公开(公告)号：US20090165872A1

公开(公告)日：2009-07-02

申请号：US12226416

申请日：2006-06-02

申请人： Shuji Moriya ,  Hideki Nagaoka ,  Tsuneyuki Okabe ,  Hiroshi Itafuji ,  Hiroki Doi ,  Minoru Ito

发明人： Shuji Moriya ,  Hideki Nagaoka ,  Tsuneyuki Okabe ,  Hiroshi Itafuji ,  Hiroki Doi ,  Minoru Ito

IPC分类号： F15C1/06

CPC分类号： F17D1/04 ,  Y10T137/87177 ,  Y10T137/87885

摘要： A gas supply unit and a gas supply system that are small-sized and inexpensive. The gas supply unit is installed on operation gas conveyance pipeline and has fluid control devices communicated via flow path blocks and controlling operation gas. The gas supply unit has the first flow path block, to one side of which an inlet open/close valve included in the fluid control devices is attached, and also has the second flow path block, to one side of which a purge valve included in the fluid control devices is attached. The first flow path block and the second flow path block are layered in the direction perpendicular to the conveyance direction of the operation gas. The inlet open/close valve and the purge valve are arranged between a mass flow controller installed on the operation gas conveyance pipeline and an installation surface where the unit is installed.

摘要翻译： 气体供给单元和气体供给系统，其尺寸小且便宜。 气体供应单元安装在操作气体输送管道上，并具有通过流路块连接并控制操作气体的流体控制装置。 气体供应单元具有第一流路块，其一侧包括在流体控制装置中的入口打开/关闭阀，并且还具有第二流路块，其一侧包括一个净化阀 流体控制装置被连接。 第一流路块和第二流路块在与操作气体的输送方向垂直的方向上分层。 入口打开/关闭阀和净化阀布置在安装在操作气体输送管线上的质量流量控制器和安装单元的安装表面之间。

公开(公告)号：US6062605A

公开(公告)日：2000-05-16

申请号：US166278

申请日：1998-10-05

申请人： Kenichi Goshima ,  Hiroshi Itafuji ,  Shigenobu Nishida

发明人： Kenichi Goshima ,  Hiroshi Itafuji ,  Shigenobu Nishida

IPC分类号： F16L19/00 ,  B01J4/00 ,  F16L19/02 ,  F16L27/08 ,  F16L55/00 ,  F16L17/00 ,  F16L21/05 ,  F16L27/00

CPC分类号： F16L27/0832 ,  F16L19/0206 ,  F16L19/0231 ,  F16L19/0237

摘要： In a weldless joint 13, screwing a fastening member 13 into a joint body allows two pipes to move closer to each other in an axial direction without rotating. The two pipes can be thus connected without welded. Packings and disposed in the joint body prevent the leakage of gas through the contact surfaces of the pipes and, further, the leakage of gas from the inside of the joint body to the outside thereof. Accordingly, no packing or sealing element is needed on the periphery of the fastening member.

摘要翻译： 在无焊缝13中，将紧固构件13拧入接头体中，允许两个管在轴向方向上彼此靠近移动而不旋转。 这两个管道可以无焊接连接。 在接头体内的填充物，能够防止气体从管接触面泄漏，另外从接合体内部泄漏到外部。 因此，在紧固构件的周边上不需要填料或密封元件。

公开(公告)号：US20070295401A1

公开(公告)日：2007-12-27

申请号：US11660860

申请日：2005-09-05

申请人： Katsuya Okumura ,  Hiroshi Itafuji ,  Hiroki Doi ,  Yasunori Nishimura

发明人： Katsuya Okumura ,  Hiroshi Itafuji ,  Hiroki Doi ,  Yasunori Nishimura

IPC分类号： G05D11/00

CPC分类号： F16K27/003 ,  F15B13/0807 ,  Y10T29/49405 ,  Y10T137/2587

摘要： The invention has an object to provide a flow path block capable of reducing pressure loss, providing an extremely long flow path and a complex flow path, and achieving weight reduction, and a manufacturing method thereof. A flow path block (1) comprises a block body (11) formed with through holes (21) and a groove (22) communicating with the through holes (21) and a lid member (12) which covers the groove (22). The groove (22) can be formed with any depth and width by a cutting tool to reduce pressure loss. The groove (22) can also be formed in a long shape by the cutting tool, so that a very long flow path can be provided when the groove (22) is covered with the lid member (12). The groove (22) can be made freely by the cutting tool to provide a complex flow path. Further, the thickness of the block body (11) can be reduced to achieve weight reduction.

摘要翻译： 本发明的目的是提供一种能够减少压力损失，提供非常长的流动路径和复杂的流动路径并实现减轻重量的流路块及其制造方法。 流路块（1）包括形成有通孔（21）的块体（11）和与通孔（21）连通的槽（22）和覆盖槽（22）的盖构件（12）。 槽（22）可以通过切削工具以任何深度和宽度形成，以减少压力损失。 槽（22）也可以通过切割工具形成为长形状，使得当凹槽（22）被盖构件（12）覆盖时，可以提供非常长的流动路径。 槽（22）可以通过切削工具自由地形成以提供复杂的流动路径。 此外，可以减小块体（11）的厚度，以实现重量减轻。

公开(公告)号：USD379844S

公开(公告)日：1997-06-10

申请号：US35854

申请日：1995-03-08

申请人： Hiroshi Itafuji

设计人： Hiroshi Itafuji

公开(公告)号：USD368130S

公开(公告)日：1996-03-19

申请号：US35852

申请日：1995-03-08

申请人： Hiroshi Itafuji

设计人： Hiroshi Itafuji

公开(公告)号：US5368062A

公开(公告)日：1994-11-29

申请号：US010325

申请日：1993-01-28

申请人： Katsuya Okumura ,  Yoshihisa Sudo ,  Kenichi Goshima ,  Hiroshi Itafuji ,  Akihiro Kojima

发明人： Katsuya Okumura ,  Yoshihisa Sudo ,  Kenichi Goshima ,  Hiroshi Itafuji ,  Akihiro Kojima

IPC分类号： C23C16/44 ,  C23C16/455 ,  F17C5/06 ,  F16K11/20

CPC分类号： C23C16/45512 ,  C23C16/4401 ,  C23C16/4408 ,  C23C16/455 ,  C23C16/45561 ,  F17C5/06 ,  F17C2205/0323 ,  F17C2205/0382 ,  F17C2227/044 ,  F17C2250/0636 ,  F17C2260/042 ,  F17C2270/0518 ,  Y10T137/4259 ,  Y10T137/86445 ,  Y10T137/87249

摘要： A gas supplying system for supplying a corrosive gas or the like to a semiconductor manufacturing apparatus or the like. A plurality of kinds of component gases are introduced into a chamber and mixed therein to form a desired supply gas. After supplying the desired supply gas, the chamber is evacuated and an inert gas is charged into the chamber to substitute a residual supply gas remaining in the chamber by the inert gas. The evacuation of the chamber and the charging of the inert gas into the chamber are repeated two or more times. Accordingly, the residual supply gas can be efficiently removed from the chamber and substituted by the inert gas.

摘要翻译： 用于向半导体制造装置等供给腐蚀性气体等的气体供给系统。 将多种组分气体引入室中并混合在其中以形成所需的供给气体。 在供应期望的供应气体之后，将室抽真空，并将惰性气体装入室中以用惰性气体代替残留在室中的残留供应气体。 将室抽真空并将惰性气体充入室中重复两次或更多次。 因此，能够从室中有效地除去残留的供给气体，并被惰性气体取代。

公开(公告)号：US6152175A

公开(公告)日：2000-11-28

申请号：US89346

申请日：1998-06-03

申请人： Masahito Itoh ,  Toshiyasu Inagaki ,  Minoru Ueta ,  Masahiko Yada ,  Hiroshi Itafuji

发明人： Masahito Itoh ,  Toshiyasu Inagaki ,  Minoru Ueta ,  Masahiko Yada ,  Hiroshi Itafuji

IPC分类号： F16K27/00 ,  F17D1/04 ,  F16K51/00

CPC分类号： F16K27/003 ,  F17D1/04 ,  Y10T137/87571 ,  Y10T137/87684 ,  Y10T137/87885

摘要： A process gas supply unit without conventional pipes. The process gas supply unit may include the components of a mass flow controller, an input valve, an output valve, a purge valve, a vacuum valve, a check valve, a regulator, and a filter. Module blocks are attached to at least one of the components with bolts from a predetermined direction. The module blocks are mounted on base plates with bolts from the same predetermined direction, and the base plates are mounted on a mounting panel with bolts from the same predetermined direction.

摘要翻译： 没有常规管道的工艺气体供应单元。 过程气体供应单元可以包括质量流量控制器，输入阀，输出阀，净化阀，真空阀，止回阀，调节器和过滤器的组件。 模块通过螺栓从预定方向附接至至少一个部件。 模块通过螺栓从相同的预定方向安装在基板上，并且用相同的预定方向的螺栓将基板安装在安装面板上。

公开(公告)号：US5819782A

公开(公告)日：1998-10-13

申请号：US777046

申请日：1996-12-30

申请人： Hiroshi Itafuji

发明人： Hiroshi Itafuji

IPC分类号： F15B13/00 ,  F15B13/08 ,  F16K27/00 ,  F16K3/36

CPC分类号： F15B13/0807 ,  F15B13/0835 ,  F15B13/086 ,  F15B13/0892 ,  F15B13/0896 ,  F16K27/003 ,  Y10T137/4259 ,  Y10T137/5109 ,  Y10T137/5283 ,  Y10T137/87885

摘要： To provide a small-sized gas supply unit dispensing with connection parts or the like such as joints, pipes or the like among components or a gas supply unit facilitating maintenance of a manual valve or the like, the gas supply unit is provided with opening and closing valves for regulating flow of supply gas flowing in channels, a mass flow controller controlling the flow rate of the supply gas and a purge valve for supplying a replacement gas excluding the supply gas remaining in the mass flow controller, wherein a series of fixing blocks in which channels for making the supply gas and the purge gas flow are formed and which have first attaching portions for fixedly installing the opening and closing valves, the mass flow controller and the purge valve above the channels, are provided with second attaching portions by which fluid element parts communicating with the supply gas channels or the purge gas channels can be attached from a direction the same as that of the first attaching portion.

摘要翻译： 为了提供小型气体供应单元，其分配诸如连接部件等的部件之间的接头，管道等，或者便于维护手动阀等的气体供应单元，气体供应单元设置有开口和 用于调节在通道中流动的供给气体的流动的关闭阀，控制供给气体的流量的质量流量控制器和用于供给除了剩余在质量流量控制器中的供给气体之外的替换气体的净化阀，其中一系列固定块 在其中形成用于制造供气和吹扫气流的通道，并且具有用于固定地安装开关阀，通道上方的质量流量控制器和净化阀的第一附接部分设置有第二附接部分，通过该第二附接部分 与供给气体通道或吹扫气体通道连通的流体元件可以从与第一附着相同的方向附接 部分。

公开(公告)号：USD377522S

公开(公告)日：1997-01-21

申请号：US43136

申请日：1995-08-22

申请人： Hiroshi Itafuji

设计人： Hiroshi Itafuji

公开(公告)号：US08581220B2

公开(公告)日：2013-11-12

申请号：US12646025

申请日：2009-12-23

申请人： Takanobu Ishihara ,  Hiroshi Itafuji

发明人： Takanobu Ishihara ,  Hiroshi Itafuji

IPC分类号： H05H1/04

CPC分类号： H05G2/006 ,  G03F7/70033 ,  H05G2/003 ,  H05G2/008

摘要： A target supply apparatus includes a tank for storing a liquid target material, a nozzle for outputting the liquid target material in the tank, and a gas supply source for supplying gas into the tank, and controls a gas pressure inside the tank with a pressure of the gas supplied from the gas supply source which is provided with a pressure regulator. The target supply apparatus also includes a pressure-decrease gas passage of which one end is connected to the tank and the other end forms an exhaust port, a pressure-decrease valve provided on the pressure-decrease gas passage, and a controller for controlling open/close of the pressure-decrease valve. The controller, when the target material is caused not to output from the nozzle, opens the pressure-decrease valve and decreases the pressure inside the tank.