公开(公告)号：US20170287683A1

公开(公告)日：2017-10-05

申请号：US15620700

申请日：2017-06-12

Applicant: Applied Materials, Inc.

Inventor： Jennifer Y. Sun ,  Biraja Kanungo ,  Tom Cho ,  Ying Zhang

IPC: H01J37/32 ,  C23C24/04

CPC classification number: H01J37/32807 ,  C23C24/04 ,  H01J37/3244 ,  Y10T428/24413

Abstract: An component of a processing chamber comprises an aerosol deposited coating on the component, the aerosol deposited coating comprising a first type of metal oxide nanoparticle and a second type of metal oxide nanoparticle.

公开(公告)号：US20150270108A1

公开(公告)日：2015-09-24

申请号：US14729950

申请日：2015-06-03

Applicant: Applied Materials, Inc.

Inventor： Jennifer Sun ,  Biraja P. Kanungo ,  Tom Cho

IPC: H01J37/32 ,  C23C4/10 ,  C23C4/12

Abstract: An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 1 mol % to about 55 mol %, and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and ZrO2 in a range between about 1 mol % to about 55 mol %.

Abstract translation: 一种制品包括涂有陶瓷涂层的主体。 陶瓷涂层可以包括约45mol％至约99mol％范围内的Y 2 O 3，约1mol％至约55mol％范围内的ZrO 2和约1mol％至约10mol％范围内的Al 2 O 3， 。 陶瓷涂层可以可选地包括在约45mol％至约99mol％范围内的Y 2 O 3和约1mol％至约10mol％范围内的Al 2 O 3。 陶瓷涂层可以包括约45mol％至约99mol％范围内的Y 2 O 3和约1mol％至约55mol％范围内的ZrO 2。

公开(公告)号：US20140363596A1

公开(公告)日：2014-12-11

申请号：US13954808

申请日：2013-07-30

Applicant: Applied Materials, Inc.

Inventor： Jennifer Y. Sun ,  Biraja P. Kanungo ,  Tom Cho

IPC: C23C16/44

CPC classification number: H01J37/32495 ,  C04B41/009 ,  C04B41/5045 ,  C04B41/87 ,  C23C4/11 ,  C23C4/134 ,  C23C16/4404 ,  Y10T428/131 ,  Y10T428/26 ,  C04B35/00 ,  C04B35/10 ,  C04B35/581 ,  C04B41/4527 ,  C04B41/5031 ,  C04B41/5042

Abstract: An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 0 mol % to about 55 mol %, and Al2O3 in a range between about 0 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 30 mol % to about 60 mol %, ZrO2 in a range between about 0 mol % to about 20 mol %, and Al2O3 in a range between about 30 mol % to about 60 mol %.

Abstract translation: 一种制品包括涂有陶瓷涂层的主体。 陶瓷涂层可以包括约45mol％至约99mol％范围内的Y 2 O 3，约0mol％至约55mol％范围内的ZrO 2和约0mol％至约10mol％范围内的Al 2 O 3， 。 陶瓷涂层可以替代地包括约30mol％至约60mol％范围内的Y 2 O 3，约0mol％至约20mol％范围内的ZrO 2和约30mol％至约60mol之间的Al 2 O 3 ％。

公开(公告)号：US11680308B2

公开(公告)日：2023-06-20

申请号：US17339248

申请日：2021-06-04

Applicant: Applied Materials, Inc.

Inventor： Jennifer Y. Sun ,  Biraja P. Kanungo ,  Vahid Firouzdor ,  Tom Cho

IPC: B32B18/00 ,  C23C14/08 ,  C23C14/22 ,  H01J37/32 ,  C23C14/34

CPC classification number: C23C14/08 ,  B32B18/00 ,  C23C14/083 ,  C23C14/22 ,  C23C14/228 ,  C23C14/34 ,  H01J37/32477 ,  H01J37/32495 ,  Y10T428/24355 ,  Y10T428/24967 ,  Y10T428/24975 ,  Y10T428/265

Abstract: A chamber component for a process chamber comprises a ceramic body and one or more protective layer on at least one surface of the ceramic body, wherein the one or more protective layer comprises Y3Al5O12 having a dielectric constant of 9.76+/−up to 30% and a hermiticity of 4.4E-10 cm3/s+/−up to 30%.

公开(公告)号：US10734202B2

公开(公告)日：2020-08-04

申请号：US14729950

申请日：2015-06-03

Applicant: Applied Materials, Inc.

Inventor： Jennifer Sun ,  Biraja P. Kanungo ,  Tom Cho

IPC: B32B1/02 ,  B32B5/00 ,  H01J37/32 ,  C23C16/44 ,  C04B41/87 ,  C04B41/00 ,  C04B41/50 ,  C23C4/11 ,  C23C4/134

Abstract: An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 1 mol % to about 55 mol %, and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and ZrO2 in a range between about 1 mol % to about 55 mol %.

公开(公告)号：US20200087776A1

公开(公告)日：2020-03-19

申请号：US16685341

申请日：2019-11-15

Applicant: Applied Materials, Inc.

Inventor： Jennifer Y. Sun ,  Biraja P. Kanungo ,  Vahid Firouzdor ,  Tom Cho

IPC: C23C14/08 ,  B32B18/00 ,  C23C14/22 ,  H01J37/32 ,  C23C14/34

Abstract: An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Er2O3, Er3Al5O12, and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.

公开(公告)号：US10418229B2

公开(公告)日：2019-09-17

申请号：US15620700

申请日：2017-06-12

Applicant: Applied Materials, Inc.

Inventor： Jennifer Y. Sun ,  Biraja Kanungo ,  Tom Cho ,  Ying Zhang

IPC: C23C24/04 ,  H01J37/32

Abstract: An component of a processing chamber comprises an aerosol deposited coating on the component, the aerosol deposited coating comprising a first type of metal oxide nanoparticle and a second type of metal oxide nanoparticle.

公开(公告)号：US20180087144A1

公开(公告)日：2018-03-29

申请号：US15814601

申请日：2017-11-16

Applicant: Applied Materials, Inc.

Inventor： Jennifer Y. Sun ,  Biraja P. Kanungo ,  Vahid Firouzdor ,  Tom Cho

IPC: C23C14/08 ,  H01J37/32 ,  C23C14/34 ,  C23C14/22 ,  B32B18/00

CPC classification number: C23C14/08 ,  B32B18/00 ,  C23C14/083 ,  C23C14/22 ,  C23C14/228 ,  C23C14/34 ,  H01J37/32477 ,  H01J37/32495 ,  Y10T428/24355 ,  Y10T428/24967 ,  Y10T428/24975 ,  Y10T428/265

Abstract: An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Y4Al2O9, Er2O3, Gd2O3, Er3Al5O12, Gd3Al5O12 and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.

公开(公告)号：US09708713B2

公开(公告)日：2017-07-18

申请号：US14282824

申请日：2014-05-20

Applicant: Applied Materials, Inc.

Inventor： Jennifer Y. Sun ,  Biraja Kanungo ,  Tom Cho ,  Ying Zhang

IPC: C23C24/04 ,  H01J37/32

CPC classification number: H01J37/32807 ,  C23C24/04 ,  H01J37/3244 ,  Y10T428/24413

Abstract: A method for coating a component for use in a semiconductor chamber for plasma etching includes providing the component and loading the component in a deposition chamber. A pressure in the deposition chamber is reduced to below atmospheric pressure. A coating is deposited on the component by spraying an aerosol comprising a suspension of a first type of metal oxide nanoparticle and a second type of metal oxide nanoparticle onto the component at approximately room temperature.