Two-sided Majorana fermion quantum computing devices fabricated with ion implant methods

    公开(公告)号:US11107966B2

    公开(公告)日:2021-08-31

    申请号:US16680117

    申请日:2019-11-11

    摘要: A quantum computing device is fabricated by forming, on a superconductor layer, a first resist pattern defining a device region and a sensing region within the device region. The superconductor layer within the sensing region is removed, exposing a region of a first surface of an underlying semiconductor layer outside the device region. The exposed region of the semiconductor layer is implanted, forming an isolation region surrounding the device region. The sensing region and a portion of the device region of the superconductor layer are exposed. A sensing region contact is formed by coupling the first surface of the semiconductor layer with a first metal layer. A nanorod contact using the first metal within the portion of the device region outside the sensing region is formed. By depositing a second metal layer on a second surface of the semiconductor layer within the sensing region, a tunnel junction gate is formed.

    FABRICATION OF MAGNETIC NANOWIRE FOR MAJORANA QUBITS

    公开(公告)号:US20210257536A1

    公开(公告)日:2021-08-19

    申请号:US16791436

    申请日:2020-02-14

    IPC分类号: H01L39/24 H01L39/12

    摘要: According to an embodiment of the present invention, a method for fabricating a Majorana fermion structure includes providing a substrate, and depositing a superconducting material on the substrate. The method includes depositing a magnetic material on the superconducting material using angled deposition through a mask. The method includes annealing the magnetic material and the superconducting material to form a magnetic nanowire partially embedded in the superconducting material such that the magnetic nanowire and the superconducting material form a Majorana fermion structure.