公开(公告)号：US10814475B2

公开(公告)日：2020-10-27

申请号：US16672935

申请日：2019-11-04

Applicant: Applied Materials, Inc.

Inventor： Karuppasamy Muthukamatchi ,  Damon K. Cox ,  Jeffrey C. Hudgens

IPC: H01L21/67 ,  B25J9/00 ,  B25J9/04 ,  H01L21/677

Abstract: Robots including spaced upper arms are described. The robot includes first and second upper arms rotatable about a shoulder axis wherein the second upper arm is spaced from the first upper arm. The other robot components (first and second forearms, first and second wrist members, and first and second end effectors) are interleaved in the space between the first and second upper arms. Each of the first and second upper arms may be individually and independently controlled. Methods of operating the robot and electronic device processing systems including the robot are provided, as are numerous other aspects.

公开(公告)号：US12115683B2

公开(公告)日：2024-10-15

申请号：US18355355

申请日：2023-07-19

Applicant: Applied Materials, Inc.

Inventor： Nicholas Michael Bergantz ,  Damon K. Cox ,  Alexander Berger

IPC: B25J9/16 ,  B65G47/90 ,  H01L21/67 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687 ,  B25J11/00 ,  B25J13/08

CPC classification number: B25J9/1692 ,  B65G47/905 ,  H01L21/67167 ,  H01L21/67196 ,  H01L21/67259 ,  H01L21/67706 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/68 ,  H01L21/68707 ,  B25J9/1697 ,  B25J11/0095 ,  B25J13/08

Abstract: A first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position. A second robot arm retrieves the calibration object from the load lock using a second taught position. A controller determines, using a sensor, a first offset amount between a calibration object center of the calibration object and a pocket center of the second robot arm. The controller determines a characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount. The first robot arm or the second robot arm uses the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock.

公开(公告)号：US20240190026A1

公开(公告)日：2024-06-13

申请号：US18079755

申请日：2022-12-12

Applicant: Applied Materials, Inc.

Inventor： Damon K. Cox ,  Manjunatha Gondihosalli ,  Karuppasamy Muthukamatchi

IPC: B25J19/00 ,  B25J15/08

CPC classification number: B25J19/0004 ,  B25J15/08 ,  B25J11/0095

Abstract: A carrier includes a carrier body, fingers attached to the carrier body, and a rotation prevention component attached to the carrier body. The fingers are configured to support a process kit ring. The rotation prevention component is configured to be disposed proximate a flat inner surface of the process kit ring to prevent rotation of the process kit ring.

公开(公告)号：US20240071802A1

公开(公告)日：2024-02-29

申请号：US18234453

申请日：2023-08-16

Applicant: Applied Materials, Inc.

Inventor： Paul Z. Wirth ,  Damon K. Cox ,  Rajkumar Thanu ,  Karuppasamy Muthukamatchi ,  Jeffrey C. Hudgens

IPC: H01L21/687 ,  B25J9/04 ,  B25J11/00 ,  H01L21/67

CPC classification number: H01L21/68707 ,  B25J9/043 ,  B25J11/0095 ,  H01L21/67167 ,  H01L21/67201

Abstract: A robot apparatus with variable end effector pitch is provided suitable for accommodating varying pitches, e.g., between two adjacent processing chambers or between two adjacent load lock chambers. The robot apparatus may operate in dual substrate handling mode, single substrate handling mode, or a combination thereof. The robot apparatus may also be an off-axis robot. A variety of robot apparatuses according to various embodiments, electronic device processing systems including such robot apparatuses, and methods of use thereof are described.

公开(公告)号：US20230364794A1

公开(公告)日：2023-11-16

申请号：US18355355

申请日：2023-07-19

Applicant: Applied Materials, Inc.

Inventor： Nicholas Michael Bergantz ,  Damon K. Cox ,  Alexander Berger

IPC: B25J9/16 ,  H01L21/677 ,  H01L21/68 ,  H01L21/67 ,  H01L21/687 ,  B65G47/90 ,  B25J13/08 ,  B25J11/00

CPC classification number: B25J9/1692 ,  H01L21/67745 ,  H01L21/68 ,  H01L21/67742 ,  H01L21/67196 ,  H01L21/68707 ,  H01L21/67259 ,  H01L21/67706 ,  B65G47/905 ,  H01L21/67167 ,  B25J13/08 ,  B25J9/1697 ,  B25J11/0095

Abstract: A first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position. A second robot arm retrieves the calibration object from the load lock using a second taught position. A controller determines, using a sensor, a first offset amount between a calibration object center of the calibration object and a pocket center of the second robot arm. The controller determines a characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount. The first robot arm or the second robot arm uses the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock.

公开(公告)号：US11770049B2

公开(公告)日：2023-09-26

申请号：US17030094

申请日：2020-09-23

Applicant: Applied Materials, Inc.

Inventor： Alexander Berger ,  Paul Lawrence Korff ,  William Paul Laceky ,  Jeffrey C. Hudgens ,  Rajkumar Thanu ,  Damon K. Cox ,  Matvey Farber

IPC: B25J19/00 ,  H02K7/18 ,  B25J17/00 ,  B25J13/08 ,  B25J9/10 ,  H02K1/278 ,  H02K17/44 ,  H02K16/00 ,  H02K21/28 ,  H02K7/11 ,  B25J11/00

CPC classification number: H02K7/1807 ,  B25J9/108 ,  B25J13/088 ,  B25J17/00 ,  B25J19/0029 ,  H02K1/278 ,  H02K7/11 ,  H02K16/005 ,  H02K17/44 ,  H02K21/28 ,  B25J11/0095 ,  B25J19/005

Abstract: A robot device includes a first link and a second link coupled to the first link via an elbow. One or more of the first link or the second link rotates about an axis of the elbow. The robot device further includes a generator disposed in the elbow. The generator is configured to generate electrical power based on relative angular mechanical movement associated with the elbow. The robot device further includes an end effector configured to transport a substrate within a substrate processing system. The end effector is disposed at a distal end of the second link. The end effector is to receive the electrical power generated by the generator.

公开(公告)号：US20210291375A1

公开(公告)日：2021-09-23

申请号：US16861000

申请日：2020-04-28

Applicant: Applied Materials, Inc.

Inventor： Nicholas Michael Bergantz ,  Damon K. Cox ,  Alexander Berger

IPC: B25J9/16 ,  H01L21/67 ,  H01L21/687 ,  H01L21/677

Abstract: A first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position. A second robot arm retrieves the calibration object from the load lock using a second taught position. A controller determines, using a sensor, a first offset amount between a calibration object center of the calibration object and a pocket center of the second robot arm. The controller determines a characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount. The first robot arm or the second robot arm uses the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock.

公开(公告)号：US10964584B2

公开(公告)日：2021-03-30

申请号：US16417369

申请日：2019-05-20

Applicant: Applied Materials, Inc.

Inventor： Leon Volfovski ,  Andreas Schmid ,  Denis Martin Koosau ,  Nicholas Michael Kopec ,  Steven Babayan ,  Douglas R. McAllister ,  Helder Lee ,  Jeffrey Hudgens ,  Damon K. Cox

IPC: H01L21/68 ,  H01L21/687 ,  H01L21/683 ,  H01L21/677

Abstract: A process kit ring adaptor includes a rigid carrier. The rigid carrier includes an upper surface and a lower surface. The upper surface includes a first distal portion and a second distal portion to support a process kit ring. The lower surface includes a first region to interface with an end effector configured to support wafers and a solid planar central region to interface with a vacuum chuck.

公开(公告)号：US20190270196A1

公开(公告)日：2019-09-05

申请号：US16415978

申请日：2019-05-17

Applicant: Applied Materials, Inc.

Inventor： Karuppasamy Muthukamatchi ,  Damon K. Cox ,  Jeffrey C. Hudgens

IPC: B25J9/00 ,  H01L21/67 ,  B25J9/04 ,  H01L21/677

Abstract: Robots including spaced upper arms are described. The robot includes first and second upper arms rotatable about a shoulder axis wherein the second upper arm is spaced from the first upper arm. The other robot components (first and second forearms, first and second wrist members, and first and second end effectors) are interleaved in the space between the first and second upper arms. Each of the first and second upper arms may be individually and independently controlled. Methods of operating the robot and electronic device processing systems including the robot are provided, as are numerous other aspects.

公开(公告)号：US20170368680A1

公开(公告)日：2017-12-28

申请号：US15619424

申请日：2017-06-09

Applicant: Applied Materials, Inc.

Inventor： Karuppasamy Muthukamatchi ,  Damon K. Cox ,  Jeffrey C. Hudgens

IPC: B25J9/00 ,  B25J9/04 ,  H01L21/67 ,  H01L21/677

CPC classification number: B25J9/0087 ,  B25J9/043 ,  H01L21/67184 ,  H01L21/67742

Abstract: Robots including spaced upper arms are described. The robot includes first and second upper arms rotatable about a shoulder axis wherein the second upper arm is spaced from the first upper arm. The other robot components (first and second forearms, first and second wrist members, and first and second end effectors) are interleaved in the space between the first and second upper arms. Each of the first and second upper arms and first and second forearms may be individually and independently controlled. Methods of operating the robot and electronic device processing systems including the robot are provided, as are numerous other aspects.