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    Spatial light modulators with light blocking/absorbing areas
    12.
    发明申请
    Spatial light modulators with light blocking/absorbing areas 有权
    具有遮光/吸收区域的空间光调制器

    公开(公告)号：US20050157376A1

    公开(公告)日：2005-07-21

    申请号：US11076640

    申请日：2005-03-09

    Applicant: Andrew Huibers ,  Satyadev Patel

    Inventor： Andrew Huibers ,  Satyadev Patel

    IPC: G02B26/08 ,  G02B26/00

    CPC classification number: B82Y30/00 ,  G02B26/0833 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/0102 ,  H01L2924/01024 ,  H01L2924/01074

    Abstract: A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light absorbing layer can form a pattern, such as a frame around an array of micro-mirrors.

    Abstract translation: 公开了投影系统，空间光调制器和用于形成诸如投影显示器的微镜阵列的方法。 空间光调制器可以具有与包括微镜阵列的基板之一粘合在一起的两个基板。 如果需要，在沉积吸气剂材料和/或固体或液体润滑剂在一个或两个晶片上之后，两个基底可以在晶片层上结合。 在本发明的一个实施例中，一个基板是透光基板，并且在透光基板上设置光吸收层，以选择性地阻挡光通过基板。 光吸收层可以形成图案，例如围绕微镜阵列的框架。

    Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
    13.
    发明申请
    Micromirror array having reduced gap between adjacent micromirrors of the micromirror array 有权

    公开(公告)号：US20050122561A1

    公开(公告)日：2005-06-09

    申请号：US11034318

    申请日：2005-01-11

    Applicant: Andrew Huibers ,  Satyadev Patel

    Inventor： Andrew Huibers ,  Satyadev Patel

    IPC: B81C20060101 ,  G02B26/00 ,  G02B26/08 ,  G02F1/29 ,  H04N5/74

    CPC classification number: B82Y30/00 ,  G02B26/0841 ,  H04N5/7458

    Abstract: A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

    Micromirror having reduced space between hinge and mirror plate of the micromirror
    14.
    发明申请
    Micromirror having reduced space between hinge and mirror plate of the micromirror 有权

    公开(公告)号：US20050088719A1

    公开(公告)日：2005-04-28

    申请号：US10627303

    申请日：2003-07-24

    Applicant: Satyadev Patel ,  Andrew Huibers

    Inventor： Satyadev Patel ,  Andrew Huibers

    IPC: G02B20060101 ,  G02B26/00 ,  G02B26/08 ,  H01L20060101 ,  H01L21/00

    CPC classification number: G02B26/0841 ,  B82Y30/00

    Abstract: A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

    High angle micro-mirrors and processes
    15.
    发明申请
    High angle micro-mirrors and processes 有权

    公开(公告)号：US20050078349A1

    公开(公告)日：2005-04-14

    申请号：US10990835

    申请日：2004-11-16

    Applicant: Satyadev Patel ,  Andrew Huibers ,  Peter Heureux

    Inventor： Satyadev Patel ,  Andrew Huibers ,  Peter Heureux

    IPC: G02B26/08 ,  G02B26/00

    CPC classification number: G02B26/0841

    Abstract: A micro-mirror that comprises a substrate, a hinge structure formed on the substrate and a mirror plate attached to the hinge structure is provided for use in display systems. The mirror plate is capable of rotating from a non-deflected resting state to a state that is at least 14° degrees. In operation, the micro-mirror switches between an “ON”-state and “OFF”-state, which are defined in accordance with a rotational position of the mirror plate. The OFF state can be a non-deflected position of the micro-mirror (generally parallel to the substrate), the same angle (though opposite direction) as the ON state, or an angle less than the ON state (though in the opposite direction). Reflected light from the “ON” and “OFF” states are thus separated and the contrast ratio is improved.

    Etching method used in fabrications of microstructures
    16.
    发明申请
    Etching method used in fabrications of microstructures 有权
    用于微结构制造中的蚀刻方法

    公开(公告)号：US20050020089A1

    公开(公告)日：2005-01-27

    申请号：US10666002

    申请日：2003-09-17

    Applicant: Hongqin Shi ,  Gregory Schaadt ,  Andrew Huibers ,  Satyadev Patel

    Inventor： Hongqin Shi ,  Gregory Schaadt ,  Andrew Huibers ,  Satyadev Patel

    IPC: G02B26/08 ,  H01L21/00 ,  H01L21/302 ,  H01L21/461

    CPC classification number: H01L21/67069 ,  B81C1/00595 ,  B81C2201/0132 ,  G02B26/0841

    Abstract: The present invention discloses a method and apparatus for removing the sacrificial materials in fabrications of microstructures using a vapor phase etchant recipe having a spontaneous vapor phase chemical etchant. The vapor phase etchant recipe has a mean-free-path corresponding to the minimum thickness of the sacrificial layers between the structural layers of the microstructure. This method is of particular importance in removing the sacrificial layers underneath the structural layers of the microstructure.

    Abstract translation: 本发明公开了一种使用具有自发气相化学蚀刻剂的气相蚀刻剂配方去除微结构制造中的牺牲材料的方法和装置。 气相蚀刻剂配方具有对应于微结构的结构层之间的牺牲层的最小厚度的平均自由程。 该方法在去除微结构结构层下面的牺牲层时尤其重要。

    Interferometers of high resolutions
    18.
    发明申请
    Interferometers of high resolutions 有权

    公开(公告)号：US20060232785A1

    公开(公告)日：2006-10-19

    申请号：US11110557

    申请日：2005-04-19

    Applicant: Regis Grasser ,  Satyadev Patel ,  Andrew Huibers

    Inventor： Regis Grasser ,  Satyadev Patel ,  Andrew Huibers

    IPC: G01B11/02

    CPC classification number: G01B9/02063 ,  G01B9/02058 ,  G01J3/453

    Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

    Interferometers of high resolutions
    19.
    发明申请
    Interferometers of high resolutions 审中-公开

    公开(公告)号：US20060232784A1

    公开(公告)日：2006-10-19

    申请号：US11109994

    申请日：2005-04-19

    Applicant: Regis Grasser ,  Satyadev Patel ,  Andrew Huibers

    Inventor： Regis Grasser ,  Satyadev Patel ,  Andrew Huibers

    IPC: G01B11/02

    CPC classification number: G01B9/02063 ,  G01B9/02058

    Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

    Micromirror and post arrangements on substrates
    20.
    发明申请
    Micromirror and post arrangements on substrates 有权

    公开(公告)号：US20060171014A1

    公开(公告)日：2006-08-03

    申请号：US11327697

    申请日：2006-01-05

    Applicant: Andrew Huibers ,  Satyadev Patel

    Inventor： Andrew Huibers ,  Satyadev Patel

    IPC: G02B26/00

    CPC classification number: G02B26/0841

    Abstract: A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.

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