FLUID FILTERING DEVICE
    1.
    发明申请
    FLUID FILTERING DEVICE 审中-公开
    流体过滤装置

    公开(公告)号:US20120156765A1

    公开(公告)日:2012-06-21

    申请号:US13393097

    申请日:2010-08-25

    摘要: The invention relates to a fluid filtering device comprising a filter (2) for filtering a fluid and a substrate (3) comprising a collecting structure (4) for collecting the filtered fluid from the filter (2). An adhesive (5) holds the filter (2) in place with respect to the collecting structure (4). The filter (2), the substrate (3) with the collecting structure (4) and the adhesive (5) are arranged such that the collecting structure (4) contacts the filter (2) and the filter (2) is attached to the substrate (3) by the adhesive (5). The collecting structure is very close to the filter and the adhesive ensures that the collecting structure remains very close to the filter. The filtered fluid can therefore be collected very efficiently and very fast. The fluid filtering device is preferentially used for filtering blood in a biosensing device.

    摘要翻译: 本发明涉及一种流体过滤装置,其包括用于过滤流体的过滤器(2)和包括用于从过滤器(2)收集过滤流体的收集结构(4)的基底(3)。 粘合剂(5)将过滤器(2)相对于收集结构(4)保持在适当的位置。 过滤器(2),具有收集结构(4)的基板(3)和粘合剂(5)被布置成使得收集结构(4)接触过滤器(2),并且过滤器(2)附接到 基材(3)由粘合剂(5)。 收集结构非常接近过滤器,并且粘合剂确保收集结构保持非常接近过滤器。 因此,可以非常有效和非常快地收集过滤的流体。 流体过滤装置优选用于过滤生物传感装置中的血液。

    Method and device for irradiating spots on a layer
    4.
    发明授权
    Method and device for irradiating spots on a layer 有权
    用于在层上照射斑点的方法和装置

    公开(公告)号:US07399978B2

    公开(公告)日:2008-07-15

    申请号:US10539351

    申请日:2003-11-20

    摘要: For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the optical element is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the optical element nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit and flowing out of an outflow opening through a total projected cross-sectional passage area in a plane parallel to the layer. The outflow opening or a plurality of the outflow openings are positioned such that, seen in a direction perpendicular to the layer, the total cross-sectional area has a centre in the portion of the interspace through which the radiation irradiates the spot.

    摘要翻译: 为了照射层,辐射束被引导并聚焦到层上的斑点,引起层相对于光学元件的相对运动,使得相继地照射该层的不同部分和在该层的表面之间的间隙 保持最靠近层的光学元件。 此外,辐射照射到层上的斑点的间隙的至少一部分保持充满液体,液体经由供应管道供给,并通过总投影横截面通过面积流出流出开口 在与平面平行的平面上。 流出开口或多个流出开口定位成使得从垂直于该层的方向看,总横截面积在该空间部分中的中心,辐射辐射穿过该点。

    Method of measuring overlay
    6.
    发明授权
    Method of measuring overlay 有权
    测量覆盖层的方法

    公开(公告)号:US07277185B2

    公开(公告)日:2007-10-02

    申请号:US11153316

    申请日:2005-06-16

    IPC分类号: G01B11/02 G01B11/00

    摘要: In a method of measuring, in a lithographic manufacturing process using a lithographic projection apparatus, overlay between a resist layer, in which a mask pattern is to be imaged, and a substrate, use is made of an alignment-measuring device forming part of the apparatus and of specific overlay marks in the substrate and resist layer. These marks have periodic structures with periods which cannot be resolved by the alignment device, but generate an interference pattern having a period corresponding to the period of a reference mark of the alignment device.

    摘要翻译: 在使用光刻投影装置的光刻制造工艺中,在要成像掩模图案的抗蚀剂层与基板之间进行覆盖的测量方法中,使用对准测量装置形成部分 设备和基板和抗蚀剂层中的特定覆盖标记。 这些标记具有周期性结构,其周期不能由对准装置解决,而是产生具有对应于对准装置的参考标记的周期的周期的干涉图案。

    Method of measuring alignment of a substrate with respect to a reference alignment mark
    7.
    发明授权
    Method of measuring alignment of a substrate with respect to a reference alignment mark 失效
    测量衬底相对于参考对准标记的对准的方法

    公开(公告)号:US06937334B2

    公开(公告)日:2005-08-30

    申请号:US09940819

    申请日:2001-08-28

    摘要: For determining the alignment of a substrate with respect to a mask, a substrate alignment mark having a periodic structure, and an additional alignment mark, having a periodic structure and provided in a resist layer (RL) on top of the substrate, are used. Upon illumination of these two marks, having a period which is considerably smaller than that of a reference mark, an interference pattern (Pb) is generated, which has a period corresponding to that of the reference mark. By measuring the movement of the interference pattern with respect to the reference mark, the much smaller mutual movement of the fine alignment marks can be measured. In this way, the resolution and accuracy of a conventional alignment device can be increased considerably.

    摘要翻译: 为了确定衬底相对于掩模的对准,使用具有周期性结构的衬底对准标记和具有周期性结构并且设置在衬底顶部的抗蚀剂层(RL)中的附加对准标记)。 在照射这两个标记时,具有比参考标记的周期明显更小的周期,产生具有对应于参考标记的周期的干涉图案(Pb)。 通过测量干涉图案相对于参考标记的移动,可以测量精细对准标记的相对较小的相互移动。 以这种方式,可以显着提高常规对准装置的分辨率和精度。

    OPTICAL EXAMINATIONS WITH CONTROLLED INPUT LIGHT
    8.
    发明申请
    OPTICAL EXAMINATIONS WITH CONTROLLED INPUT LIGHT 审中-公开
    具有控制输入光的光学检查

    公开(公告)号:US20130134293A1

    公开(公告)日:2013-05-30

    申请号:US13581696

    申请日:2011-02-24

    IPC分类号: G01J1/42

    摘要: The invention relates to a sensor device (100) in which the spatial distribution of an input light (L1) emission from a light emitting area (121, 122) of a light source (120) can selectively be changed. The input light is propagated through an optical system (110) to produce some output light (L2). Changes of the input light are taken into account when the detected output light (L2) is evaluated. Thus it is for example possible to detect and/or eliminate optical disturbances occurring in the optical path outside an object region (3). The light source (120) may particularly comprise a plurality of a light emitting segments (121, 122) that can selectively be switched on or off.

    摘要翻译: 本发明涉及一种传感器装置(100),其中从光源(120)的发光区域(121,122)发射的输入光(L1)的空间分布可以选择性地改变。 输入光通过光学系统(110)传播以产生一些输出光(L2)。 当检测到的输出光(L2)被评估时,会考虑输入光的变化。 因此,例如可能检测和/或消除在物体区域(3)外部的光路中出现的光学干扰。 光源(120)可以特别地包括可以选择性地打开或关闭的多个发光段(121,122)。

    Non-leaching adhesive system and its use in a liquid immersion objective
    9.
    发明授权
    Non-leaching adhesive system and its use in a liquid immersion objective 有权
    非浸出粘合剂系统及其在液体浸入物中的应用

    公开(公告)号:US07935213B2

    公开(公告)日:2011-05-03

    申请号:US12629155

    申请日:2009-12-02

    IPC分类号: B29C65/00 B32B37/12 B32B7/12

    CPC分类号: C09J135/02

    摘要: A non-leaching adhesive system and its use in a liquid immersion objective for immersion-writing of masters for optical discs are disclosed. The adhesive system comprises at least one monomer, selected from among the group of acrylate and methacrylate monomers, allylic monomers, norbornene monomers, hybrid monomers thereof, containing chemically different polymerizable groups, and multifunctional thiol monomers, provided that said thiol is used in combination with at least one of said non-thiol monomers; and a polymerization initiator. At least one of said monomers, not being a thiol, is provided with at least two functional polymerizable groups to obtain a crosslinked polymer network. The polymerization initiator is preferably an initiator that can be activated both thermally and with UV radiation. The adhesive system may further contain a reactive diluent. Further the use of the present adhesive system in mounting a liquid immersion objective is disclosed.

    摘要翻译: 公开了一种非浸出粘合剂系统及其在用于浸入式写入光盘的液浸物镜中的用途。 粘合剂体系包含至少一种选自丙烯酸酯和甲基丙烯酸酯单体的单体,烯丙基单体,降冰片烯单体,含有化学不同的可聚合基团的杂化单体和多官能硫醇单体,条件是所述硫醇与 所述非硫醇单体中的至少一种; 和聚合引发剂。 至少一种所述单体(不是硫醇)具有至少两个官能的可聚合基团以获得交联的聚合物网络。 聚合引发剂优选是能够以热辐射和UV辐射活化的引发剂。 粘合剂体系还可以含有反应性稀释剂。 此外,公开了本发明的粘合剂系统在安装液浸物镜中的用途。

    Non-leaching adhesive system and its use in a liquid immersion objective
    10.
    发明授权
    Non-leaching adhesive system and its use in a liquid immersion objective 有权
    非浸出粘合剂系统及其在液体浸入物中的应用

    公开(公告)号:US07642297B2

    公开(公告)日:2010-01-05

    申请号:US10568837

    申请日:2004-08-05

    IPC分类号: C08F2/46 C09J4/02

    CPC分类号: C09J135/02

    摘要: A non-leaching adhesive system and its use in a liquid immersion objective for immersion-writing of masters for optical discs are disclosed. The adhesive system comprises at least one monomer, selected from among the group of acrylate and methacrylate monomers, allylic monomers, norbornene monomers, hybrid monomers thereof, containing chemically different polymeriazble groups, and multifunctional thiol monomers, provided that said thiol is used in combination with at least one of said non-thiol monomers; and a polymerization initiator. At least one of said monomers, not being a thiol, is provided with at least two functional polymerizable groups to obtain a crosslinked polymer network. The polymerization initiator is preferably an initiator that can be activated both thermally and with UV radiation. The adhesive system may further contain a reactive diluent. Further the use of the present adhesive system in mounting a liquid immersion objective is disclosed.

    摘要翻译: 公开了一种非浸出粘合剂系统及其在用于浸入式写入光盘的液浸物镜中的用途。 粘合剂体系包含至少一种选自丙烯酸酯和甲基丙烯酸酯单体的单体,烯丙基单体,降冰片烯单体,含有化学上不同的聚合物基团的杂化单体和多官能硫醇单体,条件是所述硫醇与 所述非硫醇单体中的至少一种; 和聚合引发剂。 至少一种所述单体(不是硫醇)具有至少两个官能的可聚合基团以获得交联的聚合物网络。 聚合引发剂优选是能够以热辐射和UV辐射活化的引发剂。 粘合剂体系还可以含有反应性稀释剂。 此外,公开了本发明的粘合剂系统在安装液浸物镜中的用途。