公开(公告)号：US11517938B2

公开(公告)日：2022-12-06

申请号：US16107894

申请日：2018-08-21

Applicant: InvenSense, Inc.

Inventor： Mei-Lin Chan ,  Nikhil Apte ,  Renata Melamud Berger

IPC: B06B1/06 ,  G10K11/00 ,  G10K11/28 ,  G01H11/08 ,  H01L41/09 ,  B06B1/02 ,  H01L41/047

Abstract: An electronic device includes a substrate layer having a front surface and a back surface opposite the front surface, a plurality of ultrasonic transducers formed on the front surface of the substrate layer, wherein the plurality of ultrasonic transducers generate backward waves during operation, the backward waves propagating through the substrate layer, and a plurality of substrate structures formed within the back surface of the substrate layer, the plurality of substrate structures configured to modify the backward waves during the operation.

公开(公告)号：US11515465B2

公开(公告)日：2022-11-29

申请号：US16281792

申请日：2019-02-21

Applicant: INVENSENSE, INC.

Inventor： Nikhil Apte ,  Chienliu Chang ,  Shreyas Thakar ,  Mei-Lin Chan

IPC: H01L41/047 ,  H01L41/09 ,  B06B1/06 ,  B81B7/00 ,  G01N29/24 ,  B81B3/00

Abstract: A piezoelectric micromachined ultrasound transducer (PMUT) array may comprise PMUT devices with respective piezoelectric layers and electrode layers. Parasitic capacitance can be reduced when an electrode layer is not shared across PMUT devices but may expose the devices to electromagnetic interference (EMI). A conductive layer located within the structural layer or on a shared plane with the electrode layers may reduce EMI affecting the PMUT array operation.

公开(公告)号：US10860831B2

公开(公告)日：2020-12-08

申请号：US16679067

申请日：2019-11-08

Applicant: InvenSense, Inc.

Inventor： Bruno W. Garlepp ,  Michael H. Perrott ,  Michael Daneman ,  James Christian Salvia ,  Nikhil Apte

IPC: G06K9/00

Abstract: A method for generating an image is provided. The method comprises capturing a first set of image pixels by an ultrasonic sensor comprising an array of ultrasonic transducers using a first beamforming pattern, wherein the first beamforming pattern comprises a first pattern of transmit signals routed to a plurality of ultrasonic transducers of the ultrasonic sensor. The method further comprises capturing a second set of image pixels at the ultrasonic sensor using a second beamforming pattern, wherein the second beamforming pattern comprises a second pattern of transmit signals routed to the plurality of ultrasonic transducers. The second beamforming pattern is different than the first beamforming pattern. The second set of image pixels corresponds to an edge region of the ultrasonic sensor. The method additionally comprises combining the first set of image pixels and the second set of image pixels to form the image. An electronic device and a method of generating an image of a fingerprint with a fingerprint sensor are also provided.

公开(公告)号：US10656255B2

公开(公告)日：2020-05-19

申请号：US15205743

申请日：2016-07-08

Applicant: InvenSense, Inc.

Inventor： Eldwin Ng ,  Julius Ming-Lin Tsai ,  Nikhil Apte

IPC: H01L41/047 ,  G01S7/521 ,  B06B1/06 ,  H01L41/09 ,  A61B5/1172 ,  A61B8/00 ,  G01S15/89

Abstract: A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane is configured to allow movement at ultrasonic frequencies. The membrane includes a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. An interior support structure is disposed within the cavity and connected to the substrate and the membrane.

公开(公告)号：US20190267536A1

公开(公告)日：2019-08-29

申请号：US16281792

申请日：2019-02-21

Applicant: INVENSENSE, INC.

Inventor： Nikhil Apte ,  Chienliu Chang ,  Shreyas Thakar ,  Mei-Lin Chan

IPC: H01L41/09 ,  B06B1/06 ,  H01L41/047 ,  B81B3/00 ,  B81B7/00 ,  G01N29/24

Abstract: A piezoelectric micromachined ultrasound transducer (PMUT) array may comprise PMUT devices with respective piezoelectric layers and electrode layers. Parasitic capacitance can be reduced when an electrode layer is not shared across PMUT devices but may expose the devices to electromagnetic interference (EMI). A conductive layer located within the structural layer or on a shared plane with the electrode layers may reduce EMI affecting the PMUT array operation.

公开(公告)号：US10325915B2

公开(公告)日：2019-06-18

申请号：US15294186

申请日：2016-10-14

Applicant: InvenSense, Inc.

Inventor： James Christian Salvia ,  Michael H. Perrott ,  Marian Voros ,  Eldwin Ng ,  Julius Ming-Lin Tsai ,  Nikhil Apte

IPC: H01L27/00 ,  H01L27/092 ,  G06K9/00 ,  G06F3/0354 ,  B06B1/06 ,  B81C1/00 ,  H01L21/8238

Abstract: An electronic device includes a plurality of CMOS control elements arranged in a two-dimensional array, where each CMOS control element of the plurality of CMOS control elements includes semiconductor devices. The plurality of CMOS control elements each including a PMOS semiconductor device portion comprising a high voltage PMOS device and a low voltage PMOS device and an NMOS semiconductor device portion comprising a high voltage NMOS device and a low voltage NMOS device. The plurality of CMOS control elements are arranged in the two-dimensional array such that the PMOS semiconductor device portion of a CMOS control element of the plurality of CMOS control elements is only adjacent to other PMOS semiconductor device portions of adjacent CMOS control elements of the plurality of CMOS control elements, and such that the NMOS semiconductor device portion of a CMOS control element of the plurality of CMOS control elements is only adjacent to other NMOS semiconductor device portions of adjacent CMOS control elements of the plurality of CMOS control elements.