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公开(公告)号：US07312846B2
公开(公告)日：2007-12-25
申请号：US10920328
申请日：2004-08-18
CPC分类号： G03F9/7088 , G03F9/7049 , G03F9/7076
摘要： An off-axis alignment system in a lithographic projection apparatus uses broadband radiation to illuminate a phase grating on the wafer. The broadband radiation source may include fluorescent materials, e.g. Yag:Ce or ND:Yag crystals illuminated by excitation light.
摘要翻译： 光刻投影装置中的离轴对准系统使用宽带辐射来照射晶片上的相位光栅。 宽带辐射源可以包括荧光材料，例如 Yag：Ce或ND：由激发光照亮的Yag晶体。
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公开(公告)号：US07277185B2
公开(公告)日：2007-10-02
申请号：US11153316
申请日：2005-06-16
CPC分类号： G03F7/70633 , G03F7/70675 , G03F9/7049 , G03F9/7084
摘要： In a method of measuring, in a lithographic manufacturing process using a lithographic projection apparatus, overlay between a resist layer, in which a mask pattern is to be imaged, and a substrate, use is made of an alignment-measuring device forming part of the apparatus and of specific overlay marks in the substrate and resist layer. These marks have periodic structures with periods which cannot be resolved by the alignment device, but generate an interference pattern having a period corresponding to the period of a reference mark of the alignment device.
摘要翻译： 在使用光刻投影装置的光刻制造工艺中，在要成像掩模图案的抗蚀剂层与基板之间进行覆盖的测量方法中，使用对准测量装置形成部分 设备和基板和抗蚀剂层中的特定覆盖标记。 这些标记具有周期性结构，其周期不能由对准装置解决，而是产生具有对应于对准装置的参考标记的周期的周期的干涉图案。
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13.发明授权Method of measuring alignment of a substrate with respect to a reference alignment mark 失效测量衬底相对于参考对准标记的对准的方法公开(公告)号：US06937334B2
公开(公告)日：2005-08-30
申请号：US09940819
申请日：2001-08-28
IPC分类号： G03F7/22 , G03F9/00 , H01L21/027 , G01B11/00 , G01B11/02
CPC分类号： G03F9/7015 , G03F9/7049 , G03F9/7076
摘要： For determining the alignment of a substrate with respect to a mask, a substrate alignment mark having a periodic structure, and an additional alignment mark, having a periodic structure and provided in a resist layer (RL) on top of the substrate, are used. Upon illumination of these two marks, having a period which is considerably smaller than that of a reference mark, an interference pattern (Pb) is generated, which has a period corresponding to that of the reference mark. By measuring the movement of the interference pattern with respect to the reference mark, the much smaller mutual movement of the fine alignment marks can be measured. In this way, the resolution and accuracy of a conventional alignment device can be increased considerably.
摘要翻译： 为了确定衬底相对于掩模的对准，使用具有周期性结构的衬底对准标记和具有周期性结构并且设置在衬底顶部的抗蚀剂层（RL）中的附加对准标记）。 在照射这两个标记时，具有比参考标记的周期明显更小的周期，产生具有对应于参考标记的周期的干涉图案（Pb）。 通过测量干涉图案相对于参考标记的移动，可以测量精细对准标记的相对较小的相互移动。 以这种方式，可以显着提高常规对准装置的分辨率和精度。
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公开(公告)号：US20130134293A1
公开(公告)日：2013-05-30
申请号：US13581696
申请日：2011-02-24
申请人： Jacobus Hermanus Maria Neijzen , Jacobus Maria Antonius Van Den Eerenbeemd , Johannes Joseph Hubertina Barbara Schleipen
发明人： Jacobus Hermanus Maria Neijzen , Jacobus Maria Antonius Van Den Eerenbeemd , Johannes Joseph Hubertina Barbara Schleipen
IPC分类号： G01J1/42
CPC分类号： G01J1/42 , G01J3/02 , G01J3/0262 , G01J3/10 , G01N21/255
摘要： The invention relates to a sensor device (100) in which the spatial distribution of an input light (L1) emission from a light emitting area (121, 122) of a light source (120) can selectively be changed. The input light is propagated through an optical system (110) to produce some output light (L2). Changes of the input light are taken into account when the detected output light (L2) is evaluated. Thus it is for example possible to detect and/or eliminate optical disturbances occurring in the optical path outside an object region (3). The light source (120) may particularly comprise a plurality of a light emitting segments (121, 122) that can selectively be switched on or off.
摘要翻译： 本发明涉及一种传感器装置（100），其中从光源（120）的发光区域（121,122）发射的输入光（L1）的空间分布可以选择性地改变。 输入光通过光学系统（110）传播以产生一些输出光（L2）。 当检测到的输出光（L2）被评估时，会考虑输入光的变化。 因此，例如可能检测和/或消除在物体区域（3）外部的光路中出现的光学干扰。 光源（120）可以特别地包括可以选择性地打开或关闭的多个发光段（121,122）。
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公开(公告)号：US20120156765A1
公开(公告)日：2012-06-21
申请号：US13393097
申请日：2010-08-25
CPC分类号： B01L3/502715 , B01L3/502753 , B01L2200/027 , B01L2300/0654 , B01L2300/0803 , B01L2300/0816 , B01L2300/0864 , B01L2300/0887 , B01L2400/0406 , Y10T29/4998
摘要： The invention relates to a fluid filtering device comprising a filter (2) for filtering a fluid and a substrate (3) comprising a collecting structure (4) for collecting the filtered fluid from the filter (2). An adhesive (5) holds the filter (2) in place with respect to the collecting structure (4). The filter (2), the substrate (3) with the collecting structure (4) and the adhesive (5) are arranged such that the collecting structure (4) contacts the filter (2) and the filter (2) is attached to the substrate (3) by the adhesive (5). The collecting structure is very close to the filter and the adhesive ensures that the collecting structure remains very close to the filter. The filtered fluid can therefore be collected very efficiently and very fast. The fluid filtering device is preferentially used for filtering blood in a biosensing device.
摘要翻译： 本发明涉及一种流体过滤装置，其包括用于过滤流体的过滤器（2）和包括用于从过滤器（2）收集过滤流体的收集结构（4）的基底（3）。 粘合剂（5）将过滤器（2）相对于收集结构（4）保持在适当的位置。 过滤器（2），具有收集结构（4）的基板（3）和粘合剂（5）被布置成使得收集结构（4）接触过滤器（2），并且过滤器（2）附接到 基材（3）由粘合剂（5）。 收集结构非常接近过滤器，并且粘合剂确保收集结构保持非常接近过滤器。 因此，可以非常有效和非常快地收集过滤的流体。 流体过滤装置优选用于过滤生物传感装置中的血液。
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16.发明申请Record Carrier Comprising a Rom Mark and a Playback Device For Retrieving the Rom Mark 失效包含Rom标记的记录载体和用于检索Rom标记的播放设备公开(公告)号：US20080279086A1
公开(公告)日：2008-11-13
申请号：US11569765
申请日：2005-05-30
IPC分类号： G11B7/00
CPC分类号： G11B7/00736 , G11B7/14 , G11B20/00086 , G11B20/00586
摘要： In order to distinguish a duplicated record carrier from an original record carrier a pattern is included in a ROM type record carrier that is oriented perpendicular to the reading direction. During illegal duplication the spatial relationship is disturb which can be easily detected. The patterns can be read out simultaneously by the same single read-out spot by including both patterns within the diameter of the optical spot thus guaranteeing that the read-out patterns are actually still spatially close together. Special patterns can be used that allow an easy detection of disturbances caused by the illegal duplication.
摘要翻译： 为了将复制的记录载体与原始记录载体区分开，图案被包括在垂直于读取方向的ROM型记录载体中。 在非法复制过程中，空间关系是可以轻易检测到的干扰。 通过将两个图案包括在光点的直径内，可以通过将相同的单个读出光点同时读出图案，从而保证读出图案实际上仍然在空间上靠近在一起。 可以使用特殊模式，可以方便地检测非法复制造成的干扰。
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公开(公告)号：US09500584B2
公开(公告)日：2016-11-22
申请号：US14125093
申请日：2012-06-25
IPC分类号： G01N21/00 , G01N21/59 , G01N21/03 , G01N21/31 , G01N21/552 , G01N33/543 , G01N21/17
CPC分类号： G01N21/59 , G01N21/0303 , G01N21/31 , G01N21/3151 , G01N21/552 , G01N33/54326 , G01N2021/0325 , G01N2021/1738 , G01N2021/1742 , G01N2201/024 , G01N2201/066
摘要： An apparatus for examination of a sample includes at least one sample chamber in which the sample can be provided, where the sample chamber has a detection surface; at least one light source for emitting a first input light beam which is totally internally reflected at the detection surface of the sample chamber into a first output light beam, and for emitting a second input light beam which is at least partially transmitted through the sample chamber into a second output light beam. The apparatus further includes at least one light detector for detecting the first and the second output light beams. The sample chamber is elongated and traversed in longitudinal direction by light of the second input light beam.
摘要翻译： 用于检查样品的装置包括至少一个样品室，其中可以提供样品，其中样品室具有检测表面; 至少一个光源，用于发射在样品室的检测表面处完全内部反射到第一输出光束中的第一输入光束，并且用于发射至少部分透射通过样品室的第二输入光束 进入第二输出光束。 该装置还包括至少一个用于检测第一和第二输出光束的光检测器。 样品室通过第二输入光束的光线在纵向方向上被细长并横越。
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公开(公告)号：US20140118745A1
公开(公告)日：2014-05-01
申请号：US14125093
申请日：2012-06-25
IPC分类号： G01N21/59
CPC分类号： G01N21/59 , G01N21/0303 , G01N21/31 , G01N21/3151 , G01N21/552 , G01N33/54326 , G01N2021/0325 , G01N2021/1738 , G01N2021/1742 , G01N2201/024 , G01N2201/066
摘要： The invention relates to means for the examination of a sample, wherein a first input light beam (L1) is totally internally reflected at a detection surface of a sample chamber (111), while a second input light beam (L1′) is transmitted through the sample chamber (111). The resulting first and second output light beams (L2, L2′) are detected and can be evaluated with respect to frustrated total internal reflection and optical absorbance, respectively. Preferably, both output light beams (L2, L2′) are detected by a single image sensor (155).
摘要翻译： 本发明涉及一种用于检查样品的装置，其中第一输入光束（L1）在样品室（111）的检测表面处被全内反射，而第二输入光束（L1'）被透射 样品室（111）。 检测所得到的第一和第二输出光束（L2，L2'），并且可以分别对沮丧的全内反射和光吸收率进行评估。 优选地，两个输出光束（L2，L2'）由单个图像传感器（155）检测。
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公开(公告)号：US20130248690A1
公开(公告)日：2013-09-26
申请号：US13990251
申请日：2011-11-28
IPC分类号： G02B17/00 , H01L27/146
CPC分类号： G02B17/00 , G01N21/552 , G02B13/22 , G02B13/26 , G02B17/008 , H01L27/14625
摘要： The invention relates to a double telecentric optical system (100) and its use in a sensor device (1000), wherein said optical system (100) comprises a single focusing element, for example a lens (101). A mirror element (102) is arranged at the focal point (F) of this focusing element (101) to reflect incoming light rays back to the focusing element (101). Incoming and reflected light rays preferably pass through different parts (101a, 101b) of the focusing element (101), allowing a spatially separated arrangement of an object (3) and its image (I).
摘要翻译： 本发明涉及双远心光学系统（100）及其在传感器装置（1000）中的应用，其中所述光学系统（100）包括单个聚焦元件，例如透镜（101）。 反射镜元件（102）布置在该聚焦元件（101）的焦点（F）处，以将入射光线反射回聚焦元件（101）。 入射和反射的光线优选地通过聚焦元件（101）的不同部分（101a，101b），允许物体（3）和其图像（I）在空间上分离的布置。
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公开(公告)号：US20090238056A1
公开(公告)日：2009-09-24
申请号：US11721338
申请日：2005-12-07
CPC分类号： G11B7/24 , G11B7/14 , G11B7/24085
摘要： The present invention relates to a data medium to be read out by a focused reading beam having a predetermined wavelength. The data medium implements a new concept of generating a reference beam, by comprising a reference beam interface, which, in the propagation direction of the impinging reading beam, is arranged either in front of a data layer with a pit-and-land structure, and is partially reflective while the pit and land interface sections are fully reflective for the reading beam. Or the reference layer is arranged behind the first and second reflective interface sections, and is fully reflective while the pit and land interlace sections are partially reflective for the reading beam. The data medium of the invention has a number of between 5 and 20 channel-bit cells contained in a reference area A-ef defined by the square of the ratio between the reading beam wavelength WL and the numerical aperture NA of an optical system focusing the reading beam. The ratio between the sum of the areas of all pit interface sections and the sum of the areas of all land interface sections of the pit-and-land structure is between 0.4 and 0.6.
摘要翻译： 本发明涉及一种由具有预定波长的聚焦读取光束读出的数据介质。 数据介质通过包括参考光束接口来实现生成参考光束的新概念，该参考光束接口在入射读取光束的传播方向上被布置在具有凹坑和平台结构的数据层之前， 并且部分反射，而凹坑和平台界面部分对于读取光束是完全反射的。 或者参考层布置在第一和第二反射界面部分的后面，并且是完全反射的，而凹坑和平台交错部分对于读取光束是部分反射的。 本发明的数据介质具有包含在参考区域A-ef中的5到20个通道位单元之间的数量，该参考区域A-ef由读取光束波长WL和光学系统的数值孔径NA之间的比率的平方 阅读光束。 所有坑口界面区域的总和与土地和土地结构的所有土地界面部分的面积之和的比值在0.4和0.6之间。
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