Laser remote sensing of backscattered light from a target sample
    11.
    发明授权
    Laser remote sensing of backscattered light from a target sample 有权
    来自目标样品的反向散射光的激光遥感

    公开(公告)号:US07336351B1

    公开(公告)日:2008-02-26

    申请号:US11348938

    申请日:2006-02-07

    摘要: A laser remote sensing apparatus comprises a laser to provide collimated excitation light at a wavelength; a sensing optic, comprising at least one optical element having a front receiving surface to focus the received excitation light onto a back surface comprising a target sample and wherein the target sample emits a return light signal that is recollimated by the front receiving surface; a telescope for collecting the recollimated return light signal from the sensing optic; and a detector for detecting and spectrally resolving the return light signal. The back surface further can comprise a substrate that absorbs the target sample from an environment. For example the substrate can be a SERS substrate comprising a roughened metal surface. The return light signal can be a surface-enhanced Raman signal or laser-induced fluorescence signal. For fluorescence applications, the return signal can be enhanced by about 105, solely due to recollimation of the fluorescence return signal. For SERS applications, the return signal can be enhanced by 109 or more, due both to recollimation and to structuring of the SERS substrate so that the incident laser and Raman scattered fields are in resonance with the surface plasmons of the SERS substrate.

    摘要翻译: 激光遥感装置包括激光器,以提供波长的准直激发光; 感测光学元件,包括至少一个具有前接收表面的光学元件,以将接收到的激发光聚焦到包括目标样品的背面上,并且其中所述目标样品发射由所述前接收表面再记录的返回光信号; 用于收集来自感测光学器件的重新准备的返回光信号的望远镜; 以及用于检测和光谱分辨返回光信号的检测器。 后表面还可以包括从环境吸收目标样品的基底。 例如,基底可以是包含粗糙金属表面的SERS基底。 返回光信号可以是表面增强拉曼信号或激光诱导的荧光信号。 对于荧光应用,返回信号可以仅由于荧光返回信号的再升高而增强约10 5。 对于SERS应用,由于重新准备和SERS衬底的结构,返回信号可以提高10个或更多,使得入射激光和拉曼散射场与表面等离子体激元共振 的SERS底物。

    Relaying an optical wavefront
    12.
    发明授权
    Relaying an optical wavefront 有权
    中继光波前

    公开(公告)号:US07187815B1

    公开(公告)日:2007-03-06

    申请号:US10956733

    申请日:2004-10-01

    IPC分类号: G02B6/00

    摘要: A wavefront rely devices samples an incoming optical wavefront at different locations, optically relays the samples while maintaining the relative position of the samples and the relative phase between the samples. The wavefront is reconstructed due to interference of the samples. Devices can be designed for many different wavelengths, including for example the ultraviolet, visible, infrared and even longer wavelengths such as millimeter waves. In one application, the device function as a telescope but with negligible length.

    摘要翻译: 波前依赖设备在不同位置采样进入的光波阵面,在保持样品的相对位置和样品之间的相对相位的同时光学中继样品。 由于样品的干扰,波前被重建。 器件可以设计用于许多不同的波长,包括例如紫外线,可见光,红外线和甚至更长的波长,例如毫米波。 在一个应用中,该设备用作望远镜,但长度可忽略不计。

    Telecommunications optical processor
    13.
    发明授权
    Telecommunications optical processor 有权
    电信光学处理器

    公开(公告)号:US06985308B1

    公开(公告)日:2006-01-10

    申请号:US10446299

    申请日:2003-05-28

    摘要: A demultiplexer for use in a wavelength-division multiplexed optical system including a first positive lens group, a negative lens group, and a second positive lens group in order from a dispersive element and a reflective element. In some embodiments the reflective element is a light modulator, such as an actuatable diffraction grating. In some embodiments the demultiplexer is a part of a dynamic channel equalizer. In embodiments having a light modulator, the modulation may occur during both a first pass and a second pass.

    摘要翻译: 用于从分散元件和反射元件开始的包括第一正透镜组,负透镜组和第二正透镜组的波分复用光学系统中的解复用器。 在一些实施例中,反射元件是光调制器,例如可致动的衍射光栅。 在一些实施例中,解复用器是动态信道均衡器的一部分。 在具有光调制器的实施例中,调制可以在第一遍和第二遍期间发生。

    Mask-to-wafer alignment system
    14.
    发明授权

    公开(公告)号:US06642995B2

    公开(公告)日:2003-11-04

    申请号:US09986006

    申请日:2001-11-07

    IPC分类号: G03B2772

    CPC分类号: G03F9/7088 G02B27/143

    摘要: A modified beam splitter that has a hole pattern that is symmetric in one axis and anti-symmetric in the other can be employed in a mask-to-wafer alignment device. The device is particularly suited for rough alignment using visible light. The modified beam splitter transmits and reflects light from a source of electromagnetic radiation and it includes a substrate that has a first surface facing the source of electromagnetic radiation and second surface that is reflective of said electromagnetic radiation. The substrate defines a hole pattern about a central line of the substrate. In operation, an input beam from a camera is directed toward the modified beam splitter and the light from the camera that passes through the holes illuminates the reticle on the wafer. The light beam from the camera also projects an image of a corresponding reticle pattern that is formed on the mask surface of the that is positioned downstream from the camera. Alignment can be accomplished by detecting the radiation that is reflected from the second surface of the modified beam splitter since the reflected radiation contains both the image of the pattern from the mask and a corresponding pattern on the wafer.

    Information-efficient spectral imaging sensor
    15.
    发明授权
    Information-efficient spectral imaging sensor 有权
    信息高效光谱成像传感器

    公开(公告)号:US06504943B1

    公开(公告)日:2003-01-07

    申请号:US09345604

    申请日:1999-06-29

    IPC分类号: G06K900

    摘要: A programmable optical filter for use in multispectral and hyperspectral imaging. The filter splits the light collected by an optical telescope into two channels for each of the pixels in a row in a scanned image, one channel to handle the positive elements of a spectral basis filter and one for the negative elements of the spectral basis filter. Each channel for each pixel disperses its light into n spectral bins, with the light in each bin being attenuated in accordance with the value of the associated positive or negative element of the spectral basis vector. The spectral basis vector is constructed so that its positive elements emphasize the presence of a target and its negative elements emphasize the presence of the constituents of the background of the imaged scene. The attenuated light in the channels is re-imaged onto separate detectors for each pixel and then the signals from the detectors are combined to give an indication of the presence or not of the target in each pixel of the scanned scene. This system provides for a very efficient optical determination of the presence of the target, as opposed to the very data intensive data manipulations that are required in conventional hyperspectral imaging systems.

    摘要翻译: 一种用于多光谱和高光谱成像的可编程滤光片。 滤光器将由光学望远镜收集的光分成扫描图像中的一行中的每个像素的两个通道,一个通道用于处理光谱基滤波器的正元素,一个用于光谱基滤波器的负元件。 每个像素的每个通道将其光分散到n个光谱箱中,每个存储体中的光根据光谱基础矢量的相关联的正或负元素的值衰减。 构建光谱基矢量,使其正元素强调目标的存在,其负元素强调成像场景的背景的成分的存在。 通道中的衰减光被重新成像到用于每个像素的分离的检测器上,然后来自检测器的信号被组合以给出在扫描场景的每个像素中存在或不存在目标的指示。 与传统的高光谱成像系统中所需的非常数据密集的数据操作相反,该系统提供了对靶的存在的非常有效的光学确定。

    Apparatus and method for generating partially coherent illumination for photolithography
    16.
    发明授权
    Apparatus and method for generating partially coherent illumination for photolithography 失效
    用于产生用于光刻的部分相干照明的装置和方法

    公开(公告)号:US06262845B1

    公开(公告)日:2001-07-17

    申请号:US09300809

    申请日:1999-04-27

    申请人: William C. Sweatt

    发明人: William C. Sweatt

    IPC分类号: G02B518

    摘要: The present invention introduces a novel scatter plate into the optical path of source light used for illuminating a replicated object. The scatter plate has been designed to interrupt a focused, incoming light beam by introducing between about 8 to 24 diffraction zones blazed onto the surface of the scatter plate which intercept the light and redirect it to a like number of different positions in the condenser entrance pupil each of which is determined by the relative orientation and the spatial frequency of the diffraction grating in each of the several zones. Light falling onto the scatter plate, therefore, generates a plurality of unphased sources of illumination as seen by the back half of the optical system. The system comprises a high brightness source, such as a laser, creating light which is taken up by a beam forming optic which focuses the incoming light into a condenser which in turn, focuses light into a field lens creating Köhler illumination image of the source in a camera entrance pupil. The light passing through the field lens illuminates a mask which interrupts the source light as either a positive or negative image of the object to be replicated. Light passing by the mask is focused into the entrance pupil of the lithographic camera creating an image of the mask onto a receptive media.

    摘要翻译: 本发明将新颖的散射板引入到用于照亮复制对象的源光的光路中。 散射板被设计成通过在散射板的表面上引入大约8至24个衍射区域来中断聚焦的入射光束,该衍射区域拦截光并将其重定向到冷凝器入口光瞳中相同数量的不同位置 其中的每一个由几个区域中的每个区域中的衍射光栅的相对取向和空间频率确定。 因此,落在散射板上的光产生多个未相位的照明源,如光学系统的后半部分所示。 该系统包括诸如激光器的高亮度源,产生由束形成光学器件吸收的光,该光束将入射光聚焦到聚光器中,该聚光镜又将光聚焦到场透镜中,从而产生源的Köhler照明图像 相机入口瞳孔。 通过场透镜的光照亮将源光源中断的掩模作为要复制的对象的正或负图像。 通过掩模的光聚焦到光刻照相机的入射光瞳中,从而将掩模的图像产生到接收介质上。

    Solar photovoltaic reflective trough collection structure
    17.
    发明授权
    Solar photovoltaic reflective trough collection structure 有权
    太阳能光伏反光槽收集结构

    公开(公告)号:US09190546B1

    公开(公告)日:2015-11-17

    申请号:US12894772

    申请日:2010-09-30

    摘要: A photovoltaic (PV) solar concentration structure having at least two troughs encapsulated in a rectangular parallelepiped optical plastic structure, with the troughs filled with an optical plastic material, the troughs each having a reflective internal surface and approximately parabolic geometry, and the troughs each including photovoltaic cells situated so that light impinging on the optical plastic material will be concentrated onto the photovoltaic cells. Multiple structures can be connected to provide a solar photovoltaic collection system that provides portable, efficient, low-cost electrical power.

    摘要翻译: 一种光伏(PV)太阳能集中结构,其具有封装在矩形平行六面体的光学塑料结构中的至少两个槽,其中所述槽填充有光学塑料材料,所述槽各自具有反射内表面和大致抛物线几何形状,并且每个槽包括 光伏电池位于使得光入射到光学塑料上的光将被集中到光伏电池上。 可以连接多个结构来提供提供便携式,高效率,低成本电力的太阳能光伏收集系统。

    Microsystem enabled photovoltaic modules and systems
    18.
    发明授权
    Microsystem enabled photovoltaic modules and systems 有权
    具有微系统功能的光伏组件和系统

    公开(公告)号:US09029681B1

    公开(公告)日:2015-05-12

    申请号:US12914441

    申请日:2010-10-28

    摘要: A microsystem enabled photovoltaic (MEPV) module including: an absorber layer; a fixed optic layer coupled to the absorber layer; a translatable optic layer; a translation stage coupled between the fixed and translatable optic layers; and a motion processor electrically coupled to the translation stage to controls motion of the translatable optic layer relative to the fixed optic layer. The absorber layer includes an array of photovoltaic (PV) elements. The fixed optic layer includes an array of quasi-collimating (QC) micro-optical elements designed and arranged to couple incident radiation from an intermediate image formed by the translatable optic layer into one of the PV elements such that it is quasi-collimated. The translatable optic layer includes an array of focusing micro-optical elements corresponding to the QC micro-optical element array. Each focusing micro-optical element is designed to produce a quasi-telecentric intermediate image from substantially collimated radiation incident within a predetermined field of view.

    摘要翻译: 一种微系统使能光伏(MEPV)模块,包括:吸收层; 耦合到所述吸收层的固定光学层; 可翻译光学层; 耦合在固定和可平移光学层之间的平移台; 以及运动处理器,其电耦合到所述平移台以控制所述可平移光学层相对于所述固定光学层的运动。 吸收层包括光伏(PV)元件阵列。 固定光学层包括准准直(QC)微光学元件的阵列,其被设计和布置成将来自由可平移光学层形成的中间图像的入射辐射耦合到PV元件之一中,使得其准准。 可平移光学层包括对应于QC微光学元件阵列的聚焦微光学元件阵列。 每个聚焦微光学元件被设计成从在预定视野内入射的基本上准直的辐射产生准远心中间图像。

    Spatial light modulator features
    19.
    发明授权

    公开(公告)号:US07420730B2

    公开(公告)日:2008-09-02

    申请号:US11646891

    申请日:2006-12-28

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0808 G03F7/70291

    摘要: An enhanced spatial light modulator (ESLM) array, a microelectronics patterning system and a projection display system using such an ESLM for heat-minimization and resolution enhancement during imaging, and the method for fabricating such an ESLM array. The ESLM array includes, in each individual pixel element, a small pixel mirror (reflective region) and a much larger pixel surround. Each pixel surround includes diffraction-grating regions and resolution-enhancement regions. During imaging, a selected pixel mirror reflects a selected-pixel beamlet into the capture angle of a projection lens, while the diffraction grating of the pixel surround redirects heat-producing unused radiation away from the projection lens. The resolution-enhancement regions of selected pixels provide phase shifts that increase effective modulation-transfer function in imaging. All of the non-selected pixel surrounds redirect all radiation energy away from the projection lens. All elements of the ESLM are fabricated by deposition, patterning, etching and other microelectronic process technologies.

    Optical switch using Risley prisms
    20.
    发明授权
    Optical switch using Risley prisms 有权
    光开关采用Risley棱镜

    公开(公告)号:US06549700B1

    公开(公告)日:2003-04-15

    申请号:US09875244

    申请日:2001-06-05

    IPC分类号: G02B626

    摘要: An optical switch using Risley prisms and rotary microactuators to independently rotate the wedge prisms of each Risley prism pair is disclosed. The optical switch comprises an array of input Risley prism pairs that selectively redirect light beams from a plurality of input ports to an array of output Risley prism pairs that similarly direct the light beams to a plurality of output ports. Each wedge prism of each Risley prism pair can be independently rotated by a variable-reluctance stepping rotary microactuator that is fabricated by a multi-layer LIGA process. Each wedge prism can be formed integral to the annular rotor of the rotary microactuator by a DXRL process.

    摘要翻译: 公开了一种使用Risley棱镜和旋转微型致动器来独立旋转每个Risley棱镜对的楔形棱镜的光学开关。 光开关包括输入Risley棱镜对的阵列,其选择性地将来自多个输入端口的光束重定向到类似地将光束引导到多个输出端口的输出Risley棱镜对的阵列。 每个Risley棱镜对的每个楔形棱镜可以通过由多层LIGA工艺制造的可变磁阻步进旋转微型致动器独立旋转。 每个楔形棱镜可以通过DXRL工艺与旋转微型致动器的环形转子一体形成。