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公开(公告)号:US11952659B2
公开(公告)日:2024-04-09
申请号:US16940836
申请日:2020-07-28
Applicant: CORNING INCORPORATED
Inventor: Ming-Huang Huang , Hoon Kim , Jue Wang
IPC: G02B1/115 , C23C16/30 , C23C16/455 , H01L21/67 , G01N21/95
CPC classification number: C23C16/30 , C23C16/45553 , G02B1/115 , H01L21/67288 , G01N21/9501
Abstract: Atomic layer deposition methods for coating an optical substrate with magnesium fluoride. The methods include two primary processes. The first process includes the formation of a magnesium oxide layer over a surface of a substrate. The second process includes converting the magnesium oxide layer to a magnesium fluoride layer. These two primary processes may be repeated a plurality of times to create multiple magnesium fluoride layers that make up a magnesium fluoride film. The magnesium fluoride film may serve as an antireflective coating layer for an optical substrate, such as an optical lens.
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公开(公告)号:US20230417954A1
公开(公告)日:2023-12-28
申请号:US18210461
申请日:2023-06-15
Applicant: CORNING INCORPORATED
Inventor: Donald Erwin Allen , Narendra Shamkant Borgharkar , Ming-Huang Huang , Hoon Kim , Jue Wang
CPC classification number: G02B1/14 , G02B5/0891 , C23C14/14 , C23C14/5846 , C23C14/5873 , C23C16/30 , C23C16/45555 , C23C16/45527 , C23C16/45553 , C23C28/32 , C23C28/34
Abstract: A method of making an enhanced aluminium mirror for vacuum ultraviolet (VUV) optics includes depositing a reflective coating comprising aluminium metal to at least one surface of a substrate through physical vapor deposition (PVD) to produce a mirror comprising the substrate and the reflective coating. The method further includes removing aluminium oxides from an outer surface of the reflective coating by conducting atomic layer etching (ALE) in an Atomic Layer Deposition (ALD) system to produce an etched surface of the reflective coating and depositing an ALD protective layer onto the etched surface of the reflective coating by conducting atomic layer deposition in the ALD system to produce the enhanced aluminium mirror. The enhanced aluminium mirror includes the substrate, the reflective coating deposited on the substrate, and the ALD protective layer covering the etched surface of the reflective coating.
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公开(公告)号:US11661022B2
公开(公告)日:2023-05-30
申请号:US17147058
申请日:2021-01-12
Applicant: CORNING INCORPORATED
Inventor: Vikram Bhatia , Thomas Michael Cleary , Philippe Engel , Robin Merchant Walton , Jue Wang
CPC classification number: B60R21/01 , G01D11/245 , G02B1/02 , G02B1/14 , G02B7/007 , B60R2021/01006 , B60R2021/01122
Abstract: A vehicle includes a body of the vehicle and a sensing system coupled to the body. The sensing system includes optical componentry and a glass material, where the glass material at least in part houses the optical componentry and the glass material is at least partially transparent to light at the wavelength of the optical componentry. Further the glass material has mechanical and performance properties that allow the sensing system to be positioned particularly low on the vehicle, at a position that may be of higher risk for damage from debris.
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公开(公告)号:US20220221617A1
公开(公告)日:2022-07-14
申请号:US17711303
申请日:2022-04-01
Applicant: CORNING INCORPORATED
Inventor: Ming-Huang Huang , Chang-gyu Kim , Hoon Kim , Soo Ho Park , Jue Wang
IPC: G02B1/02 , C23C16/40 , C23C16/455 , G02B3/00
Abstract: An optical element including an optically transparent lens which defines a curved surface having a steepness given by an R/# of from about 0.5 to about 1.0. A film is positioned on the curved surface. The film includes an index layer. A composite layer is positioned on the curved surface having a refractive index greater than the index layer. The composite layer includes HfO2 and Al2O3. The composite layer has a mole fraction X of HfO2, wherein X is from about 0.05 to about 0.95 and a mole fraction of Al2O3 in the composite layer is 1−X.
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公开(公告)号:US11092814B2
公开(公告)日:2021-08-17
申请号:US16675578
申请日:2019-11-06
Applicant: CORNING INCORPORATED
Inventor: Jue Wang
Abstract: A high-efficiency, multiwavelength beam-expander optical system that employs dielectric-enhanced mirrors is disclosed. Each mirror includes a reflective multilayer coating formed from alternating layers of HfO2 and SiO2 that define, in order from the substrate surface, at least first and second sections, wherein the HfO2/SiO2 layer thicknesses are generally constant within a given section and get smaller section by section moving outward from the substrate surface. The first and second sections are respectively configured to optimally reflect different operating wavelengths so that the beam-expander optical system has an optical transmission of greater than 95% at the different operating wavelengths.
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公开(公告)号:US10761247B2
公开(公告)日:2020-09-01
申请号:US15916603
申请日:2018-03-09
Applicant: Corning Incorporated
Inventor: Jason S Ballou , Frederick J Gagliardi , Gary Allen Hart , Timothy R Soucy , Robin Merchant Walton , Leonard Gerard Wamboldt , Jue Wang
Abstract: The disclosure is directed to a highly reflective multiband mirror that is reflective in the VIS-NIR-SWIR-MWIR-LWIR bands, the mirror being a complete thin film stack that consists of a plurality of layers on a selected substrate. In order from substrate to the final layer, the mirror consists of (a) substrate, (b) barrier layer, (c) first interface layer, (d) a reflective layer, (e) a second interface layer, (f) tuning layer(s) and (g) a protective layer. In some embodiments the tuning layer and the protective layer are combined into a single layer using a single coating material. The multiband mirror is more durable than existing mirrors on light weight metal substrates, for example 6061-Al, designed for similar applications. In each of the five layer types methods and materials are used to process each layer so as to achieve the desired layer characteristics, which aid to enhancing the durability performance of the stack.
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公开(公告)号:US10605966B2
公开(公告)日:2020-03-31
申请号:US15902114
申请日:2018-02-22
Applicant: Corning Incorporated
Inventor: Joseph Charles Crifasi , Gary Allen Hart , Robin Merchant Walton , Leonard Gerard Wamboldt , Jue Wang
Abstract: A method for coating substrates is provided. The method includes diamond turning a substrate to a surface roughness of between about 60 Å and about 100 Å RMS, wherein the substrate is one of a metal and a metal alloy. The method further includes polishing the diamond turned surface of the substrate to a surface roughness of between about 10 Å and about 25 Å to form a polished substrate, heating the polished substrate, and ion bombarding the substrate with an inert gas. The method includes depositing a coating including at least one metallic layer on the ion bombarded surface of the substrate using low pressure magnetron sputtering, and polishing the coating to form a finished surface having a surface roughness of less than about 25 Å RMS using a glycol based colloidal solution.
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公开(公告)号:US20190077352A1
公开(公告)日:2019-03-14
申请号:US16130569
申请日:2018-09-13
Applicant: CORNING INCORPORATED
Inventor: Vikram Bhatia , Thomas Michael Cleary , Philippe Engel , Robin Merchant Walton , Jue Wang
Abstract: A vehicle includes a body of the vehicle and a sensing system coupled to the body. The sensing system includes optical componentry and a glass material, where the glass material at least in part houses the optical componentry and the glass material is at least partially transparent to light at the wavelength of the optical componentry. Further the glass material has mechanical and performance properties that allow the sensing system to be positioned particularly low on the vehicle, at a position that may be of higher risk for damage from debris.
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公开(公告)号:US20190072788A1
公开(公告)日:2019-03-07
申请号:US16182038
申请日:2018-11-06
Applicant: Corning Incorporated
Inventor: Rachid Gafsi , Jue Wang
CPC classification number: G02F1/093 , G02B1/11 , G02B1/115 , G02B5/205 , G02B5/208 , G02B5/22 , G02B5/3025 , G02B5/3058 , G02B27/281
Abstract: The disclosure is directed to an element that is capable of acting as both an optical polarizer and an optical attenuator, thus integrating both functions into a single element. The element comprises a monolithic or one piece glass polarizer (herein also call the “substrate”), a multilayer “light attenuation or light attenuating” (“LA”) coating that has been optimized for use at selected wavelengths and attenuations deposited on at least one polarizer facial surface, and a multilayer anti-reflective (AR) coating on top of the LA coating. The disclosure is further directed to an integrated optical isolator/attenuator comprising a first and a second polarizing elements and a Faraday rotator for rotating light positioned after the first polarizing element and before the second polarizing element, the integrated optical isolator/attenuator both polarizing and attenuation a light beam from a light source.
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公开(公告)号:US10131571B2
公开(公告)日:2018-11-20
申请号:US15593961
申请日:2017-05-12
Applicant: Corning Incorporated
Inventor: Jean-Francois Oudard , James Edward Platten , Jue Wang
IPC: C23C16/40 , C23C16/50 , C03C17/34 , G02B1/18 , H01J37/32 , C23C16/513 , G02B1/115 , G02B1/12 , C03C17/245
Abstract: A method of forming an optical coating, including the steps: depositing a buffer layer on a glass substrate via plasma deposition at a first plasma bias voltage; and depositing at least one layer of an optical coating on the buffer layer via plasma deposition, the deposition of the optical coating carried out at a second plasma bias voltage.
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