Diluent assisted lubrication of micromechanical devices
    11.
    发明授权
    Diluent assisted lubrication of micromechanical devices 有权
    稀释剂辅助微机械装置的润滑

    公开(公告)号:US06475570B2

    公开(公告)日:2002-11-05

    申请号:US10036611

    申请日:2001-12-31

    Abstract: A method and apparatus for delivering a fine mist of a lubricant to a micromechanical device. A mixture 402 of a lubricant and a diluent carrier fluid is held in a supply reservoir 404. The mixture is forced through a nebulizer tip 406 to produce a fine aerosol. A particle selector 408 removes large droplets from the aerosol as the aerosol passes. The aerosol travels a distance through a delivery conduit 410 while the diluent carrier fluid evaporates from the nebulized droplets. The evaporation removes the vast majority of the diluent carrier fluid from the droplets, greatly reducing the size of the lubricant droplets. The evaporated aerosol enters a deposition chamber 412 and is deposited on a micromechanical device 414. The micromechanical devices may be lubricated in wafer form, in which case the lubricant aerosol will lubricate an entire wafer of micromechanical devices at one time. One embodiment produces an aerosol having a mean droplet size of less than 10 microns. Evaporation of the diluent carrier fluid reduces this droplet size to 10-500 nm by the time the lubricant is deposited on the micromechanical devices. The preceding abstract is submitted with the understanding that it only will be used to assist in determining, from a cursory inspection, the nature and gist of the technical disclosure as described in 37 C.F.R. §1.72(b). In no case should this abstract be used for interpreting the scope of any patent claims.

    Abstract translation: 一种用于将微细油雾润滑剂输送到微机械装置的方法和装置。 润滑剂和稀释剂载体流体的混合物402被保持在供应容器404中。混合物被迫通过雾化器尖端406以产生细小的气溶胶。 颗粒选择器408随着气溶胶通过而从气溶胶中去除大​​的液滴。 气雾剂通过输送管道410行进一段距离,同时稀释剂载体流体从喷雾的液滴中蒸发。 蒸发从液滴中除去大部分稀释剂载体流体,大大减小了润滑剂液滴的尺寸。 蒸发的气溶胶进入沉积室412并沉积在微机械装置414上。微机械装置可以以晶片形式润滑,在这种情况下,润滑剂气溶胶将一次润滑整个微机械装置的晶片。 一个实施例产生具有小于10微米的平均液滴尺寸的气溶胶。 润滑剂沉积在微机械装置上时,稀释剂载体流体的蒸发将该液滴尺寸减小到10-500nm。 提交上述摘要的理解是,它只会用于协助从粗略检查中确定37 C.F.R.描述的技术披露的性质和要点。 §1.72(b)。 在任何情况下,本摘要不得用于解释任何专利权利要求的范围。

    Getter for enhanced micromechanical device performance
    12.
    发明授权
    Getter for enhanced micromechanical device performance 有权
    吸气剂增强了微机械装置性能

    公开(公告)号:US06843936B1

    公开(公告)日:2005-01-18

    申请号:US09416910

    申请日:1999-10-13

    CPC classification number: B01D53/28

    Abstract: A desiccant compound, image projection system using the desiccant compound, and a method for utilizing the desiccant compound. The desiccant compound formed by mixing (202) a polymer binder selected from the group consisting of polysaccharides (including without limitation structural polysaccharides such as cellulose, chitin, and their functionalized derivatives), polyamines, polysulfones, and polyamides with a drying agent, typically a zeolite, at a polymer to drying agent weight ratio of 1:2.1 to 1:100, or 1:4 to 1:10. After the desiccant compound is mixed (202) it is applied (204) to a surface and cured (206), often through the application of heat and vacuum. The cured desiccant compound is conditioned (208) and the it package is sealed (210).

    Abstract translation: 干燥剂化合物,使用干燥剂的图像投影系统以及利用干燥剂的方法。 通过混合(202)选自多糖(包括但不限于结构多糖如纤维素,几丁质及其官能化衍生物)的聚合物粘合剂,聚胺,聚砜和聚酰胺与干燥剂混合(202)形成的干燥剂化合物,通常为 沸石,聚合物与干燥剂的重量比为1:2.1至1:100,或1:4至1:10。 在干燥剂混合物(202)之后,通常通过加热和真空施加(204)到表面并固化(206)。 将固化的干燥剂化合物调节(208)并将其包装密封(210)。

    Passivation for micromechanical devices
    13.
    发明授权
    Passivation for micromechanical devices 有权
    微机械器件钝化

    公开(公告)号:US06259551B1

    公开(公告)日:2001-07-10

    申请号:US09408094

    申请日:1999-09-27

    CPC classification number: B81B1/00 B82Y30/00 C23C14/06 G02B1/10 G02B26/0833

    Abstract: A non-volatile passivation coating for micromechanical devices. The device has at least one surface (10) that contacts other surfaces and requires passivation. The passivation is provided by a monolayer of molecules (16) that has cross links (18) between the monolayers, or is of an highly stable material. The monolayer is applied by vacuum vapor coating, melt coating or coating from solution. The non-volatility of the monolayer eliminates the need for a hermetic package.

    Abstract translation: 用于微机械器件的非挥发性钝化涂层。 该装置具有与其它表面接触并需要钝化的至少一个表面(10)。 钝化由单层分子(16)提供,分子(16)在单层之间具有交联(18),或者是高度稳定的材料。 单层通过真空蒸镀,熔融涂覆或从溶液中涂布。 单层的非挥发性消除了对密封包装的需要。

    MEMS DEVICE WITH CONTROLLED GAS SPACE CHEMISTRY
    14.
    发明申请
    MEMS DEVICE WITH CONTROLLED GAS SPACE CHEMISTRY 有权
    具有控制气体空间化学的MEMS器件

    公开(公告)号:US20100165314A1

    公开(公告)日:2010-07-01

    申请号:US10833527

    申请日:2004-04-28

    Abstract: A process for protecting a MEMS device used in a UV illuminated application from damage due to a photochemical activation between the UV flux and package gas constituents, formed from the out-gassing of various lubricants and passivants put in the device package to prevent sticking of the MEMS device's moving parts. This process coats the exposed surfaces of the MEMS device and package's optical window surfaces with a metal-halide film to eliminate this photochemical activation and therefore significantly extend the reliability and lifetime of the MEMS device.

    Abstract translation: 用于保护在紫外线照射应用中使用的MEMS器件的过程不会由于UV通量和封装气体成分之间的光化学活化而损坏,所述UV通量和封装气体成分由放置在器件封装中的各种润滑剂和钝化剂的排出物形成,以防止粘附 MEMS器件的运动部件。 该方法用金属卤化物膜涂覆MEMS器件和封装的光学窗表面的暴露表面以消除该光化学活化,因此显着地延长了MEMS器件的可靠性和使用寿命。

    Lubricant delivery for micromechanical devices
    15.
    发明授权
    Lubricant delivery for micromechanical devices 有权
    微机械装置的润滑剂输送

    公开(公告)号:US06300294B1

    公开(公告)日:2001-10-09

    申请号:US09435416

    申请日:1999-11-08

    CPC classification number: B81B7/0077 B81B3/0075 G02B26/0841

    Abstract: A method of dispensing a lubricant into a micromechanical device package and a micromechanical device package containing the lubricant. The method comprises the steps of mixing (102) the lubricant, typically a perfluoroalkanoic acid such as perfluorodecanoic acid with a suitable solvent, typically an ether solvent such as tetrahydrofuran or tert-butyl methyl ether. The mixture is allowed to equilibriate (104) before being filtered (106) to remove solid particles. The filtered solution is applied (108) to a surface that will be on the interior of the package, typically the ceramic substrate. The deposited mixture is then cured (110) to remove most, if not all, of the solvent, and the package is sealed (112).

    Abstract translation: 将润滑剂分配到微机械装置包装中的方法和包含润滑剂的微机械装置包装。 该方法包括以下步骤:将润滑剂(通常为全氟链烷酸,例如全氟癸酸)与合适的溶剂(通常为醚溶剂如四氢呋喃或叔丁基甲基醚)混合(102)。 允许混合物平衡(104),然后过滤(106)以除去固体颗粒。 将过滤的溶液(108)施加到将在包装内部(通常为陶瓷基材)的表面上。 然后将沉积的混合物固化(110)以除去大部分(如果不是全部)溶剂,并且封装被密封(112)。

    Solid-state optical modulator
    16.
    发明授权
    Solid-state optical modulator 有权
    固态光调制器

    公开(公告)号:US08687260B2

    公开(公告)日:2014-04-01

    申请号:US11966314

    申请日:2007-12-28

    CPC classification number: G02F1/0136 G02F1/03 G02F1/13718 G02F2201/343

    Abstract: A spatial light modulator comprises a solid-state chiral material disposed between electrodes such that the polarization direction of the polarized light incident thereto can be controlled through an electrical field established between the electrodes.

    Abstract translation: 空间光调制器包括设置在电极之间的固态手性材料,使得可以通过在电极之间建立的电场来控制入射到其上的偏振光的偏振方向。

    Antireflective coating
    17.
    发明授权
    Antireflective coating 有权
    防反射涂层

    公开(公告)号:US08541860B2

    公开(公告)日:2013-09-24

    申请号:US13206131

    申请日:2011-08-09

    CPC classification number: G02B26/0841 G02B1/115

    Abstract: Device and method for an antireflective coating to improve image quality in an image display system. A preferred embodiment comprises a first high refractive index layer overlying a reflective surface of an integrated circuit, a first low refractive index layer overlying the first high refractive index layer, a second high refractive index layer overlying the first low refractive index layer, and a second low refractive index layer overlying the second high refractive index layer. The alternating layers of high refractive index material and low refractive index material form an optical trap, allowing light to readily pass through in one direction, but not so easily in a reverse direction. The dual alternating layer topology improves the antireflective properties of the antireflective layer and permits a wide range of adjustments for manipulating reflectivity and color point.

    Abstract translation: 用于抗反射涂层的装置和方法,以改善图像显示系统中的图像质量。 优选实施例包括覆盖集成电路的反射表面的第一高折射率层,覆盖第一高折射率层的第一低折射率层,覆盖第一低折射率层的第二高折射率层,以及第二高折射率层 低折射率层覆盖第二高折射率层。 高折射率材料和低折射率材料的交替层形成光阱,允许光容易地沿一个方向通过,但在相反方向上不容易通过。 双交替层拓扑提高了抗反射层的抗反射性能,并且允许对操纵反射率和色点的宽范围的调整。

    Antireflective Coating
    19.
    发明申请
    Antireflective Coating 有权
    防反射涂层

    公开(公告)号:US20110294305A1

    公开(公告)日:2011-12-01

    申请号:US13206131

    申请日:2011-08-09

    CPC classification number: G02B26/0841 G02B1/115

    Abstract: Device and method for an antireflective coating to improve image quality in an image display system. A preferred embodiment comprises a first high refractive index layer overlying a reflective surface of an integrated circuit, a first low refractive index layer overlying the first high refractive index layer, a second high refractive index layer overlying the first low refractive index layer, and a second low refractive index layer overlying the second high refractive index layer. The alternating layers of high refractive index material and low refractive index material form an optical trap, allowing light to readily pass through in one direction, but not so easily in a reverse direction. The dual alternating layer topology improves the antireflective properties of the antireflective layer and permits a wide range of adjustments for manipulating reflectivity and color point.

    Abstract translation: 用于抗反射涂层的装置和方法,以改善图像显示系统中的图像质量。 优选实施例包括覆盖集成电路的反射表面的第一高折射率层,覆盖第一高折射率层的第一低折射率层,覆盖第一低折射率层的第二高折射率层,以及第二高折射率层 低折射率层覆盖第二高折射率层。 高折射率材料和低折射率材料的交替层形成光阱,允许光容易地沿一个方向通过,但在相反方向上不容易通过。 双交替层拓扑提高了抗反射层的抗反射性能,并且允许对操纵反射率和色点的宽范围的调整。

    Antireflective coating
    20.
    发明授权
    Antireflective coating 有权
    防反射涂层

    公开(公告)号:US07994600B2

    公开(公告)日:2011-08-09

    申请号:US11314772

    申请日:2005-12-21

    CPC classification number: G02B26/0841 G02B1/115

    Abstract: Device and method for an antireflective coating to improve image quality in an image display system. A preferred embodiment comprises a first high refractive index layer overlying a reflective surface of an integrated circuit, a first low refractive index layer overlying the first high refractive index layer, a second high refractive index layer overlying the first low refractive index layer, and a second low refractive index layer overlying the second high refractive index layer. The alternating layers of high refractive index material and low refractive index material form an optical trap, allowing light to readily pass through in one direction, but not so easily in a reverse direction. The dual alternating layer topology improves the antireflective properties of the antireflective layer and permits a wide range of adjustments for manipulating reflectivity and color point.

    Abstract translation: 用于抗反射涂层的装置和方法,以改善图像显示系统中的图像质量。 优选实施例包括覆盖集成电路的反射表面的第一高折射率层,覆盖第一高折射率层的第一低折射率层,覆盖第一低折射率层的第二高折射率层,以及第二高折射率层 低折射率层覆盖第二高折射率层。 高折射率材料和低折射率材料的交替层形成光阱,允许光容易地沿一个方向通过,但在相反方向上不容易通过。 双交替层拓扑提高了抗反射层的抗反射性能,并且允许对操纵反射率和色点的宽范围的调整。

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