公开(公告)号：US20190078696A1

公开(公告)日：2019-03-14

申请号：US15743109

申请日：2016-07-08

Applicant: Entegris, Inc.

Inventor： Glenn M. Tom ,  Karl W. Olander ,  James A. Dietz ,  Michael J. Wodjenski ,  Edward A. Sturm ,  Susan K. Dimascio ,  Luping Wang ,  James V. McManus ,  Steven M. Lurcott ,  Jose I. Amo ,  Paul J. Marganski ,  Joseph D. Sweeney ,  Shaun M. Wilson ,  Steven E. Bishop ,  Greg Nelson ,  Donald J. Carruthers ,  Sharad N. Yedave ,  Ying Tang ,  Joseph Despres ,  Barry Chambers ,  Richard Ray ,  Daniel Elzer

IPC: F16K17/00 ,  F16K17/04 ,  F16K31/00 ,  F16K31/06 ,  F17C13/04

Abstract: Fluid supply packages of varying types are described, which are useful for delivery of fluids to fluid-utilizing facilities such as semiconductor manufacturing facilities, solar panel manufacturing facilities, and flat-panel display manufacturing facilities. The fluid supply packages include fluid supply vessels and valve heads of varied configuration, as useful to constitute fluid supply packages that are pressure-regulated and/or adsorbent-based in character.

公开(公告)号：US20190001299A1

公开(公告)日：2019-01-03

申请号：US15752822

申请日：2016-08-19

Applicant: Entegris, Inc.

Inventor： Edward A. Sturm ,  Shaun M. Wilson ,  Melissa A. Petruska

IPC: B01J20/20 ,  C10B53/02 ,  B01J20/30 ,  B01J20/28

Abstract: A cellulosic carbon pyrolyzate material is disclosed, having utility as a gas adsorbent for use in gas storage and delivery devices, gas filters, gas purifiers and other applications. The cellulosic carbon pyrolyzate material comprises microporous carbon derived from cellulose precursor material, e.g., microcrystalline cellulose. In adsorbent applications, the cellulosic carbon pyrolyzate may for example be produced in a particulate form or a monolithic form, having high density and high pore volume to maximize gas storage and delivery, with the pore size distribution of the carbon pyrolyzate adsorbent being tunable via activation conditions to optimize storage capacity and delivery for specific gases of interest. The adsorbent composition may include other non-cellulosic pyrolyzate components.

公开(公告)号：US20170003056A1

公开(公告)日：2017-01-05

申请号：US15100304

申请日：2014-11-28

Applicant: ENTEGRIS, INC.

Inventor： Edward A. Sturm ,  J. Donald Carruthers ,  Shaun M. Wilson ,  Michael J. Wodjenski ,  Lawrence H. Dubois

IPC: F25B17/08 ,  B01J20/28 ,  B01J20/20

CPC classification number: F25B17/08 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/2804 ,  B01J20/28042 ,  B01J20/28052 ,  B01J20/2808 ,  B01J20/28083

Abstract: An adsorbent assembly for use in an adsorption heating and/or cooling system is described. The adsorbent assembly includes an array of adsorbent articles in which at least one adsorbent article is arranged in at least one of the following compatible arrangements (i)-(iii): (i) in contact with at least one other adsorbent article along matable engagement surfaces of respective contacting articles, with the contacting articles being configured to form a communicating gas flow passage through the contacting articles or at peripheral portions thereof; (ii) in a tube comprising at least one matable engagement surface that is in contact with a complementary matable engagement surface of another tube containing at least one adsorbent article; and (iii) in contact with a deformable foil member that is in contact with at least one other adsorbent article and/or a heat transfer member.

Abstract translation: 描述了用于吸附加热和/或冷却系统中的吸附剂组件。 吸附剂组件包括一组吸附制品，其中至少一种吸附制品布置在以下兼容布置（i） - （iii）中的至少一个中：（i）沿着可配合的接合与至少一种其它吸附制品接触 各个接触制品的表面，其中接触制品构造成形成通过接触制品或其周边部分的连通气体流动通道; （ii）在包括至少一个可配合接合表面的管中，所述接合表面与包含至少一种吸附制品的另一管的互补配对接合表面接触; 和（iii）与与至少一种其它吸附制品和/或传热构件接触的可变形箔构件接触。

公开(公告)号：US20160030879A1

公开(公告)日：2016-02-04

申请号：US14881829

申请日：2015-10-13

Applicant: Entegris, Inc.

Inventor： Melissa A. Petruska ,  J. Donald Carruthers ,  Edward A. Sturm ,  Shaun M. Wilson ,  Joshua B. Sweeney

IPC: B01D53/08 ,  B01J20/20

CPC classification number: B01D53/08 ,  B01D53/02 ,  B01D53/04 ,  B01D53/0438 ,  B01D53/0462 ,  B01D53/047 ,  B01D2253/102 ,  B01D2257/504 ,  B01D2258/0283 ,  B01J20/20 ,  B01J20/28004 ,  B01J20/28011 ,  B01J20/3078 ,  Y02C10/04 ,  Y02C10/08

Abstract: A particulate form carbon pyrolyzate adsorbent, having the following characteristics: (a) CO2 capacity greater than 105 cc/gram at one bar pressure and temperature of 273° Kelvin; (b) CO2 Working Capacity greater than 7.0 weight percent; (c) CO2 heats of adsorption and desorption each of which is in a range of from 10 to 50 kJ/mole; and (d) a CO2/N2 Henry's Law Separation Factor greater than 5. The carbon pyrolyzate material can be formed from a polyvinylidene chloride-based polymer or copolymer, or other suitable resin material, to provide an adsorbent that is useful for carbon dioxide capture applications, e.g., in treatment of flue gases from coal-fired power generation plants.

公开(公告)号：US20230416154A1

公开(公告)日：2023-12-28

申请号：US18215097

申请日：2023-06-27

Applicant: ENTEGRIS, INC.

Inventor： Thines Kumar Perumal ,  Subhash Guddati ,  Aravind Vasanthakumar ,  Montray Leavy ,  Rocky Dean Gipson ,  Edward A. Sturm

IPC: C04B35/18 ,  C04B35/626 ,  C04B35/64 ,  B33Y40/20

CPC classification number: C04B35/18 ,  C04B35/62645 ,  C04B35/64 ,  B33Y40/20 ,  C04B2235/6021 ,  C04B2235/349 ,  C04B2235/5436 ,  C04B2235/6026 ,  C04B2235/6022 ,  C04B2235/3463

Abstract: A method for producing an article and a system associated with the method are provided. The method includes providing a green part, cooling the green part to a temperature below the freezing point of the ink to form a hardened mass and loosely-attached powder particles, and removing the loosely-attached powder particles. The green part includes powder particles, an ink, and optionally a binder. The loosely-attached powder particles removed from the green part may be recycled and reused.

公开(公告)号：US10354877B2

公开(公告)日：2019-07-16

申请号：US15928645

申请日：2018-03-22

Applicant: Entegris, Inc.

Inventor： Oleg Byl ,  Edward A. Sturm ,  Ying Tang ,  Sharad N. Yedave ,  Joseph D. Sweeney ,  Steven G. Sergi ,  Barry Lewis Chambers

IPC: H01J37/08 ,  H01L31/18 ,  H01L33/00 ,  H01J37/317 ,  H01L21/265

Abstract: Ion implantation processes and systems are described, in which carbon dopant source materials are utilized to effect carbon doping. Various gas mixtures are described, including a carbon dopant source material, as well as co-flow combinations of gases for such carbon doping. Provision of in situ cleaning agents in the carbon dopant source material is described, as well as specific combinations of carbon dopant source gases, hydride gases, fluoride gases, noble gases, oxide gases and other gases.

公开(公告)号：US09370744B2

公开(公告)日：2016-06-21

申请号：US14881829

申请日：2015-10-13

Applicant: Entegris, Inc.

Inventor： Melissa A. Petruska ,  J. Donald Carruthers ,  Edward A. Sturm ,  Shaun M. Wilson ,  Joshua B. Sweeney

IPC: B01D53/02 ,  B01D53/08 ,  B01D53/04 ,  B01D53/047 ,  B01J20/20 ,  B01J20/30 ,  B01J20/28

CPC classification number: B01D53/08 ,  B01D53/02 ,  B01D53/04 ,  B01D53/0438 ,  B01D53/0462 ,  B01D53/047 ,  B01D2253/102 ,  B01D2257/504 ,  B01D2258/0283 ,  B01J20/20 ,  B01J20/28004 ,  B01J20/28011 ,  B01J20/3078 ,  Y02C10/04 ,  Y02C10/08

Abstract: A particulate form carbon pyrolyzate adsorbent, having the following characteristics: (a) CO2 capacity greater than 105 cc/gram at one bar pressure and temperature of 273° Kelvin; (b) CO2 Working Capacity greater than 7.0 weight percent; (c) CO2 heats of adsorption and desorption each of which is in a range of from 10 to 50 kJ/mole; and (d) a CO2/N2 Henry's Law Separation Factor greater than 5. The carbon pyrolyzate material can be formed from a polyvinylidene chloride-based polymer or copolymer, or other suitable resin material, to provide an adsorbent that is useful for carbon dioxide capture applications, e.g., in treatment of flue gases from coal-fired power generation plants.

公开(公告)号：US09283512B2

公开(公告)日：2016-03-15

申请号：US14833225

申请日：2015-08-24

Applicant: Entegris, Inc.

Inventor： J. Donald Carruthers ,  Melissa A. Petruska ,  Shaun M. Wilson ,  Edward A. Sturm

IPC: B01D53/02 ,  B01D53/04 ,  B01J20/30 ,  B01J20/28 ,  B01J20/20

CPC classification number: B01D53/04 ,  B01D53/02 ,  B01D53/0462 ,  B01D53/0476 ,  B01D53/053 ,  B01D53/62 ,  B01D2253/102 ,  B01D2253/202 ,  B01D2253/304 ,  B01D2253/308 ,  B01D2253/311 ,  B01D2256/245 ,  B01D2257/504 ,  B01D2258/05 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/28016 ,  B01J20/3078 ,  C01B32/30 ,  C12M47/18 ,  Y02C10/04 ,  Y02C10/08 ,  Y02P20/152 ,  Y02P20/59 ,  Y10T428/2982

Abstract: A carbon pyrolyzate adsorbent is described that is selective for carbon dioxide in contact with gas mixtures including carbon dioxide and methane. The adsorbent has a carbon dioxide adsorbent capacity at 1 bar pressure of greater than 50 cm3 carbon dioxide per gram of adsorbent at 273K, a methane adsorption capacity at 1 bar pressure of less than 35 cm3 methane per gram of adsorbent at 21° C., and a bulk density of greater than 0.55 gram per cubic centimeter of volume. Such adsorbent can be utilized, for example, for biogas upgrading, natural gas purification, coal bed methane purification, and refining operations.

公开(公告)号：US09234628B2

公开(公告)日：2016-01-12

申请号：US14224536

申请日：2014-03-25

Applicant: Entegris, Inc.

Inventor： Shaun M. Wilson ,  Edward A. Sturm

IPC: B01D53/02 ,  F17C11/00 ,  B01J20/20 ,  B01J20/30 ,  B01J20/28

CPC classification number: B01J20/20 ,  B01D53/02 ,  B01D2253/102 ,  B01D2253/202 ,  B01D2256/18 ,  B01D2257/2027 ,  B01D2257/204 ,  B01D2257/2047 ,  B01D2257/40 ,  B01J20/28011 ,  B01J20/28016 ,  B01J20/28042 ,  B01J20/28078 ,  B01J20/2808 ,  B01J20/28083 ,  B01J20/3078 ,  C23C16/4405 ,  F17C11/00 ,  Y02C20/10 ,  Y10T137/0318 ,  Y10T137/8593

Abstract: A polyvinylidene fluoride (PVDF) pyrolyzate adsorbent is described, having utility for storing gases in an adsorbed state, and from which adsorbed gas may be desorbed to supply same for use. The PVDF pyrolyzate adsorbent can be of monolithic unitary form, or in a bead, powder, film, particulate or other finely divided form. The adsorbent is particularly suited for storage and supply of fluorine-containing gases, such as fluorine gas, nitrogen trifluoride, carbo-fluoride gases, and the like. The adsorbent may be utilized in a gas storage and dispensing system, in which the adsorbent is contained in a supply vessel, from which sorbate gas can be selectively dispensed.

公开(公告)号：US09156020B2

公开(公告)日：2015-10-13

申请号：US14672127

申请日：2015-03-28

Applicant: Entegris, Inc.

Inventor： Melissa A. Petruska ,  J. Donald Carruthers ,  Edward A. Sturm ,  Shaun M. Wilson ,  Joshua B. Sweeney

IPC: B01D53/04 ,  B01J20/20 ,  B01D53/08 ,  B01J20/30

CPC classification number: B01D53/08 ,  B01D53/02 ,  B01D53/04 ,  B01D53/0438 ,  B01D53/0462 ,  B01D53/047 ,  B01D2253/102 ,  B01D2257/504 ,  B01D2258/0283 ,  B01J20/20 ,  B01J20/28004 ,  B01J20/28011 ,  B01J20/3078 ,  Y02C10/04 ,  Y02C10/08

Abstract: A particulate form carbon pyrolyzate adsorbent, having the following characteristics: (a) CO2 capacity greater than 105 cc/gram at one bar pressure and temperature of 273° Kelvin; (b) CO2 Working Capacity greater than 7.0 weight percent; (c) CO2 heats of adsorption and desorption each of which is in a range of from 10 to 50 kJ/mole; and (d) a CO2/N2 Henry's Law Separation Factor greater than 5. The carbon pyrolyzate material can be formed from a polyvinylidene chloride-based polymer or copolymer, or other suitable resin material, to provide an adsorbent that is useful for carbon dioxide capture applications, e.g., in treatment of flue gases from coal-fired power generation plants.

Abstract translation: 具有以下特征的颗粒形式的碳热解物吸附剂：（a）在一个压力和273°开尔文温度下，CO 2容量大于105cc /克; （b）二氧化碳的工作量大于7.0重量百分比; （c）吸附和解吸的CO 2热量各自在10至50kJ /摩尔的范围内; 和（d）大于5的CO 2 / N 2亨利定律分离因子。碳热解物质可以由聚偏二氯乙烯基聚合物或共聚物或其它合适的树脂材料形成，以提供可用于二氧化碳捕获的吸附剂 应用，例如在燃煤发电厂烟气处理中的应用。