 接头装置的机械解耦，例如，至少壳体中的压力测量单元的轴向支撑不允许通过接头传递。 尽管将胶囊安置在基板上，但是底板的压力相关和温度相关的变形不允许对胶囊的接头产生任何影响。

公开(公告)号：US5954900A

公开(公告)日：1999-09-21

申请号：US935417

申请日：1997-09-23

申请人： Frank Hegner ,  Elke Maria Schmidt ,  Andreas Rossberg ,  Barbel Voigtsberger ,  Ingolf Voigt ,  Henry Ludwig

发明人： Frank Hegner ,  Elke Maria Schmidt ,  Andreas Rossberg ,  Barbel Voigtsberger ,  Ingolf Voigt ,  Henry Ludwig

IPC分类号： C04B37/00 ,  G01L9/00 ,  B32B31/26 ,  G01L9/12

CPC分类号： C04B35/645 ,  C04B37/005 ,  G01L9/0075 ,  C04B2235/656 ,  C04B2237/064 ,  C04B2237/343

摘要： This process serves to form a long-time-vacuum-tight, high-strength, and corrosion-resistant joint, by means of a joining material, between a first body and a second body each made of sintered, polycrystalline alumina ceramic with a purity greater than 92 wt. % or of sapphire. The joining material is interposed in the form of a paste, a foil, or a slip between the first body and the second body. The joining material has been made from 1) an agglomerate-free, highly disperse, high-purity .alpha.-alumina powder with particles of as high a degree of calcination as possible and of a size not exceeding 100 nm (=10.sup.-7 m), 2) an anorganic oxidic powder of an auxiliary sintering agent with particles of approximately the same size as the particle size of the .alpha.-alumina powder, 3) an organic vehicle which is dissolved or suspended in an organic or aqueous solvant and in which the particles of the respective powder are distributed as evenly as possible. Instead of the anorganic oxidic powder of an auxiliary sintering agent an anorganic oxidic auxiliary sintering agent produced chemically as envelopes around or attachment to the particles of the .alpha.-alumina powder can be used, the total .alpha.-alumina and auxiliary-sintering-agent content of the paste, the foil, or the slip ranging between 50% and 70%. After interposing the joining material the bodies are heated to a temperature of not more than 1,300.degree. C. and then allowing them to cool down.

摘要翻译： 该方法用于通过连接材料在第一主体和第二主体之间形成长时间真空密封，高强度和耐腐蚀的接头，每个第一主体和第二主体由具有纯度的烧结多晶氧化铝陶瓷制成 大于92wt。 ％或蓝宝石。 接合材料以第一主体和第二主体之间的糊状物，箔片或滑动片的形式插入。 接合材料由1）无聚集高分散，高纯度的α-氧化铝粉末制成，该粉末具有尽可能高的煅烧程度且尺寸不超过100nm（=10-7μm） 2）一种辅助烧结剂的无机氧化粉末，其颗粒大小与α-氧化铝粉末的粒度大致相同，3）有机载体，其溶解或悬浮在有机或水溶液中，其中 各粉末的颗粒尽可能均匀地分布。 代替辅助烧结剂的无机氧化物粉末，可以使用以α-氧化铝粉末的颗粒包围或附着于其上化学形成的无机氧化物辅助烧结剂，总α-氧化铝和辅助烧结剂的总量 糊，箔或滑差在50％至70％之间。 在插入接合材料之后，将本体加热至不高于1300℃的温度，然后使其冷却。