DEFECT REDUCTION RINSE SOLUTION CONTAINING AMMONIUM SALTS OF SULFOESTERS

    公开(公告)号:US20180201885A1

    公开(公告)日:2018-07-19

    申请号:US15743848

    申请日:2016-07-01

    Applicant: BASF SE

    CPC classification number: C11D11/0047 C11D1/123 G03F7/40 G03F7/425 G03F7/426

    Abstract: The present invention relates to the use of a composition comprising one or more ammonium salt(s) of one or more compounds selected from the group consisting of sulfobutanedioic acid diester(s), (sulfomethyl)-butanedioic acid diester(s), methyl-sulfobutanedioic acid diester(s), sulfoglutaric acid diester(s), and sulfotricarballic acid triester(s), for cleaning or rinsing a product comprising a substrate and supported thereon a patterned material layer having line-space structures with a line width of 50 nm and below. The invention also relates to a corresponding method of making a cleaned or rinsed product comprising a substrate and supported thereon a patterned material layer having line-space structures with a line width of 50 nm or below. The invention also relates to a solution with color of HAZEN number below 1000 and/or a turbidity in the range of from 0.08 to 10 NTU, wherein the solution comprises water and one or more ammonium salt(s) and optionally one or more organic solvent compounds. The invention also relates to a method of making a corresponding solution.

    COMPOSITIONS FOR ANTI PATTERN COLLAPSE TREATMENT COMPRISING GEMINI ADDITIVES
    14.
    发明申请
    COMPOSITIONS FOR ANTI PATTERN COLLAPSE TREATMENT COMPRISING GEMINI ADDITIVES 审中-公开
    用于包含GEMINI添加剂的抗皱纹治疗组合物

    公开(公告)号:US20150159123A1

    公开(公告)日:2015-06-11

    申请号:US14412737

    申请日:2013-07-01

    Applicant: BASF SE

    Abstract: A method of reducing defects of a semiconductor substrate whereby the substrate is rinsed with an aqueous composition containing a gemini additive of the general formula I after the development of a photoresist or a photolithographic mask wherein X is a divalent group, R1, R2, R3 and R4 are substituted or unsubstituted monovalent groups, n is an integer from 1 to 5, or 1 to 10000 depending on R3 and R4, z is an integer, which is chosen so that the overall surfactant is electrically uncharged, and Z is a counter-ion.

    Abstract translation: 一种降低半导体衬底的缺陷的方法,其中在开发光致抗蚀剂或光刻掩模之后,用包含通式I的双子添加剂的水性组合物漂洗衬底,其中X是二价基团,R1,R2,R3和 R4是取代或未取代的单价基团,n是1至5的整数,或1至10000个取决于R3和R4,z是整数,其被选择为使得整个表面活性剂是电不带电的,Z是反 - 离子。

    PROCESS FOR MINERAL OIL PRODUCTION USING SURFACTANTS BASED ON ANIONIC ALKYL ALKOXYLATES WHICH HAVE BEEN FORMED FROM GLYCIDYL ETHERS
    15.
    发明申请
    PROCESS FOR MINERAL OIL PRODUCTION USING SURFACTANTS BASED ON ANIONIC ALKYL ALKOXYLATES WHICH HAVE BEEN FORMED FROM GLYCIDYL ETHERS 审中-公开
    使用基于由甘氨酸形成的阴离子型烷基酸的表面活性剂进行矿物油生产的方法

    公开(公告)号:US20140116689A1

    公开(公告)日:2014-05-01

    申请号:US14060967

    申请日:2013-10-23

    Applicant: BASF SE

    CPC classification number: C09K8/584

    Abstract: The present invention relates to a surfactant mixture comprising at least one surfactant of the general formula (I) R1O—(CH2CH(CH2OR2)O)p-(D)n-(B)m-(A)l-(X)k—Y−1/bMb+  (I) where R1, R2, p, D, n, B, m, A, l, X, k, Y−, b, Mb+ are each as defined in the claims and the description. The invention further relates to processes for mineral oil production by means of Winsor type III microemulsion flooding using a surfactant formulation comprising the surfactant mixture.

    Abstract translation: 本发明涉及包含至少一种通式(I)的表面活性剂的表面活性剂混合物:R1O-(CH2CH(CH2OR2)O)p-(D)n-(B)m-(A)1-(X) -Y-1 / bMb +(I)其中R1,R2,p,D,n,B,m,A,l,X,k,Y-,b,Mb +各自如权利要求和说明书中所定义。 本发明还涉及使用包含表面活性剂混合物的表面活性剂制剂通过Winsor III型微乳液淹没进行矿物油生产的方法。

    PROCESS FOR PRODUCING MINERAL OIL USING SURFACTANTS BASED ON A MIXTURE OF C24 GUERBET-, C26 GUERBET-, C28-GUERBET CONTAINING HYDROCARBYL ALKOXYLATES
    16.
    发明申请
    PROCESS FOR PRODUCING MINERAL OIL USING SURFACTANTS BASED ON A MIXTURE OF C24 GUERBET-, C26 GUERBET-, C28-GUERBET CONTAINING HYDROCARBYL ALKOXYLATES 有权
    使用C24GERBET-,C26GERBET-的混合物,使用含有烷氧基烷基的C28-碳酸酯的表面活性剂生产矿物油的方法

    公开(公告)号:US20130098612A1

    公开(公告)日:2013-04-25

    申请号:US13659393

    申请日:2012-10-24

    Applicant: BASF SE

    CPC classification number: C09K8/602 C09K8/584

    Abstract: The present invention relates to a surfactant mixture comprising at least three ionic surfactants which differ in terms of the hydrocarbyl moiety (R1)(R2)—CH—CH2— and are of the general formula (I) where R1, R2, A0, k, X, o, Y, a, b, M are each as defined in the description and the claims. The invention further relates to the use and preparation thereof, and to aqueous surfactant formulations comprising the mixtures, and to processes for producing mineral oil by means of Winsor type Ill microemulsion flooding, in which the aqueous surfactant formulation is injected into a mineral oil deposit through injection wells and crude oil is withdrawn from the deposit through production wells.

    Abstract translation: 本发明涉及包含至少三种离子表面活性剂的表面活性剂混合物,它们在烃基部分(R 1)(R 2)-CH-CH 2 - 和通式(I)方面不同,其中R1,R2,A0,k ,X,o,Y,a,b,M各自如说明书和权利要求书中所定义。 本发明还涉及其使用和制备,以及包含该混合物的水性表面活性剂制剂,以及通过Winsor III型微乳液淹水生产矿物油的方法,其中将表面活性剂水溶液注入到矿物油沉积物中 注入井和原油通过生产井从沉积物中取出。

    Solubility enhancers on basis of allyl alcohol for aqueous surfactant formulations for enhanced oil recovery

    公开(公告)号:US11225857B2

    公开(公告)日:2022-01-18

    申请号:US16627473

    申请日:2018-07-11

    Applicant: BASF SE

    Abstract: The present invention relates to a method for the production of crude oil from subterranean, oil-bearing formations comprising at least the following steps of providing an aqueous surfactant composition comprising water and a surfactant mixture, injecting said surfactant composition into the subterranean, oil-bearing formation through at least one injection well, thereby reducing the crude oil-water interfacial tension to less than 0.1 mN/m, and withdrawing crude oil from the formation through at least one production well, wherein the surfactant mixture comprises at least a surfactant (A) having the general formula R1—O—(CH2CH(R2)O)a—(CH2CH(CH3)O)b—(CH2CH2O)c—R3—Y−M+ (I) and a solubility enhancer (B) having the general formula R4—O—(CH2CH(CH3)O)x—(CH2CH2O)y—R3—Y−M+ (II), wherein R1 to R4, a, b, c, x, y, Y and M have the meaning as defined the the description and claims. The invention further relates to said aqueous surfactant composition and methods for preparing the same as well as the use of solubility enhancer (B) for enhancing the solubility of anionic surfactant (A).

    Process for producing mineral oil using surfactants based on a mixture of C24 guerbet-, C26 guerbet-, C28-guerbet containing hydrocarbyl alkoxylates
    19.
    发明授权
    Process for producing mineral oil using surfactants based on a mixture of C24 guerbet-, C26 guerbet-, C28-guerbet containing hydrocarbyl alkoxylates 有权
    使用基于C24 guerbet-,C26 guerbet-,含有烃基烷氧基化物的C28-guerbet的混合物的表面活性剂来生产矿物油的方法

    公开(公告)号:US09475978B2

    公开(公告)日:2016-10-25

    申请号:US13659393

    申请日:2012-10-24

    Applicant: BASF SE

    CPC classification number: C09K8/602 C09K8/584

    Abstract: The present invention relates to a surfactant mixture comprising at least three ionic surfactants which differ in terms of the hydrocarbyl moiety (R1)(R2)—CH—CH2— and are of the general formula (I) where R1, R2, A0, k, X, o, Y, a, b, M are each as defined in the description and the claims. The invention further relates to the use and preparation thereof, and to aqueous surfactant formulations comprising the mixtures, and to processes for producing mineral oil by means of Winsor type III microemulsion flooding, in which the aqueous surfactant formulation is injected into a mineral oil deposit through injection wells and crude oil is withdrawn from the deposit through production wells.

    Abstract translation: 本发明涉及包含至少三种离子表面活性剂的表面活性剂混合物,它们在烃基部分(R 1)(R 2)-CH-CH 2 - 和通式(I)方面不同,其中R1,R2,A0,k ,X,o,Y,a,b,M各自如说明书和权利要求书中所定义。 本发明还涉及其使用和制备,以及包含该混合物的水性表面活性剂制剂,以及通过Winsor III型微乳液淹水生产矿物油的方法,其中将表面活性剂水溶液注入到矿物油沉积物中 注入井和原油通过生产井从沉积物中取出。

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