公开(公告)号：US20080180694A1

公开(公告)日：2008-07-31

申请号：US12020351

申请日：2008-01-25

Applicant: Peter J. de Groot ,  Xavier Colonna de Lega

Inventor： Peter J. de Groot ,  Xavier Colonna de Lega

IPC: G01B9/02

CPC classification number: G01B11/0675 ,  G01B9/02057 ,  G01B9/0207 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/8422 ,  G02F1/13392 ,  G02F2001/133354

Abstract: A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.

Abstract translation: 一种方法，包括：为具有多个接口的样本的至少一个空间位置提供低相干扫描干涉测量数据，其中使用具有照明几何形状和照明频谱的低相干扫描干涉仪来收集数据，并且其中数据包括 低相干扫描干涉测量信号，具有对应于多个界面的多个边缘对比区域; 以及基于条纹对比的对应区域和关于照明几何形状的信息之间的距离来确定至少一对界面之间的距离。

公开(公告)号：US09025162B2

公开(公告)日：2015-05-05

申请号：US12540709

申请日：2009-08-13

Applicant: Xavier Colonna de Lega ,  Robert Stoner ,  Peter de Groot

Inventor： Xavier Colonna de Lega ,  Robert Stoner ,  Peter de Groot

IPC: G01B9/02

CPC classification number: G01B9/02063 ,  G01B9/02057 ,  G01B9/02087 ,  G01B9/0209

Abstract: A method is disclosed which includes: using a scanning interferometry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.

Abstract translation: 公开了一种方法，其包括：使用扫描干涉测量系统，在包括掩埋表面的物体的不同扫描位置处产生相移干涉测量图像序列，识别对应于掩埋表面的最佳焦点位置的扫描位置 根据对象的相移干涉图像的序列，并且基于相移干涉测量图像和扫描位置生成最终图像，其中最终图像中的干涉条纹相对于相位干涉图像中的干涉条纹减小， 移位干涉图像。

公开(公告)号：US20120224183A1

公开(公告)日：2012-09-06

申请号：US13408003

申请日：2012-02-29

Applicant: Martin Fay ,  Jan Liesener ,  Xavier Colonna de Lega

Inventor： Martin Fay ,  Jan Liesener ,  Xavier Colonna de Lega

IPC: G01B9/02

CPC classification number: G01B11/2441 ,  G01B9/0209 ,  G01B2210/56

Abstract: An interferometry method for determining information about a test object includes directing test light to the test object positioned at a plane, wherein one or more properties of the test light vary over a range of incidence angles at the plane, the properties of the test light being selected from the group consisting of the spectral content, intensity, and polarization state; subsequently combining the test light with reference light to form an interference pattern on a multi-element detector so that different regions of the detector correspond to different angles of the test light emerging from the test object, wherein the test and reference light are derived from a common source; monitoring the interference pattern using the multi-element detector while varying an optical path difference between the test light and the reference light; determining the information about the test object based on the monitored interference pattern.

Abstract translation: 用于确定关于测试对象的信息的干涉测量方法包括将测试光引导到位于平面处的测试对象，其中测试光的一个或多个属性在平面处的入射角范围内变化，测试光的特性为 选自光谱含量，强度和偏振态; 随后将测试光与参考光组合以在多元素检测器上形成干涉图案，使得检测器的不同区域对应于从测试对象出射的测试光的不同角度，其中测试和参考光源自 共同来源 在改变测试光和参考光之间的光程差的同时使用多元素检测器来监测干涉图案; 基于所监测的干扰模式确定关于测试对象的信息。

公开(公告)号：US20100128276A1

公开(公告)日：2010-05-27

申请号：US12541325

申请日：2009-08-14

Applicant: Peter De Groot ,  Mark Davidson ,  Jan Liesener ,  Xavier Colonna de Lega ,  Leslie L. Deck

Inventor： Peter De Groot ,  Mark Davidson ,  Jan Liesener ,  Xavier Colonna de Lega ,  Leslie L. Deck

IPC: G01B9/02

CPC classification number: G01B9/0209 ,  G01B9/02007 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02068 ,  G01B9/02077 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70 ,  Y10T29/49002

Abstract: Interferometry system are disclosed that include a detector sub-system including a monitor detector, interferometer optics for combining test light from a test object with primary reference light from a first reference interface and secondary reference light from a second reference interface to form a monitor interference pattern on a monitor detector, wherein the first and second reference interfaces are mechanically fixed with respect to each other and the test light, a scanning stage configured to scan an optical path difference (OPD) between the test light and the primary and secondary reference light to the monitor detector while the detector sub-system records the monitor interference pattern for each of a series of OPD increments, and an electronic processor electronically coupled to the detector sub-system and the scanning stage, the electronic processor being configured to determine information about the OPD increments based on the detected monitor interference pattern.

Abstract translation: 公开了一种干涉测量系统，其包括检测器子系统，该检测器子系统包括监视器检测器，用于将来自测试对象的测试光与来自第一参考接口的主要参考光组合的来自第二参考接口的第二参考光组合的干涉仪光学元件，以形成监视器干涉图案 在监视器检测器上，其中所述第一参考接口和所述第二参考接口相对于彼此和所述测试光机械地固定;扫描台，被配置为扫描所述测试光和所述主参考光与所述次参考光之间的光程差（OPD） 监视器检测器，同时检测器子系统记录用于一系列OPD增量中的每一个的监视器干涉图案，以及电子处理器，电子耦合到检测器子系统和扫描级，电子处理器被配置为确定关于 OPD根据检测到的监视器干扰模式递增。

公开(公告)号：US07468799B2

公开(公告)日：2008-12-23

申请号：US12020351

申请日：2008-01-25

Applicant: Peter J. de Groot ,  Xavier Colonna de Lega

Inventor： Peter J. de Groot ,  Xavier Colonna de Lega

IPC: G01B9/02 ,  G01B11/28

CPC classification number: G01B11/0675 ,  G01B9/02057 ,  G01B9/0207 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/8422 ,  G02F1/13392 ,  G02F2001/133354

Abstract: A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.

Abstract translation: 一种方法，包括：为具有多个接口的样本的至少一个空间位置提供低相干扫描干涉测量数据，其中使用具有照明几何形状和照明频谱的低相干扫描干涉仪来收集数据，并且其中数据包括 低相干扫描干涉测量信号，具有对应于多个界面的多个边缘对比区域; 以及基于条纹对比的对应区域和关于照明几何形状的信息之间的距离来确定至少一对界面之间的距离。

公开(公告)号：US07466429B2

公开(公告)日：2008-12-16

申请号：US11768550

申请日：2007-06-26

Applicant: Peter J. de Groot ,  Robert Stoner ,  Xavier Colonna de Lega

Inventor： Peter J. de Groot ,  Robert Stoner ,  Xavier Colonna de Lega

IPC: G01B11/02

CPC classification number: G01B11/0675 ,  G01B9/0201 ,  G01B9/02057 ,  G01B9/02072 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/211 ,  G01N21/8422 ,  G01N21/9501

Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.

Abstract translation: 一种方法，包括将来自测试对象的第一表面位置的扫描干涉测量信号的可导出信息与对应于测试对象的多个模型的信息进行比较，其中通过测试对象的一系列特征对多个模型进行参数化。 被比较的可推导信息可以涉及测试对象的第一表面位置的扫描干涉测量信号的形状。