公开(公告)号：US20120320377A1

公开(公告)日：2012-12-20

申请号：US13164130

申请日：2011-06-20

Applicant: Johannes D. de Veer ,  Leonid Poslavsky ,  G. Vera Zhuang ,  Shankar Krishnan

Inventor： Johannes D. de Veer ,  Leonid Poslavsky ,  G. Vera Zhuang ,  Shankar Krishnan

IPC: G01J4/00

CPC classification number: G01N21/21 ,  G01J3/504 ,  G01N21/274

Abstract: A method to calibrate a polarizer in polarized optical system at any angle of incidence, by decoupling the calibration from a polarization effect of the system, by providing a calibration apparatus that includes a substrate having a polarizer disposed on a surface thereof, with an indicator on the substrate for indicating a polarization orientation of the polarizer, loading the calibration apparatus in the polarized optical system with the indicator in a desired position, determining an initial angle between the polarization orientation and a reference of the polarized optical system, acquiring spectra using the polarized optical system at a plurality of known angles between the polarization orientation and the reference of the polarized optical system, using the spectra to plot a curve indicating an angle of the polarizer in the polarized optical system, and when the angle of the polarizer is outside of a desired range, adjusting the angle of the polarizer, and repeating the steps of acquiring the spectra, and plotting a curve indicating the angle of the polarizer.

Abstract translation: 一种通过提供校准装置来校准偏振光学系统中任何入射角的偏振器的方法，通过提供校准装置，该校准装置包括具有设置在其表面上的偏振器的衬底， 用于指示偏振器的偏振取向的衬底，将校准装置装载在具有指示器的期望位置的偏振光学系统中，确定极化取向和偏振光学系统的基准之间的初始角度，使用偏振光 光学系统以偏振方向和偏振光学系统的基准之间的多个已知角度，使用光谱绘制指示偏振器在偏振光学系统中的角度的曲线，以及当偏振器的角度在 期望的范围，调节偏振器的角度，并重复以下步骤 获取光谱，并绘制一个指示偏振片角度的曲线。

公开(公告)号：US07453562B1

公开(公告)日：2008-11-18

申请号：US11863334

申请日：2007-09-28

Applicant: Torsten R. Kaack ,  Shankar Krishnan ,  Fabio A. Faccini

Inventor： Torsten R. Kaack ,  Shankar Krishnan ,  Fabio A. Faccini

IPC: G01N21/00

CPC classification number: G01N21/33

Abstract: A method of performing a measurement of properties of a sample, by directing a first beam of light at the sample, where a combination of the wavelength, energy, and length of time is sufficient to cause temporary damage to the sample. The first beam is reflected from the sample. The properties of the reflected beam are sensed to create a signal. A length of time is waited, sufficient for the damage to substantially heal, before a second beam of light is directed at the sample, where a combination of the wavelength, energy, and length of time is sufficient to cause temporary damage to the sample. The second beam is reflected from the sample. The properties of the reflected beam are sensed to create a signal. The first and second electrical signals are analyzed to determine the properties of the sample.

Abstract translation: 通过在样品处引入第一光束，其中波长，能量和时间长度的组合足以引起对样品的暂时损坏，来执行样品的性质的测量的方法。 第一个光束从样品反射。 感测反射光束的特性以产生信号。 在第二光束被引导到样品之前等待长度的时间足以使损伤基本上愈合，其中波长，能量和时间长度的组合足以引起对样品的暂时损坏。 第二个光束从样品反射。 感测反射光束的特性以产生信号。 分析第一和第二电信号以确定样品的性质。

公开(公告)号：US07221454B2

公开(公告)日：2007-05-22

申请号：US10504796

申请日：2003-02-13

Applicant: D. Scott Hampton ,  Shankar Krishnan ,  James Rix

Inventor： D. Scott Hampton ,  Shankar Krishnan ,  James Rix

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01J3/447

Abstract: In a device for measuring the complete polarization state of light over a spectral bandwidth, an optical input signal (41) with wavelengths of light within a spectral band is incident on two or more diffraction gratings (42, 44, 46, 48), or incident from at least two directions on one or more diffraction gratings (72, 74), and the intensity is measured as a function of wavelength for at least four of the diffraction spectra produced by the grating(s). The polarization state of light is then calculated as a function of wavelength over the spectral bandwidth from the intensity measurements.

Abstract translation: 在用于在光谱带宽上测量光的完全偏振状态的装置中，光谱波段内的波长的光输入信号（41）入射到两个或更多个衍射光栅（42,44,46,48）上，或 在一个或多个衍射光栅（72,74）上从至少两个方向入射，并且对于由光栅产生的至少四个衍射光谱，测量强度作为波长的函数。 然后，根据强度测量，光的偏振状态被计算为光谱带宽上的波长的函数。

公开(公告)号：US07006222B2

公开(公告)日：2006-02-28

申请号：US10339518

申请日：2003-01-08

Applicant: Shankar Krishnan

Inventor： Shankar Krishnan

IPC: G01J4/00

CPC classification number: G01J4/00 ,  G01B11/06 ,  G01B11/065

Abstract: A system for performing single wavelength ellipsometry (SWE) on a thin film on a multi-layer substrate such as silicon-on-insulator (SOI) applies a measurement beam having an absorption distance less than the thickness of the superficial layer of the multi-layer substrate. For example, for an SOI substrate, the measurement beam is selected to have a wavelength that results in an absorption distance that is less than the superficial silicon layer thickness. The system can include a cleaning laser to provide concurrent cleaning to enhance measurement accuracy without negatively impacting throughput. The measurement beam source can be configured to provide a measurement beam at one wavelength and a cleaning beam at a longer wavelength, so that the absorption depth of the measurement beam is less than the superficial layer thickness while the absorption depth of the cleaning beam is greater than the superficial layer thickness.

Abstract translation: 在诸如绝缘体上硅（SOI）的多层基板上的薄膜上执行单波长椭偏仪（SWE）的系统应用具有小于多层膜的表层的厚度的吸收距离的测量光束， 层基板。 例如，对于SOI衬底，测量光束被选择为具有导致小于表面硅层厚度的吸收距离的波长。 该系统可以包括清洁激光器以提供同时清洁以提高测量精度，而不会不利地影响生产量。 测量光束源可以被配置为提供一个波长的测量光束和较长波长的清洁光束，使得测量光束的吸收深度小于表面层厚度，而清洁光束的吸收深度更大 比表面层厚度。

公开(公告)号：US20050018189A1

公开(公告)日：2005-01-27

申请号：US10504796

申请日：2003-02-13

Applicant: D. Hampton ,  Shankar Krishnan ,  James Rix

Inventor： D. Hampton ,  Shankar Krishnan ,  James Rix

IPC: G01J3/447 ,  G01J4/04 ,  G01J4/00

CPC classification number: G01J4/04 ,  G01J3/447

Abstract: In a device for measuring the complete polarization state of light over a spectral bandwidth, an optical input signal (41) with wavelengths of light within a spectral band is incident on two or more diffraction gratings (42, 44, 46, 48), or incident from at least two directions on one or more diffraction gratings (72, 74), and the intensity is measured as a function of wavelength for at least four of the diffraction spectra produced by the grating(s). The polarization state of light is then calculated as a function of wavelength over the spectral bandwidth from the intensity measurements.

Abstract translation: 在用于在光谱带宽上测量光的完全偏振状态的装置中，光谱波段内的波长的光输入信号（41）入射到两个或更多个衍射光栅（42,44,46,48）上，或 在一个或多个衍射光栅（72,74）上从至少两个方向入射，并且对于由光栅产生的至少四个衍射光谱，测量强度作为波长的函数。 然后，根据强度测量，光的偏振状态被计算为光谱带宽上的波长的函数。

公开(公告)号：US06710890B1

公开(公告)日：2004-03-23

申请号：US10375554

申请日：2003-02-26

Applicant: Shankar Krishnan ,  Christopher M. Pohlhammer ,  Michael P. Green

Inventor： Shankar Krishnan ,  Christopher M. Pohlhammer ,  Michael P. Green

IPC: G01B1106

CPC classification number: G01B11/0608

Abstract: An apparatus for measuring a thickness of a substrate having an upper surface, without contacting the upper surface of the substrate. A platen having a base surface receives the substrate, and a reference surface is disposed at a known first height from the platen surface. A non contact sensor senses the known first height of the reference surface without making physical contact with the reference surface. The non contact sensor further senses a relative difference between the known first height of the reference surface and a second height of the upper surface of the substrate without making physical contact with the upper surface of the substrate. A controller controls the sensor and determines the thickness of the substrate based at least in part on the known first height of the reference surface and the relative difference between the known first height of the reference surface and the second height of the upper surface of the substrate.

Abstract translation: 一种用于测量具有上表面的基板的厚度而不与基板的上表面接触的装置。 具有基面的台板容纳基板，并且参考表面设置在距压板表面已知的第一高度处。 非接触传感器感测参考表面的已知第一高度，而不与参考表面物理接触。 非接触式传感器进一步感测参考表面的已知第一高度与衬底的上表面的第二高度之间的相对差异，而不与衬底的上表面物理接触。 控制器控制传感器并且至少部分地基于参考表面的已知第一高度和参考表面的已知第一高度与衬底的上表面的第二高度之间的相对差异来确定衬底的厚度 。

公开(公告)号：US20150176915A1

公开(公告)日：2015-06-25

申请号：US14134937

申请日：2013-12-19

Applicant: Shankar Krishnan ,  Brian Jarrett

Inventor： Shankar Krishnan ,  Brian Jarrett

IPC: F28D15/04

CPC classification number: F28D15/04 ,  F28F13/00 ,  F28F2013/006 ,  G06F1/20 ,  H01L23/42 ,  H01L23/427 ,  H01L23/473

Abstract: An apparatus that interfaces thermal transfer components is described. The apparatus includes a soft, thermally conductive metal that enables a capillary flow path with a contact surface of a thermal transfer component and an imbibing thermal interface material. The thermal transfer component is a heat sink. The thermally conductive metal includes large pores that intertwine with smaller pores of the contact surface.

Abstract translation: 描述了接触热转印组件的装置。 该装置包括柔软的导热金属，其能够使具有热传递部件的接触表面和吸收热界面材料的毛细管流动路径。 热转印组件是散热器。 导热金属包括与接触表面的较小孔交织的大孔。

公开(公告)号：US08570514B2

公开(公告)日：2013-10-29

申请号：US13164130

申请日：2011-06-20

Applicant: Johannes D. de Veer ,  Leonid Poslavsky ,  Guorong V. Zhuang ,  Shankar Krishnan

Inventor： Johannes D. de Veer ,  Leonid Poslavsky ,  Guorong V. Zhuang ,  Shankar Krishnan

IPC: G01J4/00

CPC classification number: G01N21/21 ,  G01J3/504 ,  G01N21/274

Abstract: A method to calibrate a polarizer in polarized optical system at any angle of incidence, by decoupling the calibration from a polarization effect of the system, by providing a calibration apparatus that includes a substrate having a polarizer disposed on a surface thereof, with an indicator on the substrate for indicating a polarization orientation of the polarizer, loading the calibration apparatus in the polarized optical system with the indicator in a desired position, determining an initial angle between the polarization orientation and a reference of the polarized optical system, acquiring spectra using the polarized optical system at a plurality of known angles between the polarization orientation and the reference of the polarized optical system, using the spectra to plot a curve indicating an angle of the polarizer in the polarized optical system, and when the angle of the polarizer is outside of a desired range, adjusting the angle of the polarizer, and repeating the steps of acquiring the spectra, and plotting a curve indicating the angle of the polarizer.

Abstract translation: 一种通过提供校准装置来校准偏振光学系统中任何入射角的偏振器的方法，通过提供校准装置，该校准装置包括具有设置在其表面上的偏振器的衬底， 用于指示偏振器的偏振取向的衬底，将校准装置装载在具有指示器的期望位置的偏振光学系统中，确定极化取向和偏振光学系统的基准之间的初始角度，使用偏振光 光学系统以偏振方向和偏振光学系统的基准之间的多个已知角度，使用光谱绘制指示偏振器在偏振光学系统中的角度的曲线，以及当偏振器的角度在 期望的范围，调节偏振器的角度，并重复以下步骤 获取光谱，并绘制一个指示偏振片角度的曲线。

公开(公告)号：US08456639B2

公开(公告)日：2013-06-04

申请号：US13174815

申请日：2011-07-01

Applicant: Shankar Krishnan ,  Haiming Wang

Inventor： Shankar Krishnan ,  Haiming Wang

IPC: G01N21/55 ,  G01N21/00

CPC classification number: G01N21/55 ,  G01B11/065 ,  G01B2210/56 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/42 ,  G01N21/00 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/214 ,  G01N2201/0675

Abstract: A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.

Abstract translation: 一种用于在衬底上进行多波长，多方位角，多角度入射读数的光谱仪器，该仪器具有用于产生照明光束的宽带光源，用于将多个方位角的照明引导到衬底上的物镜 角度和多个入射角，从而产生反射光束，具有照明孔的孔板和形成在其中的多个收集孔，用于选择性地通过具有期望的方位角和角度的离散组合的反射光束的部分 - 用于接收方位角和入射角的离散组合并产生读数的检测器，以及用于解释读数的处理器。

公开(公告)号：US20130025192A1

公开(公告)日：2013-01-31

申请号：US13559127

申请日：2012-07-26

Applicant: Robert S. Wegeng ,  Paul H. Humble ,  Shankar Krishnan ,  Steven D. Leith ,  Daniel R. Palo

Inventor： Robert S. Wegeng ,  Paul H. Humble ,  Shankar Krishnan ,  Steven D. Leith ,  Daniel R. Palo

IPC: C07C29/152 ,  C10G2/00 ,  H01M8/06 ,  B23P11/00 ,  F03B11/02 ,  F22B37/00 ,  B01J19/00 ,  C10L1/16

CPC classification number: B01J19/127 ,  B01J2219/00006 ,  B01J2219/00159 ,  B01J2219/0883 ,  B01J2219/089 ,  C01B3/384 ,  C01B3/48 ,  C01B2203/0233 ,  C01B2203/0283 ,  C01B2203/0445 ,  C01B2203/061 ,  C01B2203/0855 ,  C01B2203/1288 ,  C10G2/30 ,  C10K3/04 ,  F01K3/188 ,  F22B1/006 ,  F24S20/20 ,  H01M8/0612 ,  Y02E10/41 ,  Y02P20/129 ,  Y02P20/134 ,  Y10T29/49826 ,  Y10T137/8593

Abstract: A solar thermochemical processing system is disclosed. The system includes a first unit operation for receiving concentrated solar energy. Heat from the solar energy is used to drive the first unit operation. The first unit operation also receives a first set of reactants and produces a first set of products. A second unit operation receives the first set of products from the first unit operation and produces a second set of products. A third unit operation receives heat from the second unit operation to produce a portion of the first set of reactants.

Abstract translation: 公开了一种太阳能热化学处理系统。 该系统包括用于接收集中的太阳能的第一单元操作。 来自太阳能的热量用于驱动第一单元操作。 第一单元操作还接收第一组反应物并产生第一组产物。 第二单元操作从第一单元操作接收第一组产品并产生第二组产品。 第三单元操作从第二单元操作接收热量以产生第一组反应物的一部分。